JPS60164819A - Flow rate controller - Google Patents
Flow rate controllerInfo
- Publication number
- JPS60164819A JPS60164819A JP2100484A JP2100484A JPS60164819A JP S60164819 A JPS60164819 A JP S60164819A JP 2100484 A JP2100484 A JP 2100484A JP 2100484 A JP2100484 A JP 2100484A JP S60164819 A JPS60164819 A JP S60164819A
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- flow rate
- signal
- abnormality
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Feeding And Controlling Fuel (AREA)
- Safety Devices In Control Systems (AREA)
- Flow Control (AREA)
- Measuring Volume Flow (AREA)
- Regulation And Control Of Combustion (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、電気信号に応じて流体の流量を制御する比例
制御弁を有するとともに、流路に流量センサ含有し、そ
の流量信号と、所望の設定信号の偏差信号に応じて比例
制御弁をコントロールする方式の流量制御装置に関する
。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention has a proportional control valve that controls the flow rate of fluid in accordance with an electrical signal, and also includes a flow rate sensor in the flow path, and uses the flow rate signal and desired settings. The present invention relates to a flow rate control device that controls a proportional control valve according to a signal deviation signal.
従来例の構成とその問題点 従来のこの種流量制御装置を第１図に示す。Conventional configuration and its problems A conventional flow rate control device of this type is shown in FIG.
第１図において、１ａは弁装置１、弁装置１を駆動する
駆動装置２から構成される比例制御弁、３は弁装置１の
出口側に直列接続された流量センサ、４は制御回路であ
る。In FIG. 1, 1a is a proportional control valve composed of a valve device 1 and a drive device 2 that drives the valve device 1, 3 is a flow rate sensor connected in series on the outlet side of the valve device 1, and 4 is a control circuit. .
弁装置１は、流体人口５と流体出口６、流体入口５と流
体出口６間の隔壁に形成された通ロア、及び弁体８、弁
体８を閉弁方向に付勢するバネ９を有する。The valve device 1 includes a fluid port 5, a fluid outlet 6, a passage lower formed in a partition wall between the fluid inlet 5 and the fluid outlet 6, a valve body 8, and a spring 9 that biases the valve body 8 in the valve closing direction. .
駆動装置２は、弁体８と共動するプランジャ１０、プラ
ンジャ１０の両端を支持する軸受１１、プランジャ１０
の外周に設けたコイル１２、及び３ パ
ヨーク１３から構成され、コイル１２に通電することに
より、プランジャ１０に電磁力Ｆｍが作用し、弁体８を
押下げて開弁する。The drive device 2 includes a plunger 10 that moves together with the valve body 8, a bearing 11 that supports both ends of the plunger 10, and the plunger 10.
The plunger 10 is composed of a coil 12 provided on the outer periphery of the plunger 12, and a third pipe yoke 13. By energizing the coil 12, an electromagnetic force Fm acts on the plunger 10, pushing down the valve body 8 and opening the valve.
流量センサ３は、流体出口６に連通ずる管状のハウジン
グ１４と、ハウジング１４内に収容され、流体の流通に
より回転する翼車１５と、翼車１５の縁部に設けた永久
磁石１６と、永久磁石１６に対向して設けられ、パルス
状の磁束変化を検知するホール素子１７とを有する。The flow rate sensor 3 includes a tubular housing 14 that communicates with the fluid outlet 6, a blade wheel 15 housed in the housing 14 and rotated by the flow of fluid, a permanent magnet 16 provided at the edge of the blade wheel 15, and a permanent magnet 16 provided at the edge of the blade wheel 15. It has a Hall element 17 that is provided opposite to the magnet 16 and detects pulse-like changes in magnetic flux.
制御回路４は、ホール素子１７の出力をパルス信号に変
換する検出回路１８と、パルス信号の発生に比例した電
圧何号を増幅して出力する積分回路１９と、所望の設定
信号と積分回路１９の信号を比較し、かつ偏差信号全出
力する比較器２０と、この偏差信号によってコイル１２
に給電する駆動回路２１を有する。The control circuit 4 includes a detection circuit 18 that converts the output of the Hall element 17 into a pulse signal, an integration circuit 19 that amplifies and outputs a voltage proportional to the generation of the pulse signal, and a desired setting signal and the integration circuit 19. A comparator 20 that compares the signals of
It has a drive circuit 21 that supplies power to the.
