JPS601496A - Bellows for vacuum using conductive plastics - Google Patents
Bellows for vacuum using conductive plasticsInfo
- Publication number
- JPS601496A JPS601496A JP10788783A JP10788783A JPS601496A JP S601496 A JPS601496 A JP S601496A JP 10788783 A JP10788783 A JP 10788783A JP 10788783 A JP10788783 A JP 10788783A JP S601496 A JPS601496 A JP S601496A
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- vacuum
- conductive
- adhesive
- flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Disconnectible Joints And Screw-Threaded Joints (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
この発明は導電性プラスチックスを用いた真空用ベロー
ズに関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vacuum bellows made of conductive plastics.
従来一般に真空用ベローズとしては金属製ベローズが用
いられているが、金属製ベローズは極めて高価であり、
耐薬品性の点で問題があり、また金属フランジに溶接す
る際にも特殊な技術が必要とされる。ところで塩化ビニ
ル製のベローズやポースは軽量、安価で劇薬品性も和尚
改善されてきているが、耐熱性、耐候性、端末部シール
の（ｇ軸性、燃焼時の有毒性等の点で問題があｐｌまた
軽質塩化ビニルホースはガス放出性等に問題がある。Conventionally, metal bellows have been generally used as vacuum bellows, but metal bellows are extremely expensive.
There are problems with chemical resistance, and special techniques are required when welding to metal flanges. By the way, bellows and poses made of vinyl chloride are lightweight, inexpensive, and have improved chemical resistance. Also, light vinyl chloride hoses have problems with gas release.
最近、真壁装置の応用分野は極めて多岐にわたってきて
おシ、真空ポンプだけでなく、真空配偶に対しても苛酷
な条件下での耐久性が要求されてきている。例えば、半
導体素子の１！造過程では各種の活性ガスや有毒ガスが
使用され、通當の金属製配管や真空ポンプに対する腐食
が大きな問題となってきている〇
そこでこの発明は、近年目覚しい進歩を遂げている工ν
ジニアリング・プラスチックスを利用して従来用いられ
てきた金属や塩化ビニル樹脂Φｊの代シに導電性プラス
チックスで構成した真空用ベローズを提供することを目
的としている。Recently, Makabe equipment has been applied to a wide variety of fields, and not only vacuum pumps but also vacuum pumps are required to have durability under harsh conditions. For example, 1! of a semiconductor element! Various active gases and toxic gases are used in the manufacturing process, and corrosion of the metal piping and vacuum pumps has become a major problem.Therefore, this invention was developed to improve the manufacturing process, which has made remarkable progress in recent years.
The purpose of this invention is to provide a vacuum bellows made of electrically conductive plastics in place of the conventionally used metals and vinyl chloride resin Φj using engineering plastics.
この目的のためこの発明による真壁用ベローズは耐薬品
性で導電性または塗装や真空蒸着などによりその表面に
導電性を付与した樹脂材料を用いて成形したベローズ部
拐とフランジ部拐とがら成υ、ベローズ部材とフランジ
部材とを４ｉ電性接着剤または浴剤接篇によシ気密に結
合し／こことを特徴としている。For this purpose, the bellows for solid walls according to the present invention consists of a bellows part and a flange part molded using a resin material that is chemical-resistant and conductive, or whose surface has been made conductive by painting or vacuum deposition. The bellows member and the flange member are airtightly joined by 4i electrical adhesive or bath agent bonding.
ベローズ部材は好ましくは、例えはポリブチレンチレフ
タレ−）（ＰＢＴ）樹月旨またはそのエラストマを用い
てブロー成形によ多形成され得る。寸だフランジ部材は
例えばポリブチレンチレフクレー）（ＰＢＴ）樹脂を用
いて射出成形によ多形成され得る。ざらにこの発、明に
おいてはベローズ部栃の成形時にその長手方向の１ケ所
乃至数ケ所を筒状に形成し、それにより筒状部位で切断
して所望の長さのベローズ部札を得ることができるよう
にすると共に減圧時のベローズの変形を緩和する働きを
もたせることができる。The bellows member may preferably be formed by blow molding using, for example, polybutylene terephthalate (PBT) or an elastomer thereof. The flange member may be formed by injection molding using, for example, polybutylene tereflex clay (PBT) resin. Generally speaking, in this invention, in the Ming Dynasty, when forming a bellows part, one or several places in the longitudinal direction are formed into a cylindrical shape, and then cut at the cylindrical part to obtain a bellows part of a desired length. It is possible to have the function of mitigating the deformation of the bellows at the time of decompression.
