JPS60172463A - Surface polishing apparatus - Google Patents

Abstract

PURPOSE:To improve the out of roundness by generating the magnetic lines of force in the radial direction from the axis center of a workpiece installed into a container by a magnetic-field generator and generating the relative turn of working liquid for the workpiece by a relative turning means, thus allowing the relative turning collision of grinding grains onto the surface of the workpiece. CONSTITUTION:When an electromagnetic coil 38 is put into electric conduction, a magnetic field whose magnetic lines of force are directed in the direction of arrow (a) is generated, and then an electric motor 50 is put into electric conduction, and then magnets 58 and 42 synchronously revolve, and the magnetic fluid is turned by the rotary magnetic field, and a turning flow is generated in the direction of arrow (b) around a workpiece 70. Therefore, the magnetic fluid is applied with an attraction force in the direction of arrow (a) and a turning moment in the direction of arrow (b) and shifts towards the center at the speed in the vector sum of each speed in the both directions, and also grinding grains shift and uniformly collide onto the outer periphery of the workpiece, and surface polishing is performed, and the out of roundness is improved. Since the grinding grains are turned and the magnetic fluid is attracted onto the workpiece by the magnetic lines of force in the radial direction from the axis center of the workpiece, the vertical force component of the collision force of the grinding grains increases, the the collision effect is increased.

Description

【発明の詳細な説明】 ［技術分野］ −２− 本発明は表面研磨装置に関するものであり、特に磁性流
体に砥粒を混合してなる加工液に被加工物を浸漬し、被
加工物軸心から放射状の磁力線を生じさ１！る磁界を与
えた状態で被加工物と加工液との間に相対回動を生じさ
せる表面研磨装置に関するものである。本発明の表面研
磨装置は、例えば円筒状もしくは丸棒状のセラミック、
ガラス、金属等の被加工物の表面研磨に使用して有効で
ある。Detailed Description of the Invention [Technical Field] -2- The present invention relates to a surface polishing device, and in particular, a workpiece is immersed in a machining liquid made of a magnetic fluid mixed with abrasive grains, and the axis of the workpiece is polished. Radial lines of magnetic force are generated from the heart1! The present invention relates to a surface polishing device that generates relative rotation between a workpiece and a machining fluid while applying a magnetic field. The surface polishing device of the present invention includes, for example, cylindrical or round bar-shaped ceramics,
It is effective when used for surface polishing of workpieces such as glass and metal.

［従来技術］ 従来、磁性流体に砥粒を混合した加工液に浸漬された被
加工物を研磨する表面研磨装置として、第１図に示すｊ
；うに、加工液を収容した−に喘開放の円筒容器２内に
被加工物４を浸漬し、各磁極６．７及び８．９間に交番
磁界を発生させるようにしたものや、第２図に示すよう
に内円筒、外円筒よりなる二重円筒１２を回転軸１４に
よって回動可能に支持し、かつ二重円筒１２内に電磁コ
イル１６と加工液を収容する容器１８とを設け、磁極１
つ、２０間に放射状の静磁場を作り加工液中の磁−３− 性流体ど砥粒どをこれに沿って配向させると共に加工液
中で被加工物２１をクランプしたスピンドル２２を回転
可能どした０のや、第３図に示すように加工液の容器２
４内の被加工物２６表面に対して一定の隙間Ｇを隔てた
ラップ２８を回動可能に支持すると共に電磁コイル２つ
、３０によって、ラップ２８と鉄心３２との間に磁界を
設けたものなどが提案されている。特開昭５７−１６３
０５７号公報に示される表面（σ１磨装置がこれである
。[Prior Art] Conventionally, a surface polishing device shown in FIG.
; The workpiece 4 is immersed in a cylindrical container 2 with a vent opening containing a machining fluid, and an alternating magnetic field is generated between each magnetic pole 6.7 and 8.9. As shown in the figure, a double cylinder 12 consisting of an inner cylinder and an outer cylinder is rotatably supported by a rotating shaft 14, and an electromagnetic coil 16 and a container 18 containing a machining fluid are provided inside the double cylinder 12. magnetic pole 1
A radial static magnetic field is created between the two to orient the magnetic fluid and abrasive grains in the machining fluid along this field, and the spindle 22 that clamps the workpiece 21 in the machining fluid can be rotated. 0, and as shown in Figure 3, the machining liquid container 2.
A wrap 28 is rotatably supported with a certain gap G between the surface of the workpiece 26 in 4, and a magnetic field is provided between the wrap 28 and the iron core 32 by two electromagnetic coils 30. etc. have been proposed. Japanese Patent Publication No. 57-163
This is the surface (σ1 polishing device) shown in Publication No. 057.

