JPS6014106A - Method and device for measuring dimension - Google Patents
Method and device for measuring dimensionInfo
- Publication number
- JPS6014106A JPS6014106A JP12285283A JP12285283A JPS6014106A JP S6014106 A JPS6014106 A JP S6014106A JP 12285283 A JP12285283 A JP 12285283A JP 12285283 A JP12285283 A JP 12285283A JP S6014106 A JPS6014106 A JP S6014106A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- gap
- measuring member
- light
- photoelectric conversion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は寸法測定方法とその装置、殊に円筒面からな
る被測定面を有する被測定物に適した電気光学的寸法測
定方法とその装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a dimension measuring method and apparatus, and more particularly to an electro-optical dimension measuring method and apparatus suitable for an object to be measured having a cylindrical surface to be measured.
ローラ、シャフト等の外径寸法を測定する方法として、
被測定面にゲージを直接接触させる方法と、接触させな
い方法とがある。As a method to measure the outer diameter dimensions of rollers, shafts, etc.
There are methods in which the gauge is brought into direct contact with the surface to be measured, and methods in which it is not brought into contact.
ゲージを直接接触させる方法として、電気ゲージ方式が
知られているが、接触部に表面キズが発生し易く、その
結果、繰ｐ返し精度に問題がある。An electric gauge method is known as a method of directly contacting the gauge, but surface scratches are likely to occur at the contact portion, resulting in a problem in repeatability.
非接触方式として、エアーゲージ方式があるが、精度的
にラフであって、例えばサブミクロンオーダの測定がで
きない。As a non-contact method, there is an air gauge method, but its accuracy is rough and cannot measure, for example, on the submicron order.
一方、レーザー光による干渉シマを利用したレーザー測
長機等が知られているが、その調整が複雑であシ、コー
ナーキューブのような反射体の取付けが必要であって、
微細部の測定には不向きである。On the other hand, laser length measuring machines that utilize interference fringes caused by laser light are known, but their adjustment is complicated and requires the installation of a reflector such as a corner cube.
It is not suitable for measuring minute parts.
この発明は、如上のレーザー干渉計のように干渉シマを
利用する上での制限や、測定者の個人差によシ測定精度
が左右されるというような不都合がなく、高い測定精度
をうろことのできる寸法測定方法とその装置を提供する
ことを目的とするものであって、被測定物の測定面に、
適正な対向スキマを形成して測定部材を配設し、前記ス
キマをスポット光で走査せしめ、該スキマを透過した光
を光電変換し、その出力電気信号のフーリエ級数成分の
うちの所定高調波成分を検波することにより、その検波
出力と前記スキマ幅との間に成立つ関係に基づいて被測
定物寸法を測定することを特徴とするものである。This invention does not have the limitations of using interference fringes or the inconvenience that measurement accuracy is affected by the individual differences of the measurer, unlike the laser interferometer mentioned above, and can achieve high measurement accuracy. The purpose of this invention is to provide a method and device for measuring the dimensions of the object to be measured.
A measuring member is disposed with an appropriate opposing gap formed, the gap is scanned with a spot light, the light transmitted through the gap is photoelectrically converted, and a predetermined harmonic component of the Fourier series component of the output electric signal is detected. The present invention is characterized in that the dimensions of the object to be measured are measured based on the relationship established between the detected output and the gap width.
以下この発明を図示の実施例に基づいて詳細に説明する
。第１図ないし第４図に示す実施例は、例えば針状ころ
軸受のころの外径を測定する場合を示すものであって、
被測定物１としてのころを■ブロック等からなる取付金
２に載置し、その上方より適正スキマ幅Δｚ４−もって
ナイフェツジ３を有する測定部材４を対向させる。この
対向スキマ幅Δ２は、被測定物１の直径のバラツキ（真
円度のバラツキ）よシも大きい寸法に設定するものであ
シ、図示しない取付部材に測定部材４を保持させると共
に、セツティング位置調節用電気マイクロ・プローブ５
等を測定部材４の上端に押し当て最適位置にセラＦする
。The present invention will be explained in detail below based on illustrated embodiments. The embodiments shown in FIGS. 1 to 4 show a case where, for example, the outer diameter of a roller of a needle roller bearing is measured.
