JPS6017973A - Laser oscillator - Google Patents

Laser oscillator

Info

Publication number
JPS6017973A
JPS6017973A JP12571483A JP12571483A JPS6017973A JP S6017973 A JPS6017973 A JP S6017973A JP 12571483 A JP12571483 A JP 12571483A JP 12571483 A JP12571483 A JP 12571483A JP S6017973 A JPS6017973 A JP S6017973A
Authority
JP
Japan
Prior art keywords
laser
reflecting mirror
mirror
mirrors
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12571483A
Other languages
Japanese (ja)
Inventor
Yoshihide Kanehara
好秀 金原
Eikichi Hayashi
林　栄吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12571483A priority Critical patent/JPS6017973A/en
Publication of JPS6017973A publication Critical patent/JPS6017973A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0401—Arrangements for thermal management of optical elements being part of laser resonator, e.g. windows, mirrors, lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
    • H01S3/0346—Protection of windows or mirrors against deleterious effects

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To obtain a laser oscillator which prevents the lens effect of a reflecting mirror and is improved in the intensity for a laser light by improving the cooling operation of the mirror by blowing gas to the mirror. CONSTITUTION:Laser medium gas cooled by a cooler 20 is sprayed from nozzles 22A, 22B through a blower 21 to the laser medium sides of a fully reflecting mirror 4 and a partially reflecting mirror 6. Air 23 cooled and dried by a cooler 25 and a drier 26 is sprayed to cool from nozzles 22C, 22D through a blower 24 to the outsides of the mirrors 4, 6. Thus, the mirrors 4, 6 are cooled, thereby entirely cooling uniformly to eliminate the local temperature rise. Accordingly, the mirrors are not split. Though the mirrors generate heat on the surface, to which the laser light is emitted, but since the gas is sprayed directly to the surfaces, the surfaces of the mirrors can be protected, and the lens effect of the mirrors can be remarkably reduced.

Description

【発明の詳細な説明】 この発明はレーザー発振器に係り、特に反射鏡を冷却す
る冷却手段を備えたレーザー発振器に関するものである
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser oscillator, and more particularly to a laser oscillator equipped with a cooling means for cooling a reflecting mirror.

従来、この種の装置として第１図に示すものがあった。Conventionally, there has been a device of this type as shown in FIG.

図示するようにレーザー発振器（８）は、レーザー媒質
ガス（１）を満たした容器（２）内に一対の電極（３Ａ
：）（３Ｂ）と、ミラーホルダー（５尤に保持され、ジ
ンクセレンやカリウムひ素などで形成された全反射鏡（
４）と、ミラーホルダー（５Ｂ）に保持され、同部材で
形成された部分反射鏡（６）とによって構成されている
。そしてこのレーザー発振器（８）の電極（３Ａ）　（
３Ｂ）に外部の電源（９）から電圧を加えると電極間に
放電が生してレーザー媒質ガス（１）を励起する。レー
ザー媒質ガス（１）は放電によって励起されると全反射
鏡（４）と部分反射鏡（６）との間でレーザーが生じ、
部分反射鏡（６）側よりその一部分がレーザー出力Ａと
して外部に取り出される。As shown in the figure, the laser oscillator (8) has a pair of electrodes (3A
:) (3B) and a total reflection mirror (held in a mirror holder (5) made of zinc selenium, potassium arsenide, etc.)
4), and a partially reflecting mirror (6) held by a mirror holder (5B) and made of the same material. And the electrode (3A) of this laser oscillator (8) (
When a voltage is applied to 3B) from an external power source (9), a discharge occurs between the electrodes and excites the laser medium gas (1). When the laser medium gas (1) is excited by electric discharge, a laser is generated between the total reflection mirror (4) and the partial reflection mirror (6).
A portion of it is taken out as laser output A from the partial reflecting mirror (6) side.

第２図はミラーホルダー（５Ｂ）に保持された部分反射
鏡（６）部分を拡大したもので、このミラーホルタ−（
５Ｂ）の内部に冷却水（１２）を流し、ミラーホルタ−
（５Ｂ）の熱伝導を利用して間接的に反射鏡（６）を冷
却するようにしている。また、全反射鏡（４）にあって
もこれと同様の冷却手段をとっている。Figure 2 is an enlarged view of the partially reflecting mirror (6) held in the mirror holder (5B).
5B), flow the cooling water (12) inside the mirror holter.
(5B) is used to indirectly cool the reflecting mirror (6). Furthermore, a similar cooling means is used for the total reflection mirror (4).

