JPS60162732U - air bearing device - Google Patents

air bearing device

Info

Publication number
JPS60162732U
JPS60162732U JP17759483U JP17759483U JPS60162732U JP S60162732 U JPS60162732 U JP S60162732U JP 17759483 U JP17759483 U JP 17759483U JP 17759483 U JP17759483 U JP 17759483U JP S60162732 U JPS60162732 U JP S60162732U
Authority
JP
Japan
Prior art keywords
air bearing
bearing device
air
orifice
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17759483U
Other languages
Japanese (ja)
Inventor
久保寺　正男
清 竹腰
Original Assignee
東京エレクトロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン株式会社 filed Critical 東京エレクトロン株式会社
Priority to JP17759483U priority Critical patent/JPS60162732U/en
Publication of JPS60162732U publication Critical patent/JPS60162732U/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の空気軸受装置の概要を示す断面図、
第２図は第１図の要部拡大断面図である。 １・・・載置台、２・・・空気軸受本体、３・・・Ｙ軸
周ベアリング、４・・・Ｙ軸周モータ、５・・・Ｘ軸周
ベアリング、６・・・Ｘ軸周モータ、７・・・光学研摩
を施したガラス板、訃・・ガラス板固定面、９・・・パ
レット、１０・・・光学研摩面、１１・・・Ｙ軸周シャ
フト、１２・・・Ｘ軸周シャフト、１３・・・オリフィ
ス、１４・・・Ｙ軸方向駆動台。Figure 1 is a sectional view showing the outline of the air bearing device of this invention.
FIG. 2 is an enlarged sectional view of the main part of FIG. 1. 1... Mounting table, 2... Air bearing body, 3... Y-axis circumferential bearing, 4... Y-axis circumferential motor, 5... X-axis circumferential bearing, 6... X-axis circumferential motor , 7... Glass plate subjected to optical polishing, ... Glass plate fixing surface, 9... Pallet, 10... Optical polished surface, 11... Y-axis peripheral shaft, 12... X-axis Circumferential shaft, 13... orifice, 14... Y-axis direction drive stand.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 空気を噴出するオリフィスを有する空気軸受本体と、該
空気軸受本体のオリフィスから噴出される空気を受ける
受圧面とを有する空気軸受装置において、受圧面として
、光学研摩を施したガラス板を用いたことを特徴とする
空気軸受装置。In an air bearing device having an air bearing main body having an orifice for ejecting air and a pressure receiving surface receiving the air ejected from the orifice of the air bearing main body, an optically polished glass plate is used as the pressure receiving surface. An air bearing device featuring:
JP17759483U 1983-11-16 1983-11-16 air bearing device Pending JPS60162732U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17759483U JPS60162732U (en) 1983-11-16 1983-11-16 air bearing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17759483U JPS60162732U (en) 1983-11-16 1983-11-16 air bearing device

Publications (1)

Publication Number Publication Date
JPS60162732U true JPS60162732U (en) 1985-10-29

Family

ID=30735164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17759483U Pending JPS60162732U (en) 1983-11-16 1983-11-16 air bearing device

Country Status (1)

Country Link
JP (1) JPS60162732U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016539028A (en) * 2013-12-06 2016-12-15 オセ−テクノロジーズ ビーブイ Scanning inkjet printing system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016539028A (en) * 2013-12-06 2016-12-15 オセ−テクノロジーズ ビーブイ Scanning inkjet printing system

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