JPS60134614A - Manufacture of thickness-shear vibrator - Google Patents
Manufacture of thickness-shear vibratorInfo
- Publication number
- JPS60134614A JPS60134614A JP58249484A JP24948483A JPS60134614A JP S60134614 A JPS60134614 A JP S60134614A JP 58249484 A JP58249484 A JP 58249484A JP 24948483 A JP24948483 A JP 24948483A JP S60134614 A JPS60134614 A JP S60134614A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- heat treatment
- piezoelectric vibrator
- manufacturing
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 238000010438 heat treatment Methods 0.000 claims abstract description 18
- 239000000919 ceramic Substances 0.000 claims abstract description 12
- 230000010287 polarization Effects 0.000 claims abstract description 12
- 238000012545 processing Methods 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 8
- 229910010293 ceramic material Inorganic materials 0.000 abstract description 4
- 239000003973 paint Substances 0.000 abstract description 4
- 238000007493 shaping process Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010304 firing Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- CMJCEVKJYRZMIA-UHFFFAOYSA-M thallium(i) iodide Chemical compound [Tl]I CMJCEVKJYRZMIA-UHFFFAOYSA-M 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】 童業上の利用分野 本発明は、圧電振動子の製造方法に関し、特に。[Detailed description of the invention] Fields of use in childcare The present invention relates to a method of manufacturing a piezoelectric vibrator, and particularly to a method of manufacturing a piezoelectric vibrator.
厚みすべ夛振動子の製造方法に関するものである。The present invention relates to a method for manufacturing a thick and thin oscillator.
従来技術
Ｐｂ’ ｚ１／２ ｅ ”Ｉ Ｉ／２ ） Ｏｓ 等ノ
圧［”ｔ ラミックによって形成された圧電振動子は、
共振子やフィルタとして広く使用されるようになってき
ているＯ特に％厚みすベシを利用した厚みすペシ振動子
は。Prior art Pb' z1/2 e ``I I/2 ) Os isopressure [''t A piezoelectric vibrator formed of ramic is
Particularly, thickness oscillators using % thickness oscillators are becoming widely used as resonators and filters.
ＰＣＭタイミング用フィルタその他のフィルタ用振動子
として多くの応用分野が見出されてきている。そして、
このような応用においては、厚みすベシ振動子の機械的
ＱＭ ｉｌｌ、高いことが要求されてきている。しかし
ながら、従来の蒸着電極を用いる厚みすペシ根動子の製
造方法では、十分な機械的ＱＭの値が得られなかった。Many application fields have been found as resonators for PCM timing filters and other filters. and,
In such applications, a high mechanical QM ill of a thick-beam resonator is required. However, a sufficient mechanical QM value could not be obtained by the conventional method of manufacturing a thick root oscillator using a vapor-deposited electrode.
添付図面の第１図を参照して、この種の製造方法の従来
例について簡単に説明すると、先ず＊ Ｐｂ （Ｚｒ
、 ＴＩ ）０３系等の圧電セラミック材料にて、第１
図（＾）に示すような直方体の圧電セラミックブロック
１を素地成型、焼成して形成し、このブロック１の上面
およびＦ面に八ｇ ペースト等の導電塗料を塗り、これ
を電極２＾及び２Ｂとして矢印で示すような方向の分極
を行なう。次いで、第１図（８）に示すように、ブロッ
ク１を何枚もの圧電セラミック薄板１Ａにスライス加工
し、さらに、第１図（Ｃ）に示すように、スライスによ
って形成された圧電セラミック薄板１＾をラップ加工し
、その後、第１図（０）に示すように、何本もの圧電振
動子本体１Ｂに切出し加工する。第１図（Ｅ）Ｆｉ、こ
の圧電振動子本体１Ｂの１本のみをやや拡大して示して
おり、矢印は、分極方向を示している。最後に、第１図
（Ｆ）に示すように、分極方向を横切る方向に於いて相
対向する圧電振動子本体１日の両面の部分に電極３を蒸
着により形成することにより、厚みすべり振動子を製造
する。このような従来の厚みすべり振動子の製造方法で
は、得られる機械的ＱＭが使用する圧電セラミックの材
質の値よりかなり低く（約５００程度まで）なってしま
い、厚みすべり振動子として十分なＱＭの値とならなか
った。これ＃′ｉ、 圧［セラミックブロックのスライ
ス、ラップ、切出し等の加工による結晶の配列による内
部応力の増加、すなわち、加工歪に原因するものと考え
られる。従来では、このような加工歪を取るためケミカ
ルＩリジング等を行う必要があり加工精度を抑えること
が難しかった。A conventional example of this type of manufacturing method will be briefly explained with reference to FIG. 1 of the attached drawings. First, *Pb (Zr
, TI ) 03 series and other piezoelectric ceramic materials, the first
