JPS60122319A - Flow meter - Google Patents
Flow meterInfo
- Publication number
- JPS60122319A JPS60122319A JP22968483A JP22968483A JPS60122319A JP S60122319 A JPS60122319 A JP S60122319A JP 22968483 A JP22968483 A JP 22968483A JP 22968483 A JP22968483 A JP 22968483A JP S60122319 A JPS60122319 A JP S60122319A
- Authority
- JP
- Japan
- Prior art keywords
- partition plate
- flow
- flow passage
- flow rate
- fluid passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
- G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
- G01F1/28—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow by drag-force, e.g. vane type or impact flowmeter
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、流体通路内を流れる気体や液体等の流量を検
出するだめの流量計に関し、特に電子機器等の内部に形
成さ、れた小径の流体通路内の流量を検出し、応答性の
高い流量制御を行なう場合に適用して有用なものである
。[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to a flowmeter for detecting the flow rate of gas, liquid, etc. flowing in a fluid passage, and particularly relates to a flowmeter that is formed inside an electronic device or the like. This is useful when detecting the flow rate in a small diameter fluid passage and performing highly responsive flow control.
〈背景技術とその問題点〉
従来、流体通路内を流れる気体や液体等の流量を検出す
るだめの流量計として、上記流体通路の一部を例えばオ
リスイスやノズル等の絞りにょって縮径し、この絞りに
より生ずる静圧の変化すなわち差圧を検出し、上記流体
通路に流れる流体の流量を間接的に測定するようになし
た差圧流量計が用いられている。<Background technology and its problems> Conventionally, as a flowmeter for detecting the flow rate of gas, liquid, etc. flowing in a fluid passage, a part of the fluid passage is reduced in diameter by a restriction such as an oriswiss or a nozzle. A differential pressure flow meter is used that detects a change in static pressure, that is, a differential pressure, caused by this restriction, and indirectly measures the flow rate of fluid flowing through the fluid passage.
ところで、このような差圧流量計は、例えば、各種電子
機器において磁気テープ等を所謂エアシューテイング方
式を用いて装着するための磁気テープの自動供給装置等
に用いようとした場合には、上記絞シを構成するオリフ
ィスやノズル等の所謂−次装置に加えて上記差圧を測定
するだめの所謂二次装置を設ける必要があり、構造が極
めて大型であるという欠点がある。By the way, if such a differential pressure flowmeter is to be used, for example, in an automatic magnetic tape supply device for mounting magnetic tape, etc. in various electronic devices using the so-called air shooting method, the above-mentioned restriction is required. In addition to the so-called secondary devices such as the orifice and nozzle that make up the system, it is necessary to provide a so-called secondary device for measuring the differential pressure, and the structure is extremely large.
また、このような差圧流量計を用いた場合には上記絞シ
によって流体の流れが乱れてしまい、この絞り部分の近
傍位置で上述した磁気テープ等のエアシューテイング動
作を行なった場合に、この流体の乱れによって、上記磁
気テープを好適に装着操作し得ないという欠点がある。Furthermore, when such a differential pressure flowmeter is used, the flow of fluid is disturbed by the above-mentioned constriction, and if the above-mentioned air shooting operation using a magnetic tape or the like is performed near the constriction, this may occur. There is a drawback that the magnetic tape cannot be mounted properly due to the turbulence of the fluid.
また、さらに上記従来の差圧流量計は、上記二次装置を
必要とするために高価なものとなってしまう。Furthermore, the conventional differential pressure flowmeter described above is expensive because it requires the secondary device described above.
〈発明の目的〉
そこで本発明は、上述した如き実情に鑑み、極めて小型
の構成を採シ得るとともに整流効果を有し流体の流れを
乱すことのない安価な流量計を提供することを目的とす
る。<Purpose of the Invention> In view of the above-mentioned circumstances, the present invention aims to provide an inexpensive flowmeter that has an extremely compact configuration, has a rectifying effect, and does not disturb the flow of fluid. do.
〈発明の概要〉
素子にて形成するとともに、この仕切板に流体通路全連
通ずる流通路を多数形成し、上記流体通路内を流れる流
体の圧力による上記仕切板の変形によシ検出信号を得る
ようにしてなるものである。<Summary of the Invention> In addition to forming an element, a large number of fluid passages are formed in this partition plate, and all fluid passages are in communication with each other, and a detection signal is obtained by deformation of the partition plate due to the pressure of the fluid flowing in the fluid passages. This is how it happens.
