JPS60157037A - Surface inspecting device of object - Google Patents
Surface inspecting device of objectInfo
- Publication number
- JPS60157037A JPS60157037A JP59012694A JP1269484A JPS60157037A JP S60157037 A JPS60157037 A JP S60157037A JP 59012694 A JP59012694 A JP 59012694A JP 1269484 A JP1269484 A JP 1269484A JP S60157037 A JPS60157037 A JP S60157037A
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- Prior art keywords
- optical system
- television camera
- inspected
- image
- inspection
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
- Closed-Circuit Television Systems (AREA)
Abstract
Description
【発明の詳細な説明】
発明の技術分野
本発明は物体の表面検査装置、特にテレビカメラの如き
光電変換装置（センサ）を用いた物体の表面検査装置に
関するものである。DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to an object surface inspection apparatus, and more particularly to an object surface inspection apparatus using a photoelectric conversion device (sensor) such as a television camera.
背景技術とその問題点
物体の表面検査、例えば物体の表面の傷等の欠陥の有無
を、テレビカメラをセンサとして用いている表面検査装
置が、現在種々提案されている。BACKGROUND TECHNOLOGY AND PROBLEMS Various surface inspection apparatuses are currently being proposed that use a television camera as a sensor to inspect the surface of an object, for example, to check for defects such as scratches on the surface of the object.
現在か−る装置に使用されているテレビカメラを、第１
図を参照して説明する。第１図に於て、（１）はセンサ
としてのテレビカメラ、（２）はその撮像用の光学系、
例えば凸レンズである。（３）はテレビカメラ（１）の
撮像面、即ちターゲットスクリーンであり、（４）ば光
学系（２）の光軸である。通電のテレビカメラ（１）に
使用されている光学系（２）の結像作用は、周知の如く
例えばその先軸（４）上の一点Ｐに於いてこの光軸（４
）に略々垂直な２次元、即ち平曲（５）の所定領域を、
略々精確にテレビカメラ（１）のターゲットスクリーン
（３）上に結像することができる。更に、平面（５）を
撮像するように光学系（２）を調節した場合でも、光学
系（２）の絞りによる所謂焦点深度によって、光軸（４
）上の点Ｐの前段の例えば点Ｐ１及びＰ２に於ける平面
（５）に夫々平行な点線で示す平面（５１）及び（５２
）間の範囲（６）内の平面部の像も、略々鮮明にターゲ
ットスクリーン（３）上に結像できることも周知である
。従って、テレビカメラ（１）は、範囲（６）内の物体
に対しては、それに就いての有効なビデオ信号を発生ず
ることができる。The TV camera currently used in this equipment was replaced with the first one.
This will be explained with reference to the figures. In Figure 1, (1) is a television camera as a sensor, (2) is an optical system for imaging,
For example, it is a convex lens. (3) is the imaging surface of the television camera (1), that is, the target screen, and (4) is the optical axis of the optical system (2). As is well-known, the imaging effect of the optical system (2) used in a current-powered television camera (1) is, for example, at a point P on the front axis (4) of the optical system (4).
), that is, a predetermined area of flat curve (5),
It can be imaged almost precisely onto the target screen (3) of the television camera (1). Furthermore, even when the optical system (2) is adjusted to image the plane (5), the so-called depth of focus caused by the aperture of the optical system (2) causes the optical axis (4
) planes (51) and (52) shown by dotted lines parallel to the plane (5) at points P1 and P2, respectively, before point P on
It is also well known that an image of a plane part within the range (6) between ) can also be imaged substantially sharply on the target screen (3). The television camera (1) is therefore able to generate a useful video signal for objects within the range (6).
