JPS60140110A - Method and apparatus for measuring normal line direction of surface of object - Google Patents
Method and apparatus for measuring normal line direction of surface of objectInfo
- Publication number
- JPS60140110A JPS60140110A JP24513783A JP24513783A JPS60140110A JP S60140110 A JPS60140110 A JP S60140110A JP 24513783 A JP24513783 A JP 24513783A JP 24513783 A JP24513783 A JP 24513783A JP S60140110 A JPS60140110 A JP S60140110A
- Authority
- JP
- Japan
- Prior art keywords
- force detection
- component force
- measured
- glove
- detection probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 9
- 238000001514 detection method Methods 0.000 claims abstract description 84
- 239000000523 sample Substances 0.000 claims abstract description 48
- 239000013598 vector Substances 0.000 claims description 10
- 230000003247 decreasing effect Effects 0.000 claims 1
- 229920001971 elastomer Polymers 0.000 abstract 2
- 239000000806 elastomer Substances 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 9
- 238000005259 measurement Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 241001422033 Thestylus Species 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/24—Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は、被測定物表面の法線方向の渾１定方法及び装
置に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method and apparatus for determining the edge of a surface of an object to be measured in a normal direction.
従来は、たとえば被醇１定物との当接を検出するタッチ
プローブと、このタッチプローブを移動する位置決め装
置とから成る６次元測定装着があった。この６次元間１
定装置は、位置決め装置によりタッチグローブを被邸１
定物に接触させ、接触時のイＸＴ ｉｆ？決め装Ｊｆｊ
の移動距離から予め決められた座棒糸における接触点の
座標を検出するものである。Conventionally, there has been a six-dimensional measuring device consisting of, for example, a touch probe that detects contact with a fixed object and a positioning device that moves the touch probe. Between these six dimensions 1
The positioning device uses the positioning device to position the touch glove at the position 1.
If it is in contact with a fixed object, the temperature at the time of contact is XT. Decisive Jfj
The coordinates of a contact point on a predetermined seat rod thread are detected from the moving distance.
したかつて、被測定物の任意の測定点における法線方向
を測定するには、測定点近傍の少なくとも６点の座標を
６１１１定して計算を行なう必要があシ、座標測定時の
誤差と計算時の誤差が累積され、高精度の測定ができな
いという欠点があった。In the past, in order to measure the normal direction at any measurement point of the object to be measured, it was necessary to determine and calculate the coordinates of at least six points near the measurement point, which caused errors during coordinate measurement and calculation. This method has the disadvantage that time errors accumulate and highly accurate measurements cannot be made.
本発明は、上記のような欠点を解決するためになされた
もので、６分力検出グローブを被測定物に押し付けたと
きに生ずる反力方向から、６分力検出グローブと被測定
物との接触点における法線を高精度に測定することので
きる物体表面の法線方向の測定方法及びその装置を提供
するものである。The present invention was made in order to solve the above-mentioned drawbacks, and it is possible to detect the relationship between the six-component force detecting glove and the measured object from the direction of the reaction force generated when the six-component force detecting glove is pressed against the measured object. The present invention provides a method and apparatus for measuring the normal direction of an object surface, which can measure the normal line at a contact point with high precision.
第１図は６分力検出プローブ（１）が被測定物（２）に
接触したときに生ずる力の状態を６分力検出グローブ（
１１を基準とした直交座標系Ｘ＋ｙ＋・２上で示した説
明図である。６分力検出グローブ（１）に作用する力を
検出しながら、６分力検出グローブ（１）を２軸方向へ
移動させて被測定物（２）に接触させ、６分力検出グロ
ーブｆ１１に作用するＸｅ ）’＋ Ｚ軸方向の力ｘｌ
ｌ ３’Ｉ ｒ ｚｌ のいずれかが所定の値以上に
達したところで、２軸方向への移動を停止する。接触点
での面の法線方向が２軸方向ｔｚければ、６分力検出プ
ローブ（１）には法線方向抗力Ｎ と摩擦力Ｆａとの合
力ＦＭが作用する。３分力検出プローブｉ１１に作用１
する力ＦｓｔＪ：、接触点での面の法線方向ベクトルと
Ｘ、ｙ平面とのなす角θ２が９０・−〇。Figure 1 shows the state of the force generated when the 6-component force detection probe (1) contacts the object to be measured (2).
11 is an explanatory diagram shown on an orthogonal coordinate system X+y+·2 with reference to FIG. While detecting the force acting on the 6-component force detection glove (1), move the 6-component force detection glove (1) in two axial directions and bring it into contact with the object to be measured (2). Acting Xe)'+ Force xl in Z-axis direction
When either of l 3'I r zl reaches a predetermined value or more, movement in the two axis directions is stopped. If the normal direction of the surface at the contact point is the biaxial direction tz, then the resultant force FM of the normal direction resistance N and the frictional force Fa acts on the six-component force detection probe (1). 3-component force detection probe i11 acts 1
Force FstJ: The angle θ2 between the normal direction vector of the surface at the point of contact and the X, y plane is 90·-〇.
〉θｆ１９０ｕ−θ２≦θｆの場合によって異なる。〉θf190u−θ2≦θf.
ここでθｆは摩擦角であシ、６分力検出プローブ（１）
と被測定物（２）との間の摩擦係数がμであれば、−〇
。Here, θf is the friction angle, 6 component force detection probe (1)
If the coefficient of friction between and the object to be measured (2) is μ, -〇.
＝μであるｏ９Ｕ−−θ２〉θｆの場合６分力検出グロ
ーブ（１１に作用する力Ｆ＋の各方向の成分！＋＋ｙ１
＋Ｚｌは次式で与えられる。=μ o9U−−θ2>If θf, the 6-component force detection glove (components in each direction of the force F+ acting on 11!++y1
+Zl is given by the following formula.
