JPS60191762A - Method and device of vibration type surface polishing - Google Patents

Abstract

PURPOSE:To machine a workpiece with small power in a short time and polish even a blind hole smoothly and uniformly by holding the workpiece in a work clamp installed to a vibration motor, and charging it in a medium contained in a polishing vessel, to polish inner and outer surfaces. CONSTITUTION:By driving an inclining mechanism and an elevating mechanism 25 while driving a vibrating motor 1, a workpiece 31 is charged in a medium which is contained together with water and compound in a polishing vessel 11. This workpiece 31 is maintained in parallel with the axial direction of an eccentric shaft, and between the fixed claw 6a and the movable claw 6b of a work clamp mechanism 2, which is suspended through an elastic body 4 from a frame body 3, being in an integrated form with the vibrating motor 1 which vibrates by the action of the eccentric shaft. Therefore, the workpiece 31 charged in the medium is directly subjected to vibration, the vibrating wave form of the vibrating track is nearly circular in shape, and the medium completely polishes the outer surface of the workpiece 31, while the inner surface is also polished efficiently with microscopic particles, since not only vertical vibration is made in a hole, but also rotary motion is carried out along the wall of the hole.

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明は研摩槽内に収容されたメディア中に被加工品を
装入して振動により被加工品を研摩する振動式表面研摩
方法およびその装置に関するものである。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a vibratory surface polishing method in which a workpiece is charged into a media housed in a polishing tank and the workpiece is polished by vibration. It is related to the device.

（従来技術） 孔が開いた物品の製造工程においては孔の内面を研１’
ｉ’：する要求があり、その加工方法は種々知られてい
るが、いずれも一長一短があって複数稙の＜ｌ１ｔＫ法
を併用したり手作業による最終仕上を行ねなりればなら
ない。すなわち、研摩砥石を往復運動させ゛ζ研Ｐｒす
るホーニングマシンによる方法では加工孔の大きさ深さ
に制限があるうえ迷路孔の加工を行えず、また、量産性
に欠けるうえに研摩中に生ずる二次ハリの発生という問
題もある。−力、圧縮空気を利用したエアーブラスト方
法では研摩後の表面の平滑度が低いうえ盲孔を研摩する
場合には満足な結果が得られず、また、迷路孔では孔中
をエアーが通過するに際して圧力が減少して研摩状態が
部分的に異なって均一性が保たれない。しかも、高いエ
アー圧力を要するため大きな動力を要し、さらに、砥粒
が加工面に埋込まれることもあって仕上げ粗さも粗く、
また、二次ハリが発生ずるなど精密仕上げができない。(Prior art) In the manufacturing process of articles with holes, the inner surface of the holes is ground 1'.
There is a demand for i', and various processing methods are known, but all of them have advantages and disadvantages, and the <l1tK method for multiple strands must be used in combination or the final finishing must be done manually. In other words, the method using a honing machine that performs ζ-polishing by reciprocating the abrasive wheel has limitations on the size and depth of the hole to be machined, and it is not possible to machine labyrinth holes.In addition, it lacks mass productivity, and problems occur during polishing. There is also the problem of secondary firmness. - Air blasting methods that use force and compressed air have low surface smoothness after polishing, and do not give satisfactory results when polishing blind holes, and in labyrinth holes, air passes through the holes. During polishing, the pressure decreases and the polishing condition varies locally, making it impossible to maintain uniformity. In addition, high air pressure is required, which requires a large amount of power, and the abrasive grains may become embedded in the machined surface, resulting in a rough finish.
In addition, precision finishing cannot be achieved due to the occurrence of secondary hari.