以上の構成において設定信号が供給されると、比較器２
０は、積分器１９と設定信号の偏差信号を駆動回路２１
に出力し、コイル１２へ給電がなされる。コイル１２に
通電するとプランジャ１０は下方の電磁力Ｆｍを受け、
バネ９に抗して開弁し、流体は流体出口６、回転翼１５
をへて流出する。流体が通過すると回転翼１５Ｉｉ回転
し、永久磁石１６によるパルス状の磁束の変化をホール
素子１７で検出し、検出回路１８からパルス信号を出力
させる。このパルス信号は、流量センサ３を通過する流
体の流量に比例している、したがって、設定信り“によ
り設定された流量となるよう常に流量センサ３によって
流量が監視され、弁開度がコントロールされる。また設
定信号を可変すれば、その信号に比例して高精度に流量
の制御を行なうことができる。In the above configuration, when a setting signal is supplied, the comparator 2
0 is a deviation signal between the integrator 19 and the setting signal to the drive circuit 21.
The coil 12 is supplied with power. When the coil 12 is energized, the plunger 10 receives a downward electromagnetic force Fm,
The valve opens against the spring 9, and the fluid flows through the fluid outlet 6 and the rotor blade 15.
It flows out through the water. When the fluid passes, the rotor blade 15Ii rotates, the Hall element 17 detects a change in the pulse-like magnetic flux caused by the permanent magnet 16, and the detection circuit 18 outputs a pulse signal. This pulse signal is proportional to the flow rate of the fluid passing through the flow rate sensor 3. Therefore, the flow rate is always monitored by the flow rate sensor 3 and the valve opening is controlled so that the flow rate is set according to the setting signal. Furthermore, by varying the setting signal, the flow rate can be controlled with high precision in proportion to the signal.
しかしながらこの従来例では、流体に異物が混入し、翼
車１５に付着した時、もしくは翼車１５の軸受２２が長
期使用によって摩耗した時、流体が流れているにもかか
わらず、ロックされてしまい、回転しなくなる場合があ
る。その結果、検出回路１８ｒ／′ｉ流量が流れていな
いと判断し、比較器２０は流量を増加する方向の出力信
号を駆動回路２１へ出力し、比例制御弁のコイル１２に
増加方５ ′・−巴゛
向の信号が通電され、弁体８は全開となる点まで変位し
てしまい設定信号がＯＦＦされるまで無制御状態で流体
は流出する。However, in this conventional example, when foreign matter gets mixed into the fluid and adheres to the impeller 15, or when the bearing 22 of the impeller 15 wears out due to long-term use, it becomes locked even though the fluid is flowing. , it may stop rotating. As a result, the detection circuit 18r/'i determines that the flow rate is not flowing, and the comparator 20 outputs an output signal in the direction of increasing the flow rate to the drive circuit 21, causing the coil 12 of the proportional control valve to increase the flow rate 5'. The signal in the - direction is energized, the valve body 8 is displaced to the point where it is fully open, and the fluid flows out in an uncontrolled state until the setting signal is turned off.
給湯器等にこの様な流量制御装置を使用した場合、特に
流体として燃料ガスを制御するものにおいてに、熱湯が
流出し火傷の原因となり、また爆発着火する場合があり
、極めて危険な状態となる場合があった。 、 。If such a flow rate control device is used in a water heater, etc., especially in one that controls fuel gas as the fluid, hot water may flow out and cause burns, or it may explode and ignite, creating an extremely dangerous situation. There was a case. , .
発明の目的
本発明は上記従来の問題点を解消するものであり、流体
が流れているにもかかわらず、流量センサの出力信号が
検出されない場合の異常を検出し、流体通路を遮断する
とともに、その異常を報知する安全性に優れた流量制御
装置を提供することを目的とする。Purpose of the Invention The present invention solves the above-mentioned conventional problems, and detects an abnormality when the output signal of the flow rate sensor is not detected even though fluid is flowing, and blocks the fluid passage. It is an object of the present invention to provide a flow control device with excellent safety that notifies the abnormality.