ところで、上記のように構成された従来のＩ／　−ザー
発振器におい０１強力なレーザー出力Ａを得るために強
いレーザー発振をさせなければならない。そして、強い
レーザー発振をした場合には反射鏡（６）のレーザー光
（１４）の反射側において、このレーザー光（１４）が
当った部分だけが発熱する。また、この部分反射鏡（６
）はレーザー光（１４）が一部分透過し、レーザー出力
Ａとして取り出されるためレーザー光（１４）が透過す
る部分が発熱することになる。By the way, in order to obtain a strong laser output A in the conventional I/- laser oscillator configured as described above, it is necessary to generate a strong laser oscillation. When strong laser oscillation is performed, only the portion of the reflecting mirror (6) on the reflection side of the laser beam (14) that is hit by the laser beam (14) generates heat. In addition, this partial reflecting mirror (6
), the laser beam (14) is partially transmitted and extracted as laser output A, so the portion through which the laser beam (14) is transmitted generates heat.

したがって、反射鏡は冷却水によって冷却されるミラー
ボルダ−に接する周部は冷却されるが中心部は熱いとい
う状態になる。また反射鏡に使用される材料がジンクセ
レンやガリウムひ素などで、金属に比べ熱伝導度が小さ
いため周部から冷却してもなかなか中心部までは冷却で
きない。このため、反射鏡のレーザー光を反射または透
過した部分と周辺部分との温度差ができ、熱膨張によっ
て反射鏡が割れる。さらに、１０に！程度以」二の高出
力レーザーを得ようとすると反射鏡のレーザー光が反則
あるいは透過した部分の温度が」二昇しすぎて」二記反
Ω、ｊ鏡が溶けたり燃えたりしてしまう等の欠点があっ
た。Therefore, the peripheral portion of the reflecting mirror in contact with the mirror boulder, which is cooled by the cooling water, is cooled, but the central portion remains hot. In addition, the materials used for the reflector are zinc selenium and gallium arsenide, which have lower thermal conductivity than metals, so even if they are cooled from the periphery, it is difficult to cool down to the center. This creates a temperature difference between the portion of the reflecting mirror that reflects or transmits the laser beam and the surrounding area, and the reflecting mirror breaks due to thermal expansion. Furthermore, to 10! If you try to obtain a high-output laser with a level higher than 2, the temperature of the part of the reflector that the laser beam passes through will rise too much, causing the mirror to melt or burn, etc. There was a drawback.

また、第２図に示すようにレーザー光が反射したり透過
したりした部分が熱膨張するとその部分がふくらみ、反
射部は凸面鏡（１５）の作用を、透過部は凸レンズ（１
６）の作用（以下この作用をレンズ効果という）をする
ことになる。このため、正常なレーザー発振を行なわな
くなったり、レーザー出力ＡであるべきものがＢのよう
に集光してしまうことになる。In addition, as shown in Figure 2, when the part where the laser beam is reflected or transmitted thermally expands, that part swells, and the reflecting part acts as a convex mirror (15), and the transmitting part acts as a convex lens (15).
6) (hereinafter, this effect will be referred to as a lens effect). For this reason, normal laser oscillation may not be performed, or the laser output that should be A will be condensed as B.

この発明は−に記のような従来のものの欠点を除去する
ためになされたもので、反射鏡に気体を吹きつけること
によって反射鏡の冷却作用を良くし、反射鏡のレンズ効
果を防ぐとともにレーザー光に対する強度が向」−され
たレーザー発振器を提供することを目ｒ自としている。This invention was made in order to eliminate the drawbacks of the conventional ones as described in -.By blowing gas onto the reflecting mirror, it improves the cooling effect of the reflecting mirror, prevents the lens effect of the reflecting mirror, and The object of the present invention is to provide a laser oscillator with improved light intensity.

以下、この発明の一実施例を第３図について説明する。An embodiment of the present invention will be described below with reference to FIG.