次に、熱衝撃加工法では被加工品の材質の溶融温度、熱
伝導性、耐食性、比熱などの物理的性質により加工性が
変わり、適用する材質が限られるうえに表面の変質変形
が生しる外、精密仕−にげができない、量産性がない、
作業条件設定がテ１（シい、操作性が容易でない、爆発
の危険性がある、平？ｔ７仕上げができないなど多くの
問題点がある。次に、公知の回転バレル研摩法、振動バ
レル研摩法、遠心バレル研摩法によっては孔内向の研ｌ
♀：、ハリ取り加圧は殆ど不可能である。他方、粘弾性
砥粒流動加工法では大形形状の被加工品の単純な孔内面
の研摩はできるけれども、研摩後に砥粒を除去洗浄する
工程が複雑であること、角部と平坦面との研摩度合の差
が大きいこと、複雑な形状の孔の研摩の場合には孔の形
態に合ったクリアランスと強度を有する冶具を必要とす
ること、量産性が低いなどの問題点があり、ジャイロ研
摩法、スピンフィニツシユ研摩法も孔内面の研摩には不
適である。さらに、オーボレゾナント加工機を用いる方
法では被加工品を取りイ」ける梁を極めて頑丈なものに
しなければならないこと、被加工品重量に合わゼで常に
振動数調整が必要なこと、研摩剤の性状などにより振動
条件を調節しなければならないこと、加工条件を変える
ことができないなどの問題点がある。Next, in the thermal shock processing method, the workability changes depending on the physical properties of the material of the workpiece, such as melting temperature, thermal conductivity, corrosion resistance, and specific heat, which limits the materials that can be used and also causes surface alteration and deformation. In addition, precision finishing is not possible and mass production is not possible.
There are many problems such as poor work condition setting, poor operability, danger of explosion, and inability to achieve a flat T7 finish.Next, there are known rotary barrel polishing methods and vibrating barrel polishing methods. Depending on the centrifugal barrel polishing method, in-hole polishing may be possible.
♀: It is almost impossible to apply pressure to remove firmness. On the other hand, with the viscoelastic abrasive flow processing method, although it is possible to simply polish the inner surface of a hole in a large-sized workpiece, the process of removing and cleaning the abrasive grains after polishing is complicated, and there are problems with the separation between corners and flat surfaces. Gyro polishing has problems such as large differences in polishing degree, polishing of holes with complex shapes requires a jig with clearance and strength suitable for the shape of the hole, and low mass productivity. The spin finish polishing method is also unsuitable for polishing the inner surface of the hole. Furthermore, in the method using an ovo-resonant processing machine, the beam used to pick up the workpiece must be extremely strong, the frequency must be constantly adjusted to match the weight of the workpiece, and the use of abrasives is necessary. There are problems such as the need to adjust the vibration conditions depending on the properties, etc., and the inability to change the processing conditions.

（発明の目的） 本発明はこのような現状に鑑みて開発された振動式表面
研摩方法およびその装置を目的として完成されたもので
ある。(Object of the Invention) The present invention has been completed with the object of providing a vibratory surface polishing method and an apparatus therefor developed in view of the current situation.

（発明の措成） 本発明は、被加工品を振動モータに取イ」番ノられたワ
ーククランプ機構に保持させ°ζζ該別加工品前記振動
モータの駆動により直接振動さセっつ研摩相に収容され
たメディア中に装入して被加工品の内外人血を研摩する
ことを特徴とする振動式表面研）ＩＩｒ、方法を第１の
発明とし、ワーククランプ機構を一体に取付けた振動モ
ータを枠体に弾性体を介して懸架し゛ζｒＩＪｒ摩糟の
上方に該ワーククランプ機構に保持さ・ｌた被加工品を
該研摩槽のメディア中に装脱できるように対向させて配
置したことを特徴とする振動式表面研摩装置を第２の発
明とするものであって、以下、本発明を図示の振動式表
面研摩装置を実施例として詳細に説明する。(Construction of the Invention) The present invention provides a polishing phase in which a workpiece is held by a vibration motor in a workpiece clamping mechanism, and the workpiece is directly vibrated by the drive of the vibration motor. A vibratory surface polishing method characterized by polishing the internal and external human blood of a workpiece by inserting it into a media housed in a workpiece) IIr, the method of which is the first invention, and a vibratory surface polishing method with a workpiece clamping mechanism integrally attached. The motor is suspended on a frame via an elastic body, and the workpiece held by the workpiece clamp mechanism is placed above the polishing slurry so that it can be placed in and removed from the media of the polishing tank, facing each other. A second aspect of the present invention is a vibratory surface polishing apparatus characterized by the following: Hereinafter, the present invention will be described in detail using the illustrated vibratory surface polishing apparatus as an embodiment.