一方、９００−θ、≦θｆの場合、６分力検出１０−ブ
ｒ１１に作用する力Ｆｌ の各方向の成分ｘｔ ｌ ｙ
＋ ＦＺｌは、次式で与えられる。On the other hand, in the case of 900-θ, ≦θf, the components in each direction of the force Fl acting on the 6-component force detection 10-bra r11
+FZl is given by the following formula.
各方向の成分ｘｉ ｌ ）’Ｉ ＊ ＺＩは、次式で与
えられる。The component xi l )'I*ZI in each direction is given by the following equation.
しｌこがって、６分力検出グローブｆｉ＋に作用する力
Ｆ１ （Ｄ Ｘ ＊ ’ｉ方向成分より、９０°−０２
〉θｆ１９０°−θ２≦θｆの状態が明確に判別できる
。The force F1 acting on the 6-component force detection glove fi+ (D
The state of 〉θf190°−θ2≦θf can be clearly determined.
９ｏ・−〇、〉θｆの場合には、前記の２軸方向からの
接触動作に次いで、−θｔ＝”／ｘｌで与えられるθ１
の方向へ６分力検出グローブ（１）を移動し、６分力検
出グローブ（１）に力が作用しないところで停止した後
、θ１の逆方向へ移動し、６分力検出プローブｆｌｌに
作用する法線方向の力Ｎと摩擦力２、のいずれかが所定
の値以上に達したところで移動を停止する。この時点で
、６分力検出グローブ（１）に作用する力Ｆ２の各方向
の成分Ｘ２＋ｙ１＋Ｚ２は次式で与えられる。In the case of 9o.
Move the 6-component force detection glove (1) in the direction of , stop where no force acts on the 6-component force detection glove (1), then move in the opposite direction of θ1 and act on the 6-component force detection probe fll. The movement is stopped when either the force N in the normal direction or the friction force 2 reaches a predetermined value or more. At this point, the component X2+y1+Z2 in each direction of the force F2 acting on the six-component force detection glove (1) is given by the following equation.
前記２回の接触動作によシ得られた力Ｘ１＋）’ＩｔＺ
１＋ Ｘｚｔ Ｖｍｒ ＺＩ から、接触点での面の法
線ペクトルｔ＝邸θ！・邸θ１１十邸θ３拳幽θ１ノ十
内θ！にのＸｔ ｙ。The force obtained by the above two contact operations X1+)'ItZ
From 1+ - Residence θ11 ten residence θ3 fist Yu θ1 no juuchai θ! Xt y.
２方向の成分は、次式で与えられる。ここでｉＴＬ ｋ
はそれぞれＸ、ｙ、ｚ方向の単位ベクトルを示している
。The components in two directions are given by the following equation. iTL k here
represent unit vectors in the X, y, and z directions, respectively.
一方、９０°−θ２≦θｆの場合は、３分力検出グロー
ブ（１）を接触点のまわりに、２軸に対して摩擦角θｆ
の２倍より大きい角度θ０傾ける。６分力検出グローブ
（１１を傾けたときの、６分力検出プローブ（１１を基
準にとった直交座標系を）Ｃ’ Ｈｙ’ ＋ Ｚ’とす
れば ｚ／軸方向に６分力検出グローブ（１）を後退さ
せた彼、Ｘ’、 ７’、 Ｚ’ 座標系において９０°
−θ２〉θｆ の場合と同様に２回の接触動作を行なう
ことにより、Ｘ’ｒ Ｖ’ｒ Ｚ’座標系での法線ベク
トルが得られ、この法線ベクトルをＸ＋ ｙｌｚ、Ｐｌ
；を壁糸に変換すれは、ｘ、ｙ、ｚ座標系での法線ベク
トルが祷られる。たとえば、第２図に示すようにｙ軸方
向の１わりに、６分力検出グローブ（１）を角度００回
転したときの、６分力検出グローブ（１）を基準とした
座標系ｘ′、ｙ′、ｚ′において得られた法線方向ベク
トルの成分がｔｘ’ ＋ ｔｙ’ ＋ ｔｚ’であれば
、ｘ、ｙ、ｚ座標系での法線ベクトルは次式で変換され
る。On the other hand, in the case of 90°-θ2≦θf, the 3-component force detection glove (1) is placed around the contact point at a friction angle θf with respect to the two axes.
Tilt at an angle θ0 that is greater than twice the angle. 6-component force detection probe (when 11 is tilted, the 6-component force detection probe (orthogonal coordinate system based on 11) is C'Hy' + Z', 6-component force detection glove in the z/axis direction He who retreated (1), 90° in the X', 7', Z' coordinate system
By performing two contact operations in the same way as in the case of −θ2>θf, the normal vector in the X'r V'r Z' coordinate system is obtained, and this normal vector is expressed as X+ ylz, Pl
To convert ; into a wall thread, the normal vector in the x, y, z coordinate system is determined. For example, as shown in Figure 2, when the 6-component force-detecting glove (1) is rotated by 00 degrees in the y-axis direction, the coordinate system x', y is based on the 6-component force-detecting glove (1). If the component of the normal direction vector obtained at ', z' is tx' + ty' + tz', the normal vector in the x, y, z coordinate system is transformed by the following equation.
１＝（ａｘｆｊＯ−Ａｘ’ ＋ｄｎθｏ−１Ｚ’）ｉ
＋ｔｙ’ｊ ＋ （ａｘθｏｔ／。1=(axfjO-Ax'+dnθo-1Z')i
+ty'j + (axθot/.
