JPS6020306A - Production of magnetic head - Google Patents
Production of magnetic headInfo
- Publication number
- JPS6020306A JPS6020306A JP12792483A JP12792483A JPS6020306A JP S6020306 A JPS6020306 A JP S6020306A JP 12792483 A JP12792483 A JP 12792483A JP 12792483 A JP12792483 A JP 12792483A JP S6020306 A JPS6020306 A JP S6020306A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- glass
- gap
- cores
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/147—Structure or manufacture of heads, e.g. inductive with cores being composed of metal sheets, i.e. laminated cores with cores composed of isolated magnetic layers, e.g. sheets
- G11B5/1475—Assembling or shaping of elements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/21—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features the pole pieces being of ferrous sheet metal or other magnetic layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、磁気記録装置(電子計算機等の記憶装置を含
めて)等に用いる磁気ヘッドに係り、特に、磁気特性が
良好で機械的強度の大きい磁気ヘッドに関する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a magnetic head used in a magnetic recording device (including a storage device of an electronic computer, etc.), and in particular, a magnetic head with good magnetic properties and high mechanical strength. Regarding large magnetic heads.
磁気ヘッドの磁気テープとの接触面近傍の空隙縁は、記
録及び再生感度に大きく影響し、従って、この空隙縁の
機械的精度が、常時、一定に保たれ、且つ、空隙スペー
サが機械的に強固に結合されることが必要である。更に
、空隙スペーサ自体も機械的強度の大なるものが望まれ
る。従来、フェライトを磁心とする磁気ヘッドでは数ミ
クロン以下の磁気空隙を形成するために、この空隙にガ
ラスなどの非磁性物質を箔として介挿したり、スパッタ
リング又は蒸着によって膜を形成したり、あるいは、ガ
ラスペーストを塗布、乾燥して後、ガラスの軟化温度以
上に加熱融着する方法が用いられている。これにより、
フェライトに所定の作動空隙幅をもって強固に溶着させ
て、テープが磁気ヘッドに接触して走行する時に、空隙
縁が欠けるという弊害を防止している。しかし、最近で
は、更にテープ・ヘッド系の性能向上、すなわち、よシ
高記録密度の技術開発の要求に応じるため、磁性体材料
としてフェライトに代わり、センダスト、アモルファス
合金等の(酸化物系)金属磁性材料を用いる必要が生じ
てきている。The edge of the gap near the contact surface of the magnetic head with the magnetic tape greatly affects the recording and reproducing sensitivity. Therefore, the mechanical accuracy of the edge of the gap is always kept constant, and the gap spacer is mechanically It is necessary to be firmly connected. Furthermore, the gap spacer itself is also desired to have high mechanical strength. Conventionally, in order to form a magnetic gap of several microns or less in a magnetic head with a ferrite core, a non-magnetic material such as glass is inserted as a foil into the gap, or a film is formed by sputtering or vapor deposition, or A method is used in which a glass paste is applied, dried, and then heated and fused to a temperature higher than the softening temperature of the glass. This results in
By firmly welding the tape to ferrite with a predetermined working gap width, the problem of chipping of the gap edges when the tape runs in contact with a magnetic head is prevented. However, in recent years, in order to further improve the performance of tape head systems, that is, to meet the demand for technological development for higher recording densities, ferrite has been replaced by (oxide-based) metals such as sendust and amorphous alloys as magnetic materials. There is an increasing need to use magnetic materials.
これら金属磁性材料を用いた磁気ヘッドにおいて、フェ
ライト材を用いた場合と同様に、ガラスをスペーサとし
て使用する際には、磁性材料自体の特性劣化を防ぐため
に、できるだけ低温でガラスを加熱融着することが望ま
しく、そのため、例えば、PbOB2O3、PbO−8
102,pbo P2O5−PbOZnOB2O3,z
no B2O38102系の低融ガラスが用いられてい
る。しかし、フェライトの場合と異なり、金属磁性材料
では、例えば%Fe#81のような酸化物を作って安定
化しようとする傾向の大きい金属成分が含まれており、
一方、低融ガラスの中には、例えば、PbO,ZnOの
ように酸素との結合が弱い成分があり、一般に、より低
融点のガラスはど、これらの還元され易い酸化物を多く
含んでいるため、フェライトと同様の方法でガラス融着
を行なうと、金属磁性体と上記ガラスが反応して、例え
ば、pb、znの金属が析出してくる。これらの析出は
、磁心との結合を弱め、空隙スペーサとしてのガラス自
体の機械的強度や耐摩耗性を低下させ、磁気ヘッドの特
性を劣化させる重大な要因となっている。In magnetic heads using these metallic magnetic materials, when glass is used as a spacer, as in the case of using ferrite materials, the glass is heated and fused at the lowest possible temperature to prevent the characteristics of the magnetic material itself from deteriorating. Therefore, for example, PbOB2O3, PbO-8
102, pbo P2O5-PbOZnOB2O3,z
No B2O38102-based low melting glass is used. However, unlike the case of ferrite, metal magnetic materials contain metal components that have a strong tendency to stabilize by forming oxides, such as %Fe#81.
