JPS60131157A - Curved-surface forming apparatus - Google Patents

Curved-surface forming apparatus

Info

Publication number
JPS60131157A
JPS60131157A JP24022183A JP24022183A JPS60131157A JP S60131157 A JPS60131157 A JP S60131157A JP 24022183 A JP24022183 A JP 24022183A JP 24022183 A JP24022183 A JP 24022183A JP S60131157 A JPS60131157 A JP S60131157A
Authority
JP
Japan
Prior art keywords
workpiece
tool
curved
working
curved surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24022183A
Other languages
Japanese (ja)
Inventor
Shuji Ueda
修治 上田
Saburo Kubota
三郎 久保田
Hiroshi Saeki
宏 佐伯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP24022183A priority Critical patent/JPS60131157A/en
Publication of JPS60131157A publication Critical patent/JPS60131157A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/06Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor grinding of lenses, the tool or work being controlled by information-carrying means, e.g. patterns, punched tapes, magnetic tapes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/44Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B23Q1/4804Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single rotating pair followed perpendicularly by a single sliding pair
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/44Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/08Control or regulation of cutting velocity
    • B23Q15/10Control or regulation of cutting velocity to maintain constant cutting velocity between tool and workpiece

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

PURPOSE:To simplify the apparatus and prevent the generation of the error in formed shape, inequality of the roughness of the finished surface, etc. by transferring a working tool at right angles to the revolution shaft of the tool relatively to a workpiece and making the peripheral speed at the point for working the workpiece constant. CONSTITUTION:A workpiece 5 is fixed onto a rotary table 11 by a vacuum chuck part 10, and the number of revolution of the workpiece 5, cutting-in depth of a working tool 4, curved-form forming speed, etc. are set. When the working is started, the tool 4 and the workpiece 5 are operated so that the workpiece 5 is worked so that a prescribed curbed surface on the basis of the operation control data calculated beforehand is formed. In this case, each amount of operation is closed-loop-controlled through the feedback of the data supplied from displacement-amount detecting sensors 19, and 20, and the workpiece 5 revolves further for the formation of the curved surface of a rotary object, but the revolution speed is controlled so that the peripheral speed of the workpiece at a working point becomes constant. Therefore, control elements are simplified, and roughness of a finished surface can be eliminated, and the formation of the curved- surface having high accuracy is permitted.

Description

【発明の詳細な説明】 産業」、二の利用分野 本発明は、光学レンズ、ミラー等の回転対称の曲面の創
成装置(C関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for creating rotationally symmetrical curved surfaces such as optical lenses and mirrors.

従来例の構成とその問題点 従来の回転対称曲面の創成装置、僧に非球面レンズの創
成装置の被加工物及び加工工具の動作を示す概念図を第
1図に示す。回転スピンドルに取シ付けられ、被加工物
1の接線方向Ka力方向rC回転する加工具2は、被加
工物1を加工するポイントにおいて常VC創成曲面3V
C対して手直Vζ位16する様制御され、又、被加工物
1は、直交2Il!IIlの移動機構により、加工工具
2の加エボイントに対して、所定の曲面を創成する様制
御され運動するとともに、さらに、この移動機構上にて
b方向に回転することVCより回転対象曲面が創成され
る。
Structure of a conventional example and its problems FIG. 1 is a conceptual diagram showing the operation of a workpiece and a processing tool of a conventional rotationally symmetric curved surface generation apparatus and an aspherical lens generation apparatus. The processing tool 2, which is attached to a rotating spindle and rotates in the tangential direction Ka force direction rC of the workpiece 1, always has a VC generating curved surface 3V at the point where the workpiece 1 is processed.
The workpiece 1 is controlled to have a vertical position Vζ16 with respect to C, and the workpiece 1 is orthogonal 2Il! By the movement mechanism IIl, the machining tool 2 moves in a controlled manner to create a predetermined curved surface with respect to the machining point, and furthermore, by rotating in the direction b on this movement mechanism, a curved surface to be rotated is created by VC. be done.

しかしながら、上記のような構成では、加工工具2の形
状による誤差を抑える為、加工工具2を被加工物1の創
成曲面3に対し、垂直に位置する様制御することが必要
となり、制御内容及び機械的構成が複雑になる。又、被
加工物1の回転速度が一定の為、加工工具2の切り込み
量が変化し、仕上げ面の粗さが不均一になるという欠点
を有していた。
However, in the above configuration, in order to suppress errors due to the shape of the processing tool 2, it is necessary to control the processing tool 2 so that it is positioned perpendicularly to the generated curved surface 3 of the workpiece 1. Mechanical configuration becomes complicated. Furthermore, since the rotational speed of the workpiece 1 is constant, the depth of cut of the processing tool 2 changes, resulting in a disadvantage that the roughness of the finished surface becomes uneven.