−自θ、−１÷）ｋ ・・・■
このようにして６分力検出グローブ（１）を皺曲１定物
（２）に接触させたときのｘ、ｙ、ｚ軸方向の力・より
被ｒＡ＋＋定物表面の法線方向が得られる。-Auto θ, -1÷)k ...■ In this way, the force in the x, y, and z axis directions when the 6-component force detection glove (1) is brought into contact with the wrinkle 1 constant object (2) From this, the normal direction of the surface of the rA++ constant object can be obtained.
第６図は本発明に係る物体表面の法線方向の測定装置の
機構部の全体構成を示した斜視図である。FIG. 6 is a perspective view showing the overall structure of the mechanism of the device for measuring the normal direction of the surface of an object according to the present invention.
（２）は被ｆＡＩＩ定物、ｆｌｌｉｊｘ、７＋ Ｚ方向
のカを検出できる６分力検出プローブ、（３）は先端に
取付けられた３分力検出グローブ（１）のＸ＋ ３’＋
Ｚ方向の位置とｙ軸まわシの姿勢を変える４自由度の
位置決め装置である。(2) is the fAII constant object, flijx, 7+ 6-component force detection probe that can detect the force in the Z direction, (3) is the 3-component force detection probe (1) attached to the tip of the X+ 3'+
It is a positioning device with four degrees of freedom that changes the position in the Z direction and the orientation in the Y axis.
第４図は６分力検出グローブ（１）の実施例を示す斜視
図である。（４）はベース、（５）はベース（４）に両
端が固定された板バネ、＋６１は板バネ（４）の中央部
に同定され、Ｘ、Ｘ方向にそれぞれ２ケｌりｒづつ薄肉
部を有する；Ｉｔ性体、（７）は先端が球状に形成され
後端が弾性体（６）に固定された触針である。＋８１、
（９１、（Ｉｎ）Ｉｄ歪ゲージで、板バネ（５）には歪
ゲージ（８）が中央を対称に２個貼りつけている。また
弾性体（６）にはＸ方向に薄くなっている部分に歪ゲー
ジ（９）が２個貼りつけられており、Ｘ方向に薄くなっ
ている部分に歪ゲージ０（２）が２個貼９つけられてい
る。板バネ（５）及び弾性体（６）に、上記のように歪
ゲージ（８）〜ααを貼りつけ、後述のように歪ゲージ
（８）〜０υをブリッジ回路に結線することＫよって、
触針（７）に作用する力の２方向成分を歪ゲージ（８１
、ｘ方向成分を歪ゲージｆ９１、Ｘ方向成分を歪ゲージ
Ｕｎによってそれぞれ独立して検出することができる。FIG. 4 is a perspective view showing an embodiment of the six-component force detection glove (1). (4) is the base, (5) is a leaf spring with both ends fixed to the base (4), +61 is identified at the center of the leaf spring (4), and has a thinner wall of 2 kels in each of the X and X directions. (7) is a stylus having a spherical tip and a rear end fixed to the elastic body (6). +81,
(91, (In) Id strain gauge. Two strain gauges (8) are attached to the leaf spring (5) symmetrically around the center. Also, the elastic body (6) has a thinner strain gauge in the X direction. Two strain gauges (9) are attached to the part, and two strain gauges 0 (2) are attached to the thinner part in the X direction.The leaf spring (5) and the elastic body ( 6), attach the strain gauges (8) to αα as described above, and connect the strain gauges (8) to 0υ to the bridge circuit as described later.
The two-directional components of the force acting on the stylus (7) are measured using a strain gauge (81).
, the x-direction component can be detected independently by the strain gauge f91, and the X-direction component can be detected independently by the strain gauge Un.
第５図は制御装置の一例を示すブロック図で、制御装置
矯（１υは６分力検出グローブ（１）からの出力を処理
する６分力検出回路＋１２と、位置決め装置ｊＢ ＋２
１を制御する位置決め装置制御回路（１３１と、マイク
ロコンピュータ（１４Ｊとからなっている。６分力検出
回路（１３は歪ゲージ（８）〜（Ｉ［１１ごとにそれぞ
れ歪ゲージ出力信号処理回路（１９〜（］ηを備えてい
る。たとえば、処理回路（１９では、２個の歪ゲージ（
８）と２個の固定抵抗（ｔＳで構成されたブリッジ回路
がストレインアンプ１１１によって印加され、このブリ
ッジの出力信号はストレインアンプ（１１で増幅され、
直流信号として出力される。他の歪ゲージ出力信号処理
回路（１→、（Ｉｎも同様に直流信号を出力する。ただ
し、歪ゲージ出力信号処理回路ｆ１５１１ｃおけるブリ
ッジ回路は、歪ゲージ（８）が貼り付けである板バネ（
５）に作用する２方向の力だけを取シ出すために、２個
の歪ゲージ（８）が対向するようＶｃｌｌ成し、歪ゲー
ジ出力信号処理回路＋１６１．１１７１におけるブリッ
ジ回路は、弾性体（６）に作用するＸ、Ｘ方向の力を取
り出すためにそれぞれ２個の歪ゲージｆ９１、（ＩＩが
隣接するように構成されている。ゲージ出力処理回路ａ
Ｓ＋〜（１７１からの直流信号はサンプルホールド回路
；刻に大刀され、マルチプレクサＱυを介してＡ／Ｄ変
換回路＋２（９でデジタル信号化された後、マイクロコ
ンピュータ＋１４１に取り込まれる。位置決め装装置制
御回路（１濁は、６分力検出グローブｆ’ｌ ｌの位置
と姿勢を変える位置決め装置の４個のアクチェータ駆動
回路（２ト＠からなり、それぞれアクチェータ（２η〜
（至）をマイクロコンピュータ（１４１から出力される
指令に従って駆動する。FIG. 5 is a block diagram showing an example of a control device, where 1υ is a six-component force detection circuit +12 that processes the output from the six-component force detection glove (1), and a positioning device jB +2.