On the other hand, low-melting glass contains components that bond weakly with oxygen, such as PbO and ZnO, and generally, glass with a lower melting point contains many of these oxides that are easily reduced. Therefore, when glass fusion is performed in the same manner as for ferrite, the metal magnetic material and the glass react, and metals such as PB and ZN are precipitated. These precipitations weaken the bond with the magnetic core, reduce the mechanical strength and abrasion resistance of the glass itself as a gap spacer, and become a significant factor in deteriorating the characteristics of the magnetic head.
本発明の目的は、金属磁性体を磁心とした磁気ヘッドの
空隙部の製造におけるこれらの問題を解決するにある。SUMMARY OF THE INVENTION An object of the present invention is to solve these problems in manufacturing a gap portion of a magnetic head using a magnetic metal as a magnetic core.
以下、本発明による実施例を図面を参照して、最も一般
的なヘッド形状である2個のコの字状磁心を対向せしめ
ることにより磁気ヘッドを形成する場合について説明す
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings, in which a magnetic head is formed by making two U-shaped magnetic cores, which are the most common head shape, face each other.
〈実施例1〉
第2図のように断面コ字状の磁心1のフロント空隙構成
面2及びパック空隙構成面3を充分鏡面で、且つ、同一
平面となるように仕上げ、その面に金属磁性体、例えば
、センダストと後に形成されるガラス層との反応を防止
してガラス中からの金属析出を抑えるための膜として、
5i0,4をスパッタリングにより着ける。<Example 1> As shown in FIG. 2, the front air gap forming surface 2 and the pack air gap forming surface 3 of the magnetic core 1 having a U-shaped cross section are finished to be sufficiently mirror-finished and coplanar, and a metal magnetic material is applied to the surfaces. For example, as a film to prevent the reaction between sendust and the glass layer formed later and to suppress metal precipitation from the glass.
5i0,4 is applied by sputtering.
スパッタリングには、高周波スパンタ装置を用い、8i
02ターゲツトに対し02を5〜20%含んだArガス
でスパッタリングを行なった。02を含んだガスを用い
ることにより8i0zの緻密な膜が得られる。又、膜厚
はスパッタリング時間により容易に制御できる。A high frequency sputtering device is used for sputtering, and 8i
Sputtering was performed using Ar gas containing 5 to 20% of 02 to a 02 target. By using a gas containing 02, a dense film of 8i0z can be obtained. Further, the film thickness can be easily controlled by sputtering time.
次に、第1図のように、空隙スペーサ及び磁心1の接着
剤として、低融点のP b OB2011系ガラス膜5
を、第2図に示すように5i02膜4の上にスパッタリ
ングにより着ける。Next, as shown in FIG. 1, a low melting point Pb OB2011 glass film 5 is used as an adhesive for the air gap spacer and the magnetic core 1.
is deposited on the 5i02 film 4 by sputtering as shown in FIG.
スパッタリングには、高周波ス・くツタ装置を用い、タ
ーゲツトとして、例えば、PbOe70wt%以上含ん
だP b OB2O3系ガラスを用い、02を5〜20
%含んだArガスでスノ(ツタリングを行ない、ターゲ
ット組成に近いスノ(ツタ膜5を得た。膜厚の制御は、
スパンタ時間によった。For sputtering, a high-frequency sputtering device is used, and as a target, for example, PbOB2O3 glass containing 70 wt% or more of PbOe is used.
% of Ar gas was used to obtain an ivy film 5 close to the target composition.The film thickness was controlled by
Depending on the time span.
しかる後、第1図に示すように、磁心l及び1′を合わ
せて加圧しながら、500C前後の温度で加熱すると、
ガラス膜5同士は互いに融着し、さらに、加熱中にガラ
ス5がSiO2膜4の方に拡散していく。Thereafter, as shown in Figure 1, the magnetic cores 1 and 1' are heated together under pressure at a temperature of around 500C.