発明の構成
この目的を遠吠するため、本発明による流量制御装置は
、電気信号に応じて流体流量を制御する比例制御弁と、
流体通路内に設けられ流量に応じた電気信号を発生する
流量センサと、この流量ヤ６ベコ゛
ンサの出力信号に応じて前記比例制御弁を駆動させる制
御回路を有するとともに、前記比例制御弁の駆動信号が
あるにもかかわらず前記流量センサの信号が所定時間検
出されない時、流体通路を遮断するとともに、異常を報
知する異常検出回路を設けて構成したものである。Arrangement of the Invention To address this objective, a flow control device according to the invention comprises: a proportional control valve for controlling fluid flow in response to an electrical signal;
It has a flow rate sensor that is installed in the fluid passage and generates an electric signal according to the flow rate, and a control circuit that drives the proportional control valve according to the output signal of the flow rate sensor and a control circuit that drives the proportional control valve according to the output signal of the flow rate sensor. When the signal from the flow rate sensor is not detected for a predetermined period of time even though the flow rate sensor is present, the fluid passage is shut off and an abnormality detection circuit is provided which notifies the abnormality.
この構成により、設定信号の投入によって比例制御弁が
開弁し會流体が流れている状態で、万一流量センサが異
常となり、検出信号が得られなくなった場合、所定時間
後に異常検出回路によってその異常が検知され、流体通
路が遮断されるとともに、報知されるという安全動作が
行なわれる。With this configuration, if the proportional control valve opens when a setting signal is input and the fluid is flowing, if the flow rate sensor becomes abnormal and no detection signal can be obtained, the abnormality detection circuit detects the abnormality after a predetermined period of time. is detected, the fluid passage is shut off, and a safety operation is performed in which a notification is issued.
実施例の説明・ 、。Description of examples.
以下本発明の実施例を図面とともに詳細に説明する。Embodiments of the present invention will be described in detail below with reference to the drawings.
第２図は本発明による流量制御装置の一実施例を示し、
２３は異常検出回路であり、検出回路１８によってパル
ス信号に変換された信号の有無全検出するカクンタ、−
回路２４と、カクンクー回路２４の検出時間を設定する
タイマー回路２５と、７
設定信号が入力され、かつカウンター回路２４の信号が
タイマー回路２５によって設定された時間内に入力され
ない状態でのみ動作する判別回路２６と、判別回路２６
が動作した時、駆動回路２１に比例制御弁１ａの弁体８
を遮断する信号を与える遮断回路２７、及び異常をＬＥ
Ｄ等によって報知する報知回路２８とから構成されてい
る。FIG. 2 shows an embodiment of the flow rate control device according to the present invention,
23 is an abnormality detection circuit, which detects the presence or absence of a signal converted into a pulse signal by the detection circuit 18;
circuit 24; a timer circuit 25 for setting the detection time of the ticking circuit 24; circuit 26 and discrimination circuit 26
When the valve body 8 of the proportional control valve 1a is activated, the drive circuit 21
A cutoff circuit 27 provides a signal to cut off the
It is composed of a notification circuit 28 that provides notification by D or the like.
その他は第１図に示す従来例と同じであり、同一番号を
付して説明を省略する。The rest is the same as the conventional example shown in FIG. 1, so the same numbers are given and the explanation is omitted.
上記構成において、設定信号が投入されると、駆動回路
２１はコイル１２に通電し、プランジャ１０は下方に変
位して弁体８をバネ９０力に抗して開弁し、流体は流体
出口６へ流入し、さらに流量センサ３の翼車１５を通過
し、翼車１５は通過流量に比例して回転する。翼車１５
に固着された永久磁石１６はホール素子１７にパルス状
の磁束変化を与え、その信号は検出回路１８によってパ
ルス信ち−に変換され、さらに検出回路１８からのパル
ス信号に比例した電圧信号が積分回路１９から比較器２
０に入力される。In the above configuration, when a setting signal is input, the drive circuit 21 energizes the coil 12, the plunger 10 is displaced downward to open the valve body 8 against the force of the spring 90, and the fluid is supplied to the fluid outlet 6. The air flows into the flow rate sensor 3, and further passes through the impeller 15 of the flow rate sensor 3, and the impeller 15 rotates in proportion to the passing flow rate. wing wheel 15
The permanent magnet 16 fixed to the Hall element 17 gives a pulse-like magnetic flux change, and the signal is converted into a pulse signal by the detection circuit 18, and a voltage signal proportional to the pulse signal from the detection circuit 18 is integrated. From circuit 19 to comparator 2
It is input to 0.