ところが、第１図に示Ｊ゛ものは被加工物４が固定され
、かつ砥粒の移動方向が一様でないので、被加工物表面
に対づる砥粒の衝突に部分的偏りを生じ、その結果円形
断面をイｊりる被加工物の真円度を向上さけることが困
難であり、第２図に示１ものは放口」状の静磁場の中間
部で被加工物を回転させ、かつ加工液の容器を回転させ
るので、被加工物に対Ｊる砥粒の衝突ヤ）摩１察が一様
でなく、ぞの結果、前記同様被加工物の真円度を向上さ
せることが困難であり、また第３図に示Ｊものは被加工
物の平面部を研磨するものであり、円形断面を−４− 有する被加工物の表面研磨に使用することが困難である
という問題点があった。However, in the case of J shown in FIG. 1, the workpiece 4 is fixed and the moving direction of the abrasive grains is not uniform, so the impact of the abrasive grains against the workpiece surface is partially biased, and the As a result, it is difficult to avoid improving the roundness of a workpiece with a circular cross section, and the workpiece shown in Figure 2 rotates the workpiece in the middle of a static magnetic field in the shape of an opening. In addition, since the machining liquid container is rotated, the impact of the abrasive grains on the workpiece is not uniform, and as a result, the roundness of the workpiece cannot be improved as described above. Moreover, the method shown in Fig. 3 is for polishing the flat part of the workpiece, and it is difficult to use it for polishing the surface of the workpiece that has a circular cross section. was there.

［発明の目的］ 本発明はこのＪ：うな事情を背景としてなされたもので
あり、本発明の目的とするところは、円形断面を有する
被加工物の真円度を向上させ１ｑる磁性流体に砥粒を混
合した加工液を使用する表面研磨装置を提供することに
ある。[Object of the Invention] The present invention was made against the background of the above circumstances, and an object of the present invention is to improve the roundness of a workpiece having a circular cross section, and to improve the roundness of a workpiece having a circular cross section. An object of the present invention is to provide a surface polishing device that uses a machining liquid mixed with abrasive grains.

［発明の構成］ このような目的を達成するためになされた本発明の要旨
とするところは、磁性流体に砥粒を混合してなる加工液
に磁場を与えた状態で加工液に浸漬された被加工物と加
工液との間に相対回動を生じさせる表面研磨装置であっ
て、加工液を収容する容器内に被加工物を浸漬した状態
で取付は得る被加工物取付部材を設けると共に、容器内
に取付けられる被加工物軸心から前記容器外周方向に放
射状の磁力線を発生させる磁界発生装置を設け、さらに
被加工物表面と加工液との間に相対回動を生じさせる相
対回動手段を設けたことにある。[Structure of the Invention] The gist of the present invention, which has been made to achieve the above object, is that a magnetic fluid is immersed in a machining fluid in which a magnetic field is applied to the machining fluid, which is made by mixing abrasive grains with a magnetic fluid. A surface polishing device that generates relative rotation between a workpiece and a machining fluid, the workpiece is provided with a workpiece mounting member that can be mounted while the workpiece is immersed in a container containing the machining fluid. , a magnetic field generating device that generates radial magnetic lines of force from the axis of the workpiece installed in the container in the direction of the outer circumference of the container is provided, and a relative rotation that generates relative rotation between the surface of the workpiece and the machining fluid. The reason lies in the provision of means.

−５− ［実施例］ 以下本発明のいくつかの実施例を図面に基づいて詳細に
ぴ２明Ｊる。-5- [Examples] Hereinafter, some embodiments of the present invention will be described in detail based on the drawings.