発明の目的 本発明は、上記従来の欠点を解消するものであり、装置
の構成を簡素化するとともに、前記創成形状誤差、仕上
げ面粗度の不均一さ等の発生を防止した超精密加工を実
現するものである。
OBJECT OF THE INVENTION The present invention solves the above-mentioned conventional drawbacks, and provides ultra-precision machining that simplifies the configuration of the device and prevents the occurrence of the generated shape errors, non-uniformity of finished surface roughness, etc. It is something that will be realized.

発明の構成 本発明は、回転スピンドルに取り付けられ、高速回転す
るとともに、所定の曲面断面形状を回転軸と直交する方
向にたどって運動し、被加工物を19r定の曲面に創成
加工する加工工具と、前記回転「咄と直交する方向に所
定の曲率断面形状をたどるごとく被加工物、或は、前記
加工工具を運動させ得る直交する2軸の移動機構と、前
記曲面断面形状を被加工物の回転方向に創成し、回転対
象の曲1(ri ’x加工するとともに、前記加工工具
による全て或は1部の加工点における被加工物の周速度
が一定となる回転を行なう被加工物回転機構とをそれぞ
れ備えており、装置の構成が簡素化でき、創成曲面の品
質が向上するという特有の効果を有すb実施例の説明 以下、本発明の一実施例について、図面を参照しながら
説明する。
Composition of the Invention The present invention is a processing tool that is attached to a rotating spindle, rotates at high speed, and moves along a predetermined curved cross-sectional shape in a direction perpendicular to the rotation axis to create a 19r constant curved surface on a workpiece. and a two-axis orthogonal movement mechanism capable of moving the workpiece or the machining tool so as to follow a predetermined curvature cross-sectional shape in a direction perpendicular to the rotation direction; Rotation of the workpiece is created in the rotational direction of the rotation target, and the rotation target is processed by the rotation target 1 (ri ' b. Description of Embodiment Hereinafter, an embodiment of the present invention will be described with reference to the drawings. explain.

第2−(A)図は、本発明の実施例における、被加工物
及び加工工具の動作を示す正面概念図であり第2−(B
)図は、同側面概念図である。4は回転スピンドルに取
り付けられ、被加工物5の半径方向[c方向に回転する
加工工具であり、被加工物5の半径方向、即ち加工工具
4の回転軸と直交する方向d方向に運動する。被加工物
5は、回転対象曲面を得る為、e方向に回転する。
FIG. 2-(A) is a conceptual front view showing the operation of the workpiece and processing tool in the embodiment of the present invention, and FIG.
) is a conceptual diagram of the same side. 4 is a processing tool that is attached to a rotating spindle and rotates in the radial direction [c direction] of the workpiece 5, and moves in the radial direction of the workpiece 5, that is, the direction d, which is orthogonal to the rotation axis of the processing tool 4. . The workpiece 5 is rotated in the direction e in order to obtain a curved surface to be rotated.

第3図は、本発明の実施例における曲面創成装置、の正
面図であり、第4図は同1)’!II面図である。4は
、静圧空気軸受等の高精度軸受を用いた回転スピンドル
6に取り付けられ30.OOOrpm〜100、OOO
rpm の高速回転するダイヤモンド砥石等の加工工具
、7は回転スピンドル6を保持し、ボールネジ或は、静
圧ネジ等の駆動ネジ8とDCザーボモータ等の駆動モー
ター9によって上下方向、f方向に動作するスピンドル
ホルダ一部、6は光学ガラス等の被加工物で、真空チャ
ック部1Oにより、回転テーブル11に固定されている
FIG. 3 is a front view of the curved surface generating device in the embodiment of the present invention, and FIG. 4 is the same 1)'! It is a side view II. 4 is attached to a rotating spindle 6 using a high-precision bearing such as a hydrostatic air bearing. OOOrpm~100, OOO
A machining tool 7 such as a diamond grindstone that rotates at a high speed of 50 rpm holds a rotating spindle 6, and is operated in the vertical direction and the f direction by a drive screw 8 such as a ball screw or static pressure screw and a drive motor 9 such as a DC servo motor. A part of the spindle holder 6 is a workpiece such as optical glass, and is fixed to a rotary table 11 by a vacuum chuck section 1O.