所で、被検査物（７）の被検査表面（７ａ）が、例えば
第１図に示す如くテレビカメラ（１）に対して凹に弯曲
していて、上記範囲（６）からはみ出ず部分があると、
従来の光学系（２）では、その焦点が平面（５）に所謂
ピント合せしである場合は、これ等はみ出し部分の像を
、テレビカメラ（１）のターゲットスクリーン（３）に
鮮明な像として結像できず、所謂ピンボケ像となってし
まう。従って、テレビカメラ（１１は、上記はみ出し部
分に対応する有効なビデオ信号を発生し得す、はみ出し
部分の検査は、範囲（６）以内の部分の検査と同時に行
うことは不可能であった。By the way, the surface to be inspected (7a) of the object to be inspected (7) is curved concavely with respect to the television camera (1), for example, as shown in FIG. If there,
In the conventional optical system (2), when the focus is on the plane (5), the image of these protruding parts is displayed as a clear image on the target screen (3) of the television camera (1). The image cannot be formed, resulting in a so-called out-of-focus image. Therefore, the television camera (11) could generate a valid video signal corresponding to the above-mentioned protrusion, but it was not possible to inspect the protrusion at the same time as the inspection of the part within range (6).
光学系（２）の絞りを小ざく絞ゲて、その焦点深度を深
くし、範囲（６）を平面（５）の前後に更に拡げて、は
み出し部分の量を減少することができるが、それも限り
があり、被検査表面（７ａ）の弯曲度によっては、全べ
てのはみ出し部分を光学系（２）の絞りの調節では、カ
バーできない場合が多い。更に、この絞りを絞ると、光
学系（２）を通過する光量が減少し、従って、テレビカ
メラ（１１のターゲットスクリーン（３）に入射する光
量が城少し、ビデオ信号が弱くなり、検査に支障を来た
す。そのため、被検査表面（７ａ）を照射する光源（図
示せず）よりの光量を増加しなければならない。然し乍
ら、光量の増加には限度があり、上記した如き絞りの度
合に追従しきれない。It is possible to narrow down the aperture of the optical system (2) to deepen its depth of focus and further expand the range (6) to the front and back of the plane (5) to reduce the amount of protruding parts. However, depending on the degree of curvature of the surface to be inspected (7a), it is often not possible to cover all the protruding parts by adjusting the aperture of the optical system (2). Furthermore, when this aperture is stopped, the amount of light passing through the optical system (2) is reduced, and therefore the amount of light incident on the target screen (3) of the TV camera (11) is reduced, the video signal is weakened, and the inspection is hindered. Therefore, it is necessary to increase the amount of light from a light source (not shown) that illuminates the surface to be inspected (7a).However, there is a limit to the increase in the amount of light, and the amount of light that illuminates the surface to be inspected (7a) must be increased. I can't do it.
一方、焦点距離の長い、例えば望遠レンズをテレビカメ
ラに装着し、弯曲した被検査表面の全べての部分を、ピ
ンボケなしにテレビカメラのターゲットスクリーンに結
像させることも考えられるが、周知の如く望遠レンズは
、焦点距離が長いので、テレビカメラを、被検査表面に
対して遠方に配置する必要がある。従って、望遠レンズ
をテレビカメラに用いることは、スペースや光源上の問
題、更にテレビカメラの撮像距離が長いために生ずるテ
レビカメラの揺れの影響等が大きくなる問題がある。On the other hand, it is also possible to attach a telephoto lens with a long focal length, such as a telephoto lens, to a television camera and image all parts of the curved surface to be inspected onto the target screen of the television camera without defocusing. Since a telephoto lens has a long focal length, it is necessary to place the television camera far away from the surface to be inspected. Therefore, using a telephoto lens for a television camera has problems in terms of space and light sources, and furthermore, the influence of shaking of the television camera caused by the long imaging distance of the television camera becomes large.
次に、第２図を参照して、上述した従来のテレビカメラ
（１）の光学系（２）を史にＢ′ｆ細に説明しよう。Next, with reference to FIG. 2, the optical system (2) of the conventional television camera (1) mentioned above will be explained in detail.
第２図に不ず如く、従来のテレビカメラ（１）に使用さ
れている光学系、例えば凸レンズ（２）は、同図に不ず
レンズ（２）に対して凹に弯曲した被写体（７）を、そ
れと同様ではあるが、レンズ（２）に関して反対に弯曲
した像（７′）として結像する機能を有する。As shown in Figure 2, the optical system used in a conventional television camera (1), for example, a convex lens (2), is used to capture objects (7) that are concavely curved relative to the convex lens (2). It has a function of forming a similar but oppositely curved image (7') with respect to the lens (2).
