JPS60180753A - Numerically controlled machining unit - Google Patents
Numerically controlled machining unitInfo
- Publication number
- JPS60180753A JPS60180753A JP59037734A JP3773484A JPS60180753A JP S60180753 A JPS60180753 A JP S60180753A JP 59037734 A JP59037734 A JP 59037734A JP 3773484 A JP3773484 A JP 3773484A JP S60180753 A JPS60180753 A JP S60180753A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- pulse
- distance
- workpiece
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/182—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by the machine tool function, e.g. thread cutting, cam making, tool direction control
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37425—Distance, range
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/49—Nc machine tool, till multiple
- G05B2219/49237—Depth, tool depth control
Landscapes
- Engineering & Computer Science (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Machine Tool Copy Controls (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、数値制御装置を備えたレーザ切断機等の加工
機に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a processing machine such as a laser cutting machine equipped with a numerical control device.
数値制御装置を備えたレーザ切断機によシＸＹテーブル
上のワークを切断する場合、通常、レーザ光を加工ヘッ
ドの集光レンズで集光してワーク上にその集魚を当て、
高エネルギを一点に集中してワークを燃焼もしくは蒸発
させて切断を行う。When cutting a workpiece on an XY table using a laser cutting machine equipped with a numerical control device, normally the laser beam is focused by a condensing lens on the processing head and the focused laser beam is directed onto the workpiece.
Cutting is performed by concentrating high energy on one point and burning or vaporizing the workpiece.
したがって、ワークと加工ヘッドとの距離は常に一定に
保つ必要がある。このため、従来は、ワークと加工ヘッ
ドとの距離を高さ検出器によりアナログ信号として検出
し、その検出信号をサーボ倣い装置に送って加工ヘッド
の高さを自動制御していた。ところが、上記サーボ倣い
装置は、加工ヘッドの位値制＃をなす数値制御装置のサ
ーボ機構とは別個に独立して設けられていたため、装置
が複雑、高価になるなどの点で設備的に不満があった。Therefore, it is necessary to always keep the distance between the workpiece and the processing head constant. For this reason, conventionally, the distance between the workpiece and the processing head was detected as an analog signal by a height detector, and the detected signal was sent to a servo copying device to automatically control the height of the processing head. However, the above-mentioned servo copying device was installed separately and independently from the servo mechanism of the numerical control device that makes up the position value system of the processing head, which resulted in equipment dissatisfaction in terms of complexity and cost. was there.
また、上記サーボ倣い装置を用いて加工ヘッドの位置制
御をなすことも考えられるが、小刻みの位置制御をする
には、別の位置検出機構が必要となるなどの問題があっ
た。It is also conceivable to control the position of the processing head using the servo copying device described above, but there are problems such as a separate position detection mechanism being required to perform small position control.
本発明は、倣い装置により、高さ検出器からのアナログ
信号をパルス信号に変換するとともに、このパルス信号
により数値制御装置を作動してワークと加工物との距離
を一定に保つようにして、上記従来の問題点を解消した
もので、数値制御装置の単一のサーボ機構により数値制
御動作と倣い動作の２通りの動作を行うことができる数
値制御加工機を提供することを目的とする。以下、本発
明を図面に基づいて説明する。The present invention uses a copying device to convert an analog signal from a height detector into a pulse signal, and operates a numerical control device using this pulse signal to maintain a constant distance between the workpiece and the workpiece. It is an object of the present invention to provide a numerically controlled processing machine which solves the above-mentioned conventional problems and is capable of performing two types of operations, a numerically controlled operation and a copying operation, using a single servo mechanism of a numerically controlled device. Hereinafter, the present invention will be explained based on the drawings.
第１図ないし第４図は本発明の一実施例を示すもので、
図中１は数値制御装［２を備えたレーザ切断機等の加工
機の加工ヘッドであり、その先端部には図示しないレー
ザ発振器により発生せしめられたレーザ光りを集光する
集光レンズ３が組込まれている。また、この加工ヘッド
１には、上記数値制御装置２からの制御信号により速度
制御ユニット４を介して作−されるサーボモータ５が付
設されており、このサーボモータ５により加工ヘッド１
の高さ方向の位置制御が行われるようになっている。さ
らに、加工ヘッド１の側部には、直線型ポテンショメー
タや差動トランス等の高さ検出器（距離検、重器）６が
取付けられ、この高さ検出器６により、ＸＹテーブル７
上のワーク８と加エエツド１の集光レンズ３との間の距
離Ｈと、集光レンズ３とレーザ光りの集光点との距離り
との個差がアナログ電圧として検出されるようになって
おり、このアナログ電圧が第３図に示すように上記偏差
皆に比例した大きさの偏差信号りとして倣い装置９に送
られるようになっている。1 to 4 show an embodiment of the present invention,
In the figure, 1 is a processing head of a processing machine such as a laser cutting machine equipped with a numerical control device [2], and a condensing lens 3 for condensing laser light generated by a laser oscillator (not shown) is installed at the tip of the head. Built-in. Further, a servo motor 5 is attached to the processing head 1, which is operated via a speed control unit 4 in response to a control signal from the numerical control device 2.