It consists of a positioning device control circuit (131) that controls the positioning device control circuit (131) and a microcomputer (14J).The six-component force detection circuit (13 is a strain gauge output signal processing circuit (13) for each strain gauge (8) to (I[11) For example, the processing circuit (19 includes two strain gauges ()).
8) and two fixed resistors (tS) is applied by a strain amplifier 111, and the output signal of this bridge is amplified by the strain amplifier (11).
Output as a DC signal. Other strain gauge output signal processing circuits (1→, (In) also output DC signals in the same way. However, the bridge circuit in the strain gauge output signal processing circuit f1511c is connected to the plate spring (
In order to extract only the forces in two directions acting on the strain gauges (8), Vcll is formed so that the two strain gauges (8) face each other, and the bridge circuit in the strain gauge output signal processing circuit +161. 6) In order to take out the forces in the X and X directions that act on the
The DC signal from S+~(171 is sampled and held by the sample hold circuit; it is converted into a digital signal by the A/D conversion circuit +2 (9) via the multiplexer Qυ, and then taken into the microcomputer +141. Positioning device control Circuit (1) consists of 4 actuator drive circuits (2 t@) of the positioning device that changes the position and attitude of the 6-component force detection glove f'l l, each of which has an actuator (2η~
(to) is driven according to instructions output from the microcomputer (141).
上記のように構成した本発明に係る物体表面の法線方向
測定装置の動作を第６図、第７図（ａ）〜（ｆ）で駅、
明する。第６図は３分力検出グローブ（夏）が接触して
いる面とＸ−ｙ平面のなす角度が摩擦角より大きい場合
における、６分力検出プローブ（１）の先端の動作を、
法線ベクトルを含みｘ−ｙ平面に垂ＩＣな平面上で示し
ている。第７図は３分力検出プローブ（１）が接触して
いる面とｘ−ｙ平面のなす角度が摩擦角より小ざい場合
における６分力検出プローブ（１）の動作をＸ −Ｚ平
面上で示している。The operation of the device for measuring the normal direction of an object surface according to the present invention configured as described above is shown in FIGS. 6 and 7(a) to (f).
I will clarify. Figure 6 shows the movement of the tip of the 6-component force detection probe (1) when the angle between the surface in contact with the 3-component force detection glove (summer) and the X-y plane is larger than the friction angle.
It is shown on a plane that includes the normal vector and is perpendicular to the x-y plane. Figure 7 shows the operation of the 6-component force detection probe (1) on the X-Z plane when the angle between the surface in contact with the 3-component force detection probe (1) and the x-y plane is smaller than the friction angle. It is shown in
６分力検出グローブ（１）を位置決め装置（３）によシ
２軸方向に移動させるとともに、逐次６分力検出プロー
ブ（１）からの出力を制御装置θＤへ取込む。６分力検
出プローブ（１１が被測定物（２）に接触し、６分力検
出グローブ（１）に作用するＸｓ）’ｙＺ軸方向のいず
れかが０１定の値以上になったところで、ｚ軸方向への
移動を停止する。この時点での６分力検出プローブ（１
）に作用するｘ、ｙ、ｚ軸方向の力ｘ１ｔ ｙＩ＋’
ｚｌ ヲマイクロコンピュータＩに記憶シておく。The six-component force detection glove (1) is moved in two axial directions by the positioning device (3), and the output from the six-component force detection probe (1) is sequentially input to the control device θD. When either of the 6-component force detection probe (11 contacts the object to be measured (2) and the 6-component force detection glove (1) in the Stop axial movement. At this point, the 6-component force detection probe (1
) in the x, y, and z axis directions x1t yI+'
zl Store it in the microcomputer I.
次にｘｌ ｌ ｙｌのいずれかが零でないならば、マイ
クロコンピュータ（１４１によシーθ１＝ｙ／ｘ１で与
えられるθ１を計算し、位置決め装置（３）によシロ分
力検出プローブ（１）を０１の方向へ後退させ、６分力
検出グローブ（１）に作用する力が零になったところで
後退を停止した後、再び逆方向へ移動させ、６分力検出
プａ−プｔ１＋に作用するＸ ＊ ｙｔ Ｚ刺１方向の
力” ｌ ｙｔ ｌ ｚｌのいずれかが所定の値以上に
なったところで、移動を停止する。”Ｉ ｌ ７ｔ＋
ｚｔ ｌ ｘｆｉ７ｚ＊Ｚｔ よシマイクロコンピュー
タ（１４）で法線方向を計算することに、よ勺、物体表
面の法線方向を得ることができる。Next, if any of xl, l, yl is not zero, the microcomputer (141) calculates θ1 given by the equation θ1=y/x1, and the positioning device (3) detects the force component (1). 01 direction and stop the retreat when the force acting on the 6-component force detection glove (1) becomes zero, then move it in the opposite direction again and act on the 6-component force detection globe (a-t1+). When any of the forces in one direction of the Z sting (X * yt, Z prick, yt, l, zl) reaches a predetermined value or more, the movement is stopped."I l 7t+
zt l xfi7z*Zt By calculating the normal direction using the microcomputer (14), the normal direction of the object surface can be obtained.
一方、ＸＩ ｌ ｙｔがともに零であれは、位置決め装
置（３）によシロ分力検出グローブ（Ｊ）の先端の球の
中心まわりに摩擦角の２倍以上の角度回転させる。On the other hand, if XI lyt are both zero, the positioning device (3) rotates the tip of the white component force detection glove (J) around the center of the sphere by an angle that is more than twice the friction angle.