〈実施例〉
以下、本発明の具体的な実施例を図面に従って詳細に説
明する。<Example> Hereinafter, specific examples of the present invention will be described in detail with reference to the drawings.
この実施例における流量計は、第１図に示すように円筒
管１によって形成される流体通路２に配されており、こ
の流体通路２を流れる圧縮エアの流量を測定するために
設けられたものである。この流量計は第２図及び第３図
にも示すように、上記流体通路２を仕切る如く設けられ
る仕切板３が機械−電気変換素子となる二枚の圧電素子
４，５を貼り合せ上記流体通路２の形状に応じて円盤状
に形成されたものである。上記各圧電素子４，５は互い
に異なった分極方向を有してなるものであり、この仕切
り板３が上記流体通路２を流れる圧縮エアの圧力を受け
て撓んだ際に、互いの貼り合せ面を中立面として、一方
の圧電素子４が短縮するとともに他方の圧電素子５が伸
張する如くなり、良
この仕切板３の両側面間に電析を生じるようになってい
る。The flow meter in this embodiment is arranged in a fluid passage 2 formed by a cylindrical pipe 1 as shown in FIG. 1, and is provided to measure the flow rate of compressed air flowing through this fluid passage 2. It is. As shown in FIGS. 2 and 3, in this flowmeter, a partition plate 3 provided to partition the fluid passage 2 is used to bond two piezoelectric elements 4 and 5, which serve as mechanical-electric conversion elements, to It is formed into a disk shape according to the shape of the passage 2. The piezoelectric elements 4 and 5 have polarization directions different from each other, and when the partition plate 3 is bent under the pressure of the compressed air flowing through the fluid passage 2, the piezoelectric elements 4 and 5 are bonded to each other. With the plane as a neutral plane, one piezoelectric element 4 is shortened and the other piezoelectric element 5 is expanded, so that electrodeposition occurs between both sides of the partition plate 3.
また、このように圧電素子４，５を貼シ合せてなる仕切
板３には、流通路となる多数の透孔６が形成されている
。これら透孔６は上記仕切板３にて仕切られる上記流体
通路２を連通ずる如く上記各圧電素子４，５に穿設され
たものであり、仕切板３の側面の全面に亘ってほぼ均等
に分散されている。Further, in the partition plate 3 formed by bonding the piezoelectric elements 4 and 5 together in this manner, a large number of through holes 6 that serve as flow paths are formed. These through holes 6 are formed in each of the piezoelectric elements 4 and 5 so as to communicate with the fluid passage 2 partitioned by the partition plate 3, and are formed almost evenly over the entire side surface of the partition plate 3. Distributed.
またさらに、上記仕切板３の両側面には表面電極７，８
が配されている。これら表面電極７，８は上記各透孔６
を塞ぐことなく各側面に被着形成されたものであり、リ
ード線９，１０及び接続端子１１．１２に接続され、こ
のリード線９，１０及び接続端子１１．１２を介して互
いの表面電極γ、８間の電圧を検出信号として得られる
ようになっている。Furthermore, surface electrodes 7 and 8 are provided on both sides of the partition plate 3.
are arranged. These surface electrodes 7 and 8 are connected to each of the through holes 6
The lead wires 9, 10 and the connecting terminals 11.12 are connected to each other's surface electrodes via the lead wires 9, 10 and the connecting terminals 11.12. The voltage between γ and 8 can be obtained as a detection signal.
また、このような構成の仕切板３は上記円筒管１に例え
ばゴム材よシなる円環状の取付体１３を介して嵌合され
るようにして、上記流体通路２に配されている。Further, the partition plate 3 having such a structure is disposed in the fluid passage 2 so as to be fitted to the cylindrical tube 1 via an annular attachment body 13 made of, for example, a rubber material.
そして、このように構成した流量計を配した流体通路２
内に圧縮エアが流れると、上記仕切板３は、第４図に示
すように、上記圧縮エアの圧力によって上記流体通路２
の上流よシ下流に向って押圧され、湾曲変形することと
なる。すると、この仕切板３を構成する二枚の圧電素子
４，５は互いの貼合せ而を中立面とするようにして上記
一方の圧電素子４が短縮し、他方の圧電素子５が伸張す
ることとなり、上記各表面電極γ、８間に電圧を生じさ
せる。そこで、これら表面電極７，８間の電圧を上記リ
ード線９，１０及び接続端子１１゜１２等を介して検出
信号として読み取り、上記仕切板３の湾曲変形量を読取
ることによシ、上記仕切板３に加わる圧力を検出し、こ
の圧力よシ上記流体通路２に流れる圧縮エアの流量を検
出することができる。すなわち、上記流量をＱ１上記検
出信号をΔＥ１そして上記圧縮エアの単位体積あたりの
重量をγとすると、
（Ｋ：校正試験等によって得られる比例定数、ｇ！＝重
力の加速度）
の関係より、流量Ｑの値を上記検出信号ΔＥの値よりめ
ることができる。Then, a fluid passage 2 in which the flow meter configured as described above is arranged.