この壌合、レンズ（２）のピントが弯曲した被写体（７
）の最深部（０）に合っていれば、被写体（７）の他の
部分（レンズ（２）に近い部分）の像は、焦点深度を考
慮しなければ、ピンボケのものとなる。即ち、像（７′
）の被写体（７）の最深部（０）に対応した光軸（４）
上の点（０′）に、スクリーン（テレビカメラ（１）の
ターゲットスクリーン（３））を光軸（４）に垂直に置
いたとすると、スクリーン上の点（０′）に於ける像は
ピントの合ったものであるが、それ以外の像の部分は所
謂ピンボケの状態であり、逆に、レンズ（２）のピント
を被写体（７）の最浅部（最前面）に合せ、スクリーン
を像（７′）の対応部分に配置すれば、点（０′）に於
ける像がピンボケ状態となる。In this case, the lens (2) focuses on a curved subject (7).
), the image of the other part of the subject (7) (the part close to the lens (2)) will be out of focus unless the depth of focus is taken into account. That is, the image (7'
) Optical axis (4) corresponding to the deepest part (0) of the subject (7)
If we place a screen (target screen (3) of television camera (1)) perpendicular to the optical axis (4) at the upper point (0'), the image at point (0') on the screen will be in focus. However, the rest of the image is out of focus.Conversely, the lens (2) is focused on the shallowest part (frontmost part) of the subject (7), and the screen is focused on the image. If it is placed at a portion corresponding to point (7'), the image at point (0') will be out of focus.
従って、上述の如き機能を有する光学系を具備したテレ
ビカメラを用いた従来の物体の表面検査装置では、平面
でない被検査表面の検査に際しては、必然的に上述した
如く被検査表面の全べてを一度に検査できない等の諸問
題が起る。Therefore, in the conventional object surface inspection apparatus using a television camera equipped with an optical system having the above-mentioned functions, when inspecting a surface to be inspected that is not flat, it is necessary to inspect the entire surface of the inspected surface as described above. Various problems arise, such as not being able to inspect all the components at once.
発明の目的
従って、本発明の主目的は、上述した諸問題を一挙に解
決した物体の表面検査装置を提供せんとするものである
。OBJECTS OF THE INVENTION Accordingly, the main object of the present invention is to provide an apparatus for inspecting the surface of an object that solves the above-mentioned problems all at once.
発明の概要
本発明によるテレビカメラ等の光電変換装置を使用した
物体の表面検査装置は、テレビカメラの前段に光学系を
設け、該光学系により物体の平面でない被検査表面を略
々平面状の空中像となし、該平面状の空中像を上記テレ
ビカメラにより撮像し、上記被検査表面を検査すること
を特徴とするものである。Summary of the Invention A device for inspecting the surface of an object using a photoelectric conversion device such as a television camera according to the present invention is provided with an optical system in front of the television camera, and uses the optical system to inspect the surface of the object to be inspected, which is not flat, into a substantially flat surface. The method is characterized in that the planar aerial image is taken by the television camera and the surface to be inspected is inspected.
発明の実施例
第３図は本発明に使用する光学系を示す。第３図に於て
、符号αωば特殊の機能を有する光学系である。即ち、
同図に示す如き平面状の被写体（１１）を、同図にボず
如き弯曲した（この例でば光学系αωに対しζ凹なる）
像（１１’）に変換し得るものである。Embodiment of the Invention FIG. 3 shows an optical system used in the present invention. In FIG. 3, the symbol αω indicates an optical system having a special function. That is,
A flat object (11) as shown in the figure is curved as shown in the figure (in this example, it is ζ concave with respect to the optical system αω).
It can be converted into an image (11').