図において、同一符号は同一または相当部分を示し、（
２０）は冷却器、（２１）は送風機で、」１記冷却器に
よって冷却されたレーザー媒質ガスを送風機（２１）を
介してノズル（２２Ａ）及び（２２Ｂ）から全反射鏡（
４）及び部分反射鏡（６）のそれぞれレーザー媒質側（
図において内方側）に吹きつけ冷却する。また、（２４
）は送風機、（２５）は冷却器、（２６）は乾燥器で、
冷却、乾燥された空気（２３）をノズル（２２Ｃ）及び
（２２Ｄ）によって全反射鏡（４）及び部分反射鏡（６
）のそれぞれ外方側に吹きつけ冷却する。In the figures, the same reference numerals indicate the same or equivalent parts, (
20) is a cooler, (21) is a blower, and the laser medium gas cooled by the cooler described in 1.
4) and partially reflecting mirror (6) on the laser medium side (
Cool by spraying on the inside (inward side in the figure). Also, (24
) is the blower, (25) is the cooler, (26) is the dryer,
The cooled and dried air (23) is passed through the nozzles (22C) and (22D) to the total reflection mirror (4) and the partial reflection mirror (6).
) on the outer side of each to cool it.

このように全反射鏡（４）及び部分反射鏡（６）を冷却
することにより、全体が均一に冷却されて極部的な温度
」１昇がないので上記反射鏡が割れることがない。この
とき、反射鏡に吹きつける気体の温度が低いほど、また
風速が大きいほど冷却効果は大きくなる。また、反射鏡
はレーザー光の当る表面が発熱するが、この表面に直接
気体を吹きつけて冷却するため反射鏡の表面が保護され
るとともに反射鏡に対するレンズ効果も激減される。By cooling the total reflection mirror (4) and the partial reflection mirror (6) in this way, the whole is uniformly cooled and there is no local temperature rise, so the reflection mirror does not break. At this time, the lower the temperature of the gas blown onto the reflecting mirror and the higher the wind speed, the greater the cooling effect. In addition, the surface of the reflecting mirror that is hit by the laser beam generates heat, but since this surface is cooled by blowing gas directly on it, the surface of the reflecting mirror is protected and the lens effect on the reflecting mirror is drastically reduced.

なお、反射鏡に吹きつける空気を乾燥させるのは、反射
鏡の表面に水分が結露することを防ぐためである。また
、ミラーホルダーを冷却水によって冷却する装置と併用
すれば冷却効果が増すことはいうまでもない。Note that the purpose of drying the air blown onto the reflecting mirror is to prevent moisture from condensing on the surface of the reflecting mirror. Furthermore, it goes without saying that the cooling effect will be increased if the mirror holder is used in conjunction with a device that cools the mirror using cooling water.

第４図はこの発明の他の実施例を示したもので、レーザ
ー発振器の種類によっては全反射鏡（４）及び部分反射
鏡（６）が、容器（２）の内部に収納され、レーザー出
力Ａはレーザー光透過ガラス（３０）から出力されるも
のもあるが、このときは冷却器（２０）で冷却され、送
風機（２１）から送られるレーザー媒質ガスによって全
反射鏡（４）及び部分反射鏡（６）のそれぞれ両面を冷
却するとともに、ノズル（２２１Ｅりによってレーザー
光透過ガラス（３０）の内面を冷却する。また、レーザ
ー光透過ガラス（３０）の外面はノズル（２２Ｆ）から
の冷却空気を吹きつけて冷却する。FIG. 4 shows another embodiment of the present invention, in which a total reflection mirror (4) and a partial reflection mirror (6) are housed inside the container (2) depending on the type of laser oscillator, and the laser output A is sometimes output from the laser light transmitting glass (30), but in this case it is cooled by the cooler (20), and the laser medium gas sent from the blower (21) causes total reflection mirror (4) and partial reflection. Both sides of the mirror (6) are cooled, and the inner surface of the laser light transmitting glass (30) is cooled by the nozzle (221E). Also, the outer surface of the laser light transmitting glass (30) is cooled by cooling air from the nozzle (22F). Spray and cool.

なお、上記実施例ではガスレーザー発振器の場合につい
て説明したが、固体レーザー発振器であっても上記実施
例と同様の効果を奏する。Although the above embodiments have been explained using gas laser oscillators, the same effects as in the above embodiments can be achieved even when using solid state laser oscillators.