When compressed air flows inside, the partition plate 3 closes the fluid passage 2 due to the pressure of the compressed air, as shown in FIG.
It is pressed from upstream to downstream, resulting in a curved deformation. Then, the two piezoelectric elements 4 and 5 constituting the partition plate 3 are bonded together with the neutral plane, so that one piezoelectric element 4 shortens and the other piezoelectric element 5 expands. Therefore, a voltage is generated between each of the surface electrodes γ and 8. Therefore, by reading the voltage between these surface electrodes 7 and 8 as a detection signal via the lead wires 9 and 10 and the connecting terminals 11 and 12, and reading the amount of bending deformation of the partition plate 3, it is possible to The pressure applied to the plate 3 can be detected, and based on this pressure, the flow rate of compressed air flowing into the fluid passage 2 can be detected. That is, if the above flow rate is Q1, the above detection signal is ΔE1, and the weight per unit volume of the compressed air is γ, then from the relationship (K: constant of proportionality obtained by calibration test, etc., g!=acceleration of gravity), the flow rate is The value of Q can be determined from the value of the detection signal ΔE.
このように本実施例の流量計によれば、上記仕切板３の
変形によって得られる検出信号より、上記流体通路２に
流れる圧縮エアの流量を速やかにめることができる。As described above, according to the flowmeter of this embodiment, the flow rate of the compressed air flowing into the fluid passage 2 can be quickly adjusted based on the detection signal obtained by the deformation of the partition plate 3.
また、上述の如き仕切板３の形状を小型化することによ
り小径の流体通路２における流量測定にも用いることが
でき、さらに、この仕切板３の変形量をめるために大型
の二次装置を設ける必要もない。従って、この流量計は
極めて小型の装置として構成することができる。そして
、複雑な構成の二次装置を必要としないことから、極め
て安価な装置として得ることができる。Furthermore, by reducing the size of the partition plate 3 as described above, it can be used to measure the flow rate in a small-diameter fluid passage 2. Furthermore, in order to measure the amount of deformation of the partition plate 3, a large secondary device is required. There is no need to provide one. Therefore, this flowmeter can be constructed as an extremely compact device. Further, since a secondary device with a complicated configuration is not required, the device can be obtained as an extremely inexpensive device.
さらに、上記仕切板３にほぼ均等に分散して透孔６を形
成したことから、上記圧縮エアの流れが乱されてしまう
こともない。Furthermore, since the through holes 6 are formed in the partition plate 3 so as to be almost evenly distributed, the flow of the compressed air will not be disturbed.
また、上記実施例では円筒管１内に流量計を配した場合
について述べだが、上述のように小型形状に形成される
流量計は、例えば第５図に示すような、磁気記録再生装
置における磁気テープ１４の自動供給装置において、上
記磁気テープ１４をテープ送りするための圧縮エアの流
量検出用に用いることができる。この自動供給装置では
、上記磁気テープ１４を回転自在な巻回り−ル１５に巻
付けた状態で密閉型のエアシューテングケース１６に収
納し、上記磁気テープ１４をエアシューテングケース１
６の一部に形成された繰出口１７より繰出すようにした
ものである。すなわち、上記繰出口１７に隣接するよう
にして、流体通路２の開口部２＆が臨み、この流体通路
２より吐出される圧縮エアを上記磁気テープ１４が導か
れるテープ走行路１８内に供給することによシ、上記磁
気テープ１４の圧縮エアによるテープ送シを行なうよう
になされている。そして、本発明に係る流量計は上記流
体通路２の開口部２ａ近傍に配されており、上記磁気テ
ープ１４側に吐出される圧縮エアの流量を上記磁気テー
プ１４の近傍位置で検出することができる。従って、上
記磁気テープ１４の確実なテープ送シを行なうための圧
縮エアの流量を好適に制御することができる。しかも、
この流量計によって上記磁気テープ１４側に吐出される
圧縮エアの流れが乱されてしまうこともないので、上記
磁気テープ１４の撓み等を生じてしまうこともなく、円
滑なテープ送りを実現することができる。Further, in the above embodiment, the case where the flowmeter is disposed inside the cylindrical tube 1 has been described, but the flowmeter formed in the above-mentioned compact shape can be used in a magnetic recording/reproducing device, for example, as shown in FIG. In an automatic feeding device for the tape 14, it can be used to detect the flow rate of compressed air for feeding the magnetic tape 14. In this automatic feeding device, the magnetic tape 14 is wound around a rotatable winding loop 15 and stored in a closed air chute case 16.
