JPS6012488A - Sucker for work - Google Patents

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 （１）発明の技術分野 本発明は、複数個の成層主体を有しワークの形状に応じ
て該ワークを吸着するワーク吸着装置に関し、特に一つ
の検知部でワークの形状に対応することができるワーク
吸着装置に関する。Detailed Description of the Invention (1) Technical Field of the Invention The present invention relates to a work suction device that has a plurality of stratified bodies and suctions a work according to the shape of the work. The present invention relates to a work suction device that can accommodate various shapes.

■）　従来技術と問題点 従来のこの種のワーク吸着装置において、ベースから下
向きに配列された複数個の吸着主体を下降して各種の形
状のワークを吸着するには、第一に、ワークと各吸着主
体の吸着パッドとの当接を検出する手段を有さすに上記
吸着主体を一定のストロークだけ下降して所定の厚さの
ワークを吸着する方式があり、第二に、複数個の吸着主
体のうち代表点数箇所の吸着主体にワークと吸着パッド
との当接を検出する手段を設けて上記吸着主体の下降を
停止してワークを吸着する方式があフ、第三に、全部の
吸着主体にワ−りと吸着パッドとの当接全検出する手段
を設けて上記吸着主体の下降を停止してワークを吸着す
る方式があった。しかし、第一の方式においては、一定
の厚さのワークしか吸着できず、ワークの厚さが変化し
た場合には対応できなかった。また、第二の方式におい
ては、ワークの平面形状の変化に柔軟に対応することが
できず、代表点数箇所の間に入ってしまうような小さな
ワークの場合には吸着できなかった。さらに、第三の方
式においては、上記第一、第二の欠点は解消できるが、
検出手段が吸着主体の数だけ必要となるので高価となる
ものであった。■) Prior art and problems In the conventional workpiece suction device of this type, in order to lower the plurality of suction bodies arranged downward from the base and suction the workpieces of various shapes, first, the workpieces and There is a method that has means for detecting the contact of each suction body with a suction pad, and the suction body is lowered by a certain stroke to suction a workpiece of a predetermined thickness. One method is to install a means to detect the contact between the workpiece and the suction pad on the suction body at a representative number of points on the main body, and then stop the descent of the suction body to suction the workpiece. There has been a method in which the main body is provided with means for detecting the complete contact between the workpiece and the suction pad, and the suction main body stops descending to adsorb the workpiece. However, the first method could only pick up a workpiece of a certain thickness, and could not cope with changes in the thickness of the workpiece. Furthermore, the second method cannot flexibly respond to changes in the planar shape of the workpiece, and cannot adsorb small workpieces that fall between several representative points. Furthermore, in the third method, the first and second drawbacks mentioned above can be overcome, but
This method is expensive because it requires as many detection means as there are adsorbents.

（３）　発明の目的 本発明は上記の問題点を解消するためになされたもので
、一つの検知部でワークの形状に対応することができる
ワーク吸着装置を提供することを目的とする。(3) Purpose of the Invention The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a workpiece suction device that can respond to the shape of a workpiece with a single detection section.

（４）　発明の構成 そして上記の目的は本発明によれば、単一の真空源と連
結されたシリンダ部内有し、このシリンダ部の下端壁に
形成された摺動口に気密的にスライド可能とされ内部に
は空気流通孔が穿設された真空保持部材を嵌挿し、上記
空気流通孔の上端部をシリンダ部の下端壁内面にて開放
、閉塞可能とすると共に上記真空保持部材の下端には上
記空気流通孔と連通する吸着パッドを設け、且つ上記真
空保持部材を常時シリンダ部下端から下向きに突出付勢
してなる吸着主体を複数個ベースから下向きに配列し、
上記シリンダ部内な負圧にして吸着パッドをワークに下
降押圧することによシ真空経路を開き該ワークを吸着す
るワーク吸着装置において、上記いずれかの吸着パッド
がワークを押圧して該真空保持部材がスライドするのを
検出する検出部材を全吸着主体に共通する一部材で形成
すると共に、上記検出部材の所定距離の移動を検知する
検知部を設けたことを特徴とするワーク吸着装置を提供
することを目的とする。(4) According to the present invention, the structure of the invention and the above-mentioned object include a cylinder part connected to a single vacuum source, which can be slid airtightly into a sliding opening formed in the lower end wall of the cylinder part. A vacuum holding member having an air circulation hole bored therein is inserted, and the upper end of the air circulation hole can be opened and closed on the inner surface of the lower end wall of the cylinder, and the lower end of the vacuum holding member is provided with a suction pad communicating with the air circulation hole, and a plurality of suction bodies are arranged downward from the base, and the vacuum holding member is always biased to protrude downward from the lower end of the cylinder,
In a workpiece suction device that opens a vacuum path and suctions a workpiece by creating a negative pressure in the cylinder part and pressing a suction pad downward against the workpiece, one of the suction pads presses the workpiece and the vacuum holding member To provide a workpiece suction device, characterized in that a detection member for detecting the sliding of the workpiece is formed of a single member common to all suction main bodies, and a detection part for detecting movement of the detection member by a predetermined distance is provided. The purpose is to