The position in the height direction is controlled. Furthermore, a height detector (distance detection, heavy equipment) 6 such as a linear potentiometer or a differential transformer is attached to the side of the processing head 1.
The individual difference between the distance H between the workpiece 8 above and the condensing lens 3 of the processing edge 1 and the distance between the condensing lens 3 and the focal point of the laser beam is detected as an analog voltage. As shown in FIG. 3, this analog voltage is sent to the copying device 9 as a deviation signal having a magnitude proportional to all of the above deviations.
上記倣い装置９Ｆｉ、上記高さ検出器６で得られた偏差
信号りの正負を判別する符号判別回路１０と、上記偏差
信号りの電圧を所定の範囲に押え、それを絶対値信号ａ
に変換する絶対値変換回路１１と、この絶対値変換回路
１１で得られた絶対値信号ａをその電圧に比例して周波
数が高くなるようなパルスに変換するＶ／Ｆコンバータ
１２と、とのＶ／Ｆコンバータ１２で得られたパルスの
位相を遅延させる遅延回路１３とから成る。そして、高
さ検出器６で発生された偏差信号りは、符号判別回路１
０でその符号が判別され、また、絶対値変換回路１１と
Ｖ／Ｆコンバータ１２を通ってその電圧に比例した周波
・薮のパルスに変換されるとともに、遅延回路１３を通
って位相の遅れたパルスにも変換され、上記符号判別回
路１０で判別された符号に合せてＶ／Ｆコンバータ１２
の出力と遅延回路１３の出力とが切換えられて、第４図
の（イ）または仲）に示すような２相のパルス信号１ｐ
１ となって出力端子Ｏ７，０゜から出力されるように
なっている。The copying device 9Fi, the sign discrimination circuit 10 that determines whether the deviation signal obtained by the height detector 6 is positive or negative, and the voltage of the deviation signal obtained by the height detector 6 are controlled within a predetermined range and converted into an absolute value signal a.
and a V/F converter 12 that converts the absolute value signal a obtained by the absolute value conversion circuit 11 into a pulse whose frequency increases in proportion to the voltage. and a delay circuit 13 that delays the phase of the pulse obtained by the V/F converter 12. Then, the deviation signal generated by the height detector 6 is transmitted to the sign discrimination circuit 1.
0, its sign is determined, and it passes through an absolute value conversion circuit 11 and a V/F converter 12 and is converted into a pulse with a frequency proportional to that voltage, and also passes through a delay circuit 13 with a delayed phase. It is also converted into a pulse, and is sent to the V/F converter 12 in accordance with the code discriminated by the code discrimination circuit 10.
The output of the delay circuit 13 and the output of the delay circuit 13 are switched, and a two-phase pulse signal 1p as shown in (a) or middle) of FIG.
1 and is output from the output terminal O7, 0°.
さらに、上記数値制御装置２には、該数値制御装＋１２
にパルスイぎ号ｐ２ を供給する手動パルス発生器１４
と上記倣い装［９が、切換えスイッチ１５を介して相互
に切換え自在に接続されており、この切換えスイッチ１
５の切換えは数値制ｆ１１１１装置２の補助機能である
所Ｈｌ’ＪＭコードによりプログラム指令にて行われる
ものである。また、数値制御装置２の内部には、上記手
動パルス発生器１４あるいは倣い装置９から切換えスイ
ッチ１５をｌｉｌてパルス発生器インタフェース回路１
６に供給されるパルス信号ｐ１ ＊ ｐ２ に基づいて
演算処理を行って指令信号を出力するＣＰＵ（中央演算
処理袋ｆｄ）１７と、このＣＰＵ１７からの指令信号を
前記サーボモータ５からのフィードバック信号と比較し
てサーボモータ５を制御する位置制御回路１８が備ぐら
れている。そして、位置制御回路１８からの制御信号が
前記速度制御ユニット４に入ると、速度制御ユニット４
はこの制御信号とサーボモータ５の回転位置検出器から
のフィードバック信号とを比較してサーボモータ５の速
度を指令速度に合うように制御するように構成されてお
り、このサーボモータ５により加工ヘッド１の上下方向
の位置が制御され、加工ヘッド１の集光レンズ３とワー
ク８との間の距離Ｈが集光レンズ３と集光点との距離り
になるように自動制御されるようになっている。Furthermore, the numerical control device 2 includes the numerical control device +12.
