JPS60196412A - Solenoid-operated proportional valve controller - Google Patents
Solenoid-operated proportional valve controllerInfo
- Publication number
- JPS60196412A JPS60196412A JP5142684A JP5142684A JPS60196412A JP S60196412 A JPS60196412 A JP S60196412A JP 5142684 A JP5142684 A JP 5142684A JP 5142684 A JP5142684 A JP 5142684A JP S60196412 A JPS60196412 A JP S60196412A
- Authority
- JP
- Japan
- Prior art keywords
- current
- circuit
- dither
- valve
- proportional valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Servomotors (AREA)
- Magnetically Actuated Valves (AREA)
- Feedback Control In General (AREA)
- Flow Control (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は電流に応じて流体流量を制御する電磁比例弁制
御装置に関し、特に小さく良好なヒステリシスでかつ安
定した流量特性となるように作動させることが可能な制
御装置の構成に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an electromagnetic proportional valve control device that controls a fluid flow rate according to current, and in particular can be operated so as to have small, good hysteresis and stable flow characteristics. Concerning possible control device configurations.
従来例の構成とその問題点
電磁比例弁はガス湯沸器やガス暖房器・ガス調理器など
において、制御すべき温度負荷に対応しでバーナへのガ
ス供給量を制御するものであるが、２ 〕゛
電磁プランジャ摺動式の前記弁にあっては、弁体の動き
始めは静摩擦力に打ち勝つ力が発生する壕で動かず、弁
体が什丑る時は動摩擦力と駆動力が一致した時点で１４
：丑ってし捷い、摩擦力に見合うだけの誤差や、プラン
ジャやヨークの残留磁気によるヒステリシスなどで、比
例弁コイルの電流に対し、正確で再現性の高い流量制御
ができない。Conventional configuration and its problems Electromagnetic proportional valves are used in gas water heaters, gas heaters, gas cookers, etc. to control the amount of gas supplied to the burner in response to the temperature load to be controlled. 2] In the electromagnetic plunger sliding type valve, when the valve body starts to move, it does not move because of the groove where a force that overcomes the static friction force is generated, and when the valve body moves, the dynamic friction force and the driving force match. 14 at the time
: Accurate and highly reproducible flow rate control of the proportional valve coil current is not possible due to errors commensurate with frictional force and hysteresis due to residual magnetism in the plunger and yoke.
そこで従来ヒステリシス特性等を良好ならしめるために
、次のような制御装置が公知である。Conventionally, the following control device is known in order to improve the hysteresis characteristics and the like.
この場合の制御回路は第１図に示されるが、交流電源１
を整流器２によって全波整流した後、電磁比例弁のコイ
ル３と１−ランジスタ増幅器４および抵抗５からなる直
列回路に脈流の直流電流を流通させて、プランジャを餓
振動させながら所定の制御をするようにしたものである
。The control circuit in this case is shown in FIG.
After being full-wave rectified by the rectifier 2, a pulsating direct current is passed through a series circuit consisting of the coil 3 and 1 of the electromagnetic proportional valve, the transistor amplifier 4, and the resistor 5, and a predetermined control is performed while causing the plunger to vibrate. It was designed to do so.
そして比例弁コイ）Ｖ３に流す電流のモ均値を変えるた
めには、第２図に示すように、全波整流の直流をそのま
１加える最大電流値（第２図ａ参照）から設定レベル以
上の波高部分をカッ（・して得られる所望値（第２図す
、ｃ参照）の範囲内で電流３ ・ −
制？ａｌを行わせており、この制狽１を電流調整回路６
によって無段階的に成している。In order to change the average value of the current flowing through the proportional valve (coil) V3, as shown in Figure 2, add the full-wave rectified direct current by 1 directly to the maximum current value (see Figure 2 a) to the set level. The current 3 - - is controlled within the range of the desired value obtained by cutting the above wave height portion (see Figure 2, c), and this restriction 1 is applied to the current adjustment circuit 6.
This is done in a stepless manner.