（５）発明の実施例 以下、本発明の実ｕａ例を添付図面に基いて詳細に説明
する。(5) Embodiments of the Invention Hereinafter, practical examples of the present invention will be explained in detail with reference to the accompanying drawings.

本発明によるワーク吸着装置Ｅは、第１図に示すように
、ベース２０と、吸着主体３０と、検出部材４０と、検
知部５０とを有してなる。As shown in FIG. 1, the workpiece suction device E according to the present invention includes a base 20, a suction main body 30, a detection member 40, and a detection section 50.

上記ベース２０は、複数個の吸着主体３０を取シ付ける
基台となるもので、図示外の駆動装置によって矢印Ａ％
Ｂ方向に下降又は上昇される。The base 20 serves as a base on which a plurality of suction bodies 30 are mounted, and is driven by an arrow A% by a drive device (not shown).
It is lowered or raised in direction B.

上記ベース２０の下面側には、複数個の吸着主体３０．
３０・・・・・・が所定の間隔で例えばマトリクス状に
配列して下向きに設けられている。On the lower surface side of the base 20, a plurality of adsorption bodies 30.
30 are arranged downward at predetermined intervals, for example, in a matrix.

この吸着主体３０は、ワーク６０を吸着するもので、そ
の構造を第２図を参照して説明する。This suction main body 30 is for suctioning a workpiece 60, and its structure will be explained with reference to FIG. 2.

シリンダ部１は、その上端部が図示外の真空ポンプ等の
真空源に連結されており、矢印Ｃのようにその内部の空
気が引き抜かれる。上記シリンダ部１の下端壁２には、
適宜の直径の摺動口３が穿設され、との摺動口３には真
空保持部材４が嵌挿されている。この真空保持部材４は
、上記シリンダ部１内の負圧状態を後述の吸着パッド１
６に連通ずると共にその内部を上記負圧状態のままに保
持するもので、その長手方向の中心軸部には空気流通孔
５が穿設されると共に、上記摺動口３の内周面に設けら
れたシールリング６によって気密が保持された状態で矢
印Ｄ１Ｅのように上下方向にスライド可能とされている
。そして、上記真空保持部材４の上端には大径の円板部
材７が一体的に形成されておシ、この内部には上記空気
流通孔５の上端部と連通されて外周方向に延び更に下向
きに折シ曲げられて上記シリンダ部１内に開口する連通
孔８が穿設され、上記円板部材７の下面にて該連通孔８
の周囲にはシリンダ部１の下端壁２との空気もれを防止
するゴム等のシール部材９が貼設されている。The upper end of the cylinder part 1 is connected to a vacuum source such as a vacuum pump (not shown), and the air inside the cylinder part 1 is drawn out as indicated by arrow C. On the lower end wall 2 of the cylinder part 1,
A sliding opening 3 of an appropriate diameter is bored, and a vacuum holding member 4 is fitted into the sliding opening 3. This vacuum holding member 4 maintains the negative pressure state inside the cylinder portion 1 by using a suction pad 1 (described later).
6 and maintains the inside thereof in the above-mentioned negative pressure state, an air circulation hole 5 is bored in the central shaft portion in the longitudinal direction, and an air circulation hole 5 is formed on the inner circumferential surface of the above-mentioned sliding opening 3. It can be slid up and down in the direction of arrow D1E while being airtightly maintained by the provided seal ring 6. A large-diameter disk member 7 is integrally formed at the upper end of the vacuum holding member 4, and the inside thereof communicates with the upper end of the air circulation hole 5, extends in the outer circumferential direction, and further extends downward. A communication hole 8 which is bent into the cylinder portion 1 and opens into the cylinder portion 1 is formed, and the communication hole 8 is formed on the lower surface of the disc member 7.
A seal member 9 made of rubber or the like is attached around the periphery of the cylinder portion 1 to prevent air leakage from the lower end wall 2 of the cylinder portion 1.