A roller as an object to be measured 1 is placed on a mounting bracket 2 made of a block or the like, and a measuring member 4 having a knife 3 is opposed from above with an appropriate clearance width Δz4-. This facing gap width Δ2 is set to be larger than the variation in diameter (variation in circularity) of the object to be measured 1. Electric micro probe for position adjustment 5
etc. to the upper end of the measuring member 4 to set it at the optimum position.
前記対向スキマ幅Δ２における被測定物１の中心と測定
部材４のナイフェツジ３とを結ぶ面に直交する方向より
走査レーザー光等のスポット光をもって前記スキマを走
査し、この光走査によシ前記スキマを透過した光を、集
光レンズ６１Ｌ Ｔ ６ ｂ等からなる受光光学系６を
経て光電子増倍管７に入射し、光電変換して透過光強度
に相当する電気信号を得、この電気信号と前記スキマ幅
Δ２との間に成立つ関係に基づいて実際のスキマ幅Δｚ
ｌ算出し、それによって被測定物１の外径寸法を測定す
るようにしたものである。The gap is scanned with a spot light such as a scanning laser beam from a direction perpendicular to a plane connecting the center of the object 1 to be measured and the knife 3 of the measuring member 4 in the opposing gap width Δ2, and this light scanning causes the gap to be The transmitted light enters a photomultiplier tube 7 through a light receiving optical system 6 consisting of a condensing lens 61L T 6 b, etc., and undergoes photoelectric conversion to obtain an electric signal corresponding to the intensity of the transmitted light. The actual clearance width Δz is determined based on the relationship established between the clearance width Δ2 and the clearance width Δ2.
l is calculated, and the outer diameter of the object to be measured 1 is measured based on the calculated value.
被測定物１とナイフェツジ３との対向スキマを走査する
スポット光は、Ｈｅ−Ｎθガスレーザー８を光源とする
レーザー光であって、ピンホール９を通過させることに
よシそのビーム径を適度に細くシ、ビームスプリッタ−
１０で２方向に分光し、直進する光を、反射ミラー１１
′ｊｆｃ介して振動ミラー１２に入射させる。振動ミラ
ー１２は、所定周波数ｆＲで振動させ、その反射光を走
査ビームとして前記対向スキマの走査を行う。The spot light that scans the opposing gap between the object to be measured 1 and the knife 3 is a laser light whose light source is a He-Nθ gas laser 8, and the beam diameter is adjusted to an appropriate value by passing through a pinhole 9. Thin beam splitter
10 splits the light into two directions, and the light traveling straight is reflected by a reflecting mirror 11.
'jfc to the vibrating mirror 12. The vibrating mirror 12 is vibrated at a predetermined frequency fR, and uses the reflected light as a scanning beam to scan the opposing gap.
ビームスプリッタ−１０で光路を直角に変えた分光は、
フォトダイオード１３で光電変換し、その出力を後述の
出力補正用信号として供する。The spectrum obtained by changing the optical path at right angles with the beam splitter 10 is
The photodiode 13 performs photoelectric conversion, and the output thereof is provided as an output correction signal to be described later.
振動ミラー１２で反射されるレーザー光は、振動ミラー
１２によシ扇状の所定角度範囲で反射方向を変化させら
れるが、振動ミラー１２と前記対向スキマとの間に、振
動ミラー・レンズ間圧熱全自己の焦点距離と等しくして
配置したレンズ１４を設け、振動ミラー１２からの反射
光が、被測定物１とナイフェツジ３との対向方向（Ｘ軸
方向）に対して直交し、前記スキマを横切る向き（Ｘ軸
方向）に該スキマを走査する平行走査ビームに変換され
るようにしである。The direction of the laser beam reflected by the vibrating mirror 12 is changed by the vibrating mirror 12 within a predetermined fan-shaped angle range, but there is pressure between the vibrating mirror and the lens between the vibrating mirror 12 and the opposing gap. A lens 14 is provided, which is arranged to have a focal length equal to that of the entire self, so that the reflected light from the vibrating mirror 12 is perpendicular to the direction in which the object to be measured 1 and the knife blade 3 face each other (X-axis direction), and the gap is This is so that it is converted into a parallel scanning beam that scans the gap in a transverse direction (X-axis direction).
