JPS60207012A - Light-applied vibration sensor - Google Patents
Light-applied vibration sensorInfo
- Publication number
- JPS60207012A JPS60207012A JP6407984A JP6407984A JPS60207012A JP S60207012 A JPS60207012 A JP S60207012A JP 6407984 A JP6407984 A JP 6407984A JP 6407984 A JP6407984 A JP 6407984A JP S60207012 A JPS60207012 A JP S60207012A
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- light
- optical fiber
- vibrator
- inputted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は光応用振動センサに関い より詳細には光ファ
イバを用いた振動センサに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an optical vibration sensor, and more particularly to a vibration sensor using an optical fiber.
従来、光ファイバを用いた振動センサは、一般に光ファ
イバに作用する側圧により屈折率が変化し、これにより
光の透過量や位相が変化することを利用したものがほと
んどであるが、該原理を利用したものは振動作用面（光
ファイバの長さ）を大きくとらねば光信号の変化を検出
することが困難であることがら光ファイバをコイル状に
巻いた構造となっているものがほとんどであり、このた
めセンサ形状の自由度が小さい上に外形が比較的大型と
ならざるを得ない欠点がある。また、かかる原理にもと
ずくセンサは、構造上高周波の弾性波を光ファイバへ入
射させることが困難であるためＡＥセンサ（物体内部の
破壊を検知する音響センサ）等高周波受波用のセンサに
は応用不可能である。Conventionally, most vibration sensors using optical fibers take advantage of the fact that the refractive index changes due to lateral pressure acting on the optical fiber, which changes the amount of light transmitted and the phase. Since it is difficult to detect changes in the optical signal unless the vibration action surface (length of the optical fiber) is large, most of the devices used have a structure in which the optical fiber is wound into a coil. Therefore, there are disadvantages in that the degree of freedom in the sensor shape is small and the external size has to be relatively large. In addition, sensors based on this principle are difficult to inject high-frequency elastic waves into optical fibers due to their structure, so they are used as sensors for receiving high-frequency waves such as AE sensors (acoustic sensors that detect damage inside objects). is not applicable.
本発明は上記従来の欠点を除去すべくなされたもので、
このため本発明による光応用振動センサは、送光用光フ
ァイバと、受光用光ファイバと。The present invention has been made to eliminate the above-mentioned conventional drawbacks.
Therefore, the optical vibration sensor according to the present invention includes an optical fiber for transmitting light and an optical fiber for receiving light.
該送受光月光ファーｆバの先端に対向して設けられ送光
用光ファイバから受光用光ファイバへの反射光路を形成
する反射面と、振動の受波面に一端を取付けられかつ他
端に前記反射面を支持せる振動子とからなり、振動子の
曲げ共振を利用することにより高周波振動をも含めて微
少振動をも高感度に検出可能となしかつ全体をコンパク
トな構造としたことを特徴とする。a reflective surface that is provided opposite to the tip of the light transmitting and receiving moonlight fiber f and forms a reflective optical path from the light transmitting optical fiber to the light receiving optical fiber; It consists of a vibrator that can support a reflective surface, and by utilizing the bending resonance of the vibrator, it is possible to detect minute vibrations, including high-frequency vibrations, with high sensitivity, and the overall structure is compact. do.
以下、添附図に沿って本発明の詳細な説明する。Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
第１図は本発明の一実施例を示すもので９図中１はセン
サ本体のケース、３および５はそれぞれケースｌ上面匝
コネクタ７によりｙ！廟固定された送光用光ファイバお
よび受光用光ファイバ、９および１１はそれぞれ送光用
光ファイバ３および受光用光フアイバ５先端に接続され
かつケースＩＫより保持され光ファイバより発した光を
平行光とするだめのレンズ、 １３はケース１下面を形
成する受波面、１５は該受波面１３の内側面に下端を取
付けられた振動子、】７は該振動子１５の上端に中心部
を支持された反射板、１９は ゛ ゛
柩空気又は液体により充満され得る空間部である。FIG. 1 shows an embodiment of the present invention. In FIG. 9, 1 is the case of the sensor body, and 3 and 5 are connected to the upper surface of the case L by the connector 7, respectively. The light transmitting optical fiber and the light receiving optical fiber 9 and 11 fixed to the temple are connected to the tips of the light transmitting optical fiber 3 and the light receiving optical fiber 5, respectively, and are held by the case IK to collimate the light emitted from the optical fibers. A lens for transmitting light; 13 is a wave receiving surface forming the lower surface of the case 1; 15 is a vibrator whose lower end is attached to the inner surface of the wave receiving surface 13; ]7 is a central portion supported on the upper end of the vibrator 15; The reflective plate 19 is a space that can be filled with air or liquid.