上記真空保持部材４の下部には、ＣＩＪソング０等によ
シバネ用フランジ１１が取シ付けられておシ、このバネ
用フランジ１１の上面と上記シリンダ部１の下面との間
には復旧バネ１２が介装されている。この復旧バネ１２
は、例えばコイルスプリングであり、上記真空保持部材
４を常時シリンダ部１の下端から下向きに突出するよう
に付勢している。したがって、通常は上記復旧バネ１２
の付勢力によって真空保持部材４は矢印Ｅ方向に押し下
げら扛、その上端の円板部材７の連通孔８はシール部材
９で閉塞されている。なお、上記バネ用フランジ１１は
Ｃリング１０等で増シ付けるものに限られず、真空保持
部材４の下端部に一体的に形成してもよい。A spring flange 11 is attached to the lower part of the vacuum holding member 4 using CIJ song 0 or the like, and a recovery spring is attached between the upper surface of the spring flange 11 and the lower surface of the cylinder section 1. 12 are interposed. This recovery spring 12
is a coil spring, for example, and always urges the vacuum holding member 4 to protrude downward from the lower end of the cylinder portion 1. Therefore, normally the recovery spring 12
The vacuum holding member 4 is pushed down in the direction of arrow E, and the communication hole 8 of the disk member 7 at the upper end thereof is closed by the sealing member 9. It should be noted that the spring flange 11 is not limited to being added with a C ring 10 or the like, but may be formed integrally with the lower end of the vacuum holding member 4.

上記真空保持部材４の長手方向中間部の外周面には、シ
ール用フランジ１３がナツト１４等で取シ付けられ、こ
のシール用フランジ１３の上面全周にはゴム等のシール
部材１５が貼設されている。このシール部材１５は、上
記真空保持部材４を矢印り方向に押し上げてシリンダ部
１内の負圧状態を空気流通孔５に連通したとき、シリン
ダ部１の下端壁２の摺動口３と該真空保持部材４の外周
面とのすき間から外気が侵入して負圧力が低下するのを
防止するもので、上記真空保持部材４の矢印り方向への
押し上けによシ上記シリンダ部１の摺動口３０部分を密
閉するようになっている。A sealing flange 13 is attached to the outer peripheral surface of the longitudinally intermediate portion of the vacuum holding member 4 with a nut 14 or the like, and a sealing member 15 made of rubber or the like is affixed to the entire circumference of the upper surface of this sealing flange 13. has been done. When the vacuum holding member 4 is pushed up in the direction of the arrow to communicate the negative pressure inside the cylinder section 1 to the air circulation hole 5, the sealing member 15 connects to the sliding port 3 of the lower end wall 2 of the cylinder section 1. This prevents outside air from entering through the gap between the vacuum holding member 4 and the outer circumferential surface of the cylinder portion 1, thereby preventing negative pressure from decreasing. The sliding opening 30 portion is sealed.

さらに上記真空保持部材４の下端には、吸着バッド１６
が取シ付けられている。この吸着バッド１６は、上記シ
リンダ部１内の負圧状態が上記真空保持部材４を介して
連通されてその負圧でワーク６０を吸着するもので、例
えばゴム等の弾力性を有するもので形成されると共にそ
の底面は凹曲面状に形成され全体として吸盤状になって
いる。Further, a suction pad 16 is provided at the lower end of the vacuum holding member 4.
is installed. This suction pad 16 is made of an elastic material such as rubber, for example, and is configured to suction the workpiece 60 by communicating the negative pressure inside the cylinder section 1 via the vacuum holding member 4. At the same time, the bottom surface is formed into a concave curved shape, and the whole has a suction cup shape.