以上のようにこの発明は、冷却気体を吹きつけることに
よって反射鏡を冷却するようにしたので、冷却効果が向
上し反射部の焼損を防止することができるとともにレン
ズ効果を激減させることができろ効果がある。As described above, this invention cools the reflecting mirror by blowing cooling gas, which improves the cooling effect, prevents burnout of the reflecting part, and drastically reduces the lens effect. effective.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来のレーザー発振器を示す側面断面図、第２
図は従来のレーザー発振器の部分反射鏡部分を説明する
ための側面断面図、第３図はこの発明の一実施例による
レーザー発振器の側面断面図、第４図はこの発明の他の
実施例をこよるレーザー発振器の側面断面図である。 図中、同一符号は同一または相当部分を示し、（１）は
レーザー媒質、（２）は容器、（ａＡ）　（３Ｂ）は電
極、（４）は全反射鏡、（５Ａ）　（５Ｂ）はミラーホ
ルダー、（６）は部分反射鏡、（８）はレーザー発振器
、（１２）は冷却水、（１４）はレーザー光、（２０）
（２５）は冷却器、（２１）　（２４）は送風機、（２
３）は空気、（２６）は乾燥器である。 代理人　大　岩　増　雄 第１図 第２図 ３３７− 手続補正書（自発） １．事件の表示　１．１−願昭５８−１２５７１４号２
、発明の名称　レーザー発振器 ３、補正をする者 代表者片１１１仁八部 ５、補正の対象　（朋１’ｌｉ先０３．２１３）３４７
．１’ｌ胃部）以上 特許請求の範囲 ＋１１　対向１−て配設される反射鏡の間にレーザー媒
質が満され、この■／−ザー媒質に励起エネルギーを与
えてレーザー光を発生させるレーザー発振器において、
」１記反射鋭にこれを冷却する気体を吹きつけることを
特徴とするレーザー発振器。 （２）反射鏡に吹きつける気体は冷却された乾燥気体で
あることを特徴とする特許請求の範囲第１項記載のレー
ザー発根器。 （３）反射鏡に吹きつける気体はレーザー媒質ガスであ
ることを特徴とする特許請求の範囲第１項記載のレーザ
ー発振器。Figure 1 is a side sectional view showing a conventional laser oscillator;
The figure is a side cross-sectional view for explaining a partially reflecting mirror portion of a conventional laser oscillator, FIG. 3 is a side cross-sectional view of a laser oscillator according to one embodiment of the present invention, and FIG. FIG. 2 is a side cross-sectional view of the laser oscillator. In the figures, the same symbols indicate the same or equivalent parts, (1) is the laser medium, (2) is the container, (aA) (3B) is the electrode, (4) is the total reflection mirror, (5A) (5B) is Mirror holder, (6) is a partial reflecting mirror, (8) is a laser oscillator, (12) is a cooling water, (14) is a laser beam, (20)
(25) is a cooler, (21) (24) is a blower, (2
3) is air, and (26) is a dryer. Agent Masuo Oiwa Figure 1 Figure 2 337- Procedural amendment (voluntary) 1. Display of the incident 1.1-Gan Sho 58-125714 No. 2
, Title of the invention Laser oscillator 3, Representative piece 111 of the person making the correction 5, Subject of correction (Tomo 1'li 03.213) 347
．． Claims +11 A laser oscillator in which a laser medium is filled between reflecting mirrors disposed opposite to each other and generates laser light by applying excitation energy to the laser medium. In,
``1. A laser oscillator characterized by blowing a gas to cool the reflection point. (2) The laser root generator according to claim 1, wherein the gas blown onto the reflecting mirror is a cooled dry gas. (3) The laser oscillator according to claim 1, wherein the gas blown onto the reflecting mirror is a laser medium gas.

