JPS60197839A - Jig for sintering ceramics and its production - Google Patents
Jig for sintering ceramics and its productionInfo
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- JPS60197839A JPS60197839A JP59053564A JP5356484A JPS60197839A JP S60197839 A JPS60197839 A JP S60197839A JP 59053564 A JP59053564 A JP 59053564A JP 5356484 A JP5356484 A JP 5356484A JP S60197839 A JPS60197839 A JP S60197839A
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- jig
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- temperature
- sintering
- alloy
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Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は、６沖のセラミックスを焼結する除に用いるモ
リブデン合金製の・冶具とその製造方法に関し、更に詳
しくは、高温強度に優れたモリブデン合金の・冶具とそ
の製造方法に関する。Detailed Description of the Invention [Technical Field of the Invention] The present invention relates to a jig made of a molybdenum alloy used for sintering ceramics and a method for manufacturing the same, and more particularly, to a jig made of a molybdenum alloy and a method for manufacturing the same, which is used for sintering ceramics. - Concerning jigs and their manufacturing methods.
一般に各種セラミックスの焼結は１例えばプレス成形し
たセラミックス粉末成形体を通常は黒鉛製の棚仮に載置
し、これを１５００〜１８００℃の不活性雰囲気中で加
熱して行なわれる。Generally, various ceramics are sintered by placing a press-molded ceramic powder compact on a shelf, usually made of graphite, and heating it in an inert atmosphere at 1500 to 1800 DEG C.
ところが、黒鉛はその機械的強度が小さいので。However, graphite has low mechanical strength.
載置できるセラミックス粉末成形体の総置をあまり重く
することができず焼結時の生産性を高めるという点では
問題がある。There is a problem in that the total weight of the ceramic powder molded bodies that can be placed cannot be made too heavy, which increases productivity during sintering.
このため、最近では、高温における強度も大きく、耐熱
性も高いモリブデンの板材による焼結用治具が使用され
ている。For this reason, recently, sintering jigs made of molybdenum plates, which have high strength and heat resistance at high temperatures, have been used.
このようなモリブデンの板材は一般に次のようにして製
造されている。すなわち、まずモリブデン粉末を焼結し
たインゴットに高温下で鍛造、圧延などの熱間加工を施
して根羽とする。この板材をそのまま冶具として実用に
供するか、又は、この板材に二次再結晶温度以下の温度
１通常は８００〜１２００℃の温度域で加工歪みを除去
する焼鈍を施したのち二次成形７ＪＯ工を施してから実
用に供されている。Such molybdenum plates are generally manufactured as follows. That is, first, an ingot made by sintering molybdenum powder is subjected to hot working such as forging and rolling at a high temperature to form a root. This plate material can be put to practical use as a jig as it is, or it can be annealed to remove processing distortion at a temperature below the secondary recrystallization temperature 1, usually in the temperature range of 800 to 1200°C, and then subjected to secondary forming 7JO processing. It has been put into practical use after undergoing this process.
しかしながら、このような方法で得られたモリブデンの
板材はセラミックス焼結用冶具として用いた場合次のよ
うな不都合な問題を生ずる。However, when the molybdenum plate obtained by such a method is used as a ceramic sintering jig, the following disadvantages arise.
一般に治具に１５００〜１８００℃の温度域で使用され
る。そして、モリブデンの二次再結晶温度は約１２００
℃である。したがって、モリブデンの・冶具には、使用
中に二次再結晶粒が成長し、七の粗大化に伴なう脆化に
よシ治具の破壊が生ずる。更には、加熱番冷却サイクル
の反復による熱疲労又は高温使用時のクリープ現象の発
生などにより。It is generally used for jigs in a temperature range of 1500 to 1800°C. And the secondary recrystallization temperature of molybdenum is about 1200
It is ℃. Therefore, secondary recrystallized grains grow in molybdenum jigs during use, and the embrittlement caused by coarsening causes the jigs to break. Furthermore, thermal fatigue due to repeated heating and cooling cycles and creep phenomenon occur during high-temperature use.
治具が大きく変形することがある。The jig may be significantly deformed.