上記複数個の吸着主体３０．３０・・・・・・の吸着バ
ッド１６．１６−・・・・・の直上には、第１図に示す
ように、一部材からなる検出部材４０が設けられている
。この検出部材４０は、ベース２０が矢印Ａ方向に下降
されていずれかの吸着バッド１６．１Ｇ・・・・・・が
ワーク６０を押圧したときに各真空保持部材４が矢印り
方向（第２図参照）にスライドするのを検出するもので
、例えば上記複数個の吸着主体３０．３０・・・・・・
がマ）　ＩＪクス状に配列された領域よシも広い平面積
を有する平板状に形成され、該吸着主体３０に対応する
位置にはその真空保持部材４の下端部が挿通しうる孔４
１（第２図参照）があけられておシ、この孔４１の縁部
が第２図に示すように吸着バッド１６の直上に設けられ
たＣリング４２に載置されている。そして、上記平板状
の検出部材４０の四隅部には上記ベース２０に向って延
びるガイドバー４３，４３・・・・・・が立設されてお
広該ガイドバー４３．４３・・・・・・の上端部はベー
ス２０の対応箇所に穿設されたガイド孔４４．４４・・
・・・・にスライド可能に挿通されている。したがって
、上記真空保持部材４の矢印り、Ｅ方向の上昇、下降に
従って、検出部材４０も矢印Ｆ１Ｇ方向に上昇、下降す
ることとなる。なお、この検出部材４０の取り付は方は
上記のものに限られず、上記真空保持部材４の上昇、下
降を検出できるならばどのような取シ付は方であっても
よい。As shown in FIG. 1, a detection member 40 made of one member is provided directly above the suction pads 16, 16-... of the plurality of suction bodies 30, 30, . ing. This detection member 40 is configured such that when the base 20 is lowered in the direction of arrow A and any of the suction pads 16.1G... presses the workpiece 60, each vacuum holding member 4 moves in the direction of the arrow (second direction). (see figure), for example, the plurality of suction bodies 30, 30...
A hole 4 is formed in the shape of a flat plate having a larger plane area than the area arranged in the shape of an IJ box, and the lower end of the vacuum holding member 4 can be inserted through the hole 4 at a position corresponding to the suction main body 30.
1 (see FIG. 2), and the edge of this hole 41 is placed on a C-ring 42 provided directly above the suction pad 16, as shown in FIG. At the four corners of the flat detection member 40, guide bars 43, 43, .・The upper end has guide holes 44, 44 drilled at corresponding locations on the base 20.
It is slidably inserted into... Therefore, as the vacuum holding member 4 rises and falls in the arrow E direction, the detection member 40 also rises and falls in the arrow F1G direction. Note that the mounting method of the detection member 40 is not limited to the above-mentioned method, and any mounting method may be used as long as the rise and fall of the vacuum holding member 4 can be detected.

上記検出部材４０の略中央部上方の所定距離ｌには、第
１図に示すように、一つの検知部５０が設けられている
。この検知部５０は、上記検出部材４０が矢印Ｇ方向に
所定距離だけ上昇したのを検知して上記ベース２０の駆
動装置を停止させるもので、該ベース２ｏの下面から下
向きに突出された棒５１の先端部に設けられている。こ
の検知部５０としては、限定距離形のフォトセンサ又は
電♂スイッチ等の非接触形のスイッチでもよいし、或い
はリミットスイッチ等の接触形のスイッチでもよい。々
お、この検知部５０の取シ付は位置は、上記検出部材４
ｏの略中央部上方に限られず、該検出部材４ｏの上方の
所定距＊ｌＩ　ｔであるならばどの位置であってもよい
。また、ベース２０の下面に突出した棒５１の先端部に
限られず、上記検出部材４ｏの矢印Ｇ方向への上昇を検
知できる他の箇所、例えばガイドバー４３の上端部に該
ガイドバー４３の所定距離ｌの移動で作動するリミット
スイッチを設けてもよい。As shown in FIG. 1, one detecting section 50 is provided at a predetermined distance l above the substantially central portion of the detecting member 40. As shown in FIG. The detection unit 50 detects that the detection member 40 has risen by a predetermined distance in the direction of arrow G and stops the driving device of the base 20. The detection unit 50 stops the driving device of the base 20 by a rod 51 protruding downward from the lower surface of the base 2o. It is provided at the tip of the The detection unit 50 may be a limited distance photo sensor or a non-contact switch such as an electric/female switch, or a contact switch such as a limit switch. The mounting position of this detecting section 50 is the above-mentioned detecting member 4.
The position is not limited to approximately above the center of the detecting member 4o, but may be any position as long as it is a predetermined distance *lIt above the detecting member 4o. Furthermore, it is not limited to the tip of the rod 51 protruding from the lower surface of the base 20, but may be placed at a predetermined location on the guide bar 43 at another location where the rising of the detection member 4o in the direction of the arrow G can be detected, for example, at the upper end of the guide bar 43. A limit switch may be provided which is activated by movement of a distance l.

