JPS60193530A - Film forming device - Google Patents
Film forming deviceInfo
- Publication number
- JPS60193530A JPS60193530A JP4718284A JP4718284A JPS60193530A JP S60193530 A JPS60193530 A JP S60193530A JP 4718284 A JP4718284 A JP 4718284A JP 4718284 A JP4718284 A JP 4718284A JP S60193530 A JPS60193530 A JP S60193530A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- cylinder
- tank
- difference
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/18—Processes for applying liquids or other fluent materials performed by dipping
- B05D1/20—Processes for applying liquids or other fluent materials performed by dipping substances to be applied floating on a fluid
- B05D1/202—Langmuir Blodgett films (LB films)
- B05D1/206—LB troughs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
Description
【発明の詳細な説明】 （１）技術分野 本発明は成膜装置に関する。[Detailed description of the invention] (1) Technical field The present invention relates to a film forming apparatus.
（２）背景技術
従来、液面上に展開された単分子膜を、その支持体であ
る固体担体の表面上に移しとることにより、該担体上に
単分子膜又は単分子累積膜から成る薄膜を成膜する方法
（所謂、ラングミュア・ブロジェット法）が知られてい
るが、この方法に使用される成膜装置は、第１図ないし
第３図に示す垂直浸漬方式、水平付着方式および円筒回
転方式の３つに大別される。(2) Background Art Conventionally, by transferring a monomolecular film developed on a liquid surface onto the surface of a solid carrier that is its support, a thin film consisting of a monomolecular film or a monomolecular cumulative film is deposited on the support. A method for forming a film (the so-called Langmuir-Blodgett method) is known, but the film forming apparatus used for this method is a vertical immersion method, a horizontal deposition method, and a cylindrical method, as shown in Figures 1 to 3. It is roughly divided into three types of rotation methods.
筑１Ｍに偏量１．た浜直蛤邊有才の連間装置の其本構成
は、平板状等の所望の形状をした固体担体を、単分子膜
の展開されている液面上を横切るように上下させること
によって、固体担体上に単分子膜又は単分子累積膜を成
膜するものである。この垂直浸漬方式では、固体担体を
上下するための上下装置が比較的構造が簡単にすむとい
う長所がある代りに、単分子膜の固体担体上への累積率
が悪いという問題があった。Chiku 1M has an uneven amount of 1. The main structure of Tahama Naohamabe Yusai's rengan device is to raise and lower a solid support in a desired shape, such as a flat plate, across the surface of the liquid on which the monomolecular film is being developed. A monomolecular film or a monomolecular cumulative film is formed on a solid support. Although this vertical dipping method has the advantage that the structure of the up-and-down device for raising and lowering the solid carrier is relatively simple, it has the problem that the accumulation rate of the monomolecular film on the solid carrier is poor.
第２図に例示した水平付着方式の成膜装置の基本構成は
、平板状等の固体担体を単分子膜の展開されている液面
上に平行に接触させることにより、固体担体上に単分子
膜又は単分子累積膜を成膜するものである。この水平付
着方式では、累積率はほぼ１００％であるが、固体担体
の上下装置が複雑になるという問題があった。The basic configuration of the horizontal deposition type film forming apparatus illustrated in Fig. 2 is to bring a solid support such as a flat plate into parallel contact with the liquid surface on which a monomolecular film is being developed, thereby forming a single molecule on the solid support. A film or a monomolecular cumulative film is formed. In this horizontal deposition method, the accumulation rate is almost 100%, but there is a problem that the apparatus for raising and lowering the solid carrier becomes complicated.
円筒回転方式の基本構成は１円筒状等の固体担体を、単
分子膜の展開されている液面上で回転させることにより
、円筒形相体上に単分子膜又は単分子累積膜を成膜する
ものである。この回転円筒法では上記の２方式とは異り
、第３図（ａ）〜（ｃ）で示す如く円筒を境界として左
右に異なる単分子膜を展開すれば、１回の動作で単分子
膜を累積することができるという長所がある。しかしな
がら、円筒回転方式では以下のような問題があった。例
えば第３図（ａ）の如く、円筒中心Ｃがほぼ液面と同じ
高さにある時には、円筒への単分子膜の移しとりの様子
は垂直浸漬方式と同様であり、累積率が低下してしまう
。The basic structure of the cylindrical rotation method is to form a monomolecular film or a monomolecular cumulative film on a cylindrical phase body by rotating a cylindrical solid support above the liquid surface where the monomolecular film is being developed. It is something. This rotating cylinder method differs from the above two methods in that, as shown in Figures 3(a) to (c), different monomolecular films can be spread on the left and right sides with the cylinder as the boundary. It has the advantage of being able to accumulate. However, the cylindrical rotation method has the following problems. For example, as shown in Figure 3(a), when the cylinder center C is at almost the same height as the liquid level, the transfer of the monomolecular film to the cylinder is similar to the vertical immersion method, and the accumulation rate decreases. I end up.