従って、光の性質から、同一の光学系−を用いて、第４
図にボす如く、光学系ＱＯＩに対し°ζ凹に弯曲してい
る被写体の弯曲面（１２）を、平面状の像（１２’）に
変換し得ることが理解されよう。Therefore, due to the nature of light, using the same optical system, a fourth
As shown in the figure, it will be understood that the curved surface (12) of the object, which is curved concavely with respect to the optical system QOI, can be converted into a planar image (12').
第５図は本発明による物体の表面検査装置の一例を示ず
路線図である。尚、第５図に於て第１乃至第４図と対応
する符号は互いに対応する素子を示すものとする。FIG. 5 is a route map showing an example of the object surface inspection apparatus according to the present invention. In FIG. 5, the symbols corresponding to those in FIGS. 1 to 4 indicate corresponding elements.
臥で、第５図に示す本発明の例に於ては、第３及び第４
図に示す光学系０ωを、テレビカメラ（１）の従来の光
学系（２）の前段に、両者の光軸が互いに一致するよう
に取り付ける。尚、光学系ａωを光学系（２）に対する
距離が調節し得るように取り付けてもよい。テレビカメ
ラ（１）の他の構成は、第１図に示した従来のテレビカ
メラ（１１の構成と略々同一である。尚、第５図に於て
、（１４）はテレビカメラ（１）より出力される画（映
）像信号を受け、これを処理して所定の検査を行う周知
の検査処理装置を示す。In the example of the present invention shown in FIG.
The optical system 0ω shown in the figure is installed in front of a conventional optical system (2) of a television camera (1) so that their optical axes coincide with each other. Note that the optical system aω may be attached so that the distance to the optical system (2) can be adjusted. The other configuration of the television camera (1) is almost the same as that of the conventional television camera (11) shown in FIG. 1 shows a well-known inspection processing device that receives an image (video) signal output from a computer, processes it, and performs a predetermined inspection.
次に、第５図に示した本発明の一例の動作を説明する。Next, the operation of the example of the present invention shown in FIG. 5 will be explained.
今、その表面が検査されるべき被検査物の表面（１３）
が、例えば図ボのごとく光学系α０）に対して凹面であ
るときは、この光学系□０）としては、第３及び第４図
に示したと同様の機能を有する光学系α０）を使用し、
第４図に関して説明した如（、光学系αωによりその像
を、略々平面状の空中像（１３’）として光学系ａωの
後段、即ち従来の光学系（２）の前段に形成する。この
平面状の空中像（１３’）が、光学系（２）により、テ
レビカメラ（１）のターゲットスクリーン（３）に結像
される。この際、凹又は弯曲表面（１３）を、その光学
系（１０）による平面状の空中像（１３’）が光軸（４
）に略々垂直となり且つ光学系（２）により空中像（１
３’）がターゲットスクリーン（３）上に結像し得るよ
うに、光軸（４）に関して配置するものであるから、空
中像（１３’）の光学系（２）にょるターゲットスクリ
ーン（３）上の像は、全べてピントの合ったものである
。従って、テレビカメラ（１）から出力される弯曲表面
（１３）に対応する画像信号（Ｓ ｙ ）は、正確にそ
の全面をボずもの、即ち有効なものである。従って、こ
の画像信号（Ｓｖ）を、従来と同様周知の検査処理装置
（１４）で処理ずれば、全表面の検査が一挙に行われる
。The surface of the object to be inspected whose surface is now to be inspected (13)
For example, when the surface is concave with respect to the optical system α0) as shown in the box in the figure, an optical system α0) having the same function as shown in Figures 3 and 4 is used as this optical system □0). ,
As explained in connection with FIG. 4, the image is formed by the optical system αω as a substantially planar aerial image (13') after the optical system aω, that is, before the conventional optical system (2). A planar aerial image (13') is imaged by the optical system (2) onto the target screen (3) of the television camera (1), with the concave or curved surface (13) The planar aerial image (13') according to (10) is the optical axis (4
), and the optical system (2) creates an aerial image (1
3') is arranged with respect to the optical axis (4) so that the image of the target screen (3) can be formed on the target screen (3). The images above are all in focus. Therefore, the image signal (S y ) corresponding to the curved surface (13) output from the television camera (1) has exactly the entire surface as a defect, ie, a valid signal. Therefore, if this image signal (Sv) is processed by the well-known inspection processing device (14) as in the conventional case, the entire surface can be inspected at once.