振動ミラー１２は、これに付属する図示しないタコ・ゼ
ネレータと発振ドライバ１５で構成する発振回路の一部
をなし、振動ミラー１２の自己共振周波数ｆ８で振動す
る。The vibrating mirror 12 forms part of an oscillation circuit including an attached tacho generator (not shown) and an oscillation driver 15, and vibrates at the self-resonant frequency f8 of the vibrating mirror 12.
被測定物１は、その取付台２に載置する一方、必要があ
ればスライド基台１６を図示しない駆動手段により被測
定物１の軸方向（Ｘ軸方向）にスライドさせ、対向スキ
マの規定位置で光走査を行うようにする。The object to be measured 1 is placed on its mounting base 2, and if necessary, the slide base 16 is slid in the axial direction (X-axis direction) of the object to be measured 1 by a drive means (not shown) to define the opposing gap. Optical scanning is performed at the position.
この場合、実施例ではナイフェツジ３’ｌｘ軸方向に対
して固定しであるが、これはナイフェツジ３のＸ軸方向
の長さが被測定物ｌの長さとほぼ同一長さに設定されて
いるような場合は、測定部材４を保持する図示しない保
持部をスライド基台１６上に設け、被測定物ｌと同方向
に移動させるようにしてもよく、また他の例では、被測
定物ＷをＸ軸方向にスリして固定し、光学系とナイフェ
ツジと’６ｘ軸方向にスライドさせる構成とすることも
できる。In this case, in the embodiment, the knife 3' is fixed with respect to the lx-axis direction, but this is because the length of the knife 3 in the X-axis direction is set to be approximately the same length as the length of the object to be measured l. In such a case, a holding part (not shown) for holding the measuring member 4 may be provided on the slide base 16 so that the measuring member 4 can be moved in the same direction as the object to be measured. It is also possible to have a configuration in which the optical system and the knife are slid in the x-axis direction, and the optical system and the knife are slid and fixed in the x-axis direction.
受光光学系６と光電子増倍管７との間には、６．３２８
Ａ波長光を透過する干渉フィルタ１７を介在させ、周囲
から混入する外光の影響を最小限に抑える。Between the light receiving optical system 6 and the photomultiplier tube 7, there is a distance of 6.328 mm.
An interference filter 17 that transmits A-wavelength light is interposed to minimize the influence of external light entering from the surroundings.
光電子増倍管７より出力した電気信号は、プリアンプ１
８によシ第３図に示すような信号波形Ｖに増幅した後、
次段のロックインアンプ１９に入力する。The electrical signal output from the photomultiplier tube 7 is sent to the preamplifier 1.
After amplifying the signal waveform V as shown in Fig. 3 according to 8,
It is input to the lock-in amplifier 19 at the next stage.
第３図の信号波形Ｖのピーク値Ｖｐｅａｋと、パルス幅
Ｖ ｗｉｄｔｈとは、前記対向スキマ幅Δ２と密接圧関
係する。この関係はスキマ幅Δ２に比して走査光のビー
ム径を十分に大きくするときに顕著にあられれ、この実
施例の場合、対向スキマ幅Δ２が０．０１μｍ〜１０μ
ｍに対して、走査光のビ−ム径ヲ０．２〜０．５蕪とし
ておシ、前記条件全十分満足している。The peak value Vpeak and the pulse width Vwidth of the signal waveform V in FIG. 3 are closely related to the opposing gap width Δ2. This relationship becomes remarkable when the beam diameter of the scanning light is made sufficiently large compared to the gap width Δ2, and in the case of this example, the opposing gap width Δ2 is 0.01 μm to 10 μm.
If the beam diameter of the scanning light is set to 0.2 to 0.5 m, all of the above conditions are fully satisfied.