この他に、ザイリスタ利用による位相制６１１方式によ
って電流制徒１する形態のものもある。In addition to this, there is also a type in which the current is controlled by a phase system 611 method using a Zyristor.
ところが上記従来方式によったのでは、ディザ（出力電
流波形）効果が弱くなって初期の目的を達成し難い問題
があり、この欠点は特に低電流域において顕著に現れる
だめ、電磁比例弁の性能が十分に発揮されなかった。However, with the above conventional method, there is a problem that the dither (output current waveform) effect becomes weak and it is difficult to achieve the initial purpose.This drawback becomes especially noticeable in the low current range, and the performance of the electromagnetic proportional valve was not fully demonstrated.
上記欠点を補うべく他の従来例として次のような制菌装
置が公知である。In order to compensate for the above drawbacks, the following sterilization device is known as another conventional example.
この場合の制御回路は第３図に示すように、直流電源７
にトランジスタ増幅器４と電磁比例弁のコイル３を直列
接続し、トランジスタ増幅器４のベース端子に方形波信
号発生回路８を接続した構成で、方形波信号発生回路８
は第４図ａ、ｂ、ｃ、のように方形波の波高値（４辰幅
）および周期は一定で、オンとオフとの時間比（デユー
ティ）を変化させて、平均′市圧値−ｆの異々る出力信
号を出させるものである。なお電磁比例弁３と並列に抵
抗５とダイオード９とを直列にして接続しているのは、
弁コイ／１／３のザージ電圧を吸収するためである。The control circuit in this case is as shown in FIG.
The transistor amplifier 4 and the coil 3 of the electromagnetic proportional valve are connected in series, and the square wave signal generation circuit 8 is connected to the base terminal of the transistor amplifier 4.
As shown in Figure 4 a, b, and c, the peak value (4-line width) and period of the square wave are constant, and the on-off time ratio (duty) is changed to calculate the average 'city pressure value - This is to output different output signals of f. Note that the resistor 5 and diode 9 are connected in series in parallel with the electromagnetic proportional valve 3 because
This is to absorb the surge voltage of 1/3 of the valve coil.
１−記の従来例においては、電磁比例弁のコイル３に断
続方形波電圧が印加され、弁コイ／Ｉ／３の電圧および
電流波形が第５図のように急な立−Ｆす・立１′：りと
なるために、電磁比例弁のプランジャおよび弁体の不規
則な振動を誘発ｌ−１第６図のように正常な流量特性ａ
からずれ、ｂのような乱れた流量特性になったりする、
いわゆる特性乱れを発生しやすい問題がち一〕だ。この
従来方式のように一定周期と一定振幅の条件において、
立上り・立下りが緩やかになるようにしようとすると、
周期を長くしなければならず、そうすると最初の従来例
と同様に十分なディザ効果が得られなくなってし捷う。In the conventional example described in 1-1, an intermittent square wave voltage is applied to the coil 3 of the electromagnetic proportional valve, and the voltage and current waveforms of the valve coil/I/3 suddenly rise to -F and rise as shown in Fig. 5. 1': To induce irregular vibrations of the plunger and valve body of the electromagnetic proportional valve l-1 Normal flow rate characteristics a as shown in Figure 6
deviate from the flow rate, resulting in turbulent flow characteristics as shown in b.
This is a problem that tends to cause so-called characteristic disturbances. Under the conditions of constant period and constant amplitude as in this conventional method,
If you try to make the rise and fall gradual,
The period must be made longer, and if this is done, a sufficient dither effect cannot be obtained, as in the first conventional example.
壕だ曲用電源を整流し完全平滑しないで脈流成分を残し
た直流を、電磁比例弁のコイ）Ｖ３とｌ゛ランジスタ増
幅器４に直列に接続し、脈流成分をディザ効果として利
用しようとする方式も公知であるが、脈流周波数が５０
Ｈｚもしくは６０Ｈｚに限定され、やはり十分なディザ
効果を得ることができなかった。I tried to rectify the power supply for trench bending, and connect the direct current that left a pulsating component without completely smoothing it to the coil (coil) V3 and L transistor amplifier 4 of the electromagnetic proportional valve in series, and use the pulsating component as a dither effect. A method is also known, but when the pulsating flow frequency is 50
Hz or 60 Hz, and it was still not possible to obtain a sufficient dither effect.