A rectangular parallelepiped piezoelectric ceramic block 1 as shown in the figure (^) is formed by molding and firing a base material, and a conductive paint such as 8g paste is applied to the top and F sides of this block 1, and this is applied to electrodes 2^ and 2B. Polarization is performed in the direction shown by the arrow. Next, as shown in FIG. 1(8), the block 1 is sliced into a number of piezoelectric ceramic thin plates 1A, and further, as shown in FIG. 1(C), the piezoelectric ceramic thin plates 1 formed by slicing are ^ is lapped, and then, as shown in FIG. 1(0), a number of piezoelectric vibrator bodies 1B are cut out. FIG. 1(E) Fi shows only one piece of the piezoelectric vibrator main body 1B in a slightly enlarged manner, and the arrow indicates the polarization direction. Finally, as shown in FIG. 1(F), electrodes 3 are formed by vapor deposition on both sides of the piezoelectric vibrator body, which face each other in the direction transverse to the polarization direction. Manufacture. In such conventional manufacturing methods for thickness-shear resonators, the obtained mechanical QM is considerably lower (up to about 500) than the value of the piezoelectric ceramic material used, and it is difficult to obtain a sufficient QM for a thickness-shear resonator. It was not a value. This is thought to be caused by an increase in internal stress due to the arrangement of crystals due to processing such as slicing, lapping, and cutting of the ceramic block, that is, processing strain. Conventionally, it was necessary to perform chemical I-riding or the like to remove such processing distortion, making it difficult to suppress processing accuracy.
発明の目的
本発明の目的は、前述したような従来技術の問題点を解
消し、十分高い機械的ＱＭＯ値を有する厚みすペシ振動
子を製造しうるような厚みすベシ損動子の製造方法を提
供することである。OBJECTS OF THE INVENTION The purpose of the present invention is to provide a method for manufacturing a thick-beam loss transducer, which solves the problems of the prior art described above and can produce a thin-beam vibrator having a sufficiently high mechanical QMO value. The goal is to provide the following.
発明の構成 本発明による厚みすベロａ動子の製造方本は。Composition of the invention The method for manufacturing the thick tongue a mover according to the present invention is as follows.
素地成型、焼成された圧電セラミックブロックを分極前
にスライス、ラッグ、切出し等の加工を行なうことによ
シ圧電娠動子本体を形成し、該圧電振動子本体を熱処理
し、その後、その圧電振動子本体の分極を行ない、そし
て、＃配分極方向を横切る方向に於いて相対向する前記
圧電振動子本体の両面に電極を設けることを特徴とする
。The piezoelectric vibrator body is formed by slicing, lugging, cutting, etc. of the piezoelectric ceramic block that has been molded and fired before polarization, and the piezoelectric vibrator body is heat treated, and then its piezoelectric vibration The piezoelectric vibrator main body is polarized, and electrodes are provided on both sides of the piezoelectric vibrator main body facing each other in a direction crossing the polarization direction.
実施例
次に、添付図面の第２図及びｔｌＩＪ３図に基づいて本
発明の実施例について本拠明をよシ詳細に説明する。Embodiment Next, an embodiment of the present invention will be explained in detail based on FIG. 2 and FIG. 3 of the accompanying drawings.
第２図ｉｔ１本発明の一実施例としての厚みすベシ振動
子の製造方法を説明するための概略図である。この実施
例の製造方法によれば、先ず、ｐＨ） （Ｚｒ Ｉ／２
１ Ｔｌ Ｉ／２ ） Ｏ！ｌ系等ｃＤ圧電−にラミッ
／材料にて、第２医員に示すような直方体の圧電セラミ
ックブロック４を素地成型、焼成して形成する。FIG. 2 is a schematic diagram for explaining a method of manufacturing a thick-beam resonator as an embodiment of the present invention. According to the manufacturing method of this example, first, pH) (Zr I/2
1 Tl I/2 ) O! A rectangular parallelepiped piezoelectric ceramic block 4 as shown in the second doctor is formed by molding and firing a rectangular parallelepiped piezoelectric ceramic block 4 using a cD piezoelectric material such as l-based cD piezoelectric material.