比較器２０は積分回路１９の信号と設定信号の偏差信号
を駆動回路２１に与え、前記の制御ループによって設定
された流量となるよう弁の開度がコントロールされる。The comparator 20 provides a deviation signal between the signal from the integrating circuit 19 and the set signal to the drive circuit 21, and the opening degree of the valve is controlled so that the flow rate is set by the control loop described above.
したがって設定信号を可変すれば、その借り“に比例し
て高精度に流量をコントロールできる。Therefore, by varying the setting signal, it is possible to control the flow rate with high precision in proportion to the borrowing.
一方検出回路１Ｂのパルス信号はカウンター回路２４に
も入力されており、設定信号が入力され、かつカウンタ
ー回路２４の信号がタイマー回路２５によって設定され
た時間Ｔｓ内に入力されている状態では、判別回路２６
は動作せず、遮断回路２７及び報知回路２８は動作しな
い。On the other hand, the pulse signal of the detection circuit 1B is also input to the counter circuit 24, and when the setting signal is input and the signal of the counter circuit 24 is input within the time Ts set by the timer circuit 25, the discrimination circuit 26
does not operate, and the cutoff circuit 27 and notification circuit 28 do not operate.
そして万一、流体が流れている状態、すなわら設定信号
が入力されている状態で、翼車１５がロックしてしまい
流量検出が不可能となった場合、判別回路２６によって
異常判別され、遮断回路２７が動作して駆動回路２１に
遮断信号を与え、弁体８によって流体通路が遮断される
とともに、報知回路２８によってＬＥＤ等を点灯させ異
常報知する。In the event that the impeller 15 locks and flow rate detection becomes impossible while the fluid is flowing, that is, the setting signal is being input, the determination circuit 26 determines that there is an abnormality. The cutoff circuit 27 operates to give a cutoff signal to the drive circuit 21, the fluid passage is cut off by the valve body 8, and the notification circuit 28 turns on an LED or the like to notify of an abnormality.
９べ一：７゛
第３図は、各回路の出力信号波形を示し、タイマー回路
２５によって設定された時間Ｔｓ内にカウンター回路２
４の出力信号が検出されれば、判別回路はＯＮせず、Ｔ
′６においてカウンター回路２４の出力がない場合、判
別回路２６がＯＮすることを示している。9be1:7゛Figure 3 shows the output signal waveforms of each circuit.
If the output signal No. 4 is detected, the discrimination circuit is not turned on and T
If there is no output from the counter circuit 24 at '6, the discrimination circuit 26 is turned on.
なおタイマー回路２５で設定する検出時間Ｔｓは、制御
流体、応用器具に応じて不安全とならない値を設定する
。捷た遮断回路２７で比例制御弁１ａ’に遮断する例を
説明したが、流体通路に設けた電磁弁等の別の遮断弁（
図示せず）を遮断してもよい。Note that the detection time Ts set by the timer circuit 25 is set to a value that does not become unsafe depending on the control fluid and the applied equipment. Although we have described an example in which the proportional control valve 1a' is shut off by the disconnected shutoff circuit 27, another shutoff valve such as a solenoid valve provided in the fluid passage (
(not shown) may be shut off.
以上説明した本実施例によれば、比例制御弁１ａに翼回
転式の流量センサ３を設け、流量センサ３の検出信号と
設定信号の偏差信号に応じて比例制御弁１ａをフィード
バック制御するため、高精度の流量制御が可能であり、
また流体入口５側に圧力を一定に保つガバナを設ける必
要がない。According to the embodiment described above, the proportional control valve 1a is provided with the rotary blade type flow rate sensor 3, and the proportional control valve 1a is feedback-controlled in accordance with the deviation signal between the detection signal of the flow rate sensor 3 and the setting signal. Highly accurate flow control is possible,
Further, there is no need to provide a governor on the fluid inlet 5 side to keep the pressure constant.