Manual pulse generator 14 that supplies pulse signal p2 to
and the above copying device [9 are switchably connected to each other via a changeover switch 15, and this changeover switch 1
The switching of 5 is performed by a program command using the Hl'JM code, which is an auxiliary function of the numerical system f1111 device 2. Further, inside the numerical control device 2, a pulse generator interface circuit 1 is connected to the manual pulse generator 14 or the copying device 9 by switching a changeover switch 15.
A CPU (central processing unit fd) 17 performs arithmetic processing based on the pulse signals p1 * p2 supplied to the servo motors 6 and outputs a command signal, and the command signal from the CPU 17 is combined with a feedback signal from the servo motor 5. In comparison, a position control circuit 18 for controlling the servo motor 5 is provided. When the control signal from the position control circuit 18 enters the speed control unit 4, the speed control unit 4
is configured to compare this control signal with a feedback signal from the rotational position detector of the servo motor 5 to control the speed of the servo motor 5 to match the command speed, and the servo motor 5 controls the processing head. 1 is controlled in the vertical direction, and the distance H between the condenser lens 3 of the processing head 1 and the workpiece 8 is automatically controlled to be the distance between the condenser lens 3 and the condensing point. It has become.
なお、ワーク８０ＸＹ方向の位置制御は、数値制御装置
２の指令イド号で作動する図示しないＸ、Ｙ軸サーボモ
ータによりなされる。また、図中１９はデータバス、２
０はアドレスバスである。さらに、手動パルス発生器１
４は、ノンドルを回すことによりパルス信号ｐ２ を発
生させるもので、Ｘ。Note that the position control of the workpiece 80 in the X and Y directions is performed by X and Y axis servo motors (not shown) operated by the command ID number of the numerical control device 2. In addition, 19 in the figure is a data bus, 2
0 is the address bus. Furthermore, manual pulse generator 1
4 generates a pulse signal p2 by turning a nondle;
Ｙ、ｚ軸のいずれかを手動で微調送りするときに使用す
るものである。この手動パルス発生器１４で微調送りを
する場合、軸の運定は作業者が行うが、上記では、割込
み動作のときには、２軸すなわち高さ方向の軸が自動的
に選定されるようになっている。This is used when manually finely adjusting either the Y or Z axis. When performing fine-adjustment feeding using the manual pulse generator 14, the operator operates the axes, but in the above case, when an interrupt operation is performed, two axes, that is, the axis in the height direction, are automatically selected. ing.
次に上記のように構成された本発明の作用について説明
する。Next, the operation of the present invention configured as described above will be explained.
本発明のレーザ切断機等の加工機によってＸＹテーブル
７上のワーク８の切断等を表す場合、従来同様、レーザ
発振器によりレーザ光りを発し、これを集光レンズ３で
集光してその集光点でワーク８の切断等を行うが、その
際、ワーク８と加工ヘッド１の集光レンズ３との間の距
離Ｈを、集光レンズ３と集光点との距）ｋｉｉＤに一致
するように保つ。すなわち、高さ検出器６により上記距
離Ｈと距１ＩＩＤの差をアナログ電圧として検出し、こ
れを偏差信号りとして倣い装置９に送る。すると、倣い
装置９では、仁の偏差信号りの符号を符号判別回路１０
により判別する一方、絶対値変換回路１１で偏差信号り
を所定範囲の電圧の絶対値信号ａに変換し、かつ、ｖ／
Ｆコンバータ１２によりそれを各電圧に応じた周波数の
パルスに変えるとともに、このパルスを遅延回路１３で
位相の遅れたパルスにも変える。そして、上記符号判別
回路１０で判別された符号を基に偏差量が偏差量０を境
としてプラスかマイナスかに応じて０．と０２の出力を
反転させて２相のパルス信号ｐ□ を出力する。このパ
ルス信号ｐ１ は、数値制御装置２のＭコードによシ切
換えられた切換えスイッチ１５を通って数値制御装置２
に送られ、パルス発生器インタフェース回路１６を経て
データバス１９からＣＰＵ１７に入って２相のパルス信
号ｐ工の位相関係でサーボモータ５０回転方向が、パル
スの量で移動蓋が、パルスの周波数で移動速度がそれぞ
れ決められる。ＣＰＵ１７から出たサーボモータ５の回
転方向、移動量、移動速度に関する指令信号は位置制御
回路１８に送られる。位置制御回路１８は、これらの指
令信号とサーボモータ５の回転位置検出器からのフィー
ドバック信号とを比較して速度制御ユニット４（制御信
号を送る。速度制御ユニット４は、この制御信号とサー
ボモータ５０回転位置検出器からのフィードバック信号
とを比較して、サーボモータ５を指令速度で、指令され
た方向に指令された量だけ移動するように制御する。そ
して、これによりサーボモータ５が加工ヘッド１を上下
させ、ワーク８と集光レンズ３との距離Ｈが常に所定値
りになるようにその高さを自動制御する。When cutting the workpiece 8 on the XY table 7 with a processing machine such as the laser cutting machine of the present invention, as in the past, a laser oscillator emits laser light and the condensing lens 3 condenses the light. The workpiece 8 is cut at a point, and at that time, the distance H between the workpiece 8 and the condensing lens 3 of the processing head 1 is made to match the distance (distance between the condensing lens 3 and the condensing point) kiiD. Keep it. That is, the height detector 6 detects the difference between the distance H and the distance 1IID as an analog voltage, and sends this to the copying device 9 as a deviation signal. Then, in the copying device 9, the sign of the deviation signal is detected by the sign discrimination circuit 10.
