JPS60188320U - 弾性表面波発振器 - Google Patents
弾性表面波発振器Info
- Publication number
- JPS60188320U JPS60188320U JP1985057755U JP5775585U JPS60188320U JP S60188320 U JPS60188320 U JP S60188320U JP 1985057755 U JP1985057755 U JP 1985057755U JP 5775585 U JP5775585 U JP 5775585U JP S60188320 U JPS60188320 U JP S60188320U
- Authority
- JP
- Japan
- Prior art keywords
- transducers
- acoustic wave
- surface acoustic
- oscillation circuit
- wave oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims description 8
- 230000010355 oscillation Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000009977 dual effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/36—Devices for manipulating acoustic surface waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
- G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
- G01L1/165—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators with acoustic surface waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
- G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S73/00—Measuring and testing
- Y10S73/04—Piezoelectric
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Oscillators With Electromechanical Resonators (AREA)
- Measuring Fluid Pressure (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
め要約のデータは記録されません。
Description
第1図は本考案の一実施例による力検出用弾性表面波発
振器の概略構成図、第2図は第1図に示しり弾性表面波
発振器に部ける発振周波数の標準偏差を示す特性線図、
第3a図は本考案の他の実、2施例によるアユ4アル弾
性表面波発振器の概略構成−図、羊3b図は第3a図に
示したデュナル弾性表面波発振器を形成す木部トランス
ジューサ及び及 ′′びグランド板の基板上における
配置を示す構成−、第3c図・および第3d図iよトー
y7スジユー′すの周擁数応答特性線図、゛第4図は第
3a図に示し、aqet*tz−r::7面波発振器に
よ□る力検出器の概 79.10J30,40:ピエ
ゾ基板、12,1 ′4、36.37. ′3’む39
.1.3.5.7. .44.46,45..47:ト
ランスジ五−サ、35、:すだれ状電極、16.32.
34.48.49:増幅器、18,42:マウント、2
,4゜1.678:グニント二、5.1:混合器。
、 121、− \イ− −リ−yつ”n−Qm’ (*J) −Fig、2−ン Fig、3c fo = 41MH2 \や、− OH60 Fig、3a 7 −’″′ ’8ノ −一ン1−
4 3
振器の概略構成図、第2図は第1図に示しり弾性表面波
発振器に部ける発振周波数の標準偏差を示す特性線図、
第3a図は本考案の他の実、2施例によるアユ4アル弾
性表面波発振器の概略構成−図、羊3b図は第3a図に
示したデュナル弾性表面波発振器を形成す木部トランス
ジューサ及び及 ′′びグランド板の基板上における
配置を示す構成−、第3c図・および第3d図iよトー
y7スジユー′すの周擁数応答特性線図、゛第4図は第
3a図に示し、aqet*tz−r::7面波発振器に
よ□る力検出器の概 79.10J30,40:ピエ
ゾ基板、12,1 ′4、36.37. ′3’む39
.1.3.5.7. .44.46,45..47:ト
ランスジ五−サ、35、:すだれ状電極、16.32.