また流体に異物が混入し、翼車１５にからんだ場合、も
しくは流量センサ３の軸受２２の摩耗等１０ページ
により翼車１５がロックされ、流体が流れているにもか
かわらず、流量検出が不可能となった場合の不安全を異
常検出回路２３によって検出し、異常状態がタイマー回
路２５によって設定される時間継続された場合、流体通
路を自動的に遮断するものであり安全性が高い。特に給
湯器に使用され、燃料ガスの流量を制御する場合の爆発
着火、急激な昇温による熱湯の流出等の危険状態を未然
に防ぐことが可能となる。Also, if foreign matter gets mixed into the fluid and gets entangled with the impeller 15, or if the bearing 22 of the flow sensor 3 wears out, the impeller 15 is locked and the flow rate cannot be detected even though the fluid is flowing. The abnormality detection circuit 23 detects the unsafe condition when the system becomes impossible, and if the abnormal state continues for a period of time set by the timer circuit 25, the fluid passage is automatically shut off, thus providing high safety. In particular, when used in water heaters to control the flow rate of fuel gas, it is possible to prevent dangerous situations such as explosions and ignitions and outflow of hot water due to rapid temperature rise.
発明の効果
以上詳述したように本発明は、電気信ち゛に応じて流量
を制御する比例制御弁と、流体通路内に設けられ、流量
に応じた電気信号全発生する流量センサと、この流量セ
ンサの出力信号に応じて前記比例制御弁を駆動させる制
御回路を有するとともに、前記比例制御弁の駆動信号が
あるにもかかわらず前記流量センサの出力信号が所定時
間検出されない時、異常を判別し、流体通Ｆ＠を遮断す
るとともに、報知する異常検出回路を設けて流量制御装
置を構成したものであり、流体が流れているに１１
もかかわらず、流量センサの異常によって流量検出が不
可能になった場合の不安全、もしくは制御精度の悪化を
危険状態とならない内に流体通路を遮断して防止し、か
つ報知するため、安全性が向上する。また流量センサは
正常であっても、比例制御弁及び比例制御弁を駆動する
制御回路の故障により開弁しない状態が発生した場合で
も、同様に異常が検知され、流体通路を遮断する信号が
出され、制御停止状態となるとともに、異常を報知する
ため、比例制御弁及び制御回路の異常を判別できる効果
もある。Effects of the Invention As detailed above, the present invention comprises a proportional control valve that controls the flow rate according to an electric signal, a flow rate sensor that is installed in a fluid passage and generates an electric signal according to the flow rate, and a flow rate sensor that controls the flow rate according to the flow rate. It has a control circuit that drives the proportional control valve according to the output signal of the sensor, and determines an abnormality when the output signal of the flow rate sensor is not detected for a predetermined period of time despite the presence of the drive signal of the proportional control valve. The flow rate control device is constructed by blocking the fluid communication F@ and providing an abnormality detection circuit that notifies the user. Safety is improved because the fluid passage is blocked and the fluid passage is prevented from becoming unsafe or the control accuracy deteriorates before it becomes a dangerous situation, and the information is notified. Furthermore, even if the flow rate sensor is normal, if the valve does not open due to a failure in the proportional control valve or the control circuit that drives the proportional control valve, an abnormality will be detected and a signal will be issued to shut off the fluid passage. As a result, the control is stopped and an abnormality is notified, which has the effect of being able to determine whether there is an abnormality in the proportional control valve or the control circuit.
さらに設定信号を異常検出回路に関連させて流体の流出
の有無を間接的に検知するため、電気回路によって流体
の有無全判別でき、また異常状態が所定時間継続した時
に流体通路を遮断するため誤動作が発生しにくい。In addition, since the setting signal is linked to the abnormality detection circuit to indirectly detect the presence or absence of fluid outflow, the presence or absence of fluid can be completely determined by the electric circuit, and if the abnormal condition continues for a predetermined period of time, the fluid passage will be shut off, resulting in a malfunction. is less likely to occur.