プリアンプ１８で増幅した電気信号は、次段のロックイ
ンアンプ１９に入力されるが、電気パルス列の７一リエ
級数成分のうち所定高調波成分を検波してロックインア
ンプ１９から出力する。（実施例では２次の高調波を出
力する。）ロックインアンプ１９には、別に発振器ドラ
イバ１５から出力される振動ミラー１２の振動周波数ｆ
８の２倍の周波数の信号を参照信号として入力する。従
って対向スキマ幅Δ２の部分の光走査に対応するロック
インアンプ１９の出力Ｖ ｏｕｔは、前記スキマ幅Δ２
との間に、
ｖｏｕｔ＝−！ΔＺ ｓｉｎ ２ π／２・・・・・・
・・・（１）Ｋｏ：定数
の関係分有する。The electrical signal amplified by the preamplifier 18 is input to the lock-in amplifier 19 at the next stage, and a predetermined harmonic component among the 7-Lier series components of the electrical pulse train is detected and output from the lock-in amplifier 19. (In the embodiment, the second harmonic is output.) The lock-in amplifier 19 also has a vibration frequency f of the vibration mirror 12 output from the oscillator driver 15.
A signal with a frequency twice that of 8 is input as a reference signal. Therefore, the output V out of the lock-in amplifier 19 corresponding to the optical scanning of the portion of the opposing gap width Δ2 is the gap width Δ2.
Between, vout=-! ΔZ sin 2 π/2・・・・・・
...(1) Ko: Has a constant relationship.
次段の出力補正部２０では、ロックインアンプ１９の出
力Ｖｏｕｔ’ｉ入力する一方、フォトダイオード１３の
出力を、プリアンプ２１で増幅後、出力補正用信号とし
て入力し、Ｈｅ−Ｎｅガスレーザー８の光強度ゆらぎに
起因する出力Ｖ ｏｕｔの変動分を出力補正用信号に基
づいて補正する。In the output correction section 20 at the next stage, the output Vout'i of the lock-in amplifier 19 is input, while the output of the photodiode 13 is amplified by the preamplifier 21 and input as an output correction signal, and the output of the He-Ne gas laser 8 is inputted. A variation in the output V out due to light intensity fluctuation is corrected based on the output correction signal.
被測定物１は第４図示の如く、図示しない駆動装置によ
って図中矢符に示す如く回転させられるが、Ｘ−Ｙ記録
計２２のＸ−人力として回転角θに比例する電圧をロー
タリーエンコーダー２３或はポテンショメータ等により
入力し、Ｙ−人力には、出力補正部２０の出力Ｖｏｕｔ
’ｉ入力する。これによシ第５図に示すような記録波形
を得た。すなわちロックインアンプ１９の出力Ｖｏｕｔ
（実際は出力補正部２０の出力）から前記対向スキマ幅
Δｚ４測定することができる。As shown in the fourth figure, the object to be measured 1 is rotated as shown by the arrow in the figure by a drive device (not shown). is inputted by a potentiometer etc., and the output Vout of the output correction section 20 is inputted to Y-human power.
'iEnter. As a result, a recorded waveform as shown in FIG. 5 was obtained. That is, the output Vout of the lock-in amplifier 19
The opposing gap width Δz4 can be measured from (actually, the output of the output correction section 20).
なおこのように、非常に高い精度で寸法測定が行われる
結果、被測定物取付台２上に載置した被測定物の装着状
態が良好に保たれなければならないが、第４図の実施例
は、このような目的に対応して、取付台２に圧電素子２
４を装着し、信号発生器２５、増幅器２６を介して圧電
素子２４を駆動する。すなわち適当な周波数で取付台２
全励振し、取付台２上の被測定物１の装着を良好にし再
現性を向上することができる〇
第６図に示す実施例は、被測定物１と取付台２との間に
付着するゴミ、或は油膜等による影響を相殺するように
した場合の一例を示している。すなわち取付台２′に光
を透過する窓２ａを開設し、被測定物ｌの垂直方向の直
径線上に対向、する２個の測定部材４ 、４”ｉｉ配装
し、各ナイフェツジ３゜３′との対向スキマを２条のス
ポット光により走査すると共に、２組の受光光学系６
、６’、２組の図示しない光電子増倍管を配置する。而
して上方の対向スキマ、受光光学系、光電子増倍管、ロ
ックインアンプからの出力’ｆｒ：ＶｘｚＴ方からのそ
れを■２とするとき、信号処理方法としてｖｌ＋■２′
ｆ：加算回路にて作９ Ｖｏｕｔとする。In addition, as a result of dimension measurement being performed with extremely high precision in this way, the mounting condition of the object to be measured placed on the object to be measured mount 2 must be maintained in good condition. For this purpose, a piezoelectric element 2 is installed on the mounting base 2.