第４図において、３／Ｉは加工液を収容する上部が開口
した円筒状の非磁性体からなる容器であり、その内部中
心には磁性体Ｊ：りなる軸状の支持部材３６の一端部が
挿入立設され、液密に固定されている。容器３４内にお
かれた支持部材３６の部分は被加工物取付部材をなし、
円筒状の被加工物を嵌挿して取付【ノ１ｑるにうにされ
ている。支持部材３６の容器３４外の部分には電磁コイ
ル３８が設けられ、支持部ｔＡ３６を磁化し得ると只に
下端部は継鉄４０の底面部に固定されている。支持部材
３６には、容器３４の底面外側付近に磁石４２を片持状
に回動可能に支持し得る下部回転磁石保持部材４４が取
付けられている。保持部材４４には、タイミングベルト
４６を巻１１トは得るプーリ部４８が設けられ、−万雷
動機５０にカップリング５２を介して結合された駆動軸
５４にはタイミングプーリ５６が固定され、ベルト４６
が掛けられるこ−　６　− どによって保持部材４４が回転駆動相（ＩＦどされてい
る。In FIG. 4, 3/I is a container made of a cylindrical non-magnetic material with an open top that accommodates the machining fluid, and a magnetic material J is located at the center of the container. is inserted and erected and fixed in a liquid-tight manner. The portion of the support member 36 placed within the container 34 constitutes a workpiece attachment member;
It is installed by fitting a cylindrical workpiece into it. An electromagnetic coil 38 is provided in a portion of the support member 36 outside the container 34, and the lower end portion is fixed to the bottom surface portion of the yoke 40 only when the support portion tA36 can be magnetized. A lower rotating magnet holding member 44 that can rotatably support the magnet 42 in a cantilevered manner near the outside of the bottom surface of the container 34 is attached to the supporting member 36 . The holding member 44 is provided with a pulley portion 48 on which a timing belt 46 is wound.A timing pulley 56 is fixed to a drive shaft 54 connected to a lightning motor 50 via a coupling 52, and 46
The holding member 44 is rotated in a rotational drive phase (IF) by being applied with.

容器３７′ｌの」７方には、磁石５８を加工液上面付近
で回動可能に片持状に支持し得る前記保持部材４４ど同
様な構成の上部回転磁石保持部材６０が逆向きに、支持
部材３６の軸心延長線上に位置する支持軸６２にＪ：っ
て取付けられ、プーリ部６４と駆動軸５４に固定された
タイミングプーリ６６とがタイミングベル１−６８を介
して連結され、保持部ｔｔＡ　６０が回転駆動可能とさ
れている。各磁石４２．５８は互に異なる磁極が相対し
て位置され、かつタイミングプーリ５６と６６及びプー
リ部４８と６４どは、それぞれ歯数が同じとされ、両磁
石４２．５８が同方向に同速度で同期して回転駆動され
１りる」；う構成されている。尚、タイミングベルト、
プーリに代えて、歯車を使用し保持部材４４．６０を同
回転としても良い。上記構成の両保持部月４４．６０は
被加工物７０の軸心を回転中心どする回転磁界を生じ、
後）ホするように容器３４内の加工液がこれに引きづら
れて旋回流を生−７− じ、被加工物７０どの間に相対回動を生ずる。すなわち
、両保持部祠４４．６０は相対回動手段をなしている。On the "7" side of the container 37'l, there is an upper rotating magnet holding member 60 having a structure similar to that of the holding member 44, which can rotatably support the magnet 58 near the upper surface of the machining liquid in a reverse direction. A timing pulley 66 fixed to a pulley portion 64 and a drive shaft 54 is connected via a timing bell 1-68 and held. The portion ttA 60 can be rotated. The magnets 42.58 have different magnetic poles facing each other, and the timing pulleys 56 and 66 and the pulley portions 48 and 64 have the same number of teeth, and both magnets 42.58 are arranged in the same direction. They are configured to be rotated synchronously at a high speed. In addition, timing belt,
Instead of a pulley, gears may be used to rotate the holding members 44 and 60 at the same time. Both holding parts 44 and 60 having the above configuration generate a rotating magnetic field with the axis of the workpiece 70 as the rotation center,
After that, the machining fluid in the container 34 is dragged by this to create a swirling flow, causing relative rotation between the workpieces 70. In other words, both holding portions 44 and 60 constitute relative rotation means.