第１図は従来例を示す流量制御装置の構成図、第２図は
本発明の一実施例を示す流量制御装置の構成図、第３図
は同装置における異常検出回路の出力信号波形図である
。
ト「・・・・・比例制御弁、３・・・・・・流量センサ
、４・・・・・・制御回路、２３・・・・・・異常検出
回路、２４・・・・・・カクンター回路、２５・・・・
・・タイマー回１ｉ３．２６・・・・・・判別回路、２
７・・・・・・遮断回路、２８・・・・・・報知回路。Fig. 1 is a block diagram of a flow control device showing a conventional example, Fig. 2 is a block diagram of a flow control device showing an embodiment of the present invention, and Fig. 3 is an output signal waveform diagram of an abnormality detection circuit in the same device. be. "... Proportional control valve, 3... Flow rate sensor, 4... Control circuit, 23... Abnormality detection circuit, 24... Kakunter. Circuit, 25...
...Timer times 1i3.26...Discrimination circuit, 2
7... Cutoff circuit, 28... Notification circuit.
Claims (2)
制御する比例制御弁と、流体通路内に設けられ電気信号
を発生する流量センサと、この流量センサの出力信号に
応じて前記比例制御弁を駆動させる制御回路を有すると
ともに、前記比例制御弁の駆動信号があるにもかかわら
ず前記流量センサの信号が所定時間検出されない時、流
体通路を遮断するとともに報知する異常検出口＠を設け
た流量制御装置。(1) A proportional control valve that varies the fluid passage area and controls the flow rate according to an electric signal, a flow rate sensor that is installed in the fluid passage and generates an electric signal, and a proportional control valve that controls the flow rate according to the output signal of the flow rate sensor. It has a control circuit that drives the control valve, and also has an abnormality detection port that shuts off the fluid passage and notifies when the signal from the flow rate sensor is not detected for a predetermined period of time despite the presence of a drive signal for the proportional control valve. flow control device.
路と、流量センサからの出力信号を検知するカウンター
回路と、駆動信号の有無、及び前記カウンター回路から
の出力信号を受け、異常全判別する判別回路と、この判
別回路が異常判別した時、動作する遮断回路と報知回路
とから構成した特許請求の範囲第１項記載の流量制御装
置。 ２べ−づ゛(2) The abnormality detection circuit includes a timer circuit that sets the detection time, a counter circuit that detects the output signal from the flow sensor, the presence or absence of a drive signal, and receives the output signal from the counter circuit to determine whether there is any abnormality. 2. The flow rate control device according to claim 1, comprising a discrimination circuit, and a cutoff circuit and a notification circuit that operate when the discrimination circuit determines that there is an abnormality. 2 base
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2100484A JPS60164819A (en) | 1984-02-07 | 1984-02-07 | Flow rate controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2100484A JPS60164819A (en) | 1984-02-07 | 1984-02-07 | Flow rate controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60164819A true JPS60164819A (en) | 1985-08-27 |
Family
ID=12042931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2100484A Pending JPS60164819A (en) | 1984-02-07 | 1984-02-07 | Flow rate controller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60164819A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6419223A (en) * | 1987-07-13 | 1989-01-23 | Daikin Ind Ltd | Combustion controller |
| JPH0273548U (en) * | 1988-11-25 | 1990-06-05 | ||
| JPH0314001A (en) * | 1989-06-12 | 1991-01-22 | Matsushita Electric Ind Co Ltd | Fluid controller |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49129564A (en) * | 1973-04-13 | 1974-12-11 |
-
1984
- 1984-02-07 JP JP2100484A patent/JPS60164819A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49129564A (en) * | 1973-04-13 | 1974-12-11 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6419223A (en) * | 1987-07-13 | 1989-01-23 | Daikin Ind Ltd | Combustion controller |
| JPH0273548U (en) * | 1988-11-25 | 1990-06-05 | ||
| JPH0314001A (en) * | 1989-06-12 | 1991-01-22 | Matsushita Electric Ind Co Ltd | Fluid controller |
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