4 is attached, and the piezoelectric element 24 is driven via a signal generator 25 and an amplifier 26. In other words, at an appropriate frequency, the mounting base 2
It is possible to fully excite the object 1 to be measured on the mount 2 and improve reproducibility. In the embodiment shown in FIG. An example is shown in which the influence of dust, oil film, etc. is offset. That is, a window 2a that transmits light is provided in the mounting base 2', two measurement members 4, 4"ii are arranged facing each other on the diameter line in the vertical direction of the object to be measured, and each knife 3°3' At the same time, two sets of light receiving optical systems 6 scan the gap facing the
, 6', two sets of photomultiplier tubes (not shown) are arranged. Therefore, when the output from the upper opposed gap, the light receiving optical system, the photomultiplier tube, and the lock-in amplifier 'fr:VxzT is defined as ■2, the signal processing method is vl+■2'.
f: Created by the adder circuit and set to 9 Vout.
すなわち、被測定物と取付台との間に微小ゴミ゛が噛み
込まれたとき、被測定物に僅かな浮上りが発生するが、
この浮上りに起因して上方の透過光による出力ｖ１が小
さくなる反面、下方の透過光による出力ｖ２はその分だ
け大きくなシ、ゴミ、油膜、或は被測定物の駆動（移動
）機構の不完全等による測定誤差を相殺することができ
、該誤差を極力小さくしてオンラインでの測定を可能と
することができる。In other words, when minute dust gets caught between the object to be measured and the mounting base, the object to be measured will float slightly;
Due to this floating, the output v1 due to the upper transmitted light becomes smaller, but the output v2 due to the lower transmitted light becomes correspondingly larger. Measurement errors due to imperfections can be canceled out, and the errors can be minimized to enable online measurement.
以上の各実施例は、いずれも針状ころのような円筒状物
体の外径を測定する場合について示したが、これは第７
図に示すよう九、円筒形内径面を有する円環状被測定物
ＩＡの内径を測定する場合についても同様に実施可能で
あり、この場合、測定部材にナイフェツジを使用する代
りに、前記内径に対し微小対向スキマを形成する直径が
既知のボール３Ａｆｆｉ使用する。測定方法は図からも
明らかなように、前述の各実施例と全く同様であり、さ
らに微小ゴミ等の影響を考慮するときは、第８図に示す
如く、円環状被測定物の直径線上の２個所に対向スキマ
を形成するようにセットすればよなお前記各実施例にお
いて、走査光としてレーザー光を採用すれば、測定精度
の上で有利ではあるが、必ずしもこのようなコヒーレン
ト光を用いる必要はない。In each of the above embodiments, the outer diameter of a cylindrical object such as a needle roller is measured.
As shown in the figure, it is also possible to measure the inner diameter of an annular object to be measured IA having a cylindrical inner diameter surface.In this case, instead of using a knife as the measuring member, A ball 3Affi with a known diameter is used to form a minute opposing gap. As is clear from the figure, the measurement method is exactly the same as in each of the above-mentioned embodiments, and when considering the influence of minute dust etc., as shown in Fig. 8, the measurement method is In each of the above embodiments, it is advantageous in terms of measurement accuracy to use laser light as the scanning light, but it is not always necessary to use such coherent light. There isn't.