尚、保持部材６０は、被加工物７０の取付【ノ、取外し
時に邪魔にならぬＪ：う側方へ移動可能どされている。Note that the holding member 60 is movable to the side so that it does not get in the way when the workpiece 70 is attached or removed.

７２．７４．７６は軸受を示す。72.74.76 indicates bearings.

容器３４内に入れる加工液は、磁性流体と砥粒と混合さ
せＩこものである。磁性流体は液相中にコロイドサイズ
（１５０Δ以下）の強磁性粉末を分散させたコロイド溶
液であり、超常磁性を有し、容易に磁気飽和され動く、
ヒステリシスを示さない。通常マグネタイ１〜（Ｆｅｓ
Ｏａ）を分散質とし、分散媒として水、炭化水素、エス
テル、ジエステル、弗化水素などを使用する。砥粒は、
例えば被加工物がレラミックスの場合にはダイヤモンド
粒子などを使用し、金属の場合にはアルミナ粒子などを
使用する。The machining liquid placed in the container 34 is a mixture of magnetic fluid and abrasive grains. Magnetic fluid is a colloidal solution in which ferromagnetic powder of colloidal size (150Δ or less) is dispersed in a liquid phase, and it has superparamagnetism and is easily magnetically saturated and moves.
Does not exhibit hysteresis. Normal magnet tie 1 ~ (Fes
Oa) is used as a dispersoid, and water, hydrocarbon, ester, diester, hydrogen fluoride, etc. are used as a dispersion medium. The abrasive grains are
For example, if the workpiece is Reramix, diamond particles are used, and if it is metal, alumina particles are used.

継鉄／１０の上端部には、容器３／Ｉ外周どの間に一定
の隙間を有する磁極が形成され、電磁コイル３８に通電
されたどさ、支持部材３６先端部と継−〇　− 畝４０上端部とは互に異なる磁極に磁化される。A magnetic pole having a certain gap between the outer circumference of the container 3/I is formed at the upper end of the yoke/10, and when the electromagnetic coil 38 is energized, it connects to the tip of the support member 36 and the ridge 40. The upper end is magnetized to different magnetic poles.

継鉄４０と支持部材３６とによって磁気回路が形成され
、第５図に示すにうに支持部材３６から放飼状に磁力線
が向かう静磁場が発生する。すなわち、支持部材３６、
継鉄４０、電磁コイル３８ににつて、磁界発生装置が構
成される。また、被加工物が磁性体の丸棒状である場合
には、容器３４内の支持部材３６に代えて、被加工物の
端部等を把持し得るような被加工物取付部材の使用が可
能であるが、その場合、前記被加工物が一方の磁極を構
成Ｊることになる。A magnetic circuit is formed by the yoke 40 and the support member 36, and as shown in FIG. 5, a static magnetic field is generated in which lines of magnetic force are directed from the support member 36 in a free-flowing manner. That is, the support member 36,
The yoke 40 and the electromagnetic coil 38 constitute a magnetic field generating device. Furthermore, if the workpiece is a round bar-shaped magnetic material, a workpiece mounting member that can grip the end of the workpiece can be used in place of the support member 36 in the container 34. However, in that case, the workpiece will constitute one of the magnetic poles.

以下、前記実施例の作用効果について説明する。Hereinafter, the effects of the above embodiment will be explained.