発明の目的
本発明はかかる従来の問題を解消するもので、十分なデ
ィザ効果を？ｉ）ることかでき、かつ不規則な弁振動を
起と１７にくい、良好々ヒステリシスで安定１〜だ流量
特性になるよう作動させる電磁比例弁制御装置を得るこ
とを目的とする。OBJECT OF THE INVENTION The present invention solves the problems of the prior art, and provides a sufficient dither effect. i) It is an object of the present invention to provide an electromagnetic proportional valve control device which can operate the valve so as to have a stable flow rate characteristic with good hysteresis and which is less likely to cause irregular valve vibrations.
発明の構成
この目的を達成するために本発明は、直流電源に弁コイ
ルとトランジスタ増幅器を直列接続し、一定の周期・振
幅の略二角波あるいは略正弦波の電圧波形を発生するデ
ィザ発生回路と、直流電圧レベルを可変する電流制御回
路と、前記ディザ発生回路と電流割出１回路との信号を
加算する加算回路とから構成１〜だものである。Structure of the Invention To achieve this object, the present invention provides a dither generation circuit that connects a valve coil and a transistor amplifier in series to a DC power source, and generates a voltage waveform of a substantially square wave or a substantially sinusoidal wave with a constant period and amplitude. The present invention is comprised of a current control circuit for varying the DC voltage level, and an addition circuit for adding signals from the dither generation circuit and the current calculation circuit 1.
この構成によ一〕で電磁比例弁コイルに流れるｑ／均電
流レベルを変化させた場合において、弁コイルの電流は
ディザ効果−１込最も好４１〜い一定周期・振幅でかつ
緩やかな立上り・文下りの〒に原波形と６１、−〕
なるよう作用する。With this configuration, when the level of q/equal current flowing through the electromagnetic proportional valve coil is changed, the current in the valve coil has a constant period and amplitude with a gradual rise and It acts so that 〒 at the bottom of the sentence becomes the original waveform 61, -〕.
実施例の説明
以下、本発明の一実施例を第７図〜第９図を用いて説明
する。第７図において直流電源１０に電磁比例弁のコイ
）ｖｌｌとトランジスタ増幅器１２と抵抗１３を直列接
続し、弁コイル１１と並列にダイオード１４を接続し、
一定の周期・振幅の略三角波あるいは略正弦波の電圧波
形を発生するディザ発生回路１５と電流制御回路１６の
出力を加算回路１７に入力するように接続し、かつ加算
回路１７の出力端子をトランジスタ１２のベース端子に
接続されている。DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 7 to 9. In FIG. 7, an electromagnetic proportional valve (coil) vll, a transistor amplifier 12, and a resistor 13 are connected in series to the DC power supply 10, and a diode 14 is connected in parallel to the valve coil 11.
The outputs of the dither generation circuit 15 and the current control circuit 16, which generate a voltage waveform of a substantially triangular wave or a substantially sine wave with a constant period and amplitude, are connected to be input to an adder circuit 17, and the output terminal of the adder circuit 17 is connected to a transistor. 12 base terminals.
上記構成のうち、ディザ発生回路１５の一回路例を第８
図に示す。この図は三角波の電圧波形を発生するディザ
回路で、オペアンプ１８の出力端子とオペアンプ１９の
マイナス端子との間に抵抗２０・２１を直列接続し、抵
抗２０・２１の接続７
オペアンプ１８のマイナス端子とオペアンプ１９のプラ
ス端子をそれぞれ接地し、抵抗２０と抵抗２１とのＫ
ｆｊＬ点２３にはツェナーダイオード２６・２７を接続
１〜他端を接地ｊ〜、オペアンプ１９のマイナス端子と
出力端子間に、コンデンサ２８を接続している。この回
路で接続点２３には方形波があられれ、オペアンプ１９
の出力端子に三角波を発生するが、接続点２３の飽和電
圧をｖｌ、抵抗２４・２５の抵抗値をそれぞれＲ２４・
Ｒ２５とすると、三角波のピーク電圧ｖｐは、
一−−陛’、Ｖｌ
■ｐ Ｒ２４
で抵抗２４によって三角波の振幅を制命ｊでき、１だ接
続点２３の電圧Ｖｌから抵抗２１を介して、コンデンサ
２８を直線的に充電するので、三角波の周期を抵抗２１
によって制御できる。Among the above configurations, one circuit example of the dither generation circuit 15 is shown in the eighth example.