例えは、セラミックス基板焼結用の自動化ラインで使用
される治具にあっては、上記した現象が起ると、セラミ
ックス基板の治具からの転落又は変形を招き、極端な場
合には、隣接するモリブデン治具が接触してセラミック
ス基板の収納が不可能になる。そして、長期に亘る使用
ができなくなる。For example, in the case of a jig used in an automated line for sintering ceramic substrates, if the above phenomenon occurs, the ceramic substrate may fall from the jig or be deformed, and in extreme cases, The molybdenum jig will come into contact with the ceramic substrate, making it impossible to store the ceramic substrate. Then, it becomes impossible to use it for a long period of time.
このように、セラミックス焼結用治具としてモリブデン
板材を使用するに当り、更に高温強度に優れ、変形する
ことのないモリブデン材料が必要とされる。Thus, when using a molybdenum plate material as a jig for sintering ceramics, a molybdenum material that has excellent high-temperature strength and does not deform is required.
（発明の目的〕
本発明は、セラミックスの焼結時の温度下にあっても、
上記した変形等の現象を起すことがなく。(Object of the invention) The present invention provides a method for sintering ceramics to
The above-mentioned deformation and other phenomena do not occur.
高温強度に優れたモリブデン合金で構成されたセラミッ
クス焼結用冶具とその製造方法の提供を目的とする。The purpose of the present invention is to provide a ceramic sintering jig made of a molybdenum alloy with excellent high-temperature strength and a method for manufacturing the same.
本発明のセラミックス焼結用治具は高温強度に優れたモ
リブデン合金で構成されている仁とを特徴とし、その製
造方法は。The ceramic sintering jig of the present invention is characterized by a core made of a molybdenum alloy with excellent high-temperature strength, and the manufacturing method thereof is as follows.
高融点酸化物の１種又は２種以上が０．０５〜５．０本
社％合有されているモリブデン合金に、室温から一次再
結晶温度未満の温度域で加工率８０％以上の鍛造又は圧
延加工を施す第１の工程；得られた加工材に治具形状の
成形加工を施す第２の工程；得られた治具前駆体に、二
次再結晶温度より１００℃高い温度から２２００℃以下
の温度域で加熱処理を施す＠３０工程；とから成ること
を特徴とする。A molybdenum alloy containing 0.05 to 5.0% of one or more high melting point oxides is forged or rolled at a processing rate of 80% or more in the temperature range from room temperature to less than the primary recrystallization temperature. First step of processing; Second step of forming the obtained workpiece into a jig shape; The obtained jig precursor is heated from a temperature 100°C higher than the secondary recrystallization temperature to 2200°C or less It is characterized by consisting of @30 steps of performing heat treatment in a temperature range of .
本発明の治具は、後述する方法で製造したモリブデン合
金から成る。治具は楠々の形状をとシうるが１例えは、
第１図に示すような両端を折シ曲けた板状体が一般的で
ある。折シ曲は部分を下から支え、板面部分を浮かし、
板面上にセラミックス粉末成形体を載置して使用に供す
る。後述する加熱処理によって成長させる二次再結晶粒
の方向は、折り曲げ部分の支点間を跨ぐ状態にあること
が好ましい。The jig of the present invention is made of a molybdenum alloy manufactured by the method described below. A jig can take the shape of camphor trees, but one example is
A plate-shaped body with both ends bent as shown in FIG. 1 is common. The folded part supports the part from below and lifts the board part,
A ceramic powder molded body is placed on the plate surface and used. It is preferable that the direction of the secondary recrystallized grains to be grown by the heat treatment described below is in a state where they straddle the fulcrums of the bent portions.
本発明の治具は次の工程を経て製造される。第１の工程
は、高融点酸化物の１種又は２種以上が０．０５〜５．
０重ｔ％含有されているモリブデン合金に、室温から一
次再結晶温度未満の温度域で加工率８０％以上の鍛造又
は圧延加工を施す工程である。まず、出発素材は、高融
点酸化物の１種又は２種以上が添加されたモリブデン粉
末を常法によって焼結した焼結体である。The jig of the present invention is manufactured through the following steps. In the first step, one or more types of high melting point oxides are mixed at a temperature of 0.05 to 5.
This is a process of forging or rolling a molybdenum alloy containing 0% by weight at a processing rate of 80% or more in a temperature range from room temperature to less than the primary recrystallization temperature. First, the starting material is a sintered body obtained by sintering molybdenum powder to which one or more high melting point oxides are added by a conventional method.