前述の従来方法とは違って１本発明によれば、このブロ
ック４を分極せずに、何枚もの圧電セラミック薄１４＾
にスライス加工し、 １！に、第２図（８）Ｋ示ｆよ５
に、スライスによって形成された圧電セラミック薄板４
＾をラップ加工し、その後、第２図（ロ）Ｋ示すように
１例本もの圧電振動子本体４Ｂに切出し加工する。第２
図９）は、この圧電振動子本体４Ｂの１本のみをや＼拡
大して示している。次に１本発明によれば、第２図（Ｅ
）Ｋ示すように、適当な雰囲気５中で、切出し尋加工後
の圧電振動子本体４Ｂｔ適当な温度で熱処理する。この
熱処理後、第２図Ｃ）に示すように、圧電振動子本体４
Ｂの前端面及び後端面に＾ｙ４−スト等の導電塗料を塗
シ、これを電極６＾及び６Ｂとして分極を行なう。矢印
は、その分極の方向を示している。最後に、電極６＾及
び６Ｂを形成していた導電塗料を溶剤等を用いて溶かし
て除去し、第２図（Ｇ）に示すように、圧電振動子本体
４Ｂの分極方向を横切る方向に於いて相対向する両面に
電極？？蒸着によシ形成することＫよシ、厚みすベシ振
動子を製造する。In contrast to the previously mentioned conventional methods, according to the present invention, this block 4 is not polarized, but a number of piezoceramic thin sheets 14^
Slice it into 1! In Fig. 2 (8) K, f5
A piezoelectric ceramic thin plate 4 formed by slicing
^ is lapped, and then cut into a piezoelectric vibrator main body 4B as shown in FIG. 2(b)K. Second
FIG. 9) shows only one piezoelectric vibrator main body 4B in a slightly enlarged manner. Next, according to the present invention, FIG.
As shown in )K, the piezoelectric vibrator body 4Bt after being cut out and processed is heat-treated at an appropriate temperature in an appropriate atmosphere 5. After this heat treatment, as shown in FIG. 2C), the piezoelectric vibrator body 4
A conductive paint such as ^y4-st is applied to the front end face and rear end face of B, and polarization is performed using this as electrodes 6^ and 6B. The arrow indicates the direction of the polarization. Finally, the conductive paint forming the electrodes 6^ and 6B is removed by dissolving it using a solvent, etc., and as shown in FIG. Are there electrodes on both sides facing each other? ? By forming the resonator by vapor deposition, a thick resonator is manufactured.
前述の本発明の製造方法における第２図（Ｅ） Ｋ示す
熱処理工程の雰囲気及び熱処理温度管変えて種々実験し
てみた結果ｔ、第３図のグラフに例示している。第３図
は、横軸に熱処理温度をとシ、縦軸にその熱処理温度に
て得られた厚みすベシ振動子の機械的ＱＭの値をとって
、熱処理温度と機械的ＱＭとの関係ｔｌｌＩわしている
。第３図のグラフにおいて、参照符号＾で示す直線部分
は、熱処理を空気中で行なり九場合に得られた結果を示
しておシ、参照符号日で示す直線部分は、熱処理をＰｂ
雰囲気中にて行ないｐｂの蒸発を制御した場合に得ら
れた結果を示している。The results of various experiments conducted by changing the atmosphere and heat treatment temperature tube of the heat treatment step shown in FIG. 2(E)K in the manufacturing method of the present invention described above are illustrated in the graph of FIG. Figure 3 shows the relationship between heat treatment temperature and mechanical QM, with the horizontal axis representing the heat treatment temperature and the vertical axis representing the mechanical QM value of the thickness-beam resonator obtained at that heat treatment temperature. I'm watching. In the graph of Fig. 3, the straight line section indicated by the reference symbol ^ shows the results obtained when the heat treatment was performed in air, and the straight line section indicated by the reference symbol ^ indicates the results obtained when the heat treatment was performed in air.
It shows the results obtained when the evaporation of pb was controlled in an atmosphere.
第一回のグラフから分るように、熱処理によるＱＭの変
化は温度に対してはソ直線的に増大する。As can be seen from the first graph, the change in QM due to heat treatment increases linearly with temperature.