この発明は以上のように１特に円筒状被測定面を有する
被測定物の寸法測定を、きわめて高い精度をもって実現
することができ、実施例の場合、１／１００μｍ、ｔ−
ダーのスキマ計測が可能であることが確認された。As described above, the present invention can measure the dimensions of objects to be measured, especially those having cylindrical surfaces to be measured, with extremely high accuracy.
It was confirmed that it is possible to measure the gap between the
第１図はこの発明の一実施例の系統図、第２図（ａ）
、 （ｂ）は対向スキマ部を拡大して示す正面図と側面
図、第３図は光電変換して得られる電気信号の波形図、
第４図は他の実施例要部の正面図、第５図は光走査位置
とロックインアンプ出方との関係より得る特性図、第６
図（ａ） 、 （ｂ） 、第７図（ａ） 、 （ｂ）ｉ
ｄそれぞれ他の実施例要部の正面図と側面図、第８図（
ａ） 、 （ｂ）はさらに他の実施例の正面図と平面図
である。
１、ＩＡ・・・被測定物、２，２′・・・取付台、３，
３′・・・ナイフェツジ、３Ａ・・・ボール、ｊ＋４’
・・・測定部材、６，６′・・・受光光学系、７・・・
光電子増倍管、８・・・Ｈθ−Ｎｅガスレーザー、９・
・・ピンボール、１゜・・・ビームスプリッタ−１１２
・・・振動ミラー、１４・・・レンズ、１６・・・スラ
イド基台、１９°°゛ロツクインアンプ、２ｏ・・・出
方補正部、２２・・・ｘ−ｙ記録計、Δ２・・・対向ス
キマ幅
出願人 光洋精工株式会社
第１図
第２図
（Ｑ） （ｂ）
↑
第３図
第４図
１同す入山（θ）→
第７図
（ａ） （ｂ）
第８図
（０）
（ｂ）Figure 1 is a system diagram of an embodiment of this invention, Figure 2 (a)
, (b) is a front view and side view showing an enlarged view of the opposing gap, FIG. 3 is a waveform diagram of an electric signal obtained by photoelectric conversion,
Fig. 4 is a front view of the main parts of another embodiment, Fig. 5 is a characteristic diagram obtained from the relationship between the optical scanning position and the lock-in amplifier output direction, and Fig. 6 is a characteristic diagram obtained from the relationship between the optical scanning position and the lock-in amplifier output direction.
Figures (a), (b), Figure 7 (a), (b)i
d Front view and side view of main parts of other embodiments, Fig. 8 (
a) and (b) are a front view and a plan view of still another embodiment. 1, IA...Object to be measured, 2, 2'...Mounting base, 3,
3'... Naifetsuji, 3A... Ball, j+4'
...Measurement member, 6, 6'... Light receiving optical system, 7...
Photomultiplier tube, 8...Hθ-Ne gas laser, 9.
...Pinball, 1゜...Beam splitter-112
... Vibrating mirror, 14... Lens, 16... Slide base, 19°° lock-in amplifier, 2o... Output correction section, 22... x-y recorder, Δ2... - Opposing clearance width Applicant Koyo Seiko Co., Ltd. Figure 1 Figure 2 (Q) (b) ↑ Figure 3 Figure 4 Figure 1 Same entry (θ) → Figure 7 (a) (b) Figure 8 ( 0) (b)
Claims (1)
ラツキよυ大きい対向スキマな形成する如く測定部材を
セットする過程と、前記スキマをスポット光により所定
周期を走査する光走査過程と、光走査によυ前記スキマ
を透過した元金光電変換する光電変換過程と、光電変換
により得られる電気信号のツーＩＪ 工級数成分のうち
所定高調波成分を検波する検波過程と含み、検波出力と
前記スキマ幅との間に成立つ関係に基づき被測定物寸法
を測定することを特徴とする寸法測定方法（２）被測定
物取付台と、該取付台上の被測定物に対向して適正スキ
マを形成する測定部材と、スポット光を照射する投光手
段と、前記スキマにスポット光を照射し所定周期で該ス
キマを走査する光走査手段と、前記スキマを透過した光
を光電変換する光電変換手段と、光電変換手段の出力電
気信号を受けその電気信号のフーリエ級数成分のうち所
定高調波成分を検波するロックインアンプと、ロックイ
ンアンプの出力を前記スキマの各光走査位置に対応させ
て読みとる測定値判断手段とを含む寸法測定装置 （３）被測定物が円筒形被測定外径面を有し、測定部材
が前記外径面に適正スキマをもって対向させられるナイ
フェツジを有する特許請求の範囲（２）記載の寸法測定
装置 （４）被測定物が円筒形被測定内径面を有し、測足部材
が前記内径面に適正スキマを形成して挿入される球状外
径面を有する特許請求の範囲（２）記載の寸法測定装置 （５）被測定物の直径線上の２個所に前記スキマを形成
する如く前記測定部材を形成し、前記２個所の対向スキ
マのそれぞれに対応する２組の光走査手段と光電変換手
段とを設け、２組の光電変換手段の出力電気信号をロッ
クインアンプ九入力して合算すべくした特許請求の範囲
（２）から（４）までのいずれか１つに記載の寸法測定