この高融点酸化物は、後述する加熱処理によってモリブ
デン材に成長させる二次再結晶粒の組織を後述する加工
方向とは直交する方向に細長くかつ大きく成長させるた
めに添加する成分である。This high melting point oxide is a component added in order to cause the structure of the secondary recrystallized grains grown in the molybdenum material by the heat treatment described below to grow long and narrow in a direction perpendicular to the processing direction described later.
具体的には、二酸化ジルコニウム（ＺｒＯ２）、酸化イ
ツトリウム（Ｙ２Ｏ２） 、酸化ランタンＣＬａ２０３
） 。Specifically, zirconium dioxide (ZrO2), yttrium oxide (Y2O2), lanthanum oxide CLa203
).
酸化マグネシウム（ＭｇＯ）などがあげられる。これら
は単独で用いてもよいし適宜な組合せで２種以上を用い
てもよい。Examples include magnesium oxide (MgO). These may be used alone or in an appropriate combination of two or more.
これら高融点酸化物は通常粒径帆００５〜ｏ、１μｍの
粉末の形で用すられる。マトリックスであるモリブデン
への含有量が、０．０５重普チ未満の場合には、その効
果が小さく後述の加熱処理を施しても二次再結晶粒の形
状が亀甲状の筒軸結晶粒となつて高温強度の向上に冨与
せず、また、５．０重量％を超えると第１工程、第２工
程における加工が著しく困難になる。These high melting point oxides are usually used in the form of powders with a particle size of 005 to 1 μm. If the content of molybdenum in the matrix is less than 0.05%, the effect is small and even if the heat treatment described below is applied, the shape of the secondary recrystallized grains will be hexagonal cylindrical crystal grains. Therefore, it does not contribute to the improvement of high-temperature strength, and if it exceeds 5.0% by weight, processing in the first and second steps becomes extremely difficult.
本発明に６つでは、まず、このようなモリプデノ合金ｆ
ｔ室温から一次再結晶温度未満の温度域で鍛造又は圧延
して冷間７ＪＯ工する。このときの加工＋ＡＩ Ｕが一
次母結晶温度以上になると、加工中にサブダレインか発
生し、加工繊維組織の発達と加工＃、＃ｌ維組織に沿っ
た高融点酸化物の粒子の配列ができなくなるなどのＩＩ
、題が生じてくる。また、鍛造。In the present invention, firstly, such a molypdenoid alloy f
t Cold 7JO processing is performed by forging or rolling in a temperature range from room temperature to less than the primary recrystallization temperature. If the temperature of the processing + AI U at this time exceeds the primary mother crystal temperature, subdalein will occur during processing, making it impossible to develop the processed fiber structure and arrange the high melting point oxide particles along the processed # and #l fiber structures. II such as
, a problem arises. Also forged.
圧延は′帛法をその１ま適用すれはよい。For rolling, it is best to apply the 1st method.
この〃■工処理により、モリブデン合金の組織が加工方
向と直交する方向には引き伸ばされ加工方向ＫｔＸ押し
つぶされて全体として繊維状組織に配列されていく。こ
のとき、添加した高融点酸化物のｌｅＪ末の多くは上記
した繊維状組織に沿って配列する。また一部社繊維状組
織内に分散してその組織の強度を商める。By this processing, the structure of the molybdenum alloy is stretched in the direction perpendicular to the processing direction and crushed in the processing direction KtX, so that the structure is arranged into a fibrous structure as a whole. At this time, most of the leJ powder of high melting point oxide added is arranged along the above-described fibrous structure. In some cases, it is dispersed within the fibrous structure to increase the strength of the structure.
本発明にあっては、この冷間加工の加工率が８０チ以上
である。ここで、加工率とは、加工前後におけるモリブ
デン材の断面積の減少を加工前の断面積で除した１直の
百分率表示匣であって、この＋ｉが大きいほど加工は進
んでいることを意味する。In the present invention, the processing rate of this cold working is 80 inches or more. Here, the machining rate is a percentage display for one shift, which is the decrease in the cross-sectional area of the molybdenum material before and after machining divided by the cross-sectional area before machining, and it means that the larger +i is, the more advanced the machining is. do.
