JPS6017974A - Pulse laser device of unstable resonance type - Google Patents

Pulse laser device of unstable resonance type

Info

Publication number
JPS6017974A
JPS6017974A JP12571783A JP12571783A JPS6017974A JP S6017974 A JPS6017974 A JP S6017974A JP 12571783 A JP12571783 A JP 12571783A JP 12571783 A JP12571783 A JP 12571783A JP S6017974 A JPS6017974 A JP S6017974A
Authority
JP
Japan
Prior art keywords
laser light
pulse laser
hole
laser device
pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12571783A
Other languages
Japanese (ja)
Other versions
JPH0126198B2 (en
Inventor
Yoshihide Kanehara
好秀 金原
Shigeru Koikawa
小井川　茂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12571783A priority Critical patent/JPS6017974A/en
Publication of JPS6017974A publication Critical patent/JPS6017974A/en
Publication of JPH0126198B2 publication Critical patent/JPH0126198B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2308—Amplifier arrangements, e.g. MOPA
    • H01S3/2325—Multi-pass amplifiers, e.g. regenerative amplifiers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08081—Unstable resonators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To obtain a high performance laser device by emitting a pulse laser light via a through hole formed at the center of a concave mirror for forming an unstable resonator, thereby triggering it and outputting a pulse laser light of large output. CONSTITUTION:A pulse laser light emitted from a pulse laser device 16 is introduced via a through hole (g) of a concave mirror 6' with a small hole into an unstable resonator formed of a concave mirror 6 and a convex mirror 7, and the propagating direction coincides with an optical axis (c). The pulse laser light is gradually isolated from the axis (c) while repeating reflections between the mirrors 6' and 7, and eventually led out of a stable resonator via a plane mirror 8 with a hole. In the meantime, the laser light is amplified by the repetition of the collision of the laser light with carbon dioxide gas molecules excited in the discharging medium (b) by the glow (or voiceless) discharge between discharging electrodes 2 and 3, and outputted as the large output laser light of a ring mode A. In other words, the pulse laser light becomes a trigger, and outputted as a large output laser light, but the pulse responding velocity is the same as the pulse laser light.

Description

【発明の詳細な説明】 この発明は不安定共振器型パルスレーザ装置、特に不安
定共振器のバルヌレーザ出力構成に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an unstable resonator type pulsed laser device, and particularly to an unstable resonator Varne laser output configuration.

従来、この種のレーザ装置として、第１図に示すものが
あった。第１図において、（１）は不安定共振器型レー
ザ装置本体、（２）と（３）は適切な空隙（イ）を確保
して配置され、その間でグロー（又は無声）放電させる
ための対をなす放電電極、（４）はｍＩ記放電のための
電源、（５）は前記空隙（イ）部分に炭酸ガスを主成分
とする放電媒質（ロ）を適切な温度に冷却して循環供給
するガス循環装置、（６）は全反射鏡である凹面鏡、（
７）は全反射鏡である凸面鏡であり、凹面鏡（６）と凸
面鏡（７）は光軸（ハ）を一致させ、適切な距離をもっ
て対向配置され、これらで不安定共振器を形成する。（
８）は凹面鏡（６）、凸面鏡（７）の間で光軸（ハ）上
に、４５の傾斜にて、かつ中央部にダ円形の光軸（ハ）
の方向から見て円形の開口部を有する全反射鏡である開
口伺平面鏡、（９）と（１０）はレーザ光の方向を変え
るための全反射鏡である平面鏡、（１１）はレーザ光を
集光するための凸レンズ、（１２）は凸レンズ（１１）
を保持する加工ヘッド、（１３）は被加工物、（１４）
は被加工物を光軸（へ）に垂直な平面内で任意に移動さ
せ得る加工テーブルを示す。Conventionally, there has been a laser device of this type as shown in FIG. In Figure 1, (1) is the main body of the unstable resonator type laser device, (2) and (3) are arranged with an appropriate gap (a), and a glow (or silent) discharge is generated between them. A pair of discharge electrodes, (4) a power source for mI recording, and (5) a discharge medium (b) whose main component is carbon dioxide gas cooled to an appropriate temperature and circulated in the gap (a). The supply gas circulation device, (6) is a concave mirror that is a total reflection mirror, (
7) is a convex mirror which is a total reflection mirror, and the concave mirror (6) and the convex mirror (7) are placed opposite each other with an appropriate distance with their optical axes (c) aligned, and form an unstable resonator. (
8) is located between the concave mirror (6) and the convex mirror (7) on the optical axis (c) at an angle of 45, and has a circular optical axis (c) in the center.
(9) and (10) are plane mirrors that are total reflection mirrors that change the direction of the laser beam, and (11) is a total reflection mirror that changes the direction of the laser beam. Convex lens for condensing light, (12) is convex lens (11)
(13) is the workpiece, (14) is the processing head that holds the
indicates a processing table that can arbitrarily move the workpiece in a plane perpendicular to the optical axis.