34.48.49:増幅器、18,42:マウント、2
,4゜1.678:グニント二、5.1:混合器。
、 121、− \イ− −リ−yつ”n−Qm’ (*J) −Fig、2−ン Fig、3c fo = 41MH2 \や、− OH60 Fig、3a 7 −’″′ ’8ノ −一ン1−
4 3
Claims (1)
- トランスジューサを形成すやための第1、第2、の表面
を有するピエゾ基板と、前記シエゾ基板に加えられた力
に応じて前記ピエゾ基板を保持するためのマウント部と
、前記第1の表面に弾性表面波信号を伝播させるために
配置された第1、第2のトランスジューサと、前記第2
の表面に弾性表面波信号を伝播させるために配置された
第3、第4めトランスジューサと、第1発振回路を構成
するために前記第1、第2のトランスジューサ藺に−設
けられた第1増幅器と、第2発振回路を構成するために
前記第3、第4のトランスジューサ間に設けられた第2
増幅器と、前記第1発振回路お−よ−q第2発振回路の
発振周波数に基づいて前記力に関連する信号を出力する
出力部とを具備して成2 リ、前記第1、第2トラン
スジ立−サは各々前記第1、第2トランスジユーサとオ
フセットされて、 いることを特徴とする弾性表面波
発振器。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US404829*[A US3878477A (en) | 1974-01-08 | 1974-01-08 | Acoustic surface wave oscillator force-sensing devices |
US404829 | 1974-01-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60188320U true JPS60188320U (ja) | 1985-12-13 |
Family
ID=23601231
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50004755A Pending JPS50102245A (ja) | 1974-01-08 | 1975-01-08 | |
JP1985057755U Pending JPS60188320U (ja) | 1974-01-08 | 1985-04-18 | 弾性表面波発振器 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50004755A Pending JPS50102245A (ja) | 1974-01-08 | 1975-01-08 |
Country Status (3)
Country | Link |
---|---|
US (1) | US3878477A (ja) |
JP (2) | JPS50102245A (ja) |
GB (1) | GB1488155A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005241461A (ja) * | 2004-02-26 | 2005-09-08 | Kyocera Corp | 圧力センサモジュール |
Families Citing this family (61)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4096740A (en) * | 1974-06-17 | 1978-06-27 | Rockwell International Corporation | Surface acoustic wave strain detector and gage |
US3949324A (en) * | 1974-11-11 | 1976-04-06 | Texas Instruments Incorporated | Surface wave device angle modulator |
US3940636A (en) * | 1975-03-03 | 1976-02-24 | Sperry Rand Corporation | Acoustic delay surface wave motion transducer systems with enhanced stability |
JPS5217052A (en) * | 1975-07-30 | 1977-02-08 | Yokogawa Hokushin Electric Corp | Current meter |
US4107626A (en) * | 1976-12-20 | 1978-08-15 | Gould Inc. | Digital output force sensor using surface acoustic waves |
US4100811A (en) * | 1977-03-18 | 1978-07-18 | United Technologies Corporation | Differential surface acoustic wave transducer |
FR2396306A1 (fr) * | 1977-07-01 | 1979-01-26 | Thomson Csf | Accelerometre a ondes elastiques de surface |
DE2757577C3 (de) * | 1977-12-23 | 1982-01-14 | Gould Inc., Cleveland, Ohio | Kraftmeßfühler mit einem einseitig eingespannten Körper mit piezoelektrischer Oberflächenwellenerzeugung |
US4144747A (en) * | 1978-01-30 | 1979-03-20 | The Bendix Corporation | Simultaneously resonated, multi-mode crystal force transducer |
US4216401A (en) * | 1978-12-22 | 1980-08-05 | United Technologies Corporation | Surface acoustic wave (SAW) pressure sensor structure |
FR2450462A1 (fr) * | 1979-02-27 | 1980-09-26 | Thomson Csf | Magnetometre a ondes magnetostatiques |
FR2451026A1 (fr) * | 1979-03-09 | 1980-10-03 | Thomson Csf | Capteur de pression a ondes elastiques de surface |
FR2457039A1 (fr) * | 1979-05-16 | 1980-12-12 | Thomson Csf | Procede de compensation des derives en temperature dans les dispositifs a ondes de surface et capteur de pression mettant en oeuvre ce procede |
US4295102A (en) * | 1979-09-28 | 1981-10-13 | Texas Instruments Incorporated | Surface acoustic wave sensor sensing circuits |
JPS5685923A (en) * | 1979-12-13 | 1981-07-13 | Matsushita Electric Ind Co Ltd | Elastic surface wave transducer |