On the other hand, the absolute value conversion circuit 11 converts the deviation signal into an absolute value signal a of voltage within a predetermined range, and
The F converter 12 converts it into a pulse with a frequency corresponding to each voltage, and the delay circuit 13 converts this pulse into a pulse whose phase is delayed. Then, based on the sign discriminated by the sign discriminating circuit 10, the deviation amount is 0 or 0 depending on whether the deviation amount is positive or negative with the deviation amount 0 as the boundary. and 02 are inverted to output a two-phase pulse signal p□. This pulse signal p1 passes through the changeover switch 15, which is switched by the M code of the numerical controller 2, to the numerical controller 2.
The two-phase pulse signal is sent to the CPU 17 from the data bus 19 via the pulse generator interface circuit 16, and the rotation direction of the servo motor 50 is determined by the phase relationship of the two phases, the movement direction is determined by the amount of the pulse, and the lid is moved by the pulse frequency. Each movement speed is determined. Command signals regarding the rotational direction, movement amount, and movement speed of the servo motor 5 are sent from the CPU 17 to the position control circuit 18 . The position control circuit 18 compares these command signals with the feedback signal from the rotational position detector of the servo motor 5 and sends a control signal to the speed control unit 4. The servo motor 5 is controlled to move by the commanded amount in the commanded direction at the commanded speed by comparing the feedback signal from the 50 rotation position detector. 1 is raised and lowered, and its height is automatically controlled so that the distance H between the workpiece 8 and the condensing lens 3 always remains at a predetermined value.
ここで、本発明の加工機にあっては、数値制御装置２に
対して設けられたサーボモータ５等のサーボ機構を利用
して加工ヘッド１の倣い動作を行うものであるから、装
置全体の構成が簡略化され、操作性、保守性等が高まる
。Here, in the processing machine of the present invention, since the servo mechanism such as the servo motor 5 provided for the numerical control device 2 is used to perform the copying operation of the processing head 1, the overall The configuration is simplified and operability, maintainability, etc. are improved.
捷た、上記加工機では、ｘ、ｙ、ｚ軸のデカルト軸ｉ亭
で、Ｘ、Ｙ軸をＸＹテーブル７に対応させ〜２軸を加工
ヘッド１に対応させているが、このような加工機で３次
元のワーク８を加工する場合、例えばワーク８の表面が
急激な階段状に曲つ−ｔいたりして、センサの構造上倣
い動作を行うことができないことがある。そのような場
合には、あらかじめワーク８の座標を調べておき、数値
制御装置２からＸＹ座標に合せてワーク８の２座標を指
令することによりｚ軸を制御し、加工を進めることかで
きる。In the above processing machine, the X, Y, and Z axes correspond to the XY table 7, and the two axes correspond to the processing head 1. When machining a three-dimensional workpiece 8 using a machine, for example, the surface of the workpiece 8 may be curved in a sharp step-like manner, and the sensor may not be able to perform a tracing operation due to its structure. In such a case, the coordinates of the workpiece 8 can be checked in advance, and the z-axis can be controlled by commanding the two coordinates of the workpiece 8 from the numerical control device 2 in accordance with the XY coordinates to proceed with machining.