次に動作を二ついて説明する。ガス循環冷却装置（５）
により、前述の放電媒質（ロ）を空隙（イ）に循環供給
し、かつ電源（４）より通電し、放電電極（２）、（３
）の間でグロー（又は無声）放電させることにより、前
記空隙（イ）の放電媒質（ロ）が励起され、炭酸ガスに
特有の約１０．６μの波長の赤外光が発生ずる。これが
凹面鏡（６）と凸面鏡（７）で構成された不安定共振器
内で増１１され、レーザ光を発振する。レーザ光は開口
付平面鏡（８）により光軸に）の方向へリングモードに
て導かれ、更に平面鏡（９）、（１０）にて光軸住）方
向から光軸（へ）方向へ方向を変え、凸レンズ（１１）
にて大きなエネルギー密度に集光され、被加工物（１３
）に照射されこれを切断加工する。Next, I will explain two operations. Gas circulation cooling device (5)
The above-mentioned discharge medium (b) is circulated and supplied to the gap (a), and electricity is supplied from the power source (4) to discharge electrodes (2) and (3).
), the discharge medium (b) in the gap (a) is excited, and infrared light with a wavelength of about 10.6 μ, which is characteristic of carbon dioxide gas, is generated. This is multiplied in an unstable resonator made up of a concave mirror (6) and a convex mirror (7), and oscillates a laser beam. The laser beam is guided in a ring mode in the direction of the optical axis by a plane mirror with an aperture (8), and is further directed from the direction of the optical axis to the direction of the optical axis by plane mirrors (9) and (10). Convex lens (11)
The light is focused to a large energy density at the workpiece (13
) is irradiated and cut.

一般に、金属材料等を切断する場合、連続出力のレーザ
光で行うと、入熱が大きいため切断面がきたなくなり、
精密な切断ができない。逆にパルスで切断すると高精度
の切断ができ、切断面が非常にきれいになることが知ら
れている。ところが第１図に示すレーザ装置の場合、出
力するレーザ光の応答速度は電源（４）の応答が遅いと
いうこともあり、また発振ビーム径が大きく、大きな放
電体積であるためレーザ媒質ガスの通過時間が長く、数
百Ｈｚ以−りの高速パルス出力は不可能であった。Generally, when cutting metal materials, etc., if you use a continuous output laser beam, the cut surface will be messy due to the large heat input.
Precise cutting is not possible. On the other hand, it is known that pulse cutting allows for highly accurate cutting and results in a very clean cut surface. However, in the case of the laser device shown in Fig. 1, the response speed of the output laser light is slow due to the slow response of the power supply (4), and the oscillation beam diameter is large and the discharge volume is large, making it difficult for the laser medium gas to pass through. It took a long time, and high-speed pulse output of several hundred Hz or higher was impossible.

この発明は」１記のような従来のものの欠点を除去する
ためになされたもので、不安定共振器を構成する凹面鏡
の中心に貫通孔を設け、同一光軸−１−に第２のバルヌ
レーザ装ｆｉ’ｆ：を設け、これ等から得られるパルス
レーザ光を前記凹面鏡の貫通孔から不安定共振器内に注
入し、これをトリガーとして大出力パルスレーザ光を発
生させることが出来るレーザ装置を提供することを目的
としている。This invention was made in order to eliminate the drawbacks of the conventional ones as described in 1. A through hole is provided in the center of a concave mirror constituting an unstable resonator, and a second Varne laser is attached to the same optical axis -1. A laser device is provided in which a pulsed laser beam obtained from these devices is injected into an unstable resonator through a through hole of the concave mirror, and this can be used as a trigger to generate a high-output pulsed laser beam. is intended to provide.