第１図乃至第４図は本発明の第１の実施例を示すもので
、＋１１は内部に偏心軸を備えた振動モータであっ”Ｃ
，電気または油圧或いは空気圧を駆動源としており、そ
のケーシングには偏心軸の輔心方向と並行する方向すな
わち横方向に被加工品を保持するワーククランプ機構（
２）が一体に取付けられ、該ワーククランプ機（１ζ（
２）は振動モータｆｌ）とともに枠体（３）内にゴムや
スプリング等の弾性体（４）を介して懸架されている。Figures 1 to 4 show a first embodiment of the present invention, and +11 is a vibration motor equipped with an eccentric shaft inside.
The drive source is electricity, hydraulic pressure, or pneumatics, and the casing is equipped with a work clamp mechanism (which holds the workpiece in the direction parallel to the center of the eccentric shaft, that is, in the lateral direction).
2) is installed integrally, and the work clamp machine (1ζ(
2) is suspended together with a vibration motor fl) in a frame body (3) via an elastic body (4) such as rubber or a spring.

なお、図示のワーククランプ機構（２）は前記ケーシン
グに一体に締イ」け固定されて、図示しない油圧ユニッ
トにより駆動される小型耐震構造の油圧クランプシリン
ダ（５）と、該油圧クランプシリンダ（５）のヘース部
から一体に垂設された固定爪（６ａ）と、該油圧クラン
プシリンダ（５）によって固定爪（６ａ）に対し開閉動
される可動爪（６ｂ）とよりなるものとしてあり、該固
定爪（６ａ）と可動爪（６ｂ）の被加工品把持部には滑
り止めの損傷防止の目的でポリウレタンゴム等の弾性体
（７）、（７）が取換自在に添着されている。そして、
前記振動モ−夕（１１とこれに一体に取イ」けられたワ
ーククランプ＋ｉｎ　＋ｆ’！　（２１を弾性体（４）
を介して！ｎ架しである枠体（３）はヘース（８）上に
設置された研摩槽（１１）の上方に対向配置されていて
該ヘース（８）上に固定されたキャビネット（９）内の
駆動機構により駆動される旋回軸等の傾度梶横（１０）
によって前記ワーククランプ機構（２）の固定爪（６ａ
）および可動爪（６ｂ）が下向きとなるｌｊ直状態から
横向きとなる水平状態となるまで略９０度傾動できるよ
うに該キャビネ７１（９１に支持され、ワーククランプ
機構（２）に保持された破船ニ［品を該研１％４？’１
（１１）内のメディア中に装）挽できる。Ｊ、うにする
とともに加工ライン中の前後工程との自動搬送化が容易
に行われるようになっている。（１２）Ｌ；１ｒｉＩＦ
　Ｉ’ｉＪ、槽（Ｉ　］　）　トヘＸ　（８１間ニ介ｇ
　サレル：Ｊ　イルＩｔＪｆね等の弾性体であって、研
摩槽（１１）の下面に設りた振動モータ（１３）によっ
゛ζ研摩槽（１１）が振動されるものとし、また、＋ｉ
ｌ）７槽（１１）と研摩槽保持枠（１４）間には防振ゴ
ム（１５）を介装するとともにヘース（８）と地面との
間にもこの振動を吸収するための防振バッド（１６）か
介装しである。（１７）は研摩槽（１■）内に装入され
る微小ザイスのメディアに研摩助剤としての研摩水およ
びこ１ンバウンドを自動供給するためのノズルである。The illustrated workpiece clamp mechanism (2) is integrally fastened to the casing and includes a hydraulic clamp cylinder (5) of a compact earthquake-resistant structure driven by a hydraulic unit (not illustrated), and the hydraulic clamp cylinder (5). ) and a movable claw (6b) which is opened and closed relative to the fixed claw (6a) by the hydraulic clamp cylinder (5). Elastic bodies (7), such as polyurethane rubber, are attached to the workpiece gripping portions of the fixed claw (6a) and the movable claw (6b) in a replaceable manner for the purpose of preventing slippage and damage. and,
The vibration motor (11) and the work clamp +in +f'! (21) attached to the elastic body (4)
Via! The frame body (3), which is a rack, is arranged oppositely above the polishing tank (11) installed on the heath (8), and is connected to the drive in the cabinet (9) fixed on the heath (8). Inclination of the pivot shaft, etc. driven by a mechanism (10)
The fixing claw (6a) of the work clamp mechanism (2)
) and the movable claw (6b) are supported by the cabinet 71 (91 and held by the work clamp mechanism (2)) so that the broken ship can be tilted approximately 90 degrees from a straight state in which the movable claw (6b) faces downward to a horizontal state in which it faces sideways. 2 [The product is 1%4?'1
(11) Can be loaded into the media inside. J. In addition to sea urination, automatic conveyance between the front and rear processes in the processing line can be easily performed. (12)L;1riIF
I'iJ, tank (I ) Tohe
It is assumed that the polishing tank (11) is vibrated by a vibration motor (13) installed on the bottom surface of the polishing tank (11), and is made of an elastic body such as Salel.
l) A vibration-proofing rubber (15) is interposed between the 7th tank (11) and the polishing tank holding frame (14), and a vibration-proofing pad is also installed between the heath (8) and the ground to absorb this vibration. (16) or intervening. (17) is a nozzle for automatically supplying polishing water as a polishing aid and water to the microscopic Zice media charged in the polishing tank (1).