また、第３図（ｂ）の如く、円筒中心Ｃが液面より高い
場合にも累積率は低下してしまう。これは、次のような
理由による。円筒２より左側にある黒丸で示した分子１
２が液面から円筒２に移し取られる際には、移し取られ
る部分における分子の動きを説明するために示した第３
図（ｆ）における如くに、黒丸分子はわずかに回転する
（θ＜９０’）だけであり、従って円筒２上に無理なく
付着することができ、この部分の累積率は大となる。し
かしながら、右側の白丸で示した分子１１は、第３図（
ｇ）に示す如くに相当回転（θン９０°）する。円筒中
心Ｃが液面より高ければ高いほど回転は大となる。この
急激な回転によって分子に無理がかかること、また液面
上の分子の疎・水幕（図中占で示した分子の直線部分）
と円筒２トの分子の疎水基同志が向き合う度合が大とな
り、円筒２上の分子が液面上の分子に引っ張られ剥離し
やすくなること等により累積率が小となり、全体として
は累積率が低下してしまう。Furthermore, as shown in FIG. 3(b), the accumulation rate also decreases when the cylinder center C is higher than the liquid level. This is due to the following reasons. Molecule 1 shown by a black circle on the left side of cylinder 2
When 2 is transferred from the liquid surface to the cylinder 2, the third point shown to explain the movement of molecules in the part where it is transferred is
As shown in Figure (f), the black circle molecules rotate only slightly (θ<90'), and therefore can be easily attached to the cylinder 2, and the accumulation rate in this portion is large. However, the molecule 11 shown in the white circle on the right side is
As shown in g), it rotates considerably (θ-90°). The higher the cylinder center C is above the liquid level, the greater the rotation. This sudden rotation puts stress on the molecules, and the sparse/water curtain of the molecules on the liquid surface (the straight line part of the molecules shown in the diagram)
The degree to which the hydrophobic groups of the molecules on the cylinder 2 face each other increases, and the molecules on the cylinder 2 are pulled by the molecules on the liquid surface and easily peel off, resulting in a small accumulation rate, and the overall accumulation rate is It will drop.
また、第３図（Ｃ）の如く、円筒中心Ｃが液面より低い
場合には、第３図（ｂ）と逆で、円筒２より右側にある
白丸で示した分子は累積率が高く（第３図（ｈ）参照）
、左側にある黒丸で示した分子は累積率が低下してしま
う（第３図（ｉ）参照）。Furthermore, as shown in Figure 3(C), when the cylinder center C is lower than the liquid level, contrary to Figure 3(b), molecules indicated by white circles on the right side of the cylinder 2 have a high accumulation rate ( (See Figure 3 (h))
, the accumulation rate of the molecules indicated by the black circles on the left side decreases (see FIG. 3(i)).
上述した如く円筒回転方法では、円筒２を境界として区
分されている単分子膜を同時に移し取ろうとする場合に
は、累積率の点で問題があった。As described above, in the cylinder rotation method, there is a problem in terms of the accumulation rate when trying to simultaneously transfer the monomolecular films divided by the cylinder 2 as a boundary.
（３）発明の開示
本発明は上記の事実に鑑み成されたものであって、本発
明の目的は、上記問題点を解消した新規な成膜装置を提
供することにある。(3) Disclosure of the Invention The present invention has been made in view of the above facts, and an object of the present invention is to provide a novel film forming apparatus that solves the above problems.
本発明の目的は、以下の本発明によって達成される。The objects of the present invention are achieved by the following invention.
成膜用分子群を展開する為の液槽を備え、前記液槽中に
収容する液体に液面差が生じるように前記液槽を構成し
たことを特徴とする成膜装置。A film forming apparatus comprising a liquid tank for developing a group of molecules for film forming, and the liquid tank is configured so that a difference in liquid level occurs in the liquid contained in the liquid tank.
