JPS60145545U - Sample holder positioning device - Google Patents

Sample holder positioning device

Info

Publication number
JPS60145545U
JPS60145545U JP3150284U JP3150284U JPS60145545U JP S60145545 U JPS60145545 U JP S60145545U JP 3150284 U JP3150284 U JP 3150284U JP 3150284 U JP3150284 U JP 3150284U JP S60145545 U JPS60145545 U JP S60145545U
Authority
JP
Japan
Prior art keywords
holder
positioning device
opposing surface
sample
sample holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3150284U
Other languages
Japanese (ja)
Other versions
JPH0243090Y2 (en
Inventor
奥木 博昭
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP3150284U priority Critical patent/JPS60145545U/en
Publication of JPS60145545U publication Critical patent/JPS60145545U/en
Application granted granted Critical
Publication of JPH0243090Y2 publication Critical patent/JPH0243090Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の試料ホルダ位置決め装置を示す平面図、
第2図はこの考案の一実施例を示す平面図、第3図はそ
のA−A断面図、第4図および第5図は動作状態を示す
A−A対応断面図である。 各図中同一符号は同一または相当部分を示し、1はホル
ダ、2はステージ、4,21,22.23はストッパ、
6はV字状対向面、8はフラット    。 状対向面、10は2位置切換機構、11はベース、13
は回転板、14.15はアーム、16はスプリング、1
8,20はローラである。
FIG. 1 is a plan view showing a conventional sample holder positioning device;
FIG. 2 is a plan view showing an embodiment of this invention, FIG. 3 is a cross-sectional view taken along the line A-A, and FIGS. 4 and 5 are cross-sectional views taken along the line A-A showing the operating state. The same symbols in each figure indicate the same or equivalent parts, 1 is a holder, 2 is a stage, 4, 21, 22, 23 is a stopper,
6 is a V-shaped opposing surface, 8 is flat. 10 is a two-position switching mechanism, 11 is a base, 13
is a rotating plate, 14.15 is an arm, 16 is a spring, 1
8 and 20 are rollers.

Claims (4)

【実用新案登録請求の範囲】[Scope of utility model registration request] (1)  試料を取付けるホルダと、このホルダを装着
するステージと、ホルダまたはステージに設けられた2
個のストッパと、これらのストッパに対向するようにホ
ルダまたはステージの他方に設けられたV字状対向面お
よびフラット状対向面と、ホルダの装着により前記スト
ッパおよび対向面が係合するように、ホルダの周縁を押
圧する位置に切換わり、かつホルダの引出により押圧を
解除する位置に切換わる2位置切換機構とを備えたこと
を特徴とする試料ホルダ位置決め装置。
(1) A holder for mounting the sample, a stage for mounting this holder, and a
a V-shaped opposing surface and a flat opposing surface provided on the other side of the holder or stage to face these stoppers, such that the stoppers and opposing surfaces engage when the holder is mounted; A sample holder positioning device comprising: a two-position switching mechanism that switches to a position where the peripheral edge of the holder is pressed and a position where the pressure is released when the holder is pulled out.
(2)V字状対向面およびフラット状対向面が、ホルモ
ダに取付けられた係合部材に形成された実用新案登録請
求の範囲第1項記載の試料ホルダ位置決め装置。
(2) The sample holder positioning device according to claim 1, wherein the V-shaped opposing surface and the flat opposing surface are formed on an engaging member attached to the holder.
(3)2位置切換機構が、ホルダに形成された穴からホ
ルダの周縁を押圧するようにされた実用新案登録請求の
範囲第1項または第2項記載の試料ホルダ供置決め装置
(3) The sample holder placement device according to claim 1 or 2, wherein the two-position switching mechanism presses the periphery of the holder through a hole formed in the holder.
(4)2位置切換機構が、ステージに固定されたベース
と、このベースに取付けられた回転板と、この回転板の
両側から伸びる2本のアームと、回転板とベース間に設
けられた引張スプリングと、前記アームの先端に設けら
れてホルダの押圧力向または引出方向に接するローラと
を有する実用新案登録請求の範囲第1項ないし第3項の
いずれかに記載の試料ホルダ位置決め装置。
(4) The two-position switching mechanism consists of a base fixed to the stage, a rotary plate attached to the base, two arms extending from both sides of the rotary plate, and a tensioner provided between the rotary plate and the base. The sample holder positioning device according to any one of claims 1 to 3, which is a registered utility model and includes a spring and a roller provided at the tip of the arm and in contact with the pressing direction or the pulling direction of the holder.
JP3150284U 1984-03-05 1984-03-05 Sample holder positioning device Granted JPS60145545U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3150284U JPS60145545U (en) 1984-03-05 1984-03-05 Sample holder positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3150284U JPS60145545U (en) 1984-03-05 1984-03-05 Sample holder positioning device

Publications (2)

Publication Number Publication Date
JPS60145545U true JPS60145545U (en) 1985-09-27
JPH0243090Y2 JPH0243090Y2 (en) 1990-11-16

Family

ID=30532171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3150284U Granted JPS60145545U (en) 1984-03-05 1984-03-05 Sample holder positioning device

Country Status (1)

Country Link
JP (1) JPS60145545U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012109171A (en) * 2010-11-19 2012-06-07 Hitachi High-Technologies Corp Scanning electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012109171A (en) * 2010-11-19 2012-06-07 Hitachi High-Technologies Corp Scanning electron microscope

Also Published As

Publication number Publication date
JPH0243090Y2 (en) 1990-11-16

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