電磁コイル３８に通電されると第５図矢印ａ方向に磁力
線が向かう磁界を生じる。ついで、電動機５０に通電さ
れ駆動されると、」二部と下部の回転磁石保持部材６０
ど４４との磁石５８．４２が同期回転し、その回転磁界
によって磁性流体が旋回し、被加工物７０のまわりに矢
印す方向の旋回流を生じる。従って、磁性流体は矢印ａ
方向の吸引力と矢印す方向の回転力を受け、矢印ａ方向
とｂ−９一 方向との各速度のベクＩ・ル相の速度で中心に向かって
移動するが、砥粒もこれに引きづられて移動し、被加工
物の外周に一様に衝突し、被加工物の表面研磨が行なわ
れると共にその真円度を向上させ得る。このように、砥
粒は被加工物のまわりを旋回するだ（Ｊでなく、被加工
物軸心から放飼状に生じている磁力線の作用により磁性
流体が被加重［物に吸引されるのにつれて、砥粒も被加
工物に向かう方向に吸引されるので、砥粒の被加工物に
対する衝突力の垂直分力が大きくなり、衝突効果が大き
い。まＩこ、電磁］イル３８の通電を断続的に行ない支
持部材３６、継鉄４０間の磁界発生を断続させることに
ｊ：す、砥粒の被加工物に対する衝突効果を高めること
ｔ）可能である。When the electromagnetic coil 38 is energized, a magnetic field is generated in which lines of magnetic force are directed in the direction of the arrow a in FIG. Then, when the electric motor 50 is energized and driven, the second part and the lower rotating magnet holding member 60
The magnets 58 and 42 rotate in synchronization with the magnet 44, and the magnetic fluid is swirled by the rotating magnetic field, producing a swirling flow around the workpiece 70 in the direction indicated by the arrow. Therefore, the magnetic fluid is
In response to the attraction force in the direction of the arrow and the rotational force in the direction of the arrow, the abrasive grain moves toward the center at a velocity in the vector I phase of each velocity in the direction of arrow a and the direction of arrow b-9. It moves along the surface of the workpiece and uniformly collides with the outer periphery of the workpiece, polishing the surface of the workpiece and improving its roundness. In this way, the abrasive grains rotate around the workpiece. As the abrasive grains are attracted toward the workpiece, the vertical component of the collision force of the abrasive grains with the workpiece increases, resulting in a large collision effect. By intermittent generation of the magnetic field between the support member 36 and the yoke 40, it is possible to enhance the impact effect of the abrasive grains on the workpiece.

なお、継鉄４０ど支持部材３６との磁極を逆にし、支持
部材３６から継鉄４０に磁力線が向かうようにしても、
磁性流体とこれに引ぎづられて移動づる砥粒どの移動方
向は矢印ａ方向であることには変わりはない。また、保
持部材６０，４４の回転方向は前記方向と逆に１゛るこ
とは、勿論可能−１０− である。Note that even if the magnetic poles of the yoke 40 and the supporting member 36 are reversed so that the lines of magnetic force are directed from the supporting member 36 to the yoke 40,
The moving direction of the magnetic fluid and the abrasive grains that are dragged by it is still in the direction of arrow a. Furthermore, it is of course possible that the rotational direction of the holding members 60, 44 can be rotated by 1° in the opposite direction to the above-mentioned direction.

被加工物が磁性体の場合には、丸棒でも前記手段により
表面研磨をなし得る。但し、容器３４内の支持部材３６
端部を短かくし、被加工物を支持部材３６の軸端部に取
イ」【ノる必要がある。If the workpiece is a magnetic material, even a round bar can be surface polished by the above method. However, the support member 36 inside the container 34
It is necessary to shorten the end portion and attach the workpiece to the shaft end of the support member 36.

前記実施例において上部保持部材６０の取付けを中止し
、下部保持部材４４の磁石を２個使用しこれを両持ち状
態に取付けることも可能である。It is also possible to discontinue the attachment of the upper holding member 60 in the embodiment described above, and to use two magnets of the lower holding member 44 and attach them in a state where they are held on both sides.

また、保持部材４４．６０に代えて、容器３４の上下に
複数の界磁コイルを設は多相電圧を加えることにより、
回転磁界を生ずるようにしてもよい。Furthermore, instead of the holding members 44 and 60, a plurality of field coils can be installed above and below the container 34, and by applying a multiphase voltage,
A rotating magnetic field may also be generated.

第６図は本発明の他の実施例を示ずものであり、支持部
材７８は、１２／１０の底部に設けられた軸受８０によ
って回転可能に支持されると共に電動機８２に取付（プ
られた歯車８４と支持部材７８に固定された歯車８６と
を噛合せることによって回転駆動可能とされている。さ
らに、支持部材７８は容器３４内に回転可能に取付けら
れ、かつシール８８によって液もれが防止されている。FIG. 6 shows another embodiment of the present invention, in which a support member 78 is rotatably supported by a bearing 80 provided at the bottom of the 12/10 and is attached to an electric motor 82 (pulled). Rotation is possible by meshing the gear 84 with a gear 86 fixed to the support member 78.Furthermore, the support member 78 is rotatably mounted within the container 34, and a seal 88 prevents liquid leakage. Prevented.