次に、このように構成されたワーク吸着装置Ｅの作動に
ついて説明する。壕ず、第１図に示すように、ワーク吸
着装置Ｅを適宜の台７ｏ上に載置された適宜の平面形状
及び厚さのワーク６０の上方に移動させ、ベース２０の
駆動装置管作動して矢印Ａのように全体を下降させる。Next, the operation of the work suction device E configured as described above will be explained. As shown in FIG. 1, the workpiece suction device E is moved above a workpiece 60 of an appropriate planar shape and thickness placed on an appropriate table 7o, and the drive device tube of the base 20 is activated. and lower the entire unit as shown by arrow A.

このように下降していくと、ワーク６０の上方に位置す
る部分の吸着バッド１６がワーク６０の上面に当接し、
さらにワーク吸着装置Ｅを矢印へのように下降させると
、第３図に示すように、当該部位の真空保持部材４が復
旧バネ１２を収縮させながらシリンダ部１に対して矢印
りのように相対的に上昇する。このとき、各吸着バッド
１６の直上に装着された検出部材４０は、第２図に示す
Ｃリング４２を介して押し上げられ、第３図に示すよう
に、ベース２０に対して矢印Ｇのように相対的に上昇す
る。このようにしてワーク吸着装置Ｅを矢印Ａ方向に下
降して、上記検出部材４０が矢印Ｇ方向に所定距離ｌだ
け上昇したら、検知部５０がその所定距離ｌの移動を検
知して上記ベース２０の駆動装置を止めて装置全体の下
降を停止する。このとき、ワーク６０の上面を押圧して
いる真空保持部材４の上端の円板部材７の連通孔８が開
放される。As it descends in this way, the suction pad 16 located above the workpiece 60 comes into contact with the upper surface of the workpiece 60, and
When the work suction device E is further lowered in the direction of the arrow, as shown in FIG. to rise. At this time, the detection member 40 mounted directly above each suction pad 16 is pushed up via the C ring 42 shown in FIG. 2, and as shown in FIG. Relative increase. When the work suction device E is lowered in the direction of the arrow A in this manner and the detection member 40 is raised by a predetermined distance l in the direction of the arrow G, the detection unit 50 detects the movement of the predetermined distance l and the base 2 Stop the lowering of the entire device by stopping the drive device. At this time, the communication hole 8 of the disk member 7 at the upper end of the vacuum holding member 4 pressing the upper surface of the workpiece 60 is opened.

この状態になったところで、第２図に示すシリンダ部１
に連結された図示外の真空源の動力を運転して該シリン
ダ部１内の空気を矢印Ｃのように引き抜いて上記シリン
ダ部１内を負圧状態とする。すると、上記シリンダ部１
内の負圧状態が真空保持部材４の空気流通孔５に連通し
て、当該部位の吸着バッド１６がワーク６０を吸着する
。その後、上記ワーク６０’ｆ−吸着したままワーク吸
着装置Ｅの全体を矢印Ｂ方向に上昇させて、真空源を停
止させ、ワーク吸着装置Ｅを移動して上記ワーク６０を
所定の場所に運搬する。When this state is reached, the cylinder part 1 shown in FIG.
The air inside the cylinder section 1 is drawn out in the direction of arrow C by driving the power of a vacuum source (not shown) connected to the cylinder section 1 to bring the inside of the cylinder section 1 into a negative pressure state. Then, the cylinder part 1
The negative pressure inside communicates with the air circulation hole 5 of the vacuum holding member 4, and the suction pad 16 at the relevant portion suctions the workpiece 60. Thereafter, the entire workpiece suction device E is raised in the direction of arrow B while the workpiece 60'f is still being sucked, the vacuum source is stopped, and the workpiece suction device E is moved to transport the workpiece 60 to a predetermined location. .

（６）発明の効果 本発明は以上のように構成されたので、吸着バッド１６
とワーク６０との当接押圧の検出を複数個の吸着主体３
０に対して一つの検知部５０で検知することができる。(6) Effects of the invention Since the present invention is configured as described above, the suction pad 16
A plurality of suction bodies 3 detect contact pressure between the workpiece 60 and the workpiece 60
0 can be detected by one detection unit 50.