６分力検出プローブ（１）を回転したときの６分力検出
プローブ（１）を基準にとった座標系をＸ’＋ ｙ’＋
Ｚ’とすれは、次に位置決め装置Ｎ ｆ３１により６
分力検出グローブ（１）を２′方向へ後退させ、６分力
検出グローブ（１）に力が作用しなくなるところで停止
した後 ｚ／力方向′ｓ、動じ６分力検出グローブに作
用する力Ｘｓ＋ ｙｉ＋ ｚｌのいずれかが所定の値を
越えたところで移動を停止し、ｘＳ、ｙ３．ｚｌをマイ
クロコンピュータ（］４Ｊ ＶＣ９６憶する。次にマイ
クロコンピュータ（１４１によｔ） ｔｍｏｌ ＝ ｙ
Ｖｚ、で与えられる０重を計ｑし、位置決め装置（３）
により６分力検出プローブｆｉ１を０重の方向へ後退さ
せ、６分力検出グローブ（１１に作用する力が零になっ
たところで後退を停止した後再ひ逆方向へ移動させ、６
分力検出プローブ（１１に作用するｘ、ｙ、ｚ軸方向の
力Ｘ４＋ｙ４＋ ｚ４のいずれかが所定の値以上になっ
たところで移動を停止する。ｘｌ １ ｙ８ ｒ ｚｓ
＋ Ｘ４１ ｙ４ ＋ｚ４ よシマイクロコンピュー
タ１ｔ（ｌでＸ’ Ｈｙ’ ＊ Ｚ’座標系での法線方
向を計算した後、５分力検出プローブ（１）を傾けた角
度の分を補正すれば物体表面の法線方向を得ることがで
きる。The coordinate system based on the 6-component force detection probe (1) when the 6-component force detection probe (1) is rotated is X'+ y'+
Next, positioning device N f31 moves Z' and
After moving the component force detection glove (1) backward in the 2' direction and stopping when the force no longer acts on the 6 component force detection glove (1), z/force direction's, the force acting on the 6 component force detection glove moves. Movement is stopped when any of Xs+yi+zl exceeds a predetermined value, and xS, y3. Store zl in the microcomputer (]4J VC96. Next, store zl in the microcomputer (141) tmol = y
Measure the zero weight given by Vz, and use the positioning device (3)
The 6-component force detection probe fi1 is moved backward in the direction of zero force, and when the force acting on the 6-component force detection probe (11) becomes zero, the retreat is stopped and then moved in the opposite direction again.
Movement is stopped when any of the forces in the x, y, and z axis directions, X4+y4+z4, acting on component force detection probe (11) exceeds a predetermined value.xl 1 y8 r zs
+ The normal direction of the surface can be obtained.
第８図は本発明の他の実施例を示す説明図で、他の用途
への転用例を示している。この実施例では物体表面測定
装置において、５分力検出グローブｆｌｌをｙ軸まわす
に姿勢を変えられる。位置決め装置としているが、６分
力検出グローブ（１１をＸ−ｙ平面に対して傾けられる
ものであれば同様の効果が得られる。FIG. 8 is an explanatory diagram showing another embodiment of the present invention, and shows an example of application to other uses. In this embodiment, in the object surface measuring device, the posture of the five-component force detection glove flll can be changed by rotating it on the y-axis. Although it is used as a positioning device, the same effect can be obtained as long as the six-component force detection glove (11 can be tilted with respect to the X-y plane).
以上の説明では６分力検出グローブが被測定物ＫＷ触し
たときに生じる力の方向から物体表面の法線方向を測定
する場合を示したが、本発明の物体表面の法線方向測定
装置ｆは高精度の３次元物体形状測定装置としても用い
ることができる。通常の３次元物体形状測定装置では、
位置決め装置の先に取付けたタッチプローブが被測定物
に接触したときのタッチプローブのｘ ＊ ｙ ｒ ｚ
ａｍをめる動作を多数点打なって被測定物の形状を測
定していたため、狽１１定点間の補間の際の誤差とタッ
チプローブ先端の大きさによる実際の接触点と油１定し
た接触点との位置の誤差が避られない。しかしながら本
発明のように接触点での法線方向がわかれば、６Ｉ１１
定点間を補間するときの情報量がふえ、補間の精度を上
げることができる。また、Ｘ軸と角バしθｒなす斜面と
先端が半径ｒの球になっている６分力検出プローブとを
２次元で示した第８図のように、、法線方向より球の接
触位置がわかるため、正確に＃湘１定物上の接触点の位
置を測定できる。したがって、本発明によれば、６次元
物体の形状測定を高Ｎ度に測定することが口Ｊ能である
。In the above explanation, the normal direction of the object surface is measured from the direction of the force generated when the six-component force detection glove touches the object KW, but the normal direction measuring device f of the object surface of the present invention has been described. can also be used as a highly accurate three-dimensional object shape measuring device. In a normal 3D object shape measuring device,
x * y r z of the touch probe when the touch probe attached to the tip of the positioning device contacts the object to be measured
Since the shape of the object to be measured was measured by making multiple points in the am closing motion, there was a difference between the actual contact point and the oil constant contact due to errors in interpolation between fixed points and the size of the tip of the touch probe. Errors in position with respect to the points are unavoidable. However, if the normal direction at the contact point is known as in the present invention, 6I11
The amount of information when interpolating between fixed points increases, and the accuracy of interpolation can be improved. Also, as shown in Figure 8, which is a two-dimensional diagram showing the slope that forms an angle θr with the X-axis and the 6-component force detection probe whose tip is a sphere with radius r, the contact position of the sphere from the normal direction. Since this is known, the position of the contact point on the #1 fixed object can be accurately measured. Therefore, according to the present invention, it is possible to measure the shape of a six-dimensional object to a high degree of N.
以上の説明から明らかなように、本発明によれば祈測定
物の表面上の測定点での法線方向が直接得られ、高精度
の測定が行なえる等の顕著な効果ｆあげることができる
。As is clear from the above explanation, according to the present invention, the normal direction at the measurement point on the surface of the object to be measured can be directly obtained, and remarkable effects such as high precision measurement can be achieved. .