加工率が８０％未（背の場合には、上記した繊維状組織
に沿って鵡融点酸化物の粉末が元号に配列せず、後述の
加熱処理時に二次再結晶粒が亀甲状の等軸状結晶組織に
なシ易すい。そのため、高温下での使用時にｉｚ、＝ｒ
ｊ記したようにモリブデン材には粒界すペシに伴なう異
常変形１粒界割れ等の現象が発生し易すくなる。加工率
としては９０％以上であることが望ましい。ただし、加
工率１００％はめシ得ないので本発明にあって加工率１
００チは會まない。If the processing rate is less than 80% (in the case of the back), the powder of the melting point oxide is not arranged in the era name along the fibrous structure described above, and the secondary recrystallized grains become hexagonal during the heat treatment described below. It easily forms an axial crystal structure.Therefore, when used at high temperatures, iz, = r
As mentioned above, phenomena such as abnormal deformation and intergranular cracking due to grain boundary cracking are more likely to occur in molybdenum materials. It is desirable that the processing rate is 90% or more. However, since it is not possible to achieve a processing rate of 100%, in the present invention, the processing rate is 100%.
00chi doesn't meet.
第２の工程は１以上のようにして加工されたモリブデン
の板材に成形加工を施して板材全治具の形状にして冶具
前駆体を製造する工程である。例えば、第１図の治具の
製造に当っては、第１工程で得られた加工材の両端を図
のように折υ曲ける。The second step is a step in which the molybdenum plate processed in the above steps is subjected to a molding process to form the entire plate into the shape of a jig to produce a jig precursor. For example, in manufacturing the jig shown in FIG. 1, both ends of the workpiece obtained in the first step are bent as shown in the figure.
このとき、繊維状組織が伸びている方向の両端を折り曲
けると、板面にかかるｉ普１に肩効に支持できるので好
ましい。なお、このような折シ曲げ加工の際には、加工
する部分を若干加熱すると加工時の１ａ裂、サケａｔ防
げるので有効である。At this time, it is preferable to bend both ends of the fibrous tissue in the direction in which it extends, since this can effectively support the surface of the board. Incidentally, during such folding processing, it is effective to slightly heat the part to be processed, since this will prevent 1a tearing and cracking at the time of processing.
第３の工程は、得られた治具前駆体に、二次再結晶粒興
より１００℃高い温度から２２００℃以下の温度域で加
熱処理を施す工程である。その結果。The third step is a step in which the obtained jig precursor is subjected to heat treatment in a temperature range from 100° C. higher than the secondary recrystallized grain formation to 2200° C. or lower. the result.
前駆体の中には扁平で細長く大きな二次再結晶粒が成長
する。Flat, elongated, and large secondary recrystallized grains grow in the precursor.
このときの加熱温度が上記温度以下の場合には。If the heating temperature at this time is below the above temperature.
そもそも二次再結晶粒の成長が不充分であり、そのため
、高温下での使用時にモリブデン治具に不安定な結晶粒
の成長が進んで熱疲労強度やりＩＪ ＋１強度にバラツ
キが生ずる。In the first place, the growth of secondary recrystallized grains is insufficient, and as a result, the growth of unstable crystal grains progresses in the molybdenum jig when used at high temperatures, resulting in variations in thermal fatigue strength and IJ +1 strength.
しかしながら、加熱処理時の温度が２２００℃よシ高く
なると、細長く大きな二次再結晶粒が過大にジグザグと
成長して等軸状結晶組織に類似した結晶粒界の状態にな
ってしまい、・冶具としての使用時に１粒界すぺυや高
温強度の低下に伴う異常変形１粒界割れが起りやすくな
シ、脆化による破損。However, when the temperature during heat treatment becomes higher than 2200°C, elongated and large secondary recrystallized grains grow excessively in a zigzag pattern, resulting in a grain boundary state similar to an equiaxed crystal structure. When used as a material, abnormal deformation and grain boundary cracking are likely to occur due to a decrease in single-grain boundary dimensions and high-temperature strength, and damage due to embrittlement.
割れ現象を招きやすくなる。This tends to lead to cracking phenomena.