The glass films 5 are fused together, and the glass 5 further diffuses toward the SiO2 film 4 during heating.
ここで、はじめの膜4及び5の膜厚構成、又は、熱処理
温度、時間を変えることにより、ガラス5のSiO2膜
4への拡散量は制御できる。従って、これらを適当な条
件に選ぶと、ガラス5は、8102膜の方へ拡散してゆ
くが、最終的に、センダストに到達させることなく磁気
空隙を得ることができる。例えば、第2図で8j02膜
4を1.0μへガラス膜5’t1.0μm着けて、50
0C,15分の熱処理を行なうと、ガラス5と8102
は相互に拡散し、8jOz膜は約0.5μm残る。Here, the amount of diffusion of the glass 5 into the SiO2 film 4 can be controlled by changing the film thickness structure of the initial films 4 and 5, or by changing the heat treatment temperature and time. Therefore, if these conditions are selected appropriately, the glass 5 will diffuse toward the 8102 film, but eventually a magnetic gap can be obtained without letting it reach the sendust. For example, in Fig. 2, the 8j02 film 4 is attached to 1.0 μm and the glass film 5't is 1.0 μm thick, and 50
After heat treatment at 0C for 15 minutes, glass 5 and 8102
are mutually diffused, and about 0.5 μm of the 8jOz film remains.
また、8(02膜4を1.5μm、ガラス膜5を0.4
p m着けて、450C,15分の熱処理を行なうと
、8102膜が約0.05μm残る。In addition, 8 (02 film 4 is 1.5 μm, glass film 5 is 0.4
pm and heat treatment at 450C for 15 minutes leaves about 0.05 μm of the 8102 film.
このようにSi Q2膜を用いて、ガラス5がセンダス
トと反応することを防止することができ、従って、5f
02膜のない場合に同様の条件で接着した際に、ガラス
中に金属鉛が析出し、センダストとガラスの結合を弱め
ると共に、空隙スペーサとしてのガラス自体の強度も低
下するという問題を回避できる。In this way, by using the Si Q2 film, it is possible to prevent the glass 5 from reacting with the sendust, and therefore the 5f
It is possible to avoid the problem that when adhering under the same conditions without the 02 film, metallic lead is precipitated in the glass, weakening the bond between the sendust and the glass, and reducing the strength of the glass itself as a gap spacer.
以上では、反応防止膜として5iO2′f:用いたが、
その他にAt20s 1Zr02.TiO2,MgOな
どの安定で融点の高い酸化物や、SnO2の様なガラス
を還元しない酸化物及びこれらの組合せにより成る化合
物を用いることもできる。In the above, 5iO2'f: was used as a reaction prevention film, but
In addition, At20s 1Zr02. It is also possible to use stable oxides with high melting points such as TiO2 and MgO, oxides that do not reduce glass such as SnO2, and compounds consisting of combinations thereof.
〈実施例2〉 第2図の反応防止膜4としてTiを蒸着により着ける。<Example 2> Ti is deposited as the reaction prevention film 4 in FIG. 2 by vapor deposition.
蒸着は、Tiをルツボに入れヒーターで加熱し、真空中
で蒸着させ、あらかじめ時間、温度などを調節し、所定
の厚さに着くように制御する。For vapor deposition, Ti is placed in a crucible, heated with a heater, and vapor-deposited in a vacuum. Time, temperature, etc. are adjusted in advance and controlled so that a predetermined thickness is achieved.
その後、実施例1と同様の方法により磁気空隙部を形成
する。Thereafter, a magnetic gap is formed by the same method as in Example 1.
Tiは、ガラスと比較的反応しに<<、かつ、比較的高
温度で緻密に蒸着できるため、防止膜として良好である
。Ti is good as a preventive film because it does not react with glass relatively easily and can be deposited densely at a relatively high temperature.
その他、非磁性でガラスと比較的反応しにくい金属膜は
、反応防止膜として用いることができる。In addition, a metal film that is nonmagnetic and relatively difficult to react with glass can be used as a reaction prevention film.
さらに、LSIの保護膜や機能材料のコーテイング材と
して用いられており、特に、溶融ガラスに対する耐食性
にすぐれた、例えば、BN。Furthermore, BN, for example, is used as a protective film for LSIs and as a coating material for functional materials, and has particularly excellent corrosion resistance against molten glass.