12は、被加工物6を回転対象曲面に創成する為回転さ
せる静圧空気軸受を用いた被加工物回転スピンドル、1
3は、前記被加工物回転スピンドル12を載せ、これを
、加工工具40回転軸に対し、1θ交する方向でかつ、
被加工物らの半径方向g方向に動作する静圧空気軸受等
の高精度軸受を有するスライドテーブルペ14は、静圧
空気軸受ガイドバー、15はスライドテーブル13を駆
動する為のボールネジ或は、静圧ネジ等の駆動ネジであ
り、DCサーボモータ16[より駆動される。17は本
体ベースである。又、18は加工工具4の回転運動半径
を検出する静電容量型或は、渦電流型等の微小変位セン
サーであり、回転スピンドル6に取り付けられている。
12 is a workpiece rotation spindle using a static pressure air bearing that rotates the workpiece 6 to create a rotation target curved surface;
3 carries the workpiece rotation spindle 12 in a direction 1θ intersecting with the rotation axis of the processing tool 40, and
The slide table plate 14 has a high-precision bearing such as a hydrostatic air bearing that operates in the radial direction g of the workpiece, and a hydrostatic air bearing guide bar 15 is a ball screw or a ball screw for driving the slide table 13. It is a drive screw such as a static pressure screw, and is driven by a DC servo motor 16. 17 is the main body base. Further, 18 is a minute displacement sensor such as a capacitance type or an eddy current type that detects the radius of rotational motion of the processing tool 4, and is attached to the rotating spindle 6.

さらに、スピンドル7の動作方向f1および、スライド
テーブル13の動作方向gにそれぞれ19.20のレー
ザー干渉測長器等の変位量検出センサーを設けておシ、
スピンドルホルダ一部7の動作、スライドテーブル13
の動作は19,2Qの変位量検出センサーがらのデータ
で極めて精度よく傘4μmの分解能で閉ループ制御され
る。なお、この曲面創成装置は図示せぬ制御装置によっ
て、前記閉ループ動作制御も含め制御されるようになっ
ている。
Furthermore, a displacement detection sensor such as a laser interference length measuring device of 19.20 mm is provided in the operating direction f1 of the spindle 7 and in the operating direction g of the slide table 13, respectively.
Operation of spindle holder part 7, slide table 13
The operation is controlled in a closed loop with extremely high accuracy and a resolution of 4 μm using data from the 19.2Q displacement detection sensors. Note that this curved surface generating device is controlled by a control device (not shown), including the closed loop operation control.

以上のように構成された曲面創成装置について以下、そ
の動作を説明する。
The operation of the curved surface generating device configured as described above will be explained below.

まず、所定の曲面を創成するに当たり、高速回転する加
工工具40回転運動半径を、微小変位センサー18で測
定し、このデータをもとに、被加工物5を所定の曲面形
状に研削加工する如く、加工工具4及び被加工物5をそ
れぞれf方向2g方向に動作させる為に、あらがしめ組
み適才れたプログラムに従って動作制御データをコンピ
ューターで計算する0次に被加工物6を真空チャック部
1○によシ回転テーブル11に固定する0被加工物60
回転数、加工工具4の切シ込み深さ、曲面形状創成速度
等、加工条件の設定を行ない加工を開始すると、前記の
あらかじめ計算された、動作制御データーに基づいて、
被加工物5′lc所定の曲面形状に創成加工する様、加
工工具4及び、被加工物5は動作する0この時それぞれ
の動作量は19゜2Oの変位量検出センサからのデータ
がフィードバックされ閉ループ制御される。゛づらに、
被加工物5は、回転対象曲面に創成する為回転するが、
この時の回転速度は、加工点における被加工物の周速度
が一定となる様、速度制御される。
First, in creating a predetermined curved surface, the rotational motion radius of the processing tool 40 rotating at high speed is measured by the minute displacement sensor 18, and based on this data, the workpiece 5 is ground into the predetermined curved shape. In order to move the processing tool 4 and the workpiece 5 respectively in the f direction and the 2g direction, the workpiece 6 is moved to the vacuum chuck section 1. ○ Workpiece 60 fixed on rotary table 11
When machining conditions such as the rotation speed, cutting depth of the machining tool 4, and curved surface shape creation speed are set and machining is started, based on the previously calculated motion control data,
The machining tool 4 and the workpiece 5 operate so as to generate and machine the workpiece 5'lc into a predetermined curved surface shape.At this time, the data from the displacement detection sensor of which the amount of movement of each is 19°2O is fed back. Closed loop controlled. In a pinch,
The workpiece 5 rotates to create a curved surface to be rotated,
The rotational speed at this time is controlled so that the circumferential speed of the workpiece at the processing point is constant.

以上のように、本実施例によれば、制御要素が1′li
′1累化でき、創成曲面形状精度O・3μm2面粗さ、
Ra0.02μmが達成出来る。
As described above, according to this embodiment, the control element is 1'li
'1 can be accumulated, the generated curved surface shape accuracy is O・3μm 2-surface roughness,
Ra of 0.02 μm can be achieved.

なお、本実施例(でおいては、加工工具4はダイヤモン
ド砥石としたが、加工工具4は、数本のバイトヲマウン
トした多刃ホイール工具としても良く切削加工による曲
面創成も可能である。
Note that in this embodiment, the processing tool 4 is a diamond grindstone, but the processing tool 4 may be a multi-blade wheel tool with several bits mounted thereon, and it is also possible to create a curved surface by cutting.