（４）発明を実施するための最良の形態以下、第４図〜
第６図に示す実施例装置をもとにして、本発明について
詳細に説明する。尚、以下の例では説明を簡略化するた
め、担体を円筒とした場合について主として説明する。(4) Best mode for carrying out the invention Below, Figure 4~
The present invention will be explained in detail based on the embodiment shown in FIG. In the following example, in order to simplify the explanation, the case where the carrier is a cylinder will be mainly explained.
第４図〜第６図は１本発明に係る成膜装置の実施例であ
り、その略示的縦断面図を示している。FIGS. 4 to 6 show an embodiment of a film forming apparatus according to the present invention, and show schematic longitudinal cross-sectional views thereof.
第４図〜第６図において、３．４はその表面に単分子膜
を形成させる液体、例えば水、エタノール等であり、ｌ
は液体３．４を溜めるための液槽である。２は円筒形相
体であり、着脱可能な固定機構（不図示）により液槽１
に保持され、モーター等の駆動手段（不図示）により正
逆回転可能にされている。５は液槽ｌ内の液体３．４を
円筒２を境界として区分するためのしきり板、例えばゴ
ムブレード、テフロンブレード等である。６は浸透圧の
高い液体、７は浸透圧の低い液体、８はしきり板５と同
様に液槽ｌ内の液体６．７を円筒２を境界として区分す
るための半透膜である。９は３゜４と同様に単分子膜を
展開する液体、１０は９より比重が小さくかつ分子を溶
解しない液体である。In Figures 4 to 6, 3.4 is a liquid that forms a monomolecular film on its surface, such as water, ethanol, etc.
is a liquid tank for storing liquid 3.4. 2 is a cylindrical companion body, which is connected to the liquid tank 1 by a detachable fixing mechanism (not shown).
It is held in place and can be rotated in forward and reverse directions by a driving means (not shown) such as a motor. Reference numeral 5 denotes a partition plate, such as a rubber blade or a Teflon blade, for dividing the liquid 3.4 in the liquid tank 1 using the cylinder 2 as a boundary. 6 is a liquid with high osmotic pressure, 7 is a liquid with low osmotic pressure, and 8 is a semipermeable membrane for dividing the liquid 6.7 in the liquid tank 1 using the cylinder 2 as a boundary, similar to the partition plate 5. 9 is a liquid that develops a monomolecular film like 3°4, and 10 is a liquid that has a lower specific gravity than 9 and does not dissolve molecules.
以下、第４図〜第６図に示した実施例について順を追っ
て説明する。Hereinafter, the embodiments shown in FIGS. 4 to 6 will be explained in order.
第４図の装置は、単分子膜の展開される液面に高低差を
つけるための手段として、しきり板を利用した例である
。第４図の装置においては、円筒２を図のようにセット
した後、円筒２およびしきり板５によって区分される液
槽ｌ内のそれぞれの部分Ａ、Ｈに、液面の高低差が生じ
るように不図示の注入口から液体３および４を注入する
。図では液槽ｌ内の部分Ｂに入れられている液体３の液
面を、Ａに入れられている液体４の液面よりも低くしで
ある。液体３．４を注入した後、単分子膜を液体３．４
のそれぞれの液面上に展開して、円筒２を図の矢印方向
（反時計方向）に回転させれば、円筒２上に累積率の向
上したしかも所望の累積度の単分子膜から成る単分子累
積膜を得ることができる。The apparatus shown in FIG. 4 is an example in which a partition plate is used as a means for creating a height difference in the liquid surface on which a monomolecular film is spread. In the apparatus shown in FIG. 4, after the cylinder 2 is set as shown in the figure, a height difference in the liquid level is created in each part A and H in the liquid tank l divided by the cylinder 2 and the partition plate 5. Liquids 3 and 4 are injected from injection ports (not shown). In the figure, the liquid level of liquid 3 contained in part B in liquid tank l is lower than the liquid level of liquid 4 contained in part A. After injecting liquid 3.4, the monolayer was injected into liquid 3.4.
By rotating the cylinder 2 in the direction of the arrow in the figure (counterclockwise), a monolayer consisting of a monomolecular film with an improved accumulation rate and a desired degree of accumulation is deposited on the cylinder 2. A molecular cumulative film can be obtained.