It is arranged to be fed out from a feeding opening 17 formed in a part of 6. That is, the opening 2& of the fluid passage 2 faces adjacent to the outlet 17, and the compressed air discharged from the fluid passage 2 is supplied into the tape running path 18 along which the magnetic tape 14 is guided. Alternatively, the magnetic tape 14 is transported by compressed air. The flowmeter according to the present invention is disposed near the opening 2a of the fluid passage 2, and can detect the flow rate of compressed air discharged to the magnetic tape 14 at a position near the magnetic tape 14. can. Therefore, the flow rate of compressed air for reliable tape feeding of the magnetic tape 14 can be suitably controlled. Moreover,
Since the flow of compressed air discharged to the magnetic tape 14 side is not disturbed by this flow meter, the magnetic tape 14 is not warped, and smooth tape feeding is realized. I can do it.
なお、上述した実施例では圧縮エアの流量を検出するだ
めの流量計について述べたが、本発明の流量計は水等の
液体の流量検出を行なう場合にも用いることができる。In the above-described embodiments, a flowmeter for detecting the flow rate of compressed air was described, but the flowmeter of the present invention can also be used to detect the flow rate of liquid such as water.
また、上記実施例においては仕切板３を二枚の圧電素子
４，５にて形成し、この仕切板３の変形量を容易に検出
し得るようにしたが、流体の圧力が充分大きい場合には
一枚の圧電素子の変形量によって圧力の変化を検出する
ようにしても良い。Furthermore, in the above embodiment, the partition plate 3 is formed by two piezoelectric elements 4 and 5 so that the amount of deformation of the partition plate 3 can be easily detected. Alternatively, the change in pressure may be detected based on the amount of deformation of a single piezoelectric element.
またさらに、上記実施例では上記流体通路２を連通ずる
ための流通路として、上記仕切板３に透孔６を不規則に
分散させて形成したが、このような、流通路は例えば上
記仕切板３を切欠いて形成したもので必っても良く、さ
らに、一定の規則を有して配列形成されたものであって
も良い。Furthermore, in the above embodiment, the through holes 6 are irregularly distributed and formed in the partition plate 3 as flow passages for communicating the fluid passages 2. It may be formed by notching 3, or may be formed in an array according to a certain rule.
そしてまた、上記実施例では仕切板３を形成する機械−
電気変換素子として、圧電素子４，５を用いたが、この
ような機械−電気変換素子として、例えば撓板に抵抗線
を配してなる抵抗線歪ゲージの如きものや、半導体の歪
量を電気的に検出するような半導体歪ゲージの如きもの
を用いても良く、その具体的態様は種々採り得るもので
ある。Furthermore, in the above embodiment, the machine for forming the partition plate 3 -
Although piezoelectric elements 4 and 5 were used as electrical conversion elements, other examples of such mechanical-electrical conversion elements include resistance wire strain gauges in which a resistance wire is arranged on a flexible plate, and devices that measure the amount of strain in semiconductors. A semiconductor strain gauge that detects electrically may be used, and various specific embodiments may be used.
〈発明の効果〉
によって得られる検出信号より流体通路に流れる流体の
流量を検出するようにしたことがら、流体通路を流れる
流体の流量を速やかにめることができる。<Effects of the Invention> Since the flow rate of the fluid flowing through the fluid passage is detected from the detection signal obtained as described above, the flow rate of the fluid flowing through the fluid passage can be quickly determined.
そして、上記仕切板の形状を小型にすることによ）小径
の流体通路における流量測定にも用いることができ、さ
らに、大型の二次装置を設ける必要がない。従って、こ
の流量計は極めて小型の装置として構成することができ
、電子機器等に実装することも容易である。By making the shape of the partition plate small, it can also be used to measure the flow rate in a small diameter fluid passage, and furthermore, there is no need to provide a large secondary device. Therefore, this flowmeter can be configured as an extremely small device and can be easily installed in electronic equipment and the like.