以下この発明を添附図面を参照してさらに説明する。The present invention will be further described below with reference to the accompanying drawings.
第１図にはこの発明による真空用ベローズの一実施例を
示し、１はフランジ部材で、このフランジ部材１は硬度
、クリープ特性および寸法精度船−を考慮して例えはＰ
Ｉ３Ｔ樹脂（カーボン繊維入シ）を用いて射出成形によ
り形成され、藍たこのフランジ部わ１の形状（ｆｌＩｓ
Ｏ規格のクイック・カップリング方式としている０２は
ベローズ部制で、このベローズ部材２は弾性を必髪とす
るためＰＢＴ （釣脂またはＰＢＴエラストマを使用し
てブロー成形により成形され、また図示したようにベロ
ーズ長さを選べるように切断可能な筒状部分６が形成さ
れている。FIG. 1 shows an embodiment of a vacuum bellows according to the present invention, and 1 is a flange member, which is made of a material such as P
It is formed by injection molding using I3T resin (carbon fiber filled), and the shape of the flange part 1 of the indigo octopus (flIs
02, which uses an O standard quick coupling system, has a bellows system, and this bellows member 2 is made of PBT (fish oil or PBT elastomer) by blow molding to ensure elasticity, and as shown in the figure. A cuttable cylindrical portion 6 is formed so that the length of the bellows can be selected.
フランジ部材１とベローズ部材２とは第１図に符号４，
５で示すように二種類の接着剤すなわち等ｌ＋ｉ、件接
着剤４および接着強度の高い非尋１ｂ、性接尤剤５によ
シフランジ側内面および突当り部とブロー成形特寸法精
度の出るベローズ部栃外面とのＩｂｔ、ｉで気密接着さ
れている。この編合、使用目的や使用する接着剤の特性
にょカ一種類の接着剤でフランジ部材１とベローズ部材
２とを接１１することもできる。The flange member 1 and the bellows member 2 are designated by reference numerals 4 and 4 in FIG.
As shown in Fig. 5, two types of adhesives are used, namely, the adhesive 4 and the adhesive 1b, which has high adhesive strength, and the adhesive 5. It is airtightly attached to the outside surface of the chestnut at Ibt and i. The flange member 1 and the bellows member 2 can be joined 11 with a single type of adhesive depending on the knitting, purpose of use, and characteristics of the adhesive used.
また使用する導電性または表…１に導電性を付与したプ
ラスチックス材料についても上述の例に限られるもので
はなく、使用目的や条件に応じて任意に選択することが
できる。Further, the conductivity used or the plastic material having the conductivity shown in Table 1 is not limited to the above-mentioned examples, and can be arbitrarily selected depending on the purpose of use and conditions.
このようにして構成した真空用ベローズは例えば第２図
に示すように配管の端部接続時の微調整用に１節ベロー
ズとして実施したシ、１だ第３図に示すように防振と接
続位置微調艙ｆ：兼ねて例えは主ポンプ頂部に接続され
る２節ベローズとして実施することができる。The vacuum bellows constructed in this way can be used, for example, as a one-section bellows for fine adjustment when connecting the ends of piping, as shown in Figure 2, or as a one-section bellows for vibration isolation and connection as shown in Figure 3. Fine position adjustment port f: This can also be implemented as a two-bar bellows connected to the top of the main pump.
