JPS60181645U - Measuring head of diaphragm vacuum gauge - Google Patents
Measuring head of diaphragm vacuum gaugeInfo
- Publication number
- JPS60181645U JPS60181645U JP4481985U JP4481985U JPS60181645U JP S60181645 U JPS60181645 U JP S60181645U JP 4481985 U JP4481985 U JP 4481985U JP 4481985 U JP4481985 U JP 4481985U JP S60181645 U JPS60181645 U JP S60181645U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- annular
- groove
- vacuum gauge
- measuring head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、この考案のダイヤフラム真空計の測定子の１
実施例における、その構成部品の大略の配置を示す、垂
直断面図である。第２図は、第１図の測定子の円筒壁と
、これの上端面に締付けられたダイヤフラムとの、締付
個所を拡大して示す、部分垂直断面図である。第３図、
第４図および第５図は、測定子に包含される円筒壁、ダ
イヤフラムおよび環状フランジをそれぞれ表わす、平面
図である。第６図および第７図は、第２実施例を表わす
、第１図および第２図にそれぞれに対応する図である。
第８図および第９図は、第２実施例に包含される、下方
環状ダイヤプラムおよび上方環状ダイヤフラムをそれぞ
れ表わす、平面図である。
図面において、１は真空ケーシング、２は円筒壁、３は
上端面、４は溝、５はシール材、７はダイヤフラム、９
と１０は環状ダイヤフラム、１５は環状フランジ、１６
は突出部、２０は締付部材（ねじ）を示す。Figure 1 shows one of the probes of the diaphragm vacuum gauge of this invention.
FIG. 2 is a vertical cross-sectional view showing the approximate arrangement of component parts in the example. FIG. 2 is a partial vertical sectional view showing an enlarged tightening location of the cylindrical wall of the measuring head of FIG. 1 and a diaphragm tightened to the upper end surface of the diaphragm. Figure 3,
4 and 5 are plan views respectively showing the cylindrical wall, diaphragm and annular flange included in the probe. 6 and 7 are diagrams corresponding to FIG. 1 and FIG. 2, respectively, representing the second embodiment. 8 and 9 are plan views showing, respectively, a lower annular diaphragm and an upper annular diaphragm included in the second embodiment. In the drawings, 1 is a vacuum casing, 2 is a cylindrical wall, 3 is an upper end surface, 4 is a groove, 5 is a sealing material, 7 is a diaphragm, 9
10 is an annular diaphragm, 15 is an annular flange, 16
indicates a protrusion, and 20 indicates a tightening member (screw).
Claims (1)
れに沿って一周する溝を形成し、この溝の中にシール材
を配置し、ストレーンゲージのプローブ素子を備えたダ
イヤフラムを、その周部分において、前記上端面に載せ
、前記溝に保合できる寸法形状の突出部を下面に有する
環状フランジを、前記突出部が前記ダイヤフラムを介し
て前記溝に対面するような配置で、前記周部分に載せ、
締付部材によって、ダイヤフラムを介して環状フランジ
を前記上端面に締付けた、ことを特徴とするダイヤプラ
ム真空計の測定子。 ２ ダイヤプラムの周部分と環状フランジの間に、円筒
壁より内径が小さい環状ダイヤフラムを介在させ、前記
の締付部材による締付けによって、環状ダイヤフラムが
前記周部分に固定されるようにした、実用新案登録請求
の範囲第１項に記載のダイヤフラム真空計の測定子。[Claims for Utility Model Registration] 1. A groove is formed around the annular upper end surface of a cylindrical wall in a vacuum casing, and a sealing material is placed in this groove, and a probe element of a strain gauge is formed. A diaphragm having a diaphragm is placed on the upper end surface at its peripheral portion, and an annular flange having a protrusion on the lower surface with a size and shape that can be fitted in the groove, the protrusion facing the groove through the diaphragm. Place it on the circumferential part in such an arrangement,
A gauge head for a diaphragm vacuum gauge, characterized in that an annular flange is clamped to the upper end surface via a diaphragm by a clamping member. 2. A utility model in which an annular diaphragm having an inner diameter smaller than the cylindrical wall is interposed between the peripheral portion of the diaphragm and the annular flange, and the annular diaphragm is fixed to the peripheral portion by tightening with the aforementioned tightening member. A measuring head for a diaphragm vacuum gauge according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4481985U JPS60181645U (en) | 1985-03-29 | 1985-03-29 | Measuring head of diaphragm vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4481985U JPS60181645U (en) | 1985-03-29 | 1985-03-29 | Measuring head of diaphragm vacuum gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60181645U true JPS60181645U (en) | 1985-12-02 |
Family
ID=30557742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4481985U Pending JPS60181645U (en) | 1985-03-29 | 1985-03-29 | Measuring head of diaphragm vacuum gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60181645U (en) |
-
1985
- 1985-03-29 JP JP4481985U patent/JPS60181645U/en active Pending
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