As shown in the figure. This figure shows a dither circuit that generates a triangular voltage waveform.Resistors 20 and 21 are connected in series between the output terminal of an operational amplifier 18 and the negative terminal of an operational amplifier 19, and the connection 7 of the resistors 20 and 21 is the negative terminal of the operational amplifier 18. and the positive terminals of the operational amplifier 19 are grounded, and the K of the resistors 20 and 21 is grounded.
Zener diodes 26 and 27 are connected to the fjL point 23, and the other end is grounded, and a capacitor 28 is connected between the negative terminal and the output terminal of the operational amplifier 19. In this circuit, a square wave is applied to the connection point 23, and the operational amplifier 19
A triangular wave is generated at the output terminal of .
R25, the peak voltage vp of the triangular wave is 1--Majesty, Vl ■p R24 can control the amplitude of the triangular wave by the resistor 24, and the voltage Vl at the connection point 23 is connected to the capacitor via the resistor 21. 28 is charged linearly, so the period of the triangular wave is set by the resistor 21.
can be controlled by
−に記第７図、第８図に示した構成において、ディザ発
生回路１５で発生する’に圧波形は、従来例のように方
形波電圧で急激な７１℃圧の立トリ立下りによる弁振動
などの不都合を生じることの々いように、緩やかに立上
り立下る三角波の電圧波形で、かつ電磁比例弁にとって
ヒステリシスを小さくでき最適な一定周期一定振幅に設
定し、このディザ発生回路１５の信号と電流制御回路１
６の直流電圧信号が加算回路１７で加算され、トランジ
スタ１２のベース電流波形は第９図のように大きい平均
電流１．のときと、小さい平均電流ＩＬのときと周期・
振幅は変化せず一定となるよう作用する。- In the configuration shown in FIGS. 7 and 8, the pressure waveform generated by the dither generation circuit 15 is caused by the sudden rise and fall of the 71°C pressure with a square wave voltage, as in the conventional example. The signal of the dither generating circuit 15 is set to have a triangular voltage waveform that rises and falls slowly to avoid problems such as vibration, and is set to a constant period constant amplitude that is optimal for minimizing hysteresis for the electromagnetic proportional valve. and current control circuit 1
The DC voltage signals of 6 are added by the adding circuit 17, and the base current waveform of the transistor 12 is created by the large average current 1.6 as shown in FIG. , when the average current IL is small, and when the period ・
It acts so that the amplitude does not change and remains constant.
このとき、電磁比例弁のコイル１１の電流波形も第９図
のベース電流制御回路に大きい平均電流ＩＨのときと、
小さい平均電流ＩＬのときと周期・振幅は変化せず一定
となるよう作用し、緩やかに立上り立下る略五角波の電
流波形であるため、弁振動がなく、かつ暖れたディザ効
果でヒステリシスの小さい安定した流量特性を得られる
効果がある。At this time, the current waveform of the coil 11 of the electromagnetic proportional valve is also different from that when the base current control circuit in FIG. 9 has a large average current IH.
When the average current IL is small, the cycle and amplitude remain constant without changing, and the current waveform is approximately a pentagonal wave that rises and falls slowly, so there is no valve vibration, and the warm dither effect eliminates hysteresis. This has the effect of obtaining small and stable flow characteristics.