Claims (3)

【特許請求の範囲】[Claims] （１）・　対向して配設される反射鏡の間にレーザー媒
質が満され、このレーザー媒質に励起エイ・ルギーを与
えてレーザー光を発生させるレーザー発振器において、
上記反射鏡にこれを冷却する気体を吹きつけることを特
徴とするレーザー発−賑器。(1). In a laser oscillator, a laser medium is filled between reflecting mirrors disposed facing each other, and excitation energy is applied to this laser medium to generate laser light.
A laser generator characterized in that a gas for cooling the reflecting mirror is blown onto the reflecting mirror. （２）反射鏡に吹きつける気体は冷却された乾燥気体で
あれことを特徴とする特許請求の範囲第１項記載のレー
ザー発振器。(2) The laser oscillator according to claim 1, wherein the gas blown onto the reflecting mirror is a cooled dry gas. （３）反射鏡に吹きつける気体はレーザー媒質ガスであ
ることを特徴とする特許請求の範囲第１項記載のレーザ
ー発振器。(3) The laser oscillator according to claim 1, wherein the gas blown onto the reflecting mirror is a laser medium gas.
JP12571483A 1983-07-11 1983-07-11 Laser oscillator Pending JPS6017973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12571483A JPS6017973A (en) 1983-07-11 1983-07-11 Laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12571483A JPS6017973A (en) 1983-07-11 1983-07-11 Laser oscillator

Publications (1)

Publication Number Publication Date
JPS6017973A true JPS6017973A (en) 1985-01-29

Family

ID=14916926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12571483A Pending JPS6017973A (en) 1983-07-11 1983-07-11 Laser oscillator

Country Status (1)

Country Link
JP (1) JPS6017973A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6398165A (en) * 1986-10-14 1988-04-28 Fanuc Ltd Laser
BE1002533A4 (en) * 1988-10-04 1991-03-12 E L T N V UITKOPPELINRICHTING FOR gas lasers.
JPH05102554A (en) * 1991-10-07 1993-04-23 Matsushita Electric Ind Co Ltd Gas laser oscillator

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52156642A (en) * 1976-06-21 1977-12-27 Nec Corp Laser mirror supporting device
JPS5741830A (en) * 1980-08-26 1982-03-09 Sanraizu Kogyo Kk Method and device for burring work of pipe inner wall
JPS589924A (en) * 1981-07-10 1983-01-20 Sumitomo Metal Ind Ltd Production of high strength oil well pipe of high stress corrosion cracking resistance
JPS5896788A (en) * 1981-12-03 1983-06-08 Toshiba Corp Lateral flow type gas laser device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52156642A (en) * 1976-06-21 1977-12-27 Nec Corp Laser mirror supporting device
JPS5741830A (en) * 1980-08-26 1982-03-09 Sanraizu Kogyo Kk Method and device for burring work of pipe inner wall
JPS589924A (en) * 1981-07-10 1983-01-20 Sumitomo Metal Ind Ltd Production of high strength oil well pipe of high stress corrosion cracking resistance
JPS5896788A (en) * 1981-12-03 1983-06-08 Toshiba Corp Lateral flow type gas laser device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6398165A (en) * 1986-10-14 1988-04-28 Fanuc Ltd Laser
BE1002533A4 (en) * 1988-10-04 1991-03-12 E L T N V UITKOPPELINRICHTING FOR gas lasers.
JPH05102554A (en) * 1991-10-07 1993-04-23 Matsushita Electric Ind Co Ltd Gas laser oscillator

Similar Documents

Publication Publication Date Title
JP2001524761A (en) Cooling device for optical crystal or laser crystal, respectively
JP3083688B2 (en) Solid-state laser device
JPS6017973A (en) Laser oscillator
JP2741433B2 (en) Laser oscillator
JPS60257584A (en) Photodetector built-in type semiconductor laser
JPH05183220A (en) Semiconductor laser-excited solid-laser device
JPH0237710B2 (en)
JPH0482281A (en) Solid laser oscillator
JPS6344310B2 (en)
JPS5879787A (en) Variable device for laser output
JP2005332842A (en) Laser oscillator
KR100396676B1 (en) Apparatus cooling laser solid
JPH03257979A (en) Laser oscillator
JPH02153582A (en) Laser diode excitation solid-state laser
JPS627179A (en) Laser oscillator
JPS62243382A (en) Laser oscillator
JPH08111556A (en) Proximity two-wavelength variable laser device
JPH0669567A (en) Semiconductor laser-excited solid laser equipment
SU274872A1 (en) Mode-controlling laser
JP3475662B2 (en) Gas laser oscillator
JPH08307017A (en) Laser device
KR100322694B1 (en) Second harmonic generator and method for fabricating the same
KR100437800B1 (en) Apparatus for cooling of solid state laser
JP2002335029A (en) Band narrowed laser
JP2001053356A (en) Crystal retainer used for laser device for processing