なお１本発明にあっては、鍛造又に圧延加工を施こした
加工材に直接上記した加熱処理を砲こすが、加工後に一
度二次再結晶温度よシ低い温度で歪み除去の焼鈍ヶ行な
ってから上記加熱処理を飽こしてもよい。Note that in the present invention, the forged or rolled workpiece is directly subjected to the heat treatment described above, but after the processing, annealing is performed once to remove distortion at a temperature lower than the secondary recrystallization temperature. After that, the above heat treatment may be completed.
本発明の治具は、第１図に例示したような１枚の治具で
あってもよいが１例えは、第２図に例示したように、こ
の冶具板１を襟数枚、支持＋１２で固定されたカラー３
の上に重ねていく多段構造のものであってもよい。The jig of the present invention may be a single jig as illustrated in FIG. 1, but in one example, as illustrated in FIG. Color 3 fixed with
It may also have a multi-tiered structure in which it is stacked on top of the other.
このような多段構造の治具の場合には、炉内空間を有効
に利用することができ、しかも各冶具板ｌａ、ｌｂ、ｌ
ｃ、ｌｄにはそれぞれ別種のセラミックス粉末成形体を
のせることができて有用である。In the case of a jig with such a multi-stage structure, the space inside the furnace can be used effectively, and each jig plate la, lb, l
It is useful because different types of ceramic powder compacts can be placed on c and ld, respectively.
（発明の笑施例〕
第１表に示した割合（重１％）でＭＯ粉末と高融点酸化
物の粉末とを混合し、て４種類の混合粉末試料を調製し
た。試料１．２についてはボットロー２中で２０Ｒ間混
合し、試料３，４は各ゾルとＭｏ２末を撹拌機で５時間
混合したのち１２０’ｃで加熱乾燥した。試料５は比較
例としてのＭｏ 粉末のみのもの。(Example of the invention) Four types of mixed powder samples were prepared by mixing MO powder and high melting point oxide powder in the proportions shown in Table 1 (1% by weight). Regarding sample 1.2. Samples 3 and 4 were mixed for 20R in Botlow 2, and samples 3 and 4 were mixed with each sol and Mo2 powder for 5 hours using a stirrer, and then heated and dried at 120'C.Sample 5 was a comparative example containing only Mo powder.
第１表
これらの混合粉末をそれぞれ約２ ｔｏｎ／ｉの圧力で
ズレス成形し、得られた成形体を１８３０℃の水素炉中
で９時間焼結した。比較のために、 ＭＯのみの焼結体
も同様の条件で製造した。Table 1 Each of these mixed powders was molded under a pressure of about 2 ton/i, and the resulting molded body was sintered in a hydrogen furnace at 1830° C. for 9 hours. For comparison, a sintered body containing only MO was also produced under similar conditions.
これらの焼結体につき、１１００−１４００’Ｃで鍛造
しついで１１００℃以下の温度で圧延して冷間加工率９
５％で厚み２１ＥＩＩの板材とした。なお、試料ｌのモ
リブデン合金からは冷間加工率７５％の板材（厚み２語
）も製造した。These sintered bodies were forged at 1100-1400'C and rolled at a temperature below 1100°C to achieve a cold working rate of 9.
5% and a plate material with a thickness of 21EII. Note that from the molybdenum alloy of sample 1, a plate material (thickness 2) with a cold working rate of 75% was also manufactured.
これら板材から第１図に示した形状（たて１３０Ｍ、横
２００１１Ａ）の冶具板を成形加工した。A jig plate having the shape shown in FIG. 1 (length 130M, width 20011A) was formed from these plate materials.
各治具板につき、第２表に示したような加熱処理を施し
た。Each jig plate was subjected to heat treatment as shown in Table 2.
第２表
なお、加熱処理時には、変形を防ぐために各治具板の板
面に平らなタングステン厚板をのせた、これら治具板の
各２枚を用いて第２図に例示した多段構造の焼結用冶具
を組立てた。Table 2 Note that to prevent deformation during heat treatment, a flat thick tungsten plate is placed on the surface of each jig plate, and two of these jig plates are used to create the multi-stage structure illustrated in Figure 2. The sintering jig was assembled.