ディザ発生回路１５については第８図では三角波発生回
路を例に説明したが、方形波のように急激な立上り立下
り波形でなく、緩やかな立」ニリ立下り波形であればノ
コギリ波のような略三角波形や、台形の」：うな略三角
波形、あるいは正弦波捷たはそれがやや歪んだ略正弦波
形などの電圧波形を発生するディザ発生回路であれば、
いずれも前記の三角波発生回路と同様の効果が得られる
。The dither generation circuit 15 has been explained using a triangular wave generation circuit as an example in FIG. If it is a dither generation circuit that generates a voltage waveform such as an approximately triangular waveform, a trapezoidal waveform, a sine wave, or a slightly distorted approximately sine wave,
In either case, the same effects as the triangular wave generating circuit described above can be obtained.
発明の効果
以」二のように本発明の電磁比例弁制御装置によれば次
の効果が得られる。Effects of the Invention The electromagnetic proportional valve control device of the present invention provides the following effects.
（１）緩やかに立」ニリ立下る一定周期・振幅の電圧波
形を発生するディザ発生回路と電流制御回路との信号を
加算回路で加算し、弁コイルと直流電源と直列接続した
トランジスタ増幅器のベース端子に入力する構成として
いるので、弁コイルの電流は緩やかな立りり立下りでか
つ一定の周期・振幅の波形のディザ電流が流れるように
作用し、有効なディザ効果を発揮しながら、不都合な弁
振動を誘起しないため、小さく良好なヒステリシスでか
つ安定した流量特性となるよう電磁比例弁を作動させる
ことができる効果がある。(1) The base of the transistor amplifier is connected in series with the valve coil and the DC power supply by adding the signals from the dither generation circuit and the current control circuit, which generate a voltage waveform with a constant period and amplitude that gradually rises and falls, using an adder circuit. Since the configuration is such that the current is input to the terminal, the current in the valve coil acts as a dither current with a waveform of gradual rise and fall and a constant period and amplitude, and while exhibiting an effective dither effect, it also eliminates any undesirable effects. Since valve vibration is not induced, the electromagnetic proportional valve can be operated with small and good hysteresis and stable flow characteristics.
＠）ディザ発生回路によるディザ信号と、電流側（財）
回路による直流信号とを加算（−１弁コイルと直列接続
の１−ランンスタベース端子に入力する構成であるから
、ディザ波形および周期・振幅を任意１０べ一；
にかつ最適なものに設定ができ、各種の電磁比例弁に対
応できる。電磁比例弁の可動部・弁体などの形態や重量
などによジ、最もディザ効果を発揮できる波形および周
期・振幅はそれぞれ条件が異なる場合が多い。丑だ不都
合な弁振動を生じる条件についても同様であり、上記の
本発明の構成によれば、それらを最適な条件で作動させ
ることが可能となる。@) Dither signal by dither generation circuit and current side (goods)
Since the configuration is such that the DC signal from the circuit is added (input to the 1-run star base terminal connected in series with the 1-valve coil, the dither waveform, period, and amplitude can be set to any 10 bases and the optimum one). It is compatible with various electromagnetic proportional valves.Depending on the shape and weight of the electromagnetic proportional valve's movable parts and valve body, the waveform, period, and amplitude that produce the most dither effect often have different conditions. The same applies to conditions that cause undesirable valve vibrations, and according to the configuration of the present invention described above, it is possible to operate them under optimal conditions.
（３）低電流時から高電流時まで、常に一定の周期振幅
のディザ波形で作動する方式であるため、電磁比例弁の
作動位置および流量位置がどこにあっても、常に最適な
一定のディザ効果が得られ、常に安定した特性を得るこ
とができる。(3) The method operates with a dither waveform with a constant periodic amplitude from low current to high current, so no matter where the electromagnetic proportional valve's operating position and flow rate position are, the optimal constant dither effect is always achieved. is obtained, and stable characteristics can always be obtained.