なお、前記実施例と変更のない部分は、同一番号を付し
＝　１１　− て説明を省略Ｊる。電繕ｔコイル３８の通電によって、
支持部材７８から放口１状に向かう磁力線が生ずるが、
その状態で電動閤８２にＪ：つて支持部材７８が回転駆
動されると、磁界が回転し磁性流体がこれに引きづられ
て旋回し、砥粒も旋回する。It should be noted that the same parts as in the above embodiment are designated by the same numbers and the description thereof will be omitted. By energizing the electric repair T coil 38,
Lines of magnetic force are generated from the support member 78 toward the opening 1, but
In this state, when the support member 78 is rotated by the electric spacing 82, the magnetic field rotates, the magnetic fluid is dragged by it and turns, and the abrasive grains also turn.

すなわち、支持部材７８、電動機８２イ↑どは相対回動
手段をなしている。That is, the support member 78, the electric motor 82, etc. constitute relative rotation means.

第７図は本発明のざらに他の実施例を示すものであり、
撹拌羽１１Ｎ　９０をイｊＪる撹拌装置９２が電動機（
図示けず）にＪ、って回転部ｕＪ可能とされている。撹
拌装置９２４；Ｌ支１？１部祠３６に取（ｄけられる被
加工物７０に３：ｌ　シーＣ加圧液の相対回動を生じさ
せる相対回動手段をなしている。FIG. 7 roughly shows another embodiment of the present invention,
The stirring device 92 that drives the stirring blades 11N 90 is an electric motor (
(not shown), the rotating part uJ is enabled. Stirring device 924; L support 1 - 1 part serves as a relative rotation means for causing relative rotation of the pressurized liquid on the workpiece 70 to be placed in the 3:l C pressurized liquid.

以上本発明のいくつかの実施例について説明したが、本
発明はこのＪ、うな実施例に何等限定されるものではな
く、本発明の要旨を逸脱しない範囲において、種々ｔす
る態様で実施し１りることは勿論である。Although several embodiments of the present invention have been described above, the present invention is not limited to these embodiments in any way, and may be carried out in various manners without departing from the gist of the present invention. Of course, it is possible to do so.

［発明の効果］ 以上詳記したＪ、うに、本発明にＪ：れば磁界発生−１
２− 装置ににって容器内に取付けられる被加工物軸心から放
射状に磁力線を発生させると共に相対回動手段ににって
被加工物に対して加工液の相対回動を生ずるようにされ
るように構成されているので、被ハロＴ物表面に対して
ハロエ液中の砥粒が相対回動しつつ衝突し被加工物の真
円麿を向上させ得る。[Effect of the invention] According to the above-detailed J, sea urchin, magnetic field generation-1 according to the present invention
2- The device generates lines of magnetic force radially from the axis of the workpiece installed in the container, and the relative rotation means causes the machining fluid to rotate relative to the workpiece. Since the abrasive grains in the halo liquid collide with the surface of the workpiece while rotating relative to each other, the roundness of the workpiece can be improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は表面研磨装置の第１の従来例を示す平面図、第
２図は同じく第２の従来例を示す断面図、第３図は同じ
く第３の従来例を示す断面図である。 第４図は本発明の〜実施例を示す断面図、第５図は同実
施例の作動説明図、第６図は本発明の他の実施例を示す
断面図、第７図は本発明のさらに他の実施例を示す断面
図である。 ３４・・・容器 ４４・・・下部回転を銖石保持部（相対回動手段）６０
・・・上部回転磁石保持部（相対回動手段）７０・・・
被加工物 ７８・・・支持部材（相対回動手段） ９２・・・撹拌装置（相対回動手段） −１３− 第１図 ＼ 第３図 第２図 第５図 り 第６図 １址弘 特開昭ＧＯ−１７２４６３（６） 第７図FIG. 1 is a plan view showing a first conventional example of a surface polishing apparatus, FIG. 2 is a cross-sectional view of the second conventional example, and FIG. 3 is a cross-sectional view of a third conventional example. FIG. 4 is a sectional view showing an embodiment of the present invention, FIG. 5 is an explanatory diagram of the operation of the same embodiment, FIG. 6 is a sectional view showing another embodiment of the present invention, and FIG. FIG. 7 is a sectional view showing still another embodiment. 34... Container 44... The lower part is rotated by the orestone holding part (relative rotation means) 60
... Upper rotating magnet holding part (relative rotation means) 70...
Workpiece 78... Support member (relative rotation means) 92... Stirring device (relative rotation means) -13- Figure 1\ Figure 3 Figure 2 Figure 5 Figure 6 Figure 1 Kaisho GO-172463 (6) Figure 7