各治具板の中央板面上に重置０．７５Ｋｙのタングステ
ン円板（直径１００１１Ｂ）を載せ、その状態で１８０
０℃の水素気流中に１０時間放置したのち室温に１時間
放置するという加熱冷却サイクルを２０回反復した。サ
イクル４回毎に、冶具板１の四隅に対する中央部の反り
歓を各２枚について測定し、２枚の平均値をめた。タン
グステン円板とその上にある冶具板ｌの下面との間隔は
１０９であった。A 0.75Ky tungsten disk (diameter 10011B) is placed on the center plate surface of each jig plate, and in that state
A heating/cooling cycle was repeated 20 times, in which the sample was left in a hydrogen stream at 0° C. for 10 hours and then left at room temperature for 1 hour. Every four cycles, the warpage of the central part of the jig plate 1 with respect to the four corners was measured for each two pieces, and the average value of the two pieces was calculated. The distance between the tungsten disk and the lower surface of the jig plate l placed thereon was 109.
その結果を加熱冷却サイクル回数との関係で第３図に示
した。図で曲線ａ、ｂ、ｃ、ｄはそれぞれ実施例１，２
，３．４の゛冶具板の場合を表わし。The results are shown in FIG. 3 in relation to the number of heating and cooling cycles. In the figure, curves a, b, c, and d represent Examples 1 and 2, respectively.
, 3.4 represents the case of the jig plate.
曲＃ｅは比較例４１曲線ｆは比較例３１曲線りは比較例
１１曲線ｈｉ−を比較例２の冶具板の状態を表わす。Curve #e represents Comparative Example 41, curve f represents Comparative Example 31, curve hi- represents Comparative Example 11, and curve hi- represents the state of the jig plate of Comparative Example 2.
図から明らかなように、比較例の治具板はいずれも反り
鼠が大きく、比較例４．比較例３．比較例２の各治具板
にいたってはそれぞれ４回％８回。As is clear from the figure, the jig plates of Comparative Examples all had large warpage, and Comparative Example 4. Comparative example 3. For each jig plate of Comparative Example 2, the test was performed 4 times and 8 times.
１６回の加熱冷却サイクルで１段のタングステン円板に
接触してしまうが１本発明の治具板はいずれも８圓以降
の変形はない。Although the jig plate of the present invention comes into contact with one tungsten disk after 16 heating/cooling cycles, none of the jig plates of the present invention deform beyond 8 circles.
〔発明の効果）
以上の説明で明らかなように、本＠明方法で製造された
冶具は、セラミックス粉末成形体の焼結温度である１５
００〜１８００℃の温度域にあっても。[Effects of the Invention] As is clear from the above explanation, the jig manufactured by the present @mei method has a sintering temperature of 15, which is the sintering temperature of the ceramic powder compact.
Even in the temperature range of 00~1800℃.
変形が非常に小さくかつ長時間に紅って安定状態を保持
するので１例えば自動化ラインの焼結用冶具として用い
た場合、その使用寿命が長くなることはもちろんのこと
、保守点検回数を削減することが可能となシ炉の運転効
率を高めることができる。Since the deformation is very small and it maintains a stable state for a long time, for example, when used as a sintering jig in an automated line, it not only has a long service life but also reduces the number of maintenance inspections. This makes it possible to increase the operating efficiency of the furnace.
また、この冶具の高温強度は高いので、これを複数段積
みめげた多段構造にすることによって、セラミックス粉
末成形体の焼結時における炉内空間を有効に活用するこ
とが可能になる。Furthermore, since this jig has high high-temperature strength, by stacking the jig in a multi-stage structure, it becomes possible to effectively utilize the space inside the furnace during sintering of the ceramic powder compact.
第１図は本発明治具の１例を示す斜視図、第２図は第１
図の治具を積みめげて成る多段構造の治具である。第３
図ｉｊ：夾施例に述べた各冶具板の反りけ゛を示す図で
ある。
第２図FIG. 1 is a perspective view showing one example of the jig of the present invention, and FIG.