第１図は従来の電磁比例弁制御装置の一例を示す基本回
路図、第２図ａ、ｂ、ｃは第１図に示す装置による弁コ
イルの電流波形線図、第３図は他の従来の電磁比例弁制
御装置の一例を示す基本回路図、第４図ａ、ｂ、ｃは第
３図に示す装置の方１１ 。
示す装置の方コイルの電圧・電流波形線図、第６図は第
３図に示す装置による電磁比例ＪＰ流亀特性図、第７図
は本発明の一実施例をボす電磁比例制伺１装置の基本回
路図、第８図は第７図のテ゛イザ発生回路の一例を示す
凹ＷＬ第９図は第７図に示す装置のトラノジスタペース
電流波形線図および弁コイ／ｌ／電流波形線図である。
１０ 直流′市源、１１・−ＩＰコイル、１２１−ラン
ジスタ増幅器、１５ ディザ発生回路、１６電流制御回
路、１７ 加算回路。
代坤人の氏名 弁理士 中 尾 故 男 ほか１名第１
図
第２図
（ａ−） （ｂ）
（Ｃ）
″）１区 −
塚 寸
綜
第７図
第 ９ 図Fig. 1 is a basic circuit diagram showing an example of a conventional electromagnetic proportional valve control device, Fig. 2 a, b, and c are current waveform diagrams of the valve coil according to the device shown in Fig. 1, and Fig. 3 is another conventional electromagnetic proportional valve control device. A basic circuit diagram showing an example of the electromagnetic proportional valve control device shown in FIG. The voltage and current waveform diagram of the coil of the device shown in FIG. The basic circuit diagram of the device, FIG. 8 is a concave WL showing an example of the laser generating circuit shown in FIG. It is a diagram. 10 DC source, 11-IP coil, 121 transistor amplifier, 15 dither generation circuit, 16 current control circuit, 17 addition circuit. Name of representative Patent attorney: Late Nakao and 1 other person 1st
Figure 2 (a-) (b) (C)'') Section 1 - Tsuka Tsuka Figure 7 Figure 9
Claims (1)
、一定の周期・増幅の略五角波あるいは略正弦波の電圧
波形を発生するディザ発生回路と、直流゛重圧ｌ／ベル
を可変する電流制御回路と、前記A dither generation circuit connects a valve coil and a transnullator amplifier in series to a DC power source, and generates a voltage waveform of a substantially pentagonal wave or a substantially sinusoidal wave with a constant period and amplification, and a current control circuit that varies the DC pressure l/bel. , said
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5142684A JPS60196412A (en) | 1984-03-16 | 1984-03-16 | Solenoid-operated proportional valve controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5142684A JPS60196412A (en) | 1984-03-16 | 1984-03-16 | Solenoid-operated proportional valve controller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60196412A true JPS60196412A (en) | 1985-10-04 |
| JPH0330031B2 JPH0330031B2 (en) | 1991-04-26 |
Family
ID=12886597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5142684A Granted JPS60196412A (en) | 1984-03-16 | 1984-03-16 | Solenoid-operated proportional valve controller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60196412A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0229632A2 (en) * | 1986-01-10 | 1987-07-22 | Mks Instruments, Inc. | Flowmeter-controlled valving |
| EP0294072A2 (en) * | 1987-06-01 | 1988-12-07 | Parker Hannifin Corporation | Control device for regulating flow of pressurized gas between two pressurized gas devices |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5371759A (en) * | 1976-12-08 | 1978-06-26 | Shinko Electric Co Ltd | Changing method of valve characteristic |
| JPS56172912U (en) * | 1980-05-23 | 1981-12-21 |
-
1984
- 1984-03-16 JP JP5142684A patent/JPS60196412A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5371759A (en) * | 1976-12-08 | 1978-06-26 | Shinko Electric Co Ltd | Changing method of valve characteristic |
| JPS56172912U (en) * | 1980-05-23 | 1981-12-21 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0229632A2 (en) * | 1986-01-10 | 1987-07-22 | Mks Instruments, Inc. | Flowmeter-controlled valving |
| EP0294072A2 (en) * | 1987-06-01 | 1988-12-07 | Parker Hannifin Corporation | Control device for regulating flow of pressurized gas between two pressurized gas devices |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0330031B2 (en) | 1991-04-26 |
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