S 13N4 s SIC等の非磁性非酸化物系のセラ
ミックスも反応防止膜4としてすぐれた相料である。Non-magnetic non-oxide ceramics such as S 13N4 s SIC are also excellent phase materials for the reaction prevention film 4.
本発明によれば、空隙に充填されるガラス質拐料中に金
属が析出することがなくなり、従って機械的強度や耐摩
耗性の高い磁気空隙を得ることができる。According to the present invention, metal is not precipitated in the glass particles filled in the voids, and therefore it is possible to obtain magnetic voids with high mechanical strength and wear resistance.
第1図は、本発明の方法によって得られた磁気ヘンドコ
アの側断面図、第2図は本発明の一実施例を説明するた
めの製造過程における磁気ヘンドコアの断面図である。FIG. 1 is a side sectional view of a magnetic hend core obtained by the method of the present invention, and FIG. 2 is a sectional view of the magnetic hend core in a manufacturing process for explaining one embodiment of the present invention.
Claims (1)
いて、 一対の前記磁気ヘッドの空隙構成対向面に夫々低融点ガ
ラスを形成し、これを合わせて低温で加熱融着する際、
前記低融点ガラスと前記金属磁性体との反応を防止する
ための膜を前記低融点ガラスと前記磁性体との間に形成
することを特徴とする磁気ヘッドの製造方法。[Claims] 1. In the manufacturing process of a magnetic head having a magnetic core made of a metallic magnetic material, a low melting point glass is formed on each of the opposing surfaces of the pair of magnetic heads, and the glass is heated and fused together at a low temperature. When doing,
A method of manufacturing a magnetic head, comprising forming a film between the low melting point glass and the magnetic material to prevent a reaction between the low melting point glass and the metal magnetic material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12792483A JPS6020306A (en) | 1983-07-15 | 1983-07-15 | Production of magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12792483A JPS6020306A (en) | 1983-07-15 | 1983-07-15 | Production of magnetic head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6020306A true JPS6020306A (en) | 1985-02-01 |
JPH0480446B2 JPH0480446B2 (en) | 1992-12-18 |
Family
ID=14971999
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12792483A Granted JPS6020306A (en) | 1983-07-15 | 1983-07-15 | Production of magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6020306A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0195411A2 (en) * | 1985-03-20 | 1986-09-24 | Hitachi Maxell Ltd. | Magnetic head |
US5687045A (en) * | 1991-09-20 | 1997-11-11 | Hitachi, Ltd. | Thin film magnetic head and production method thereof and magnetic disk drive equipped with this thin film magnetic head |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5437120U (en) * | 1977-08-19 | 1979-03-10 | ||
JPS5552524A (en) * | 1978-10-13 | 1980-04-17 | Toshiba Corp | Manufacture of magnetic head |
JPS55117723A (en) * | 1979-02-28 | 1980-09-10 | Sony Corp | Magnetic head |
JPS56137517A (en) * | 1980-03-31 | 1981-10-27 | Tdk Corp | Magnetic head and its manufacture |
JPS5923174A (en) * | 1982-06-30 | 1984-02-06 | カメロン・アイアン・ワ−クス・インコ−ポレ−テツド | Stem sealing device for valve and valve |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2323635A1 (en) * | 1975-09-10 | 1977-04-08 | Ugine Kuhlmann | PROCESS FOR PREPARING CONCENTRATED SOLUTIONS OF HYDRAZINE HYDRATE |
-
1983
- 1983-07-15 JP JP12792483A patent/JPS6020306A/en active Granted
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5437120U (en) * | 1977-08-19 | 1979-03-10 | ||
JPS5552524A (en) * | 1978-10-13 | 1980-04-17 | Toshiba Corp | Manufacture of magnetic head |
JPS55117723A (en) * | 1979-02-28 | 1980-09-10 | Sony Corp | Magnetic head |
JPS56137517A (en) * | 1980-03-31 | 1981-10-27 | Tdk Corp | Magnetic head and its manufacture |
JPS5923174A (en) * | 1982-06-30 | 1984-02-06 | カメロン・アイアン・ワ−クス・インコ−ポレ−テツド | Stem sealing device for valve and valve |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0195411A2 (en) * | 1985-03-20 | 1986-09-24 | Hitachi Maxell Ltd. | Magnetic head |
US5687045A (en) * | 1991-09-20 | 1997-11-11 | Hitachi, Ltd. | Thin film magnetic head and production method thereof and magnetic disk drive equipped with this thin film magnetic head |
Also Published As
Publication number | Publication date |
---|---|
JPH0480446B2 (en) | 1992-12-18 |
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