Claims (1)

【特許請求の範囲】 １　磁性流体に砥粒を混合してなる加工液に磁場を与え
た状態で加工液に浸漬された被加工物と加工液との間に
相対回動を生じさせる表面１ｉｌＩ＠装置であって、加
工液を収容する容器内に被加工物を浸漬した状態で取付
は得る被加工物取付部材を設けると共に、容器内に取付
けられる被加工物軸心から前記容器外周方向に放射状の
磁力線を発生させる磁界発生装置を設け、さらに被加工
物表面と加工液との間に相対回動を生じさせる相対回動
手段を設けたことを特徴とする表面研磨装置。 ２　磁界発生装置は、容器内に設けられ円筒状の波力Ｕ
工物内孔に嵌合させ得る磁性体よりなる被加工物取付部
材または磁性体よりなる丸棒状の被加工物を取付は得る
被加工物取付部材に、容器外に立設した磁性体よりなる
軸状の支持部材を結合し、該支持部材に電磁コイルを設
け、容器外周部−１− 付近に１若した継鉄どの間に磁気回路を形成さｌたもの
である特ｉｉ′ｒ請求の範囲第１項記載の表面研磨装置
。 ３　相対回動手段は、容器内の被加工物軸心の延長線上
両端側に該延長線を回転中心として互に同期して回転駆
動可能に（社石が設【′Ｊられ、かつ該両磁石（ま互に
異なる磁極が相対して配置されたものである特許請求の
範囲第１項または第２項記載の表面研磨装置。 ４　相対回動手段は、イ１°装置が固定された加工液の
容器に対して支持部材が回転駆動可能かつ液密に取付（
Ｊられ、しかｂ支持部材」］端部には被加工物取付部材
が固定されたものである特許請求の範囲第１項または第
２項記載の表面ｒｉ１１磨装置。 ５　相対回動手段は、加工液の容器内に設（Ｊだ撹拌羽
根が被１＋ｌｌ　：ｔ−物取付部材を中心として回転駆
動可能どされＩこらのである１４許請求の範囲第１項ま
たは第２項ｔｔ［載の表面Ｄ１磨装胃。[Claims] 1. A surface that causes relative rotation between a workpiece immersed in a machining fluid and the machining fluid while a magnetic field is applied to the machining fluid, which is a mixture of magnetic fluid and abrasive grains. ＠The device is equipped with a workpiece mounting member that can be mounted while the workpiece is immersed in a container containing machining fluid, and is provided with a workpiece mounting member that extends from the axis of the workpiece installed in the container in the direction of the outer circumference of the container. A surface polishing apparatus comprising: a magnetic field generating device that generates radial lines of magnetic force; and a relative rotation means that generates relative rotation between the surface of a workpiece and a machining liquid. 2 The magnetic field generator is installed inside the container and generates a cylindrical wave force U.
A workpiece mounting member made of a magnetic material that can be fitted into the inner hole of the workpiece or a round bar-shaped workpiece made of a magnetic material is attached to the workpiece mounting member made of a magnetic material installed upright outside the container. A shaft-shaped supporting member is coupled, an electromagnetic coil is provided on the supporting member, and a magnetic circuit is formed between a yoke provided near the outer periphery of the container. The surface polishing device according to scope 1. 3. The relative rotation means can be rotated in synchronization with each other with the extension line as the rotation center on both ends of the extension line of the axis of the workpiece in the container. A magnet (a surface polishing device according to claim 1 or 2, in which different magnetic poles are arranged facing each other). 4. The relative rotation means is a processing device in which the A1° device is fixed The support member can be rotatably driven and liquid-tightly attached to the liquid container (
3. The surface polishing device according to claim 1 or 2, wherein a workpiece mounting member is fixed to the end portion. 5. The relative rotation means is provided in the processing liquid container (J), and the stirring blade is rotatably driven around the object mounting member. Section 2 TT [surface D1 polished stomach.