この発明の一実施例を図について説明する。第２図にお
いて（６）は中心部に貫通孔（ト）を有する全反射鏡で
ある小孔付凹面鏡、（１６）はパルスレーザ光を出力す
る第２のレーザ装置である。その他は第１図と同一であ
り同一番号は同一のものを示す。An embodiment of the present invention will be described with reference to the drawings. In FIG. 2, (6) is a concave mirror with a small hole, which is a total reflection mirror having a through hole (G) in the center, and (16) is a second laser device that outputs a pulsed laser beam. Other parts are the same as in FIG. 1, and the same numbers indicate the same parts.

第２図に示した実施例において、パルスレーザ装置（１
６）から出たパルスレーザ光は、小孔付凹面鏡（６）の
貫通孔（１）を通して凹面鏡（６）、凸面鏡（７）等か
ら成る不安定共振器内に注入され、進行方向は光軸（ハ
）と一致している。それゆえ、前記パルスレーザ光は第
３図に示すように小孔付凹面鏡（６）と凸面鏡（７）の
間で反射を繰返しながら次第に光軸（ハ）から離れ、つ
いには穴付平面鏡（８）にて不安定共振器から外へ導か
れる。この間、放電電極（２）、（３）間のグロー（又
は無声）放電により、放電媒質（ロ）中の励起された炭
酸ガス分子に前記レーザ光が衝突を繰返してレーザ光は
増巾され、リングモード囚の大出力レーザ光として出力
される。すなわち前記パルスレーザ光がトリガーとなっ
て大出力レーザ光が出力されるが、そのパルス応答速度
はパルスレーザ光と同一である。In the embodiment shown in FIG.
The pulsed laser beam emitted from 6) is injected into an unstable resonator consisting of a concave mirror (6), a convex mirror (7), etc. through the through hole (1) of the concave mirror (6) with a small hole, and the traveling direction is along the optical axis. This is consistent with (c). Therefore, as shown in FIG. 3, the pulsed laser beam gradually moves away from the optical axis (c) while repeating reflection between the concave mirror with small holes (6) and the convex mirror (7), and finally reaches the plane mirror with holes (8). ) is guided out from the unstable resonator. During this time, due to the glow (or silent) discharge between the discharge electrodes (2) and (3), the laser light repeatedly collides with the excited carbon dioxide molecules in the discharge medium (b), and the laser light is amplified. It is output as a high-power laser beam in ring mode. That is, the pulsed laser beam serves as a trigger to output a high-output laser beam, but its pulse response speed is the same as that of the pulsed laser beam.

また、パルスレーザ装置として高速応答のパルスレーザ
である無声放電励起パルスレーザを使用すると０〜３Ｋ
Ｕｚの大出力パルスレーザを出力することができる。不
安定共振器の出力総合率Ｍを大きく設定することにより
、より大出力で良質のビームのパルスレーザ出力が得ら
れる。In addition, if a silent discharge excitation pulsed laser, which is a pulsed laser with a high speed response, is used as a pulsed laser device, the
It can output a high output pulse laser of Uz. By setting the overall output ratio M of the unstable resonator to a large value, it is possible to obtain a pulse laser output with a higher output and a higher quality beam.

以」二のようにこの発明によれば、不安定共振器を構成
する凹面鏡の中心に貫通孔を設け、かつ同一光軸−１：
に第２のパルスレーザ装置を設け、前記貫通孔を通して
パルスレーザ光を注入し、これをトリガーとして大出力
のパルスレーザ光を出力できる構造としたので、被加工
物の精密切断に高性能なレーザ装置が得るれる効果があ
る。According to the present invention, as described in "2" below, a through hole is provided at the center of the concave mirror constituting the unstable resonator, and the same optical axis -1:
A second pulse laser device is installed in the through hole, and a pulse laser beam is injected through the through hole, and this is used as a trigger to output a high-output pulse laser beam.This makes it possible to use a high-performance laser for precision cutting of workpieces. The device has certain effects.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の不安定共振器型レーザ装置を示す構成図
、第２図はこの発明の不安定共振器型レーザ装置を示す
構成図、第３席口よ第２図に示した不安定共振器の光学
系を説明するための図である。 図中、（６）は小孔付凹面鏡、（７）は凸面鏡、（１６
）は第２のパルスレーザ装置である。 なお、図中同一符号は同−又は相当部分を示す。 代理人　大　岩　増　雄 昭和　年　月　日 １．事件の表示　１．１・願昭５８−１２５７１７号３
、補正をする者 明細書の発明の詳細な説明 （１） ６、補正の内容 明細書中筒５頁第１４行に「出方総合」とあるのを「出
力結合」と訂正する。 以上 （２）Fig. 1 is a block diagram showing a conventional unstable resonator type laser device, Fig. 2 is a block diagram showing an unstable resonator type laser device of the present invention, and the third seat FIG. 3 is a diagram for explaining an optical system of a resonator. In the figure, (6) is a concave mirror with small holes, (7) is a convex mirror, and (16) is a concave mirror with small holes.
) is the second pulse laser device. Note that the same reference numerals in the figures indicate the same or equivalent parts. Agent Masu Oiwa Showa Year Month Day 1. Display of incident 1.1・Gan Sho 58-125717 No. 3
, Detailed explanation of the invention in the specification of the person making the amendment (1) 6. Contents of the amendment On page 5, line 14 of the middle cylinder of the specification, the phrase ``output synthesis'' is corrected to ``output combination.'' Above (2)