すなわち、従来例では液面差がないために、第３図に示
した如く、液面から単分子膜を移し取る際の分子の回転
が円筒２の回転方向の一方の側では大きくなるために、
累積率が低下していたが。That is, in the conventional example, since there is no difference in liquid level, the rotation of the molecules when transferring the monomolecular film from the liquid level becomes larger on one side in the direction of rotation of the cylinder 2, as shown in FIG. ,
Although the cumulative rate was decreasing.
上記構成によればＡ、Ｂ両方の部分で分子の回転を小さ
くすることができるので累積率の向上をはかることがで
きる。従って、液槽ｌ内の部分Ｂに入れる液体４の液面
を、Ａに入れる液体３の液面よりも低くするのであれば
、円筒２の回転方向を図の如く反時計方向とし、一方、
液体４の液面を液体３の液面より高くするのであれば、
円筒２の回転方向を時計方向とするのが好ましい。According to the above configuration, since the rotation of molecules can be reduced in both parts A and B, it is possible to improve the accumulation rate. Therefore, if the level of liquid 4 to be placed in part B in liquid tank l is to be lower than the level of liquid 3 to be placed in part A, the direction of rotation of cylinder 2 should be counterclockwise as shown in the figure, and on the other hand,
If you want to make the liquid level of liquid 4 higher than the liquid level of liquid 3,
Preferably, the direction of rotation of the cylinder 2 is clockwise.
液槽ｌ内の部分Ａ、Ｈに液面の高低差が生じるように入
れられる液体３，４の量としては、例えば液面の高い方
の液体、図ではＡの側の液体３があまり多すぎると液体
３及びその上に展開されての液体、図では液体４及びそ
の上に展開されている分子１２に混入してしまうし、ま
た液体４があまり少なすぎると、円筒２と液体の接触面
積が少なくなって累積率が下がるし、液体４をさらに少
なくすると液体４と円筒２が接触しなくなるので、円筒
の半径をｒとすると液体３，４の液面の高さり、ｈ’は
、円筒中心ｃｆｔ基準としテ（１／３） ｒと（２１３
）ｒの間とするのが好ましい。もちろん１
ｈとｈｏは同□じ値とすることもできるし、異る値とす
ることも可能である。As for the amount of liquids 3 and 4 that are put into parts A and H in the liquid tank l so that there is a difference in the height of the liquid level, for example, the liquid with the higher liquid level, the liquid 3 on the A side in the figure, is too large. If it is too small, it will mix with the liquid 3 and the liquid spread on it (in the figure, the liquid 4 and the molecules 12 spread on it), and if there is too little liquid 4, the cylinder 2 and the liquid will not come into contact with each other. The area decreases and the accumulation rate decreases, and if the amount of liquid 4 is further reduced, liquid 4 and cylinder 2 will not come into contact with each other, so if the radius of the cylinder is r, the height of the liquid level of liquids 3 and 4, h', will be: Using the cylinder center cft as a reference, Te (1/3) r and (213
) r. Of course, 1h and ho can be the same value or can be different values.
液槽ｌ内の部分Ａ、Ｈに入れる液体３，４としては、所
望に応じて上記のような水、エタノール等を使用するこ
とが可能であるが、液体３，４を同じものとすることも
できるし、また異る液体を使用してもよい、液体３，４
に展開する成膜用分子群１１．１２としては、液体３．
４上に単分子膜を形成し得る分子、例えばその分子内に
親木基および疎水機を有するような分子であれば使用す
ることができるが、液体３，４に展開する分子は同じも
のとしてもよいし、異る種類の分子とすることもできる
。もちろん、２種以上の分子を液体３゜４上に展開して
混合単分子累積膜を成膜する等のことも可能である。As the liquids 3 and 4 to be put in parts A and H in the liquid tank 1, water, ethanol, etc. as mentioned above can be used as desired, but liquids 3 and 4 should be the same. You can also use different liquids.Liquids 3 and 4
The film-forming molecule group 11.12 developed in liquid 3.
Any molecule that can form a monomolecular film on 4 can be used, for example, a molecule that has a parent tree group and a hydrophobic group within the molecule, but the molecules that develop in liquids 3 and 4 are the same. It can also be a different type of molecule. Of course, it is also possible to form a mixed monomolecular cumulative film by developing two or more types of molecules on a liquid 3.4.