次に、第６図を参照して、本発明に使用する平面でない
面を平面状の像に変換する光学、系（１０１の一例を説
明する。Next, with reference to FIG. 6, an example of an optical system (101) for converting a non-planar surface into a planar image used in the present invention will be described.
第６図は光学系（１０１の側断面図で、曲率半径の大な
る球面（ｂ）と曲率半径の小なる球面１ａ）より形成さ
れる凹凸レンズ（全体とし°ζ凸レンズ或はボジテブレ
ンズ）の凸球面［ａｌの部分を、同図に点線で示す如き
、例えは偏平な皿状の弯曲面、即ぢ非球面ｔｃ＋となし
、光学系（１０１の光軸（４）近傍の曲率又は弯曲度を
、その周辺部に比して小さくする。かくの如く形成した
光学系（１０）の焦点距離は、光軸（４）からその周縁
に向うに従って、短くなる。従って、この第６図に示す
光学系０ωは、第３乃至第５図に示し′た光学系（１０
）の機能を果すものである。Figure 6 is a side sectional view of the optical system (101, showing the convexity of a concave-convex lens (°ζ convex lens or positive lens as a whole) formed by a spherical surface (b) with a large radius of curvature and a spherical surface 1a with a small radius of curvature. As shown by the dotted line in the figure, the spherical surface [al] is, for example, a flat dish-shaped curved surface, that is, an aspherical surface tc+, and the curvature or degree of curvature near the optical axis (4) of the optical system (101) is The focal length of the optical system (10) thus formed becomes shorter from the optical axis (4) toward its periphery.Therefore, the optical system shown in FIG. The system 0ω is the optical system (10
).
尚、第６図に示す非球面ｔｃ＋の形状は、平面像（１２
’）又は（１３’）として結像されるべき被検査表向（
１３）の弯曲度合に応じて、適宜に選択されることは、
勿論である。The shape of the aspherical surface tc+ shown in FIG. 6 is a plane image (12
') or (13') on the surface to be inspected (
13) can be appropriately selected depending on the degree of curvature of
Of course.
第７図は本発明による光学系の他の実施例（１０’）の
側断面図である。この例では、第６図の例と同様の球面
Ｔａｌ及びＴｂ）よりなる凹凸レンズの凸球面（ａｌを
、同図点線で示す如く、光軸（４）近傍の弯曲度が球面
（ａｌの弯曲度より大なる非球面（ｄｌとなす。このよ
うに形成した光学系（１０’）の焦点距離は、光軸（４
）から周縁に向うに従って長くなる。従っこ、このよう
な光学系（１０’）を使用すると、第４図にン１くした
場合とは逆に弯曲した被写体、即ち光学系（１０’）に
対して凸なる表面を、平面像として結像することができ
る。従って、この光学系（１０’）も、光学系（１０’
）に対して凸なる弯曲面に対して、光学系ａωと同一の
目的を達成し得るものである。尚、この場合の非球１１
１Ｊ（ｄ）の形状も、被検査表「１１の形状に応じて変
更されるものである。FIG. 7 is a side sectional view of another embodiment (10') of the optical system according to the present invention. In this example, the convex spherical surface (al) of the concave-convex lens is made up of spherical surfaces Tal and Tb similar to the example in FIG. The focal length of the optical system (10') formed in this way is the aspherical surface (dl) that is larger than the optical axis (4
) becomes longer toward the periphery. Therefore, when such an optical system (10') is used, a curved object, that is, a surface that is convex with respect to the optical system (10'), can be viewed as a plane image, contrary to the case shown in Fig. 4. It can be imaged as Therefore, this optical system (10') also
) can achieve the same purpose as the optical system aω. In addition, the non-spherical 11 in this case
The shape of 1J(d) is also changed according to the shape of the inspection table "11".