ただし、熱処理を空気中で行なう場合には、熱処理温度
がはソ１０ロロ℃を越える場合には、 ＱＭ′ の値が
低下することが分った。そして、熱処理温度を１０００
Ｐｂ 雰囲気中で行なうとよく、よシ高いＱＭ値が得ら
れ、はソ１２００℃近辺で、用いた圧電セラミックの材
質のＱ値にはｙ尋しい値が得られることも分った。However, it has been found that when heat treatment is performed in air, the value of QM' decreases when the heat treatment temperature exceeds 10°C. It is best to perform the heat treatment in an atmosphere of 1000 Pb, and a very high QM value can be obtained, and when the temperature is around 1200°C, the Q value of the piezoelectric ceramic material used may be very high. I understand.
発明の効果
本発明の製造方法によれば、＃述したように、スライス
、ラップ、切出し等の加工後分極工程前に熱処理を行表
うととＫよシ、加工歪が除かれて。Effects of the Invention According to the manufacturing method of the present invention, as described above, when heat treatment is performed after processing such as slicing, lapping, cutting, etc. and before the polarization step, processing distortion can be eliminated.
機械的ＱＭの十分高い厚みすベシ撮動子を得ることがで
きる。A thickness camera element with sufficiently high mechanical QM can be obtained.
第１図は従来の厚みすべり振動子の製造方法の一例を説
明するための概略図％第２図は本発明の一実施例として
の厚みすベシ撮動子の製造方法を説明するための概略図
、第３図は本発明の製造方法における熱処理の雰囲気及
び温度と得られる厚みすべり振動子のＱＭの値との関係
を例示する図である。
４・・・圧電セラミックブロック、４Ｂ・・・圧電撮動
子本体、５・・・雰囲気、６＾、６ａ・・・分極用室′
Ｖｊ！、。
７・・・電極
□ りFIG. 1 is a schematic diagram for explaining an example of a conventional method for manufacturing a thickness shear transducer. FIG. 2 is a schematic diagram for explaining a method for manufacturing a thickness shear transducer as an embodiment of the present invention. 3 are diagrams illustrating the relationship between the atmosphere and temperature of heat treatment and the QM value of the obtained thickness-shear resonator in the manufacturing method of the present invention. 4... Piezoelectric ceramic block, 4B... Piezoelectric sensor body, 5... Atmosphere, 6^, 6a... Polarization chamber'
Vj! ,. 7... Electrode □ri
Claims (3)
を分極前にスライス、ラツｆ、切出し等の加工を行なう
ことによシ圧電蚕動子本体を形成し。 該圧電振動子本体を熱処理し、その後、その圧電振動子
本体の分極を行ない、そして、前記分極方向を横切る方
向に於いて相対向する前記圧電振動子本体の両面に電極
を設けることを特徴とする厚みすベシ振動子の製造方法
。(1) A piezoelectric oscillator body is formed by slicing, latching, cutting, and other processing on the base molded and fired piezoelectric ceramic block before polarization. The piezoelectric vibrator body is heat-treated, and then the piezoelectric vibrator body is polarized, and electrodes are provided on both surfaces of the piezoelectric vibrator body facing each other in a direction transverse to the polarization direction. A method for manufacturing a thick-beam resonator.
て空気中で行なわれる特許請求の範囲第（１）項記載の
厚みすべ如振動子の製造方法。(2) The method for manufacturing a thin smooth vibrator according to claim (1), wherein the heat treatment is performed in air at a temperature of 500°C to 1000°C.
にてｐＨ）雰囲気中で行なわれる特許請求の範囲第（１
）項記載の厚みすべ夛振動子の製造方法。(3) The heat treatment is performed in a pH atmosphere at a temperature of 1000°C to 1200°C.
) The method for manufacturing the thickness-smooth resonator described in item 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58249484A JPS60134614A (en) | 1983-12-23 | 1983-12-23 | Manufacture of thickness-shear vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58249484A JPS60134614A (en) | 1983-12-23 | 1983-12-23 | Manufacture of thickness-shear vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60134614A true JPS60134614A (en) | 1985-07-17 |
Family
ID=17193652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58249484A Pending JPS60134614A (en) | 1983-12-23 | 1983-12-23 | Manufacture of thickness-shear vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60134614A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63100807A (en) * | 1986-10-16 | 1988-05-02 | Matsushita Electric Ind Co Ltd | Manufacture of piezoelectric ceramic resonator |
-
1983
- 1983-12-23 JP JP58249484A patent/JPS60134614A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63100807A (en) * | 1986-10-16 | 1988-05-02 | Matsushita Electric Ind Co Ltd | Manufacture of piezoelectric ceramic resonator |
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