８Ｐ７１図は６分力検出プローブが物体表面に接触した
ときの力の状態を示す説明図、第２図は６分力検出プロ
ーブを傾ける場合の力の状態を示す説明図、＾３６図は
物体表面の法線方向姐１（定装置の機構部を示す斜視図
、第４図は６分力検出プローブを示す斜視図、第５図は
制御回路構成の一例を示すブロック図、第６図、第７図
←）、（ｈｂ （Ｑｂ （ｄ）ｊ（Ｑ）、 （ｆ）は６
分力検出プローブの動作説明図、第８図は本発明の他の
実施例を示す説明図である。
（１）・・・６分力検出グローブ （２）・・・被測定
物 （３）・・・位置決め装置 （ｌυ・・・制御装置
。
なお各図中同一符号は同一または相当部分を示すものと
する。
代理人 弁理士 木 村 三 朗
第 ５ 図
第６０
餡７図
（０） （ｄ）
手続袖正書（自発）
昭和５９年 ６月２２日
特許庁長官殿
１、事件の表示 特願昭５８−２４５１３７号２、発明
の名称
物体表面の法線方向の測定方法及び装置３、油止をする
者
４、代理人
６、 補正の内容
（１）明細書の「特許請求の範囲」を別紙のとおシ補正
する。
（２）明細書第４頁第１９行〜第２０行の「摩擦力Ｆａ
との合力Ｆｔ Ｊを「摩擦力Ｆａとの合力Ｆ１」と補正
する。
（３）明細書第５頁第１行のｒＦｔＪを「Ｆｌ」と補正
する。
（４）明細書第６頁第８行のｒＮＪをｒＮＪと補正する
。
（５）明細書第１０貢第１９行の「／Ｄ変換回路（イ）
」を「Ａ／Ｄ変換回路四」と補正する。
（６）明細書第１１貢第２行〜第６行の「位置決め装置
」を「位置決め装置（３１」と補正する。
（７）明細書第１６庁第１０行の「−θｔ−／ＸｘＪを
ｒ ｔｕ ｌｌｓ ＝ ”／ Ｘｇ Ｊ ト補正スル。
（８）図面の第７図を別紙補正図面のとおシ補正する。
以上
特許請求の範囲（補正〕
「（１）作用する力のｘ、ｙ、ｚ軸方向の力検出をでき
る３分力検出グローブを被測定物表面に押しつけて被渾
１定物表面の法線方向を測定する方法において、
（ｉ）、６分力検出プローブに作用する刀を６１１１定
しながら５分力検出プローブを２軸方向に移動させ、６
分力検出グローブが被淋１定物に接触して、６分力検出
プローブに作用するｘ、ｙ、ｚ軸方向の力ＸＩ＋ ｙｔ
＋ ｚｌのいずれかが所定の値になると移動を停止する
。
■、ＸＩ・ｙＩがともに零でない場合には、−〇簾−ｙ
ンエ、で与えられる角度０１一方向へ６分力検出グロー
ブに作用する力が零になるまで移動した後停止する。次
いで、角度６１の逆方向へ移動し、６分力検出グローブ
が被測定物に接触し３分力検出プローブに作用するｘｌ
、 ｙｚ＋ Ｚｌのいずれかが所定の値になると移動を
停止する。この動作で得られたｘｌ ＋ ７１ ｔ ｚ
ｌとＶｘｒ Ｖｘｒ ｚｍ より・被測定物表面の法線
方向は法線方向の単位ベクトル（ｘ＋ ＋ｘｚ）／ ｆ
ｉＸ１＋ｘ２）”＋Ｃｙｔ ＋ｙｘ）”＋（ｚ＜ ＋
ｚ、−）ｉ−。
ｔｚ＝（Ｚ＋＋Ｚｚ）／Ｊ（穐＋Ｘｓ）”＋（Ｆｓ＋７
ｉ）” ＋（ｚｔ ＋ｚｘ ）” ｒを得る。
■、ｘｌ ＋ ３’ｓがともに零の場合には、６分力検
出プローブを被測定物と３分力検出グローブの摩擦角の
２倍以上の角度傾けた後、前記■、■と同様の動作で法
線方向を得、傾けた角度の補正を行なって被測定物表面
の法線方向を得ることを特徴とする物体表面の法線方向
の測定方法。
ｒ２１作用する力のＸＩ ７ｒ Ｚ軸方向の成分を、独
立に検出できるように歪ゲージを貼シ付けた６分力検出
グローブと、前記６分力検出プローブを移動させる多自
由度の位置決め装置と、前記６分力装置を制御する制御
装置とを備えたことを特徴とする物体表面の法線方向測
定装置。」
第７
（ａ）
１
［ｂ）
（Ｃ）
（ｄ）
（ｅ）Figure 8P71 is an explanatory diagram showing the state of force when the 6-component force detection probe contacts the surface of an object, Figure 2 is an explanatory diagram showing the state of force when the 6-component force detection probe is tilted, and Figure 36 is an explanatory diagram showing the state of force when the 6-component force detection probe contacts the object surface. Normal direction of the surface 1 Figure 7←), (hb (Qb (d)j(Q), (f) is 6
FIG. 8, which is an explanatory diagram of the operation of the component force detection probe, is an explanatory diagram showing another embodiment of the present invention. (1)...Six-component force detection glove (2)...Object to be measured (3)...Positioning device (lυ...Control device. The same symbols in each figure indicate the same or equivalent parts. Agent: Patent Attorney Sanro Kimura 5 Figure 60 Figure 7 (0) (d) Procedural Sleeve Letter (spontaneous) June 22, 1980 To the Commissioner of the Japan Patent Office 1, Indication of the case Patent application No. 58-245137 2, Title of the invention: Method and device for measuring the normal direction of the surface of an object 3, Oil stopper 4, Agent 6, Contents of amendment (1) The “claims” of the specification have been changed. (2) “Frictional force Fa” on page 4, lines 19-20 of the specification.