なお、図中（１８）は研ｒ７糟（１１）内のメディアを
交換する際に回収タンク（１９）へメディアを排出さ−
Ｕるための排水［１（；Ｊの扉、（２０）は制御盤、（
２１）は手元操作ボックスであり、（２２）はヘース（
９）上に設置される廃水タンクで、該廃水タンク（２２
）は回収タンク（１９）と接続されて上？ｆ；′液を研
摩水として再使用する外、高深度の廃液をし１示しない
廃水処理装置ヘボンプアソプするようになっている。In addition, (18) in the figure indicates that the media is discharged to the recovery tank (19) when replacing the media in the grinder (11).
Drainage [1 (; J door, (20) is the control panel, (
21) is the hand control box, and (22) is the Heas (
9) A wastewater tank installed above the wastewater tank (22
) is connected to the recovery tank (19) on the top? f; In addition to reusing the liquid as polishing water, the waste liquid is collected at a deep depth and is used in several waste water treatment equipments.

他方、第５図、第６図は本発明の第２の実施例を示すも
ので、枠体（３）に振動モータ（１１とこれに一体に取
（；Ｊりられたワーククランプ機構（２）とが弾性体（
４）を介して懸架されている点は前記第１の実施例と同
様であるが、この枠体（３）は前記実施例における傾動
機構００）の代りにヘース（８）上に設置された支柱（
２４）の上部に設りられた油圧式のシリンダ等の昇降機
構（２５）により昇降動されるように該支柱（２４）に
支持されたガイド軸（２６）に案内されてワーククラン
プ４：旧ｆ’■（２）に保持された被加工品を研ｒτ槽
（１１）に収容されたメディア中に装脱できるようにし
である。また、研１γ槽（１１）はヘース（８）上にあ
る）３卜水タンク（２２Ｌｌ二に設置固定されて図示し
ない排水バ・イブで接続されＣいる。なお、自動化時の
被加工品の取４＝１時に位置決め精度向上のため振動モ
ータ（１）の１一部には円′Ｊ（１面をもつ位置決めピ
ン（２つ）を固定し、−力、枠体（３）中に位置決めピ
ン（２９）が嵌合する円ｆｌＥ受の（３０）を設りて位
置決め精度を上げており、研ＩＶ槽（１１）中での加工
時はメディアの反力によってハネが圧縮され、位置決め
ピン（２９）と円錐受け（３０）とは分離した状態とな
り、ｌｌｉ、７耗、破１員等は防止される構造となって
いる。On the other hand, FIGS. 5 and 6 show a second embodiment of the present invention, in which a vibration motor (11) is mounted on a frame (3) and a work clamp mechanism (2) is integrally attached to the vibration motor (11). ) and is an elastic body (
4) is similar to the first embodiment, but this frame (3) is installed on the heath (8) instead of the tilting mechanism 00) in the previous embodiment. Pillar (
The work clamp 4 is guided by a guide shaft (26) supported by the column (24) so as to be moved up and down by a lifting mechanism (25) such as a hydraulic cylinder installed on the upper part of the work clamp 4: The work piece held in f'■ (2) can be loaded into and removed from the media housed in the grinding rτ tank (11). In addition, the grinding tank (11) is installed and fixed on the three-volume water tank (22Ll2) on the heath (8) and connected with a drainage valve (not shown). In order to improve the positioning accuracy when Take 4 = 1, positioning pins (2) with one side of the circle 'J' are fixed to one part of the vibration motor (1), and the positioning pins (2) with one surface are fixed to the vibration motor (1). A circular flE receiver (30) into which the pin (29) fits is provided to improve positioning accuracy, and during processing in the polishing IV tank (11), the spring is compressed by the reaction force of the media, and the positioning pin (29) and the conical receiver (30) are in a separated state, and are structured to prevent damage, wear, damage, etc.