US4315324A (en) * | 1980-09-11 | 1982-02-09 | The United States Of America As Represented By The Secretary Of The Navy | Directly modulated sonobuoy transmitter using surface acoustic wave sensor |
US4365520A (en) * | 1981-01-07 | 1982-12-28 | Gould Inc. | Strain gage transducers |
DE3126615A1 (de) * | 1981-07-06 | 1983-01-20 | Kollsman System-Technik GmbH, 8000 München | Vorrichtung zur druckmessung |
GB2117115B (en) * | 1982-03-23 | 1985-11-06 | Standard Telephones Cables Ltd | Surface acoustic wave accelerometer |
FR2528183A1 (fr) * | 1982-06-08 | 1983-12-09 | Thomson Csf | Accelerometre a ondes elastiques de surface |
US4535631A (en) * | 1982-09-29 | 1985-08-20 | Schlumberger Technology Corporation | Surface acoustic wave sensors |
US4586382A (en) * | 1982-09-29 | 1986-05-06 | Schlumberger Technology Corporation | Surface acoustic wave sensors |
US4512198A (en) * | 1982-09-29 | 1985-04-23 | Schlumberger Technology Corporation | Surface acoustic wave sensors |
JPS59191126A (ja) * | 1983-04-14 | 1984-10-30 | Victor Co Of Japan Ltd | ビデオヘツドの位置制御装置 |
FR2546303B1 (fr) * | 1983-05-20 | 1985-07-05 | Thomson Csf | Capteur de forces a ondes elastiques de surface |
GB2142141B (en) * | 1983-06-25 | 1986-11-19 | Standard Telephones Cables Ltd | Remote surface acoustic wave vibration sensor |
GB2143326B (en) * | 1983-07-14 | 1986-08-13 | Standard Telephones Cables Ltd | Surface acoustic wave accelerometer |
JPH0626039B2 (ja) * | 1983-10-31 | 1994-04-06 | ソニー株式会社 | 磁気ヘツドの変位駆動装置 |
FR2558955B1 (fr) * | 1984-01-27 | 1986-05-02 | Thomson Csf | Capteur de forces vectoriel a ondes elastiques de surface |
CS267053B1 (en) * | 1985-06-24 | 1990-02-12 | Capek Jan | Palpable sensing element for robot |
US5189914A (en) * | 1988-02-29 | 1993-03-02 | The Regents Of The University Of California | Plate-mode ultrasonic sensor |
US5212988A (en) * | 1988-02-29 | 1993-05-25 | The Reagents Of The University Of California | Plate-mode ultrasonic structure including a gel |
GB9004822D0 (en) * | 1990-03-03 | 1990-04-25 | Lonsdale Anthony | Method and apparatus for measuring torque |
US5365770A (en) * | 1993-04-05 | 1994-11-22 | Ford Motor Company | Ultrasonic wave interferometers |
US7880594B2 (en) | 2000-09-08 | 2011-02-01 | Automotive Technologies International, Inc. | Switch assemblies and method for controlling vehicular components |
US6448513B1 (en) * | 2001-02-02 | 2002-09-10 | Circuits & Systems Inc. | Electronic weighing apparatus utilizing surface acoustic waves |
DE19638634C2 (de) * | 1996-09-20 | 2001-03-01 | Siemens Ag | Mit akustischen Oberflächenwellen arbeitende Sensoranordnung |
JP4143296B2 (ja) * | 1999-12-17 | 2008-09-03 | 凸版印刷株式会社 | 弾性表面波素子 |
GB2361318A (en) * | 2000-04-12 | 2001-10-17 | Marconi Caswell Ltd | A surface acoustic wave strain sensor |
GB2405931B (en) * | 2000-09-08 | 2005-04-27 | Automotive Tech Int | Vehicle wireless sensing and communication system |
GB0024813D0 (en) * | 2000-10-10 | 2000-11-22 | Transense Technologies Plc | Pressure monitoring device incorporating saw device |
US7330271B2 (en) * | 2000-11-28 | 2008-02-12 | Rosemount, Inc. | Electromagnetic resonant sensor with dielectric body and variable gap cavity |
US7151337B2 (en) * | 2002-03-21 | 2006-12-19 | Transense Technologies Plc | Pressure monitor incorporating saw device |
CZ301243B6 (cs) * | 2004-12-28 | 2009-12-16 | Rieter Cz S.R.O. | Zpusob zjištování délkové hmotnosti pramene textilních vláken nebo jemu podobného útvaru a zarízení k provádení zpusobu |