面、第６及び第７図の例は、所謂単レンズの場合である
が、上述の目的を達成する光学系は、複数個のレンズを
組合せてもできるし、レンズとプリズム等を組合せても
できるし、これ等の設計の変更は、当該業者に取って、
容易であろう。The examples shown in Figures 6 and 7 are for a so-called single lens, but an optical system that achieves the above purpose can also be created by combining multiple lenses, or by combining a lens and a prism, etc. Yes, it is possible, and such design changes are subject to the manufacturer's responsibility.
It would be easy.
尚、上述は、光学系ａの又は（１０’）を弯曲面を平面
に変換する手段として用いた場合であるが、被検査表面
によっＣは、テレビカメラ（１）の光学系（２）の代り
に光学系（ｆｉｌ又は（１０’）を用い、これにより、
弯曲している被検査表面を略々平面像としてテレビカメ
ラ（１）のターゲットスクリーン（３）に結像するよう
になしてもよい。Incidentally, the above is a case where optical system a or (10') is used as a means for converting a curved surface into a flat surface, but depending on the surface to be inspected, C may be used as optical system (2) of television camera (1). using the optical system (fil or (10') instead of , thereby
The curved surface to be inspected may be imaged as a substantially planar image on the target screen (3) of the television camera (1).
発明の効果
上述した本発明によれば、従来は一度で全べての表面が
検査できない程に弯曲している被検査表面を、特殊な光
学系を用いて略々平面像に変換し得るものであるから、
上述の如く弯曲している被検査表向の全べてを、一度で
精確に検査し得、検査の効率を格段に向上させることが
できる。Effects of the Invention According to the present invention described above, the surface to be inspected, which is curved to the extent that conventionally the entire surface cannot be inspected at once, can be converted into a substantially flat image using a special optical system. Because it is,
As described above, the entire curved surface to be inspected can be accurately inspected at once, and inspection efficiency can be significantly improved.
更に、望遠レンズを使用する必要がないので、スペース
も狭くてすみ、光源とし′ζも、従来使用されているも
ので十分である等の効果もある。Furthermore, since there is no need to use a telephoto lens, the space can be narrowed down, and a conventionally used light source 'ζ is sufficient.
第１図は従来のテレビカメラの撮像機能の説明に供する
路線図、第２図は従来のテレビカメラに使用されている
光学系の説明に供する路線図、第３及び第４図は本発明
に使用する光学系の一例の機能の説明に供する路線図、
第５図は本発明の一例の路線図、第６及び第７図は夫々
本発明に使用し得る光学系の一例の側断面図である。
図に於゛ζ、（１）はテレビカメラ、（２）はその光学
系、（３）はターゲットスクリーン、（［０）及び（１
０’）は本発明に使用する光学系、（１４）は検査処理
装置を夫々示す。
１−、；、、ｉ−Ｊ
第２図
第３図
第４図
第５図Figure 1 is a route map for explaining the imaging function of a conventional television camera, Figure 2 is a route map for explaining the optical system used in the conventional television camera, and Figures 3 and 4 are for explaining the imaging function of a conventional television camera. A route map for explaining the functions of an example of the optical system used,
FIG. 5 is a route map of an example of the present invention, and FIGS. 6 and 7 are side sectional views of examples of optical systems that can be used in the present invention. In the figure, (1) is the television camera, (2) is its optical system, (3) is the target screen, ([0) and (1
0') indicates an optical system used in the present invention, and (14) indicates an inspection processing device. 1-, ;,, i-J Figure 2 Figure 3 Figure 4 Figure 5
Claims (1)
査装置に於て、上記テレビカメラの前段に光学系を設け
、該光学系により物体の平面でない被検査表面を略々平
面状の空中像となし、該平面状の空中像を上記テレビカ
メラにより撮像し、上記被検査表面を検査することを特