なお、仕切り板５は、液体３と液体４が、液槽ｌ内の部
分ＡとＢとの間を移動しないようにする為のものである
ので、ゴムブレードあるいはテフロンブレードなどの気
密性の高いものを用いるのが好ましい。The partition plate 5 is to prevent the liquid 3 and liquid 4 from moving between parts A and B in the liquid tank l, so it is made of a highly airtight material such as a rubber blade or a Teflon blade. It is preferable to use
第５図の装置は、単分子膜の展開される液面に高低差を
つけるための手段として浸透圧の差を利用した例である
。このため、本例においては第４図におけるしきり板５
に相当する部分を半透膜８とし、該半透膜８と円筒２と
で液槽１内をＡ、Ｂ２つの部分に区分し、ＡおよびＢの
どちらか一方に入れる液体を浸透圧の低い液体（図では
Ｂに入れられている液体７を浸透圧の低い液体としであ
る）とし、もラ一方に入れる液体を浸透圧の高い液体（
図ではＡに入れられている液体６）とする＋−１−−ｙ
ｋ斎−一−１ｒｈ／Ｆ％Ｗ〆一、Ｈ（２７Ｌ−ａｋ’ｉ
？ｆ＋１＝ｔ−）＋ｒ、＊せ、第５図におけると同様の
成膜を可能としたものである。The apparatus shown in FIG. 5 is an example in which a difference in osmotic pressure is used as a means for creating a height difference in the liquid surface on which a monomolecular film is spread. Therefore, in this example, the partition plate 5 in FIG.
The part corresponding to 2 is a semipermeable membrane 8, and the semipermeable membrane 8 and cylinder 2 divide the inside of the liquid tank 1 into two parts A and B, and the liquid to be put into either A or B is a liquid with a low osmotic pressure. A liquid (in the figure, the liquid 7 in B is a liquid with low osmotic pressure), and the liquid in one side is a liquid with high osmotic pressure (
In the figure, the liquid contained in A is 6) +-1--y
ksai-1-1rh/F%W〆1, H(27L-ak'i
? f+1=t-)+r, *S), which makes it possible to form a film similar to that shown in FIG.
一般に浸透圧差によって生じる液面の高低差は、浸透圧
の高い液体、本例の場合液体。６の体積に反比例するの
で、浸透圧の高い液体を入れる方の液槽ｌ、円筒２及び
半透ｌＩ！８によって囲まれる部分、本例の場合はＡの
体積を浸透圧の低い液体を入れる方の体積、本例の場合
はＢより小さくするのが好ましい、浸透圧の高い液体と
しては、水などの溶媒に、その溶媒に可溶の溶質、例え
ば砂糖や金属塩などを溶かした溶液等が利用し得るもの
として挙げられ、浸透圧の低い液体７としては、上記の
水などの溶媒が利用し得るものとして挙げられるが、液
体６の溶媒と液体７の溶媒は同一とするのが好ましい。Generally, the height difference in liquid level caused by a difference in osmotic pressure is caused by a liquid with a high osmotic pressure, in this case a liquid. Since it is inversely proportional to the volume of 6, the liquid tank l, cylinder 2 and semipermeable lI which contain the liquid with high osmotic pressure! It is preferable that the volume of the part surrounded by 8, A in this example, be smaller than the volume of the liquid containing the low osmotic pressure, B in this example.As the liquid with high osmotic pressure, water etc. A solution in which a solute soluble in the solvent, such as sugar or a metal salt, is dissolved in the solvent can be used, and as the liquid 7 with low osmotic pressure, the above-mentioned solvents such as water can be used. However, it is preferable that the solvent of liquid 6 and the solvent of liquid 7 are the same.
また、本例の場合にも第４図におけると同様に、液体６
及び液体７の液面の高さｈ及びｈｏは、円筒２の半径ｒ
に対し、円筒中心Ｃを基準として、（１／３） ｒと（
２／３） ｒの間とするのが好ましい、また、浸透圧は
溶液の濃度に比例するので、液面の高低差の調節は、溶
液６の濃度を変化させる事により行なうのが簡便である
。 さらに、半透膜８は、溶媒のみを透過し、溶液中の
溶質を透過しないものを、溶媒にあわせて適宜選択する
ことができるが、例えばコロジオン膜等、一般に広く知
られているものを適宜使用することが可能である。また
半透膜８は、第４図における仕切り板５と同様に液体６
と液体７との混入を防止する目的もあるので、第５図に
おけると同様に半透膜８と円筒２の間にすき間ができな
いようにしである。Also in this example, as in FIG. 4, the liquid 6
and the height h and ho of the liquid level of the liquid 7 are the radius r of the cylinder 2.