また、複雑な構成を有する高価な二次装置を必要としな
いことから、極めて安価な装置として得ることができる
。Furthermore, since an expensive secondary device with a complicated configuration is not required, the device can be obtained as an extremely inexpensive device.
またさらに、上記仕切板によって流体の流れが乱れてし
まうこともなく、この乱れを整えるための整流装置等を
設ける必要もない。Furthermore, the flow of the fluid is not disturbed by the partition plate, and there is no need to provide a rectifier or the like to correct this disturbance.
第１図は本発明に係る流量計の一実施例を示す概略断面
図、第２図は上記流量計の仕切板を示す概略断面図、第
３図は上記仕切板を示す概略正面図、第４図は上記仕切
板が湾曲変形した状態を示す概略断面図、第５図は上記
流量計を磁気テープの自動供給装置に用いてなる他の実
施例を示す一部省略平面図である。
２・・・流体通路 ３・・・仕切板
４．５・・・圧電素子 ６・・・透孔
７．８・・・表面電極
特許出願人 ソニー株式会社
代理人 弁理士 小 池 晃
同 日 村 榮 −
１１−FIG. 1 is a schematic sectional view showing an embodiment of a flowmeter according to the present invention, FIG. 2 is a schematic sectional view showing a partition plate of the flowmeter, FIG. 3 is a schematic front view showing the partition plate, and FIG. FIG. 4 is a schematic sectional view showing a state in which the partition plate is curved and deformed, and FIG. 5 is a partially omitted plan view showing another embodiment in which the flow meter is used in an automatic magnetic tape feeding device. 2...Fluid passage 3...Partition plate 4.5...Piezoelectric element 6...Through hole 7.8...Surface electrode patent applicant Sony Corporation representative Patent attorney Kodo Koike Himura Sakae - 11-
Claims (1)
成するとともに、この仕切板に流体通路を連通ずる流通
路を多数形成し、上記流体通路内を流れる流体の圧力に
よる上記仕切板の変形により検出信号を得るようにして
なる流量計。A partition plate that partitions the fluid passages is formed of a listener-electric conversion element, and a number of flow passages that communicate the fluid passages are formed in this partition plate, and the partition plate is deformed by the pressure of the fluid flowing in the fluid passages. A flowmeter that obtains a detection signal by
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22968483A JPS60122319A (en) | 1983-12-05 | 1983-12-05 | Flow meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22968483A JPS60122319A (en) | 1983-12-05 | 1983-12-05 | Flow meter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60122319A true JPS60122319A (en) | 1985-06-29 |
| JPH0360048B2 JPH0360048B2 (en) | 1991-09-12 |
Family
ID=16896069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22968483A Granted JPS60122319A (en) | 1983-12-05 | 1983-12-05 | Flow meter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60122319A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04106627U (en) * | 1991-02-19 | 1992-09-14 | 関西日本電気株式会社 | Liquid flow rate fluctuation detection mechanism |
| WO2020058315A1 (en) * | 2018-09-18 | 2020-03-26 | Siemens Aktiengesellschaft | Pressure or flow rate measuring cell |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54147864A (en) * | 1978-05-12 | 1979-11-19 | Yokogawa Hokushin Electric Corp | Measuring apparatus of velocity and rate of flow |
-
1983
- 1983-12-05 JP JP22968483A patent/JPS60122319A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54147864A (en) * | 1978-05-12 | 1979-11-19 | Yokogawa Hokushin Electric Corp | Measuring apparatus of velocity and rate of flow |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04106627U (en) * | 1991-02-19 | 1992-09-14 | 関西日本電気株式会社 | Liquid flow rate fluctuation detection mechanism |
| WO2020058315A1 (en) * | 2018-09-18 | 2020-03-26 | Siemens Aktiengesellschaft | Pressure or flow rate measuring cell |
| CN112714864A (en) * | 2018-09-18 | 2021-04-27 | 西门子股份公司 | Pressure or flow measuring cell |
| CN112714864B (en) * | 2018-09-18 | 2022-05-27 | 西门子股份公司 | Pressure or flow measuring cell |
| US11898889B2 (en) | 2018-09-18 | 2024-02-13 | Siemens Aktiengesellschaft | Pressure and flow rate measuring cell |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0360048B2 (en) | 1991-09-12 |
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