徴とする物体の表面検査装置。In an object surface inspection device using a photoelectric conversion device such as a television camera, an optical system is provided in front of the television camera, and the optical system is used to convert the non-flat surface of the object to be inspected into a substantially flat aerial image. An apparatus for inspecting a surface of an object, characterized in that the planar aerial image is captured by the television camera and the surface to be inspected is inspected.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59012694A JPS60157037A (en) | 1984-01-26 | 1984-01-26 | Surface inspecting device of object |
| US06/687,478 US4984886A (en) | 1984-01-26 | 1984-12-28 | Surface inspection apparatus for objects |
| DE19853500332 DE3500332A1 (en) | 1984-01-26 | 1985-01-08 | SURFACE TEST APPARATUS FOR AN OBJECT |
| AU37507/85A AU581868B2 (en) | 1984-01-26 | 1985-01-08 | Surface inspection apparatus for objects |
| FR8500682A FR2558959B1 (en) | 1984-01-26 | 1985-01-18 | APPARATUS FOR CONTROLLING OBJECT SURFACES |
| GB08501904A GB2153552B (en) | 1984-01-26 | 1985-01-25 | Object inspection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59012694A JPS60157037A (en) | 1984-01-26 | 1984-01-26 | Surface inspecting device of object |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60157037A true JPS60157037A (en) | 1985-08-17 |
| JPH0570101B2 JPH0570101B2 (en) | 1993-10-04 |
Family
ID=11812482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59012694A Granted JPS60157037A (en) | 1984-01-26 | 1984-01-26 | Surface inspecting device of object |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4984886A (en) |
| JP (1) | JPS60157037A (en) |
| AU (1) | AU581868B2 (en) |
| DE (1) | DE3500332A1 (en) |
| FR (1) | FR2558959B1 (en) |
| GB (1) | GB2153552B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5247153A (en) * | 1989-10-05 | 1993-09-21 | Lsi Logic Corporation | Method and apparatus for in-situ deformation of a surface, especially a non-planar optical surface |
| US5727236A (en) * | 1994-06-30 | 1998-03-10 | Frazier; James A. | Wide angle, deep field, close focusing optical system |
| AT405986B (en) * | 1997-07-18 | 2000-01-25 | Rehm Dieter Mag | Depth of focus lens system |
| CA2270451A1 (en) | 1998-06-17 | 1999-12-17 | Wolfgang Weigel | Supplementary optical system for a camera |
| DE102005014415B3 (en) * | 2005-03-24 | 2007-03-22 | Isra Vision Systems Ag | Apparatus and method for inspecting a curved surface |
| EP1934573B1 (en) * | 2005-09-21 | 2019-03-13 | Novartis AG | Optical inspection system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS555603U (en) * | 1978-06-24 | 1980-01-14 | ||
| JPS55132937A (en) * | 1979-04-04 | 1980-10-16 | Sumitomo Electric Ind Ltd | Defect detector |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB593514A (en) * | 1944-10-17 | 1947-10-20 | John Henry Jeffree | Improvements in or relating to lens systems for wide-aperture anastigmatic objectives |
| GB316698A (en) * | 1928-05-11 | 1929-08-08 | Benjamin Ellan Luboshez | Improvements in x-ray photographic apparatus |
| GB335696A (en) * | 1929-03-05 | 1930-10-02 | Howard Dwight Beach | Improvements in or relating to method of and apparatus for producing photographic images |
| GB358665A (en) * | 1929-09-06 | 1931-10-15 | Carl Zeiss | |
| GB364617A (en) * | 1930-08-23 | 1931-12-23 | Gramophone Co Ltd | Improvements in or relating to photographic cameras and picture projecting and viewing apparatus |
| GB561597A (en) * | 1942-12-08 | 1944-05-25 | Gunther Loeck | Improvements in or relating to optical systems |