ごの。ｌンうに構成された装置によって被加工品の表面
研摩を行）には、先ず、枠体（３）内にある振動モータ
（１１に被加工品が該振動モータ（１）の偏心軸の軸心
方向と並行する方向に保持されるように一体に取（＝Ｉ
りられているｉノーククランブ機構（２）に被加工品（
３１）を手動或いはロボットを使用して装着保持させ、
該振動モータ（１）を駆動さ−Ｕつつ傾動機構００）や
昇降４幾４ｔ＆　（２５）を駆動させて枠体（３）の下
方に対向して配置された研Ｉ♀槽（１１）内に水、コン
パウンドとともに収容されているメディア中に装入すれ
ば、被加工品（３１）は電気、油圧、空気圧等を駆動源
とじ−ζ駆動されて偏心軸の作用で振動する振動モータ
（１１と一体化されて枠体（３）に対し弾性体（４）を
介して！ｎ架されているワーククランプ機構（２）の固
定爪（６ａ）と可動爪（（ｉｂ）間に前記偏心軸の軸心
方向と並行に保持されているので、メディア中に装入さ
れた被加工品（３１）に直接振動が与えられるとともに
振動軌跡の振動波形は略円形となり、メディアは被加工
品（３１）の外表面を連館に研摩することは勿論、孔中
で単に上下振動するたりではなく孔壁に沿った回転運動
が行われるので内表面も微小メディアをもって効率よく
研摩されることとなり、特に、研摩槽（１１）を振動モ
ータ（１３）により振動されるようにしておけば、メデ
ィアが研摩槽（１１）内で回転流動を行うこととなるの
−さ常詩メディア、水、コンパウンドが均一に分布され
た状態を保持し、メディアが孔中で目詰まりすることが
なくてより適確な研ＩＲ効果が期待できる。しかも、こ
の研摩中に生ずる振動は弾性体（４）等により吸収され
るので、振動公害のおそれはない。Gono. In order to polish the surface of the workpiece using a device configured as shown in FIG. It is taken integrally so that it is held in a direction parallel to the central direction (=I
The workpiece (
31) are attached and held manually or using a robot,
The vibration motor (1) is driven while the tilting mechanism 00) and the lifting mechanism 4t& (25) are driven to move the inside of the grinding tank (11) located below the frame (3). When the workpiece (31) is loaded into the media contained together with water and compound, the workpiece (31) is driven by a vibration motor (11) that is driven by an electric, hydraulic, pneumatic, etc. drive source and vibrates under the action of an eccentric shaft. The eccentric shaft is connected between the fixed claw (6a) and the movable claw ((ib) of the work clamp mechanism (2), which is integrated with the frame body (3) via the elastic body (4)!n. Since the medium is held parallel to the axial direction of the workpiece (31), direct vibration is applied to the workpiece (31) loaded in the medium, and the vibration waveform of the vibration locus becomes approximately circular. ), the outer surface of the hole can be polished continuously, and since the rotational movement along the hole wall is carried out instead of simply vibrating up and down in the hole, the inner surface can also be polished efficiently with fine media. If the polishing tank (11) is vibrated by the vibration motor (13), the media will rotate and flow inside the polishing tank (11).The media, water, and compound will be uniform. Since the media is maintained in a well-distributed state and the holes are not clogged, a more accurate polishing IR effect can be expected.Furthermore, the vibrations generated during polishing are absorbed by the elastic body (4), etc. Therefore, there is no risk of vibration pollution.