Claims (2)

【特許請求の範囲】[Claims] （１）不安定共振器を構成する凹面鏡の中心に貫通孔を
設け、この孔を通して不安定共振器の外部ニ設けた第２
のパルスレーザ装置からパルスレーザ光を注入すること
により、これをトリガーとｔ２て大出力のパルスレーザ
光を出力させることを特徴とする不安定共振器型パルス
レーザ装置。(1) A through hole is provided in the center of the concave mirror that constitutes the unstable resonator, and a second hole is provided outside the unstable resonator through this hole.
An unstable resonator type pulsed laser device characterized in that by injecting a pulsed laser beam from the pulsed laser device, this is used as a trigger to output a high output pulsed laser beam at t2. （２）第２のパルスレーザ装置は無声放電励起パルスレ
ーザ装置であることを特徴とする特許請求の範囲第１項
記載の不安定共振器型パルスレーザ装置。(2) The unstable resonator type pulsed laser device according to claim 1, wherein the second pulsed laser device is a silent discharge excited pulsed laser device.
JP12571783A 1983-07-11 1983-07-11 Pulse laser device of unstable resonance type Granted JPS6017974A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12571783A JPS6017974A (en) 1983-07-11 1983-07-11 Pulse laser device of unstable resonance type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12571783A JPS6017974A (en) 1983-07-11 1983-07-11 Pulse laser device of unstable resonance type

Publications (2)

Publication Number Publication Date
JPS6017974A true JPS6017974A (en) 1985-01-29
JPH0126198B2 JPH0126198B2 (en) 1989-05-22

Family

ID=14917005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12571783A Granted JPS6017974A (en) 1983-07-11 1983-07-11 Pulse laser device of unstable resonance type

Country Status (1)

Country Link
JP (1) JPS6017974A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987002519A1 (en) * 1985-10-08 1987-04-23 Benny Allan Greene Laser apparatus
US4868515A (en) * 1988-10-21 1989-09-19 The United States Of America As Represented By The Secretary Of The Navy Narrow-bandwidth unstable laser resonator
US4942588A (en) * 1985-11-20 1990-07-17 Mitsubishi Denki Kabushiki Kaisha Laser device
JP2008258447A (en) * 2007-04-05 2008-10-23 Kawasaki Heavy Ind Ltd Multi-point output laser generating device
RU2541724C2 (en) * 2012-09-18 2015-02-20 Федеральное государственное бюджетное учреждение "Государственный научный центр Российской Федерации-Институт Теоретической и Экспериментальной Физики" Device and method for generating high-power pulses using co2 laser

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS562429A (en) * 1979-06-22 1981-01-12 Diesel Kiki Co Ltd Warm-up rotation speed controlling device for diesel engine

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS562429A (en) * 1979-06-22 1981-01-12 Diesel Kiki Co Ltd Warm-up rotation speed controlling device for diesel engine

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987002519A1 (en) * 1985-10-08 1987-04-23 Benny Allan Greene Laser apparatus
US4942588A (en) * 1985-11-20 1990-07-17 Mitsubishi Denki Kabushiki Kaisha Laser device
US4868515A (en) * 1988-10-21 1989-09-19 The United States Of America As Represented By The Secretary Of The Navy Narrow-bandwidth unstable laser resonator
JP2008258447A (en) * 2007-04-05 2008-10-23 Kawasaki Heavy Ind Ltd Multi-point output laser generating device
RU2541724C2 (en) * 2012-09-18 2015-02-20 Федеральное государственное бюджетное учреждение "Государственный научный центр Российской Федерации-Институт Теоретической и Экспериментальной Физики" Device and method for generating high-power pulses using co2 laser

Also Published As

Publication number Publication date
JPH0126198B2 (en) 1989-05-22

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