上記センサの光の経路は、送光用光ファイバ３−レンズ
９−空間部Ｊ９の伝搬媒質−反射板１７−空間部１９の
伝搬媒質−レンズ１１−受光用光ファイバ５の順であり
、受波面１３が振動を受けていないときは送光用光ファ
イバ３より出射した光は上記の経路を介して、はとんど
全ての光が受光用光ファイバ５に入射する。The light path of the sensor is in the following order: light transmitting optical fiber 3 - lens 9 - propagation medium in space J9 - reflection plate 17 - propagation medium in space 19 - lens 11 - light receiving optical fiber 5. When the wavefront 13 is not subjected to vibration, almost all of the light emitted from the light transmitting optical fiber 3 enters the light receiving optical fiber 5 via the above-mentioned path.
受波面１３か振動を受けると、振動子１５は一定の固有
振動数を有するため、この固有振動数付近で大振幅の振
動となる。すなわち、受波面１３には必ず横方向（受波
面に対して平行）の振動を含む振動波が到来するので振
動子１５の振動は所定の共振周波数を有する棒の屈曲振
動となり２反射板Ｊ７はその自由端に位置するために最
も大きな振幅で振動する。これに伴い、第２図に示すよ
うに９反射板１７０角度が変化するため、光の反射方向
が変わり、その結果受光用光ファイバ５に入射する光量
が変化する。反射板１７の振動振幅は振動の強さにほぼ
比例し、受光用光ファイバ５に入射する光景は反射板の
振動振幅の大きさに依存するので、受光量より振動の強
さを検出することができる。When the wave receiving surface 13 is subjected to vibration, since the vibrator 15 has a certain natural frequency, it vibrates with a large amplitude around this natural frequency. That is, since a vibration wave including vibration in the lateral direction (parallel to the wave receiving surface) always arrives at the wave receiving surface 13, the vibration of the vibrator 15 becomes a bending vibration of a rod having a predetermined resonance frequency, and the second reflecting plate J7 It vibrates with the greatest amplitude because it is located at its free end. Accordingly, as shown in FIG. 2, the angle of the nine reflecting plates 170 changes, so the direction of light reflection changes, and as a result, the amount of light incident on the light-receiving optical fiber 5 changes. The vibration amplitude of the reflector 17 is approximately proportional to the strength of the vibration, and the sight incident on the light-receiving optical fiber 5 depends on the magnitude of the vibration amplitude of the reflector, so it is possible to detect the strength of the vibration rather than the amount of received light. I can do it.
なお、送受光用光ファイバ３，５の配置およびレンズ９
．］１の配置並に形状は図示のものに限定されることは
なく、要は送光用光ファイバ３より出射された光か反射
板１７により受光用光ファイバ５に入射されるように構
成されればよい。それ故。Note that the arrangement of the optical fibers 3 and 5 for transmitting and receiving light and the lens 9
．． ] The arrangement and shape of 1 are not limited to those shown in the drawings, but the point is that the light emitted from the light transmitting optical fiber 3 is configured so that it enters the light receiving optical fiber 5 by the reflecting plate 17. That's fine. Therefore.
本発明にあってはレンズ９，１１も必須ではない。In the present invention, the lenses 9 and 11 are also not essential.
上記構成よりなるセンサは、振動子の曲げ共振を利用し
ているので微少振動をも検出することができ高感度であ
る（、特に高周波に対してン。また。The sensor configured as described above utilizes the bending resonance of the vibrator, so it can detect even minute vibrations and is highly sensitive (especially for high frequencies).
構造上光ファイバをコイル状にする必要がないのて自由
度が太ぎくかつ全体をコンパクトにすることができる。Since there is no need to make the optical fiber into a coiled structure, there is a large degree of freedom and the entire structure can be made compact.