装置[Scope of Claims] (1) A process of setting the measuring member so as to form a facing gap between the object to be measured and the measuring member that is larger than the variation in the dimensions of the object to be measured, and a process of setting the measuring member so as to form a facing gap between the object to be measured and the measuring member, and determining the gap by a spot light. An optical scanning process of scanning the period, a photoelectric conversion process of photoelectrically converting the source metal that passes through the gap by optical scanning, and a detection of a predetermined harmonic component among the two IJ series components of the electrical signal obtained by the photoelectric conversion. A dimension measuring method characterized in that the dimensions of the object to be measured are measured based on the relationship established between the detection output and the gap width (2) a mounting stand for the object to be measured, and a step on the mounting stand; a measuring member that forms an appropriate gap facing the object to be measured; a light projection device that irradiates a spot light; a light scanning device that irradiates the gap with a spot light and scans the gap at a predetermined period; a lock-in amplifier that receives an output electric signal from the photoelectric conversion means and detects a predetermined harmonic component among the Fourier series components of the electric signal; (3) The object to be measured has a cylindrical outer diameter surface to be measured, and the measuring member has an appropriate clearance on the outer diameter surface. (4) The dimension measuring device according to claim (2), which has knife blades that are opposed to each other. (5) The measuring member is formed so as to form the gaps at two locations on the diameter line of the object to be measured; Claim (2) in which two sets of optical scanning means and photoelectric conversion means are provided corresponding to each of the opposing gaps, and the output electric signals of the two sets of photoelectric conversion means are input to nine lock-in amplifiers and summed. The dimension measuring device according to any one of (4) to
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12285283A JPS6014106A (en) | 1983-07-05 | 1983-07-05 | Method and device for measuring dimension |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12285283A JPS6014106A (en) | 1983-07-05 | 1983-07-05 | Method and device for measuring dimension |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6014106A true JPS6014106A (en) | 1985-01-24 |
| JPH0547763B2 JPH0547763B2 (en) | 1993-07-19 |
Family
ID=14846232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12285283A Granted JPS6014106A (en) | 1983-07-05 | 1983-07-05 | Method and device for measuring dimension |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6014106A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0216587A2 (en) * | 1985-09-13 | 1987-04-01 | Tesa Metrology Limited | Improvements to optical measurement apparatus |
| US20130128285A1 (en) * | 2010-07-29 | 2013-05-23 | Panart Khajornrungruang | System and method for measuring length of gap between rotating tool and workpiece |
-
1983
- 1983-07-05 JP JP12285283A patent/JPS6014106A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0216587A2 (en) * | 1985-09-13 | 1987-04-01 | Tesa Metrology Limited | Improvements to optical measurement apparatus |
| US20130128285A1 (en) * | 2010-07-29 | 2013-05-23 | Panart Khajornrungruang | System and method for measuring length of gap between rotating tool and workpiece |
| US8755055B2 (en) * | 2010-07-29 | 2014-06-17 | Kyushu Institute Of Technology | System and method for measuring length of gap between rotating tool and workpiece |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0547763B2 (en) | 1993-07-19 |
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