On the other hand, with the cylinder center C as a reference, (1/3) r and (
2/3) It is preferable to set it between r. Also, since the osmotic pressure is proportional to the concentration of the solution, it is convenient to adjust the difference in height of the liquid level by changing the concentration of the solution 6. . Further, the semipermeable membrane 8 can be appropriately selected depending on the solvent, such that it only allows the solvent to pass through and does not allow the solute in the solution to pass through. It is possible to use. Further, the semipermeable membrane 8 is used for liquid 6, similar to the partition plate 5 in FIG.
Since the purpose is also to prevent mixing of the liquid 7 with the semipermeable membrane 8 and the liquid 7, a gap is not formed between the semipermeable membrane 8 and the cylinder 2, as in FIG.
第６図の装置は、単分子膜の展開される液面に高低差を
つけるための手段として、液体の比重差を利用した例で
ある。第６図の装置においては、第４図におけるしきり
板５をなくし、単分子膜の展開される液面（図では液体
９の液面）を区分し、該液面に分子を展開した後、円筒
２で区分される液面のどちらか一方の側（図に向って左
側）に単分子膜の展開されている液体９よりも比重の軽
い液体（図では液体１０）を入れることで、液槽１内の
単分子膜が展開される液体９に液面差を生じさせ、第４
図におけると同様の成膜を可能にしたものである。The apparatus shown in FIG. 6 is an example in which a difference in specific gravity of a liquid is used as a means for creating a height difference in the liquid surface on which a monomolecular film is spread. In the apparatus shown in FIG. 6, the partition plate 5 in FIG. 4 is eliminated, the liquid surface on which the monomolecular film is spread (the liquid surface of liquid 9 in the figure) is divided, and after the molecules are spread on the liquid surface, By placing a liquid (liquid 10 in the figure) with a lighter specific gravity than the liquid 9 on which the monomolecular film is spread on either side of the liquid surface divided by the cylinder 2 (on the left side when facing the figure), the liquid A liquid level difference is created in the liquid 9 in which the monomolecular film in the tank 1 is developed, and the fourth
This makes it possible to form a film similar to that shown in the figure.
すなわち液体９は、分子１１．１２をその表面に展開す
るための液体であり、液体１０は液体９に液面差を生じ
させるための液体である。従って、液体ｌＯとしては液
体９よりも比重が軽くかつ液体ｌＯと９との界面に展開
されている分子１２を溶かすことなく、しかも液体９と
混じりあわず液体９との境界に単分子膜を形成し得る液
体を用いる必要がある。単分子膜を展開する液体９とし
ては前述の水等が利用し得るが、液体９に液面差を生じ
させる液体１０としては石油エーテル等が利用し得るも
のとして挙げられる。That is, the liquid 9 is a liquid for spreading the molecules 11 and 12 on its surface, and the liquid 10 is a liquid for causing a liquid level difference in the liquid 9. Therefore, the liquid IO has a lighter specific gravity than the liquid 9, does not dissolve the molecules 12 spread out at the interface between the liquid IO and 9, and does not mix with the liquid 9, forming a monomolecular film at the boundary with the liquid 9. It is necessary to use a liquid that can be formed. As the liquid 9 that develops the monomolecular film, the water described above can be used, but as the liquid 10 that causes a difference in the liquid level in the liquid 9, petroleum ether or the like can be used.
尚、前記実施例以外にも、例えば円筒２で区分される液
槽ｌのそれぞれの部分を気密構造として、圧力差を利用
する事により液面に高低差をつける等の事も可能である
。また、上記実施例では円筒２を１つとしであるが、液
槽ｌ内に複数の円筒を並列に設置する等の事も可能であ
る。In addition to the above-mentioned embodiment, it is also possible to make the liquid tank 1 divided by the cylinder 2 into an airtight structure so as to create a height difference in the liquid level by utilizing a pressure difference. Further, in the above embodiment, only one cylinder 2 is used, but it is also possible to install a plurality of cylinders in parallel within the liquid tank l.