以上のように、本発明の数値制御加工機においては、距
離検出器によシ検出されたアナログ信号を倣い装置によ
って２相のパルス信号に変換し、このパルス信号により
数値制御装置を作動して、そのサーボ機構により加工ヘ
ッドとワークとの間の距離を一定に保つようにしたので
、従来のように、倣い動作を行わせしめるために数値制
御装置用のサーボ機構とは別のサーボ機構を設ける必要
がなく、シたがって、装置全体の構成が簡略化されると
ともに、操作性、保守性等が向上するなどの効果を奏す
る。As described above, in the numerically controlled processing machine of the present invention, the analog signal detected by the distance detector is converted into a two-phase pulse signal by the copying device, and the numerical control device is operated by this pulse signal. Since the servo mechanism was used to maintain a constant distance between the processing head and the workpiece, a servo mechanism separate from the servo mechanism for the numerical control device was provided to perform the copying operation, as was the case in the past. This is not necessary, and the overall configuration of the device is simplified, and the operability, maintainability, etc. are improved.
図は本発明の一実施例を示すもので、第１図は加工機の
構成を表す略図、第２図は倣い装置のブロック図、第３
図は偏差信号の説明図、第４図はパルス信号の説明図で
、（イ）は偏差信号りがプラスの場合を、また（口）は
偏差信号りがマイナスの場合をそれぞれ示すものである
。
１・・・・・・加工ヘッド、２・・・・・・数値制御装
置、６・・・・・・高さ検出器（距離検出器）、９・・
・・・・倣い装置。
第１図The figures show one embodiment of the present invention, in which Figure 1 is a schematic diagram showing the configuration of a processing machine, Figure 2 is a block diagram of a copying device, and Figure 3 is a block diagram of a copying device.
The figure is an explanatory diagram of the deviation signal, and Figure 4 is an explanatory diagram of the pulse signal. (a) shows the case where the deviation signal is positive, and (b) shows the case where the deviation signal is negative. . 1... Processing head, 2... Numerical control device, 6... Height detector (distance detector), 9...
・・・Copying device. Figure 1
Claims (1)
す数値制御装置を備えた数値制御加工機において、ワー
クと加工ヘッドとの距離を検出してアナログ信号を発生
する距離検出器と、この距離検出器で得られたアナログ
信号をパルス信号に変換し、このパルス信ｅ％より上記
数値制御装置を作動してワークと加工ヘッドとの距離を
一定に保つ倣い装置とを具備して成ることを特徴とする
数値制御加工機。In a numerically controlled processing machine equipped with a numerical control device that is operated by pulse signals to control the position of the processing head, there is a distance detector that detects the distance between the workpiece and the processing head and generates an analog signal, and a distance detector that detects the distance between the workpiece and the processing head and generates an analog signal. The apparatus is equipped with a copying device that converts the analog signal obtained by the detector into a pulse signal and operates the numerical control device based on this pulse signal e% to maintain a constant distance between the workpiece and the processing head. Characteristic numerical control processing machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59037734A JPS60180753A (en) | 1984-02-29 | 1984-02-29 | Numerically controlled machining unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59037734A JPS60180753A (en) | 1984-02-29 | 1984-02-29 | Numerically controlled machining unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60180753A true JPS60180753A (en) | 1985-09-14 |
Family
ID=12505712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59037734A Pending JPS60180753A (en) | 1984-02-29 | 1984-02-29 | Numerically controlled machining unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60180753A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62120955A (en) * | 1985-11-21 | 1987-06-02 | Amada Co Ltd | Copying attachment for thermal cutting machine |
| JPS62155982U (en) * | 1985-11-29 | 1987-10-03 | ||
| JPS6333194A (en) * | 1986-07-25 | 1988-02-12 | Mitsubishi Electric Corp | Profile controller for laser beam machining device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS603994A (en) * | 1983-06-18 | 1985-01-10 | Amada Co Ltd | Z-axis control device of laser working machine |
-
1984
- 1984-02-29 JP JP59037734A patent/JPS60180753A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS603994A (en) * | 1983-06-18 | 1985-01-10 | Amada Co Ltd | Z-axis control device of laser working machine |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62120955A (en) * | 1985-11-21 | 1987-06-02 | Amada Co Ltd | Copying attachment for thermal cutting machine |
| JPS62155982U (en) * | 1985-11-29 | 1987-10-03 | ||
| JPS6333194A (en) * | 1986-07-25 | 1988-02-12 | Mitsubishi Electric Corp | Profile controller for laser beam machining device |
| JPH0436793B2 (en) * | 1986-07-25 | 1992-06-17 | Mitsubishi Electric Corp |
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