The resultant force FtJ with the frictional force Fa is corrected as "the resultant force F1 with the frictional force Fa." (3) Correct rFtJ in the first line of page 5 of the specification to "Fl". (4) Correct rNJ on page 6, line 8 of the specification to rNJ. (5) "/D conversion circuit (A)" in Part 10, Line 19 of the specification
" is corrected to "A/D conversion circuit 4". (6) “Positioning device” in lines 2 to 6 of the 11th official specification is corrected to “positioning device (31”). (7) “-θt-/XxJ” in line 10 of the 16th office of the specification is corrected. r tu lls = ”/ In the method of measuring the normal direction of the surface of the object to be measured by pressing a 3-component force detection glove capable of detecting force in the z-axis direction against the surface of the object to be measured, (i), a sword acting on the 6-component force detection probe; While keeping 6111 constant, move the 5-component force detection probe in two axial directions, and
When the component force detection glove comes into contact with the fixed object, the force in the x, y, and z axis directions acting on the 6 component force detection probe is XI + yt
+zl reaches a predetermined value, the movement is stopped. ■, If both XI and yI are not zero, -〇blade-y
It moves in one direction until the force acting on the 6-component force detection glove becomes zero, and then stops. Then, moving in the opposite direction of angle 61, the 6-component force detection glove contacts the object to be measured and acts on the 3-component force detection probe xl
, yz+Zl reaches a predetermined value, the movement is stopped. xl + 71 t z obtained by this operation
From l and Vxr Vxr zm - The normal direction of the surface of the object to be measured is the unit vector in the normal direction (x+ +xz)/f
iX1+x2)"+Cyt +yx)"+(z< +
z,-)i-. tz=(Z++Zz)/J(穐+Xs)”+(Fs+7
i) Obtain "+(zt +zx)" r. If ■ and xl + 3's are both zero, tilt the 6-component force detection probe at an angle that is more than twice the friction angle between the object to be measured and the 3-component force detection glove, and then A method for measuring the normal direction of the surface of an object, characterized in that the normal direction is obtained by motion, and the normal direction of the surface of the object is obtained by correcting the tilted angle. r21 A 6-component force detection glove with a strain gauge pasted thereon so as to be able to independently detect the component of the acting force in the XI 7r Z-axis direction, and a multi-degree-of-freedom positioning device for moving the 6-component force detection probe. , and a control device for controlling the six-component force device. ” Section 7 (a) 1 [b) (C) (d) (e)
Claims (2)
６分力検出グローブを被測定物表面に押しつけて被測定
物表面の法線方向を測定する方法において、 ■、６分力検出グローブに作用する力を測定しながら６
分力検出グローブを２軸方向に移動させ、６分力検出プ
ローブが被測定物に接触して、６分力検出プローブに作
用するＸ＋ ｙ＋ Ｚ軸方向の力Ｘ□＋）’Ｉ＋Ｚ１
のいずれかが所定の値忙なると移動を停止する。 （す、Ｘｌｙ ｙｌがともに零でない場合には、−θ＝
”ｊ＋７ｘ１で与えられる角度θ方向へ３分力検出グロ
ーブに作用する力が零になるまで移動した後停止する。 次いで、角度θの逆方向へ移動し、６分力検出プローブ
が被測定物に接触し３分力検出グローブに作用するＸ２
＊ ’ｊａｒ ｚｆｉのいずれかが所定の値になると移
動を停止する。この動作で得られたＸｌ１ｙＩＩｚ１と
Ｘ２＋ Ｘ２＊ Ｚ２よシ、被測定物表面の法線方向は
法線方向の単位ベクトル（ＸＩ ＋Ｎａ ） ／ ！ｙ
２）”＋ （Ｚｌ 、＋ｚ２ ）” 。 ｔｒ、 ＝ （Ｚｌ ＋Ｚｆｉ ）／ （Ｘ１＋Ｘ！
） ＋（）’ｔ＋ｙｚ）”＋（ｚｌ＋ｚＪ”を得る。 ■、’Ｘｔ ＋ ７１がともに零の場合には、６分力検
出プローブを被測定物と６分力検出グローブの摩擦角の
２倍以上の角度幼けた後、前記■、■と同様の動作で法
線方向を得、傾けた角度の補正を行なって被測定物表面
の法線方向を得ることを特徴とする物体底面の法線方向
の測定方法。(1) In the method of measuring the normal direction of the surface of the object to be measured by pressing a 6-component force detection glove capable of detecting the acting force in the X, y, and Z axis directions against the surface of the object to be measured, 6 while measuring the force acting on the force detection glove.
The component force detection globe is moved in two axes, the 6 component force detection probe comes into contact with the object to be measured, and the force acting on the 6 component force detection probe is X+ y+ Force in the Z axis direction
When one of them becomes busy by a predetermined value, it stops moving. (If both Xly and yl are not zero, -θ=
It moves in the direction of the angle θ given by j+7x1 until the force acting on the 3-component force detection glove becomes zero, and then stops.Then, it moves in the opposite direction of the angle θ, and the 6-component force detection probe touches the object to be measured. X2 that contacts and acts on the 3-component force detection glove
*When either 'jar zfi reaches a predetermined value, the movement is stopped. From Xl1yIIz1 and X2+X2*Z2 obtained by this operation, the normal direction of the surface of the object to be measured is the unit vector in the normal direction (XI + Na) /! y
2)"+(Zl,+z2)". tr, = (Zl +Zfi)/ (X1+X!