以上、相体を円筒形相体とした場合を例とじて本発明を
説明したが、本発明の装置は上記例に限定されるもので
ないことは言うまでもない、また、担体としても、上記
円筒の他、角柱状、球状等の担体、あるいはこれら担体
上に着脱可能に取り付けたシート状の担体等にも同様の
ことが言える。更にはシート状等の担体を、例えばベル
トコンベアにおけるように２つの円筒間にわたして成膜
する等の場合についても同様のことが言える。The present invention has been explained above using the case where the partner body is cylindrical, but it goes without saying that the device of the present invention is not limited to the above example. The same can be said of prismatic, spherical, etc. carriers, or sheet-like carriers removably attached to these carriers. Furthermore, the same can be said of the case where a film is formed by passing a sheet-like carrier between two cylinders, such as on a belt conveyor.
また、連続シート状等の担体をロール状に巻き取り、こ
れを２本の円筒間にわたして連続的に成膜する等の場合
にも同様のことが言える。The same thing can also be said when a carrier such as a continuous sheet is wound up into a roll and passed between two cylinders to form a film continuously.
以上に説明した如く、本発明の成膜装置によれば、単分
子膜の展開される液面に高低差を設けることが可能であ
り、従って液面から単分子膜を移し取る際の分子の回転
を小さくすることができるので、累積率の向上が可能と
なった。As explained above, according to the film forming apparatus of the present invention, it is possible to provide a height difference in the liquid surface on which a monomolecular film is developed, and therefore, when transferring a monomolecular film from the liquid surface, it is possible to create a height difference. Since the rotation can be reduced, the accumulation rate can be improved.
第１図〜第３図は、それぞれ順に垂直浸漬方式、水平付
着方式および円筒回転方式の成膜装置における成膜状態
を説明する図、第４図〜第６図は本発明に係る成膜装置
の実施例の略示的縦断面図である。
１−−一液槽
２−ｍ−円筒
３ 、４ 、６ 、７ 、９ 、１０−−一 液体５．
１４−−−Ｌきり板
８−ｍ−半透膜
１１、１２−ｍ−分子
１３−ｍ−平板状担体
第３図（９）
第３図（Ｃ）
第３図（ｈ） 第３図（ｉ）
第４図
第５図
第６図FIGS. 1 to 3 are diagrams illustrating the film forming state in a vertical immersion type, horizontal deposition type, and cylindrical rotation type film forming apparatus, respectively, and FIGS. 4 to 6 are views showing a film forming apparatus according to the present invention. 1 is a schematic longitudinal sectional view of an embodiment of FIG. 1--Liquid tank 2-m-Cylinder 3, 4, 6, 7, 9, 10--Liquid 5.
14--L-cut plate 8-m-semipermeable membrane 11, 12-m-molecules 13-m-plate-shaped carrier Fig. 3 (9) Fig. 3 (C) Fig. 3 (h) Fig. 3 ( i) Figure 4 Figure 5 Figure 6
Claims (1)
収容する液体に液面差が生じるように前記液槽を構成し
たことを特徴とする成膜装置。A film forming apparatus comprising a liquid tank for developing a group of molecules for film forming, and the liquid tank is configured so that a difference in liquid level occurs in the liquid contained in the liquid tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4718284A JPS60193530A (en) | 1984-03-14 | 1984-03-14 | Film forming device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4718284A JPS60193530A (en) | 1984-03-14 | 1984-03-14 | Film forming device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60193530A true JPS60193530A (en) | 1985-10-02 |
Family
ID=12767940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4718284A Pending JPS60193530A (en) | 1984-03-14 | 1984-03-14 | Film forming device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60193530A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04124910U (en) * | 1991-04-23 | 1992-11-13 | 凸版印刷株式会社 | assembly container |
| US5512326A (en) * | 1991-06-12 | 1996-04-30 | Canon Kabushiki Kaisha | Method and apparatus for forming monomolecular film or built-up monomolecular film |
| JP4759616B2 (en) * | 2005-07-01 | 2011-08-31 | ピーピージー インダストリーズ オハイオ， インコーポレイテッド | Transparent electrodes for electrochromic switchable cells |
-
1984
- 1984-03-14 JP JP4718284A patent/JPS60193530A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04124910U (en) * | 1991-04-23 | 1992-11-13 | 凸版印刷株式会社 | assembly container |
| US5512326A (en) * | 1991-06-12 | 1996-04-30 | Canon Kabushiki Kaisha | Method and apparatus for forming monomolecular film or built-up monomolecular film |
| JP4759616B2 (en) * | 2005-07-01 | 2011-08-31 | ピーピージー インダストリーズ オハイオ， インコーポレイテッド | Transparent electrodes for electrochromic switchable cells |
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