発明の効果 以上のように本発明は、加工工具を被加工物に文Njシ
て相対的に加工工具の回転軸と直交する方向V(たどら
せることにより曲面形状を創成する様にした事、又、加
工工具によって加工される被加工物の加工点における周
速が一定になることから、少ない制御要素で加工工具の
先端形状の悪さの影響を受けず、又、仕上げ面の不均一
な面粗さが解消でき、極めて精度の高い曲面創成が出来
、その実用的効果は犬なるものがある。
Effects of the Invention As described above, the present invention creates a curved shape by moving the machining tool to the workpiece in a direction V (relatively orthogonal to the rotation axis of the machining tool). In addition, since the circumferential speed at the machining point of the workpiece being machined by the machining tool is constant, it is not affected by the poor shape of the tip of the machining tool with fewer control elements, and it is not affected by the shape of the tip of the machining tool. Roughness can be eliminated, curved surfaces can be created with extremely high precision, and the practical effects are impressive.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の曲面創成装置における被加工物及び加工
工具の動作を示す概念図、第2図(A)は本発明の一実
施例の曲面創成装置における被加工物及び加工工具の動
作を示す正面概念図、第2図(lj)は同側面概念図、
第3図は本発明の一実施例における曲面創成装置の正面
図、第4図は同(t]、11面図であるO 1.5・−・・・被加工物、2.4・・・・・・加工工
具、6・・・・・回転スピンドル、7・・・・・・スピ
ンドルホルダー、8.16・・−・・駆動ネジ、9,1
6・・・・・駆動モーター、12・・−・被加工物回転
スピンドル、18・・・微小変位センサー、19.20
・−・・・変位量検出センサー。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
図 第2図 (A )(B+
FIG. 1 is a conceptual diagram showing the operation of the workpiece and processing tool in a conventional curved surface generation device, and FIG. Figure 2 (lj) is a conceptual diagram of the same side.
Fig. 3 is a front view of the curved surface generating device according to an embodiment of the present invention, and Fig. 4 is a front view of the same (t). ...Processing tool, 6...Rotating spindle, 7...Spindle holder, 8.16...Drive screw, 9,1
6... Drive motor, 12... Workpiece rotation spindle, 18... Minute displacement sensor, 19.20
・−・・・Displacement detection sensor. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2 (A) (B+

Claims (1)

【特許請求の範囲】[Claims] 回転スピンドルに取り付けられ、高速回転するとともに
、所定の曲面断面形状を回転軸と直交する方向にたどっ
て運動し、被加工物を所定の曲面に創成加工する加工工
具と、前記回転軸と直交する方向に所定の曲面断面形状
をたどるごとく被加工物、或は、前記加工工具を運動さ
せ得る、直交する2軸の移動機構と、前記曲面断面形状
を被加工物の回転方向に創成し、回転対象の曲面を加工
するとともに、前記加工工具による全ての、或は1部の
加借点における被加工物の周速度が一定となる回転を行
なう、被加工物回転機構とをそれぞれ備えた曲面創成装
置。
A processing tool that is attached to a rotating spindle, rotates at high speed, and moves along a predetermined curved cross-sectional shape in a direction perpendicular to the rotational axis to create a predetermined curved surface on a workpiece; a moving mechanism with orthogonal two axes capable of moving a workpiece or the machining tool so as to follow a predetermined curved cross-sectional shape in a direction; A curved surface creation system comprising a workpiece rotation mechanism that processes the target curved surface and rotates the workpiece using the processing tool so that the circumferential speed of the workpiece at all or some of the addition points is constant. Device.
JP24022183A 1983-12-20 1983-12-20 Curved-surface forming apparatus Pending JPS60131157A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24022183A JPS60131157A (en) 1983-12-20 1983-12-20 Curved-surface forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24022183A JPS60131157A (en) 1983-12-20 1983-12-20 Curved-surface forming apparatus

Publications (1)

Publication Number Publication Date
JPS60131157A true JPS60131157A (en) 1985-07-12

Family

ID=17056248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24022183A Pending JPS60131157A (en) 1983-12-20 1983-12-20 Curved-surface forming apparatus

Country Status (1)

Country Link
JP (1) JPS60131157A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01264755A (en) * 1988-04-14 1989-10-23 Hakko Eng:Kk Polishing of aspheric lens and device thereof
JP2007283488A (en) * 2000-02-16 2007-11-01 Seiko Epson Corp Manufacturing method of spectacle lens

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01264755A (en) * 1988-04-14 1989-10-23 Hakko Eng:Kk Polishing of aspheric lens and device thereof
JP2007283488A (en) * 2000-02-16 2007-11-01 Seiko Epson Corp Manufacturing method of spectacle lens

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