（発明の効果） 本発明は前記説明から明らかなように表面研摩が液加］
二品に対して電気または油圧或いは空気圧により駆動さ
れる振動モータにより直接振動が伝えられることによっ
てメディアが孔中で目詰まりしない微小なメディアを効
率よく使用することができるので孔の深さ、形状或いは
縦孔、横孔の制限なく研１￥加−１゛を行うことができ
、さらに、被加工品と振動ｉ１４；ｊが一体となったま
まほぼフリーの状態の直動振動でほぼ円形の振動軌跡の
波形となるため、小さなエネルギーで研削力が高く、短
時間加工がｉｉＪ能であるうえに二次ハリの発生なども
なく−ｒ迷路孔内のすみずみまで仕上面粗さを細かくし
て平滑に、しかも、均一で一定品質の研１１γができる
という利点がある。また、被加工品を独立してそれぞれ
固定するため液加］二品の衝突がなく、従って被加工品
に打痕を生じるごともない。さらに、共振型でなく被加
工品に直接振動を与える直動型のため装置の振動部の疲
労破Ｊ、、ｒ４が少なく、小型の振動モータでコンバク
１−にでき、使用電力等も少なくてすむうえに振動数及
び振幅を無段階に容易に調４ｒでき、振幅の変動がない
ため被加工品に適合した条件を設定でき、また、被加工
品の月質に特に制限がなく操作性に優れていて工程ライ
ンへ組み込んで自動化することもできるので量産性も高
く、装置の設置面積を小さく」↓つ製造原価も低くする
ことができる等種々の利点がある。(Effects of the Invention) As is clear from the above description, the present invention is capable of surface polishing by liquid addition.
Vibration is directly transmitted to the two parts by a vibration motor driven by electricity, hydraulic pressure, or pneumatics, making it possible to efficiently use microscopic media that does not clog the hole, thereby controlling the depth and shape of the hole. Alternatively, grinding can be carried out without restrictions on vertical holes and horizontal holes, and in addition, the workpiece and vibration i14; Since the waveform is a vibration locus, the grinding force is high with small energy, short machining is possible, and there is no secondary hari.-r The finished surface roughness can be finely applied to every corner of the labyrinth hole. It has the advantage of being able to grind 11γ smoothly, uniformly, and with constant quality. Furthermore, since the workpieces are fixed independently, there is no collision between the two parts, and therefore no dents are created on the workpiece. Furthermore, since it is not a resonant type but a direct-acting type that directly vibrates the workpiece, there are fewer fatigue failures in the vibrating part of the equipment, and it can be used as a compact vibration motor with a small vibration motor, and it consumes less power. In addition, the frequency and amplitude can be easily adjusted in a stepless manner, and since there is no fluctuation in amplitude, conditions suitable for the workpiece can be set, and there are no particular restrictions on the quality of the workpiece, improving operability. It has various advantages, such as being able to be integrated into the process line and automated, making it highly suitable for mass production, reducing the installation area of the equipment, and lowering manufacturing costs.