この発明においては、フランジ部材１、ベローズ部拐２
および両部材間の接着部はイ「電防上のため訟ｎＩＪ抵
抗１０４Ω／（：ｍ２以下の導電性をもつ樹脂表面およ
び接着剤を使用する。例えはＰＢＴ樹脂およびそのエラ
ストマを使用した動台、従来の金属または塩化ビニル製
のベローズに比べて耐薬品性が極めて高い。また面ｊ熱
温度範囲も一６０°Ｃ〜１２０゜Ｃと広く、イ１青ガス
を扼生じない。さらに金４．１−ｓ ？ベローズに比べ
て安価、軽知に作ることができると共にガス放出性（５
ｘ １０ Ｔｏｒｒ Ａ／ｓ ｃｍ ） 、カス透過性
（２ｘ １０ Ｔｏｒｒ Ｌ ｃｍ／ｓ Ｃｍ ）が小
さい０寸たベローズをクイックカップリング方式として
滑脱容易と５−ることかできる。In this invention, the flange member 1, the bellows part 2
For the adhesive part between both parts, use a resin surface and adhesive with a conductivity of 104 Ω/(:m2 or less).For example, use a moving base made of PBT resin and its elastomer. It has extremely high chemical resistance compared to conventional metal or vinyl chloride bellows.It also has a wide thermal temperature range of 160°C to 120°C, and does not trap blue gas.Furthermore, gold 4 .1-s ?It is cheaper and easier to make than bellows, and it has better gas release properties (5
x 10 Torr A/s cm) and sludge permeability (2 x 10 Torr L cm/s Cm).It can be said that the bellows of 0 dimensions is easy to slide off as a quick coupling system.
身５１図はこの光り月による真ち！月」ベローズの一実
施例を示″′ｆ′断面図、負、２，６図は真債几ベロー
ズの使用例を示す概略図である。
図中、１：フランジ部材、 ２：ベロース？’：ｌＸ拐
、 ４：ηＪ色性接妬−剤、 ５：接気″゛ｊ剤。Figure 51 of the body is based on this light moon! Figures 2 and 6 are schematic diagrams showing examples of how the bellows is used. In the figure, 1: flange member, 2: bellows. : lX removal, 4: ηJ chromatic entrainment agent, 5: entrainment agent.
Claims (1)
より表面に導電性を付与した樹脂材料を用いて成形した
ベローズ部材と、フランジ部材とから成シ、ベローズ部
材とフランジ部材とを導電性接着剤または溶剤接着によ
シ気密に結合したことを特徴とする真空用ベローズ。 ２、 ベローズ部材の長手方向の少なくとも一つの１１
月１１部位を筒状に形成した特許請求の範囲第１項に記
載の真空用ベローズ。[Scope of Claims] 1. Consisting of a bellows member molded using a resin material whose surface is made conductive by chemically conductive or conductive coating, a vacuum base layer, etc., and a flange member, the bellows member and the flange A bellows for vacuum use, characterized in that the bellows is airtightly bonded to a member by conductive adhesive or solvent bonding. 2. At least one 11 in the longitudinal direction of the bellows member
The vacuum bellows according to claim 1, wherein the 11 portions are formed into a cylindrical shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10788783A JPS601496A (en) | 1983-06-17 | 1983-06-17 | Bellows for vacuum using conductive plastics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10788783A JPS601496A (en) | 1983-06-17 | 1983-06-17 | Bellows for vacuum using conductive plastics |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS601496A true JPS601496A (en) | 1985-01-07 |
Family
ID=14470588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10788783A Pending JPS601496A (en) | 1983-06-17 | 1983-06-17 | Bellows for vacuum using conductive plastics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS601496A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61291787A (en) * | 1985-06-03 | 1986-12-22 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Pump |
| JP2008508095A (en) * | 2004-08-03 | 2008-03-21 | エケロス，ラルス | Processes and reactors for enhanced energy efficient biological (waste) water treatment |
-
1983
- 1983-06-17 JP JP10788783A patent/JPS601496A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61291787A (en) * | 1985-06-03 | 1986-12-22 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Pump |
| JPH0585755B2 (en) * | 1985-06-03 | 1993-12-08 | Ibm | |
| JP2008508095A (en) * | 2004-08-03 | 2008-03-21 | エケロス，ラルス | Processes and reactors for enhanced energy efficient biological (waste) water treatment |
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