また、検出部材４０社すべての吸着主体３０に共通する
一部材で形成されているので、いずれの吸着バッド１６
がワーク６０を押圧してもその所定距離の移動を上記検
知部５０との間で検出することができる。In addition, since the detection member is made of one material common to the suction bodies 30 of all 40 companies, any suction pad 16
Even if the workpiece 60 is pressed by the workpiece 60, the movement of the workpiece 60 by a predetermined distance can be detected between the detection unit 50 and the detection unit 50.

したがって、一つの検知部５０と検出部材４０とでワー
ク６０の形状に柔軟に対応することができると共に装置
全体のコスト低下を図ることができる。Therefore, one detecting section 50 and one detecting member 40 can flexibly respond to the shape of the workpiece 60, and the cost of the entire apparatus can be reduced.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明によるワーク吸着装置を示す正面図、第
２図は吸着主体を示す断面図、第３図は装置の作動状態
を示す正面図である。 １・・・・・・シリンダ部 ２・・・・・・下端壁 ３・・・・・・摺動口 ４・・・・・・真空保持部材 ５・・・・−・空気流通孔 ８・・・・一連通孔 １１・・・・・・バネ用フランジ １２・・・・・・復旧バネ １６・・・・・・吸着バッド ２０・・・・・・ベース ３０・・・・・・吸着主体 ４０・・・・・・検出部材 ４１・・・・・・孔 ４３・・・・・・ガイドバー ４４・・・・・・ガイド孔 ５０・・・・・・検知部 ６θ・・・・・・ワーク 出願人　富士通株式会社 第１図 ７０ ｖ、３図 第２図FIG. 1 is a front view showing a workpiece suction device according to the present invention, FIG. 2 is a sectional view showing the main body of the workpiece suction, and FIG. 3 is a front view showing the operating state of the device. 1... Cylinder part 2... Lower end wall 3... Sliding port 4... Vacuum holding member 5... Air circulation hole 8. ...Series through hole 11...Spring flange 12...Recovery spring 16...Suction pad 20...Base 30...Adsorption Main body 40...detection member 41...hole 43...guide bar 44...guide hole 50...detection part 6θ... ...Work applicant Fujitsu Ltd. Figure 1 70 v, Figure 3 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 単一の真空源と連結されたシリンダ部を有し、このシリ
ンダ部の下端壁に形成された摺動口に気密的にスライド
可能とされ内部には空気流通孔が穿設された真空保持部
材を嵌挿し、上記空気流通孔の上端部をシリンダ部の下
端壁内面にて開放、閉塞可能とすると共に上記真空保持
部材の下端には上記空気流通孔と連通する吸着ノくラド
を設け、且つ上記真空保持部材を常時シリンダ部下端か
ら下向きに突出付勢してなる吸着主体を複数個ベースか
ら下向きに配列し、上記シリンダ部内を負圧にして吸着
パッドをワークに下降押圧することによシ真空経路を開
き該ワークを吸着するワーク吸着装置において、上記い
ずれかの吸着パッドがワークを押圧して該真空保持部材
がスライドするのを検出する検出部材を全吸着主体に共
通する一部材で形成すると共に、上記検出部材の所定距
離の移動を検知する検矧部を設けたことを特徴とするワ
ーク吸着装置。A vacuum holding member that has a cylinder part connected to a single vacuum source, can be slid airtight through a sliding opening formed in the lower end wall of this cylinder part, and has air circulation holes bored inside. The upper end of the air circulation hole can be opened and closed on the inner surface of the lower end wall of the cylinder part, and the lower end of the vacuum holding member is provided with a suction nozzle communicating with the air circulation hole, and By arranging a plurality of suction bodies in which the vacuum holding member is always urged downwardly from the lower end of the cylinder and arranging them downward from the base, and applying negative pressure inside the cylinder part to press the suction pad downward against the workpiece. In a workpiece suction device that opens a vacuum path and suctions the workpiece, a detection member that detects when one of the suction pads mentioned above presses the workpiece and the vacuum holding member slides is made of one material common to all suction main bodies. A work suction device further comprising a measuring section for detecting movement of the detection member over a predetermined distance.