) +()'t+yz)"+(zl+zJ" is obtained. ■If both 'Xt + 71 are zero, set the 6-component force detection probe at twice the friction angle between the object to be measured and the 6-component force detection glove. After decreasing the above angle, the normal direction is obtained by the same operations as in (1) and (2) above, and the normal direction of the surface of the object to be measured is obtained by correcting the tilted angle.The normal to the bottom surface of the object. How to measure direction.
立に検出できるように歪ゲージを貼ｐ付けた６分力検出
グローブと、前記３分力検出グローブを移動させる多自
由度の位置決め装置と、前記３分力検出グローブの出力
を演算処理し、前記位置決め装置ａを制御する制御装置
とを備えたことを特徴とする物体表面の法線方向測定装
置。(2) Multi-degree-of-freedom positioning for moving the 6-component force detection glove with strain gauges attached so that the X+7r and Z-axis components of the acting force can be detected independently, and the 3-component force detection glove. 1. An apparatus for measuring the normal direction of an object surface, comprising: a control apparatus for calculating the output of the three-component force detection glove and controlling the positioning apparatus a.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24513783A JPS60140110A (en) | 1983-12-28 | 1983-12-28 | Method and apparatus for measuring normal line direction of surface of object |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24513783A JPS60140110A (en) | 1983-12-28 | 1983-12-28 | Method and apparatus for measuring normal line direction of surface of object |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60140110A true JPS60140110A (en) | 1985-07-25 |
| JPH0352809B2 JPH0352809B2 (en) | 1991-08-13 |
Family
ID=17129177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24513783A Granted JPS60140110A (en) | 1983-12-28 | 1983-12-28 | Method and apparatus for measuring normal line direction of surface of object |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60140110A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02286888A (en) * | 1989-04-28 | 1990-11-27 | Maezawa Ind Inc | Automatic water supply system and device therefor |
| US5040306A (en) * | 1988-02-18 | 1991-08-20 | Renishaw Plc | Surface-sensing device |
| US5152072A (en) * | 1988-02-18 | 1992-10-06 | Renishaw Plc | Surface-sensing device |
| US5174039A (en) * | 1990-08-17 | 1992-12-29 | Kabushiki Kaisha Toshiba | Displacement-measuring apparatus, and static-pressure bearing device for use in the displacement-measuring apparatus |
| US5189806A (en) * | 1988-12-19 | 1993-03-02 | Renishaw Plc | Method of and apparatus for scanning the surface of a workpiece |
| US5212646A (en) * | 1987-12-19 | 1993-05-18 | Renishaw Plc | Method of using a mounting for surface-sensing stylus |
| EP0617253A2 (en) * | 1993-03-20 | 1994-09-28 | Pietzsch Automatisierungstechnik Gmbh | Measuring device for determining the cylinder form |
| EP0730210A1 (en) * | 1995-03-03 | 1996-09-04 | Faro Technologies Inc. | Three dimensional coordinate measuring apparatus |
| JP2008537107A (en) * | 2005-03-24 | 2008-09-11 | レニショウ パブリック リミテッド カンパニー | Measuring probe |
| CZ302109B6 (en) * | 2006-12-04 | 2010-10-20 | CVUT v Praze - Fakulta strojní CENTRUM AUTOMOBILU A SPALOVACÍCH MOTORU JOSEFA BOŽKA II | Multiaxial variable force sensor |
| NL1037855A (en) * | 2009-05-08 | 2010-11-09 | Sios Messtechnik Gmbh | DEVICE FOR THE MEASUREMENT OF POWER COMPONENTS. |
-
1983
- 1983-12-28 JP JP24513783A patent/JPS60140110A/en active Granted
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5212646A (en) * | 1987-12-19 | 1993-05-18 | Renishaw Plc | Method of using a mounting for surface-sensing stylus |
| US5040306A (en) * | 1988-02-18 | 1991-08-20 | Renishaw Plc | Surface-sensing device |
| US5152072A (en) * | 1988-02-18 | 1992-10-06 | Renishaw Plc | Surface-sensing device |
| US5189806A (en) * | 1988-12-19 | 1993-03-02 | Renishaw Plc | Method of and apparatus for scanning the surface of a workpiece |
| JPH02286888A (en) * | 1989-04-28 | 1990-11-27 | Maezawa Ind Inc | Automatic water supply system and device therefor |
| US5174039A (en) * | 1990-08-17 | 1992-12-29 | Kabushiki Kaisha Toshiba | Displacement-measuring apparatus, and static-pressure bearing device for use in the displacement-measuring apparatus |
| US5611147A (en) * | 1993-02-23 | 1997-03-18 | Faro Technologies, Inc. | Three dimensional coordinate measuring apparatus |
| EP0617253A3 (en) * | 1993-03-20 | 1995-06-14 | Pietzsch Automatisierungstech | Measuring device for determining the cylinder form. |
| EP0617253A2 (en) * | 1993-03-20 | 1994-09-28 | Pietzsch Automatisierungstechnik Gmbh | Measuring device for determining the cylinder form |
| EP0730210A1 (en) * | 1995-03-03 | 1996-09-04 | Faro Technologies Inc. | Three dimensional coordinate measuring apparatus |
| JP2008537107A (en) * | 2005-03-24 | 2008-09-11 | レニショウ パブリック リミテッド カンパニー | Measuring probe |
| CZ302109B6 (en) * | 2006-12-04 | 2010-10-20 | CVUT v Praze - Fakulta strojní CENTRUM AUTOMOBILU A SPALOVACÍCH MOTORU JOSEFA BOŽKA II | Multiaxial variable force sensor |
| NL1037855A (en) * | 2009-05-08 | 2010-11-09 | Sios Messtechnik Gmbh | DEVICE FOR THE MEASUREMENT OF POWER COMPONENTS. |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0352809B2 (en) | 1991-08-13 |
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