AT7781U3 (de) * | 2005-04-21 | 2006-05-15 | Piezocryst Advanced Sensorics | Messwertaufnehmer mit zumindest einem saw-element |
US20070079656A1 (en) * | 2005-10-11 | 2007-04-12 | Honeywell International Inc. | Micro-machined acoustic wave accelerometer |
DE102005061754A1 (de) * | 2005-12-21 | 2007-06-28 | Huf Hülsbeck & Fürst Gmbh & Co. Kg | Sensoranordnung zum Erfassen des Andrückens eines Bedienerkörperteils an eine Sensorfläche |
AT503558B1 (de) * | 2006-06-13 | 2007-11-15 | Piezocryst Advanced Sensorics | Vorrichtung zur messung von druck, kraft, beschleunigung oder davon abgeleiteten grössen |
GB2480628A (en) * | 2010-05-25 | 2011-11-30 | Horstman Defence Systems Ltd | A suspension unit for use on a tracked vehicle including a load sensor |
WO2012086124A1 (ja) * | 2010-12-20 | 2012-06-28 | Necカシオモバイルコミュニケーションズ株式会社 | 発振装置および電子機器 |
CN103444207B (zh) * | 2011-03-31 | 2016-08-31 | 日本电气株式会社 | 振荡器和电子设备 |
RU2014110527A (ru) * | 2011-08-31 | 2015-10-10 | Хиршманн Аутомейшн энд Контрол ГмбХ | Измерение нагрузки на грузоподъемнике подъемных механизмов |
KR20130062625A (ko) * | 2011-12-05 | 2013-06-13 | 삼성전자주식회사 | 싱크함수를 이용한 신호 측정 장치 및 방법 |
AT513259B1 (de) * | 2013-01-29 | 2014-03-15 | Austrian Ct Of Competence In Mechatronics Gmbh | Verfahren zur Änderung des statischen und/oder dynamischen Istverhaltens eines insbesondere elastischen Körpers unter äußerer Belastung |
US9551609B2 (en) * | 2013-07-30 | 2017-01-24 | The Boeing Company | Modal acoustic aircraft weight system |
JP6862762B2 (ja) * | 2016-10-28 | 2021-04-21 | セイコーエプソン株式会社 | 力検出センサー、力覚センサーおよびロボット |
JP6862794B2 (ja) * | 2016-11-24 | 2021-04-21 | セイコーエプソン株式会社 | 力検出センサー、力覚センサー、トルクセンサーおよびロボット |
CN109990819B (zh) * | 2019-03-29 | 2021-06-01 | 电子科技大学 | 一种基于声表面波传感器的频率信号检测***及检测方法 |
CN110966913B (zh) * | 2019-12-12 | 2021-01-19 | 西安电子科技大学 | 基于液态金属的柔性大应变传感器及其制备方法 |
AT524289A1 (de) * | 2020-10-12 | 2022-04-15 | Pacemaker Tech Gmbh | Verfahren zur Kraft- bzw. Druckmessung, insbesondere für eine Ganganalyse, mit einem piezoelektrischen Sensor sowie piezoelektrischer Sensor hierzu |
CN114136507A (zh) * | 2021-12-07 | 2022-03-04 | 中国电子科技集团公司第四十八研究所 | 一种无线无源声表面波压力传感器及其制备方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3575050A (en) * | 1968-12-04 | 1971-04-13 | Panametrics | Fluid flowmeter |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3350944A (en) * | 1963-10-17 | 1967-11-07 | Gen Electric | Strain gauge pressure transducer |
US3701147A (en) * | 1969-01-22 | 1972-10-24 | Us Navy | Surface wave devices for signal processing |
GB1347687A (en) * | 1970-05-21 | 1974-02-27 | Young R E | Displacement transducers |
US3805189A (en) * | 1972-11-27 | 1974-04-16 | Gte Laboratories Inc | Oscillators using surface acoustic wave delay line |
-
1974
- 1974-01-08 US US404829*[A patent/US3878477A/en not_active Expired - Lifetime
- 1974-11-14 GB GB49324/74A patent/GB1488155A/en not_active Expired
-
1975
- 1975-01-08 JP JP50004755A patent/JPS50102245A/ja active Pending
-
1985
- 1985-04-18 JP JP1985057755U patent/JPS60188320U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3575050A (en) * | 1968-12-04 | 1971-04-13 | Panametrics | Fluid flowmeter |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005241461A (ja) * | 2004-02-26 | 2005-09-08 | Kyocera Corp | 圧力センサモジュール |
JP4511216B2 (ja) * | 2004-02-26 | 2010-07-28 | 京セラ株式会社 | 圧力センサモジュール |
Also Published As
Publication number | Publication date |
---|---|
GB1488155A (en) | 1977-10-05 |
JPS50102245A (ja) | 1975-08-13 |
US3878477A (en) | 1975-04-15 |
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