さらに、共振型であるため高感度となる周波数領域を任
意に選択することができ、音響的ノイズの影響を受けに
くいセンサを構成することかできる。Furthermore, since it is a resonant type, a frequency range in which high sensitivity can be selected can be arbitrarily selected, and a sensor that is less susceptible to the effects of acoustic noise can be constructed.
本発明は、とくに光ファイバを用いたＡＥセンサや加速
度計に使用するに好適である。The present invention is particularly suitable for use in AE sensors and accelerometers using optical fibers.
以上のように９本発明によれば高感度で自由度が大きく
かつコンパクトな構造の光応用振動センサが提供される
。As described above, according to the present invention, an optical vibration sensor with high sensitivity, a large degree of freedom, and a compact structure is provided.
第１図および第２図は本発明の一実施例を示す断面図で
第１図は非振動時、第２図し↓振動時のセンサの状態を
示す。
３・・・送光用光フフイバ、５・・・受光用光ファイノ
く９．１１・・・レンズ、 】３・・・受波面１５・・
・振動子、１７・・・反射面FIGS. 1 and 2 are cross-sectional views showing an embodiment of the present invention. FIG. 1 shows the state of the sensor when it is not vibrating, and FIG. 2 shows the state of the sensor when it is vibrating. 3... Optical fiber for light transmission, 5... Optical fiber for light reception 9.11... Lens, ]3... Wave receiving surface 15...
・Vibrator, 17...reflection surface
Claims (1)
光ファイバの先端に対向して設けられがつ送光用光ファ
イバから受光用光ファイバへの反射光路を形成する反射
面と、一端を振動メの受波面に数句けられかつ他端に前
記反射面を支持せる振動子とからなる光応用振動センサ
。a light-transmitting optical fiber, a light-receiving optical fiber, and a reflective surface that is provided opposite to the tip of the light-transmitting and receiving optical fiber and forming a reflective optical path from the light-transmitting optical fiber to the light-receiving optical fiber; An optical vibration sensor comprising a vibrator whose one end is connected to a wave receiving surface of a vibrator and whose other end supports the reflective surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6407984A JPS60207012A (en) | 1984-03-31 | 1984-03-31 | Light-applied vibration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6407984A JPS60207012A (en) | 1984-03-31 | 1984-03-31 | Light-applied vibration sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60207012A true JPS60207012A (en) | 1985-10-18 |
Family
ID=13247718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6407984A Pending JPS60207012A (en) | 1984-03-31 | 1984-03-31 | Light-applied vibration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60207012A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4848871A (en) * | 1987-10-03 | 1989-07-18 | Messerschmitt-Bolkow-Blohm Gmbh | Fiber optic sensor for detecting mechanicl quantities |
| US4897541A (en) * | 1984-05-18 | 1990-01-30 | Luxtron Corporation | Sensors for detecting electromagnetic parameters utilizing resonating elements |
| US5600070A (en) * | 1993-07-01 | 1997-02-04 | Wlodarczyk; Marek | Fiber optic combustion pressure sensor with improved long-term reliability |
| EP3106848A3 (en) * | 2015-06-16 | 2017-03-22 | Utc Fire&Security Corporation | Threat detection system |
-
1984
- 1984-03-31 JP JP6407984A patent/JPS60207012A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4897541A (en) * | 1984-05-18 | 1990-01-30 | Luxtron Corporation | Sensors for detecting electromagnetic parameters utilizing resonating elements |
| US4848871A (en) * | 1987-10-03 | 1989-07-18 | Messerschmitt-Bolkow-Blohm Gmbh | Fiber optic sensor for detecting mechanicl quantities |
| US5600070A (en) * | 1993-07-01 | 1997-02-04 | Wlodarczyk; Marek | Fiber optic combustion pressure sensor with improved long-term reliability |
| EP3106848A3 (en) * | 2015-06-16 | 2017-03-22 | Utc Fire&Security Corporation | Threat detection system |
| US9928705B2 (en) | 2015-06-16 | 2018-03-27 | Utc Fire & Security Corporation | Threat detection system |
| US10102727B2 (en) | 2015-06-16 | 2018-10-16 | Utc Fire & Security Corporation | Threat detection system |
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