| GB608892A (en) * | 1945-03-07 | 1948-09-22 | Stephen Evdokimovich Garutso | Improvements in or relating to optical lens assemblies |
| GB791312A (en) * | 1953-03-26 | 1958-02-26 | Theodore Hendrik Nakken | Photographic objectives |
| GB1266916A (en) * | 1968-04-25 | 1972-03-15 | ||
| US3677621A (en) * | 1969-11-24 | 1972-07-18 | Vickers Ltd | Optical field flattening devices |
| US3770969A (en) * | 1972-03-09 | 1973-11-06 | Owens Illinois Inc | Inspecting the bottom wall of hollow open-ended containers |
| GB1333185A (en) * | 1972-05-26 | 1973-10-10 | Rank Organisation Ltd | Optical objective |
| GB1455171A (en) * | 1973-01-16 | 1976-11-10 | Olympus Optical Co | Microscope systems and objectives therefor |
| AU457116B2 (en) * | 1973-03-09 | 1975-01-16 | Barry-Heimiller Company | Container flaw inspection apparatus |
| DE2443515A1 (en) * | 1973-09-17 | 1975-09-11 | Hitachi Ltd | ELECTRON BEAM PICTURE PROJECTOR |
| US3902792A (en) * | 1974-01-02 | 1975-09-02 | Polaroid Corp | Landscape lens |
| JPS555603B2 (en) * | 1974-02-12 | 1980-02-08 | ||
| US3932042A (en) * | 1974-05-20 | 1976-01-13 | Barry-Wehmiller Company | Container inspection apparatus and method of inspection |
| GB1520837A (en) * | 1976-06-01 | 1978-08-09 | Rank Organisation Ltd | Optical objectives |
| US4191462A (en) * | 1978-04-24 | 1980-03-04 | Polaroid Corporation | Fixed focus exposure control apparatus with reverse spherical aberration corrective characteristic |
| CA1127894A (en) * | 1979-05-16 | 1982-07-20 | Philip J. Rogers | Transfer lens for optical image display system |
| JPS56117154A (en) * | 1980-02-21 | 1981-09-14 | Hajime Sangyo Kk | Inspecting apparatus of flaw |
| DE3021072A1 (en) * | 1980-06-04 | 1981-12-10 | Fuji Electric Co., Ltd., Kawasaki, Kanagawa | Automatic product checking system - uses raster scanned TV camera to scan surface on horizontal line-by-line system |
| SE423755B (en) * | 1980-07-30 | 1982-05-24 | Optik Innovation Ab Oiab | PROJECTION OPTICS |
| DE3109270A1 (en) * | 1981-03-11 | 1982-09-30 | Siemens AG, 1000 Berlin und 8000 München | BOTTLE INSPECTION ARRANGEMENT |
| DE3111194C2 (en) * | 1981-03-21 | 1984-01-05 | Fa. Hermann Heye, 3063 Obernkirchen | Method and device for the detection of defects in glass objects |
| JPS5887522A (en) * | 1981-11-20 | 1983-05-25 | Hitachi Ltd | Video camera optical system |
-
1984
- 1984-01-26 JP JP59012694A patent/JPS60157037A/en active Granted
- 1984-12-28 US US06/687,478 patent/US4984886A/en not_active Expired - Fee Related
-
1985
- 1985-01-08 DE DE19853500332 patent/DE3500332A1/en active Granted
- 1985-01-08 AU AU37507/85A patent/AU581868B2/en not_active Ceased
- 1985-01-18 FR FR8500682A patent/FR2558959B1/en not_active Expired
- 1985-01-25 GB GB08501904A patent/GB2153552B/en not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS555603U (en) * | 1978-06-24 | 1980-01-14 | ||
| JPS55132937A (en) * | 1979-04-04 | 1980-10-16 | Sumitomo Electric Ind Ltd | Defect detector |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2153552A (en) | 1985-08-21 |
| AU581868B2 (en) | 1989-03-09 |
| DE3500332A1 (en) | 1985-08-01 |
| US4984886A (en) | 1991-01-15 |
| FR2558959B1 (en) | 1988-05-27 |
| FR2558959A1 (en) | 1985-08-02 |
| GB8501904D0 (en) | 1985-02-27 |
| AU3750785A (en) | 1985-08-01 |
| JPH0570101B2 (en) | 1993-10-04 |
| DE3500332C2 (en) | 1993-02-04 |
| GB2153552B (en) | 1987-08-26 |
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