従って、本発明は従来の表面研摩法の問題点を解決した
振動式表面１ｌｌ）　ｔ’ｉ方法およびその装置として
業界の発展に寄与するところ極め−Ｃ大なものである。Therefore, the present invention greatly contributes to the development of the industry as a vibrating surface polishing method and apparatus that solve the problems of conventional surface polishing methods.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の振動式表面研摩装置の第１の実施例を
示す一部切欠正面図、第２図は同しく要部の正面図、第
３図は同しく一部切欠側面図、第４図は同しく要部の側
面図、第５図は本発明の振動式表面研１ｆ装置の第２の
実施例を示す正面図、第６図は同しく側面図である。 （１）：振動モータ、（２）：ワーククランプ機構、（
３）：枠体、（４）二弾性体、（１０）　：傾動機構、
（１１）：研Ｐ百１旨（１３）　：振動モータ、（２５
）　：昇降機構、（３１）：被加工品。 第２図 第３図 第４図 Ｚ　′（−”　７ ） ｆFIG. 1 is a partially cutaway front view showing a first embodiment of the vibratory surface polishing device of the present invention, FIG. 2 is a front view of the main parts, and FIG. 3 is a partially cutaway side view. FIG. 4 is a side view of the main parts, FIG. 5 is a front view showing a second embodiment of the vibratory surface polishing apparatus 1f of the present invention, and FIG. 6 is a side view. (1): Vibration motor, (2): Work clamp mechanism, (
3): Frame body, (4) Bielastic body, (10): Tilting mechanism,
(11): Ken P Hyakuichiji (13): Vibration motor, (25
): Lifting mechanism, (31): Workpiece. Figure 2 Figure 3 Figure 4 Z ′(-”7) f

Claims (1)

【特許請求の範囲】 １、被加工品を振動モータに取（＝Ｊけられたワークク
ランプ機構に保持させて該被加工品を前記振動モータの
駆動により直接振動さ−Ｕつつ研摩槽に収容されたメデ
ィア中に装入して被加工品の内外表面を研摩するごとを
動機とする振動式表面研１？方法。 ２、被加工品が振動モータの偏心軸の軸心方向と並行し
てワーククランプ機構に保持された状態でｔｖ［ｒｒ　
４曹に収容されたメディア中に装入されるようにしたｑ
￥５′１請求の範囲第１項記載の振動式表面研摩方法。 ３、ワーククランプ機構を一体に取付＆Ｊた振動モータ
を枠体に仰性体を介して）詭架して研摩槽の−に方に該
ワーククランプ機構に保持さセた被加工品を該６月Ｙ（
曹のメディア中に装脱できるように対向させて配置した
ことを特徴とする振動式表面研摩装置。 ４、研ｒｑ：槽を振動モータにより振動されるものとし
た特許請求の範囲第３項記載の振動式表面研摩装置。 ５、ワーククランプ機構を一体に取イ」レノた振動モー
タが）ｎ架された枠体をシリンダーにより昇降動される
ものとしたｑ４許請求の範囲第３項または第４項記載の
振動式表面研摩装置。 ６、ワーククランプ機構を一体に取付Ｌ）だ振動モータ
が懸架された枠体を略９０度仲動できるｆｑ１動機構を
もって研摩槽内のメディア中に装脱できるようにした特
許請求の範囲第３項または第４項記載の振動式表面研摩
装；１ｔ０[Scope of Claims] 1. A workpiece is taken by a vibration motor and held in a workpiece clamping mechanism, and the workpiece is placed in a polishing tank while being directly vibrated by the drive of the vibration motor. 1. Vibratory surface polishing method in which the workpiece is placed in a media that has been polished to polish the inner and outer surfaces of the workpiece. 2. tv [rr
It was made to be charged into the media housed in 4th Sergeant.q
¥5'1 The vibratory surface polishing method according to claim 1. 3. Attach the work clamp mechanism integrally and hang the vibration motor on the frame via the vertical body, and place the workpiece held by the work clamp mechanism on the - side of the polishing tank. Month Y (
A vibratory surface polishing device characterized in that the vibrating surface polishing devices are arranged facing each other so as to be able to be loaded and unloaded into a sanding medium. 4. Polishing rq: The vibratory surface polishing device according to claim 3, wherein the tank is vibrated by a vibration motor. 5. The vibrating surface according to claim 3 or 4, in which the work clamping mechanism is integrated with a vibration motor, and the suspended frame is moved up and down by a cylinder. Polishing equipment. 6. The workpiece clamping mechanism is integrally attached L), and the frame body on which the vibration motor is suspended is provided with an fq1 movement mechanism capable of moving approximately 90 degrees, so that it can be loaded into and removed from the media in the polishing tank. Vibratory surface polishing device according to item or item 4; 1t0