This is a jig with a multi-tiered structure made by stacking the jigs shown in the figure. Third
Figure ij: A diagram showing the warpage of each jig plate described in the other examples. Figure 2
Claims (1)
クス焼結用治具。 ２ 該・冶具が複数段重ね合わされている特許請求の範
囲第１項記載のセラばツクス焼結用治具。 ３ 高融点酸化物の１柚又は２＆以上が０，０５〜５．
０重１％含有されているモリブデン合金に、室温から一
次再結晶温匿未滴の温度域で加工率８０％以上の鍛造又
は圧延加工を施す第１の工程； 得られた加工材に゛冶具形状の成形加工を施す第２の工
程； 得られた治具前駆体に、二次再結晶温度より１００℃高
い温度から２２００℃以下の温度域で加熱処理を施す第
３の工程； とから成ることを特徴とするセラミックス焼結用治具の
製造方法。[Claims] 1. A ceramic sintering jig made of a molybdenum alloy with excellent high-temperature strength. 2. A jig for sintering ceramics according to claim 1, wherein the jig is stacked in multiple stages. 3 High melting point oxide 1 or 2& or more is 0.05 to 5.
The first step is to forge or roll a molybdenum alloy containing 0 wt 1% at a processing rate of 80% or more in the temperature range from room temperature to primary recrystallization heating; A second step of performing a shape forming process; A third step of subjecting the obtained jig precursor to a heat treatment in a temperature range from 100°C higher than the secondary recrystallization temperature to 2200°C or less; A method for manufacturing a ceramic sintering jig, characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59053564A JPS60197839A (en) | 1984-03-22 | 1984-03-22 | Jig for sintering ceramics and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59053564A JPS60197839A (en) | 1984-03-22 | 1984-03-22 | Jig for sintering ceramics and its production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60197839A true JPS60197839A (en) | 1985-10-07 |
| JPH0119458B2 JPH0119458B2 (en) | 1989-04-11 |
Family
ID=12946313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59053564A Granted JPS60197839A (en) | 1984-03-22 | 1984-03-22 | Jig for sintering ceramics and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60197839A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01502680A (en) * | 1987-01-28 | 1989-09-14 | メタルウエルク、プランゼー、ゲゼルシヤフト、ミツト、ベシユレンクテル、ハフツング | Creep-resistant alloy made of high-melting point metal and its manufacturing method |
| JPH07242491A (en) * | 1994-03-02 | 1995-09-19 | Natl Res Inst For Metals | Dispersion strengthening molybdenum single crystal and production thereof |
| WO2005028692A1 (en) * | 2003-09-19 | 2005-03-31 | Plansee Se | Ods-alloy of molybdenum, silicon and boron |
| CN109207760A (en) * | 2018-10-10 | 2019-01-15 | 金堆城钼业光明（山东）股份有限公司 | A kind of molybdenum alloy thread and preparation method thereof of composite mixed lanthanum yttrium magnesium |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS493366A (en) * | 1972-05-02 | 1974-01-12 | ||
| JPS572859A (en) * | 1980-06-05 | 1982-01-08 | Tokyo Tungsten Co Ltd | Molybdenum substrate and its manufacture |
-
1984
- 1984-03-22 JP JP59053564A patent/JPS60197839A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS493366A (en) * | 1972-05-02 | 1974-01-12 | ||
| JPS572859A (en) * | 1980-06-05 | 1982-01-08 | Tokyo Tungsten Co Ltd | Molybdenum substrate and its manufacture |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01502680A (en) * | 1987-01-28 | 1989-09-14 | メタルウエルク、プランゼー、ゲゼルシヤフト、ミツト、ベシユレンクテル、ハフツング | Creep-resistant alloy made of high-melting point metal and its manufacturing method |
| JPH07242491A (en) * | 1994-03-02 | 1995-09-19 | Natl Res Inst For Metals | Dispersion strengthening molybdenum single crystal and production thereof |
| WO2005028692A1 (en) * | 2003-09-19 | 2005-03-31 | Plansee Se | Ods-alloy of molybdenum, silicon and boron |
| US7806995B2 (en) | 2003-09-19 | 2010-10-05 | Plansee Se | ODS molybdenum-silicon-boron alloy |
| CN109207760A (en) * | 2018-10-10 | 2019-01-15 | 金堆城钼业光明（山东）股份有限公司 | A kind of molybdenum alloy thread and preparation method thereof of composite mixed lanthanum yttrium magnesium |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0119458B2 (en) | 1989-04-11 |
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