JPS60116895A - Vacuum pump - Google Patents
Vacuum pumpInfo
- Publication number
- JPS60116895A JPS60116895A JP22415783A JP22415783A JPS60116895A JP S60116895 A JPS60116895 A JP S60116895A JP 22415783 A JP22415783 A JP 22415783A JP 22415783 A JP22415783 A JP 22415783A JP S60116895 A JPS60116895 A JP S60116895A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- impeller
- pump stage
- viscous
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は排気口を大気圧とする真空ポンプ、例えば半導
体製造装置における清浄な真空を作り出すのに好適な真
空ポンプに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a vacuum pump whose exhaust port is at atmospheric pressure, such as a vacuum pump suitable for creating a clean vacuum in semiconductor manufacturing equipment.
従来の真空ポンプ（特開昭５１−３＋１１．１３号）は
第＼
１図に示すように、１−Ｔ線を中心として左右対称に設
けられており、その右半部の構造は次のとおりである。The conventional vacuum pump (Japanese Unexamined Patent Publication No. 51-3+11.13) is installed symmetrically around the 1-T line as shown in Figure 1, and the structure of the right half is as follows. It is.
すなわち＠魁口２ＡとＳ領口２ＲＧ有するハウジング２
の内壁に取付けられた固定板３Ｂ〜６Ｂと、そのハウジ
ング２内に軸受７を介して回転自在に支持された回転軸
１に取付けられた回転円板３Ａおよび羽根車４Ａ〜６Ａ
のそれぞれとからなる軸流ターボ分子ポンプ段３、付加
分子ポンプ段４、遠心圧縮ポンプ段５および渦流圧縮ポ
ンプ段６を、前記吸気口２Ａ側から排気口２Ｂ側に至る
間のハウジング２内に順次」こ連設して構成されている
。In other words, housing 2 with @Kairokuguchi 2A and S-Ryoguchi 2RG
fixed plates 3B to 6B attached to the inner wall of the housing 2, and a rotating disk 3A and impellers 4A to 6A attached to the rotating shaft 1 rotatably supported in the housing 2 via a bearing 7.
An axial turbo-molecular pump stage 3, an additional molecular pump stage 4, a centrifugal compression pump stage 5, and a vortex compression pump stage 6 each consisting of They are constructed by sequentially installing them.
上記軸流ターボ分子ポンプ段３は、前記回転円板３Ａと
固定板３Ｂを交互に組立せて構成され、また付加分子ポ
ンプ段４は前記円板状羽根車４Ａと固考板４Ｂを交互に
組合せで構成され、また遠心圧縮ポンプ段５は前記羽根
車５Ａとディフューザ固定板５Ｂを交互に組合せて構成
され、さらに渦流圧縮ポンプ段６は前記回転板６Ａど固
定板６Ｂとを交互に組合せて構成されている。The axial turbo-molecular pump stage 3 is constructed by alternately assembling the rotating disk 3A and fixed plate 3B, and the additional molecular pump stage 4 is constructed by alternately assembling the disc-shaped impeller 4A and fixed plate 4B. The centrifugal compression pump stage 5 is constructed by alternately combining the impeller 5A and the diffuser fixed plate 5B, and the vortex compression pump stage 6 is constructed by alternately combining the rotary plate 6A and the fixed plate 6B. It is configured.
一方、回転軸１は駆動タービン８を介して駆動され、こ
の駆動タービン８はハウジング２の側壁に設けられた空
気人口９Ａと空気出口９Ｂに連結されている。On the other hand, the rotating shaft 1 is driven via a drive turbine 8, and the drive turbine 8 is connected to an air port 9A and an air outlet 9B provided on the side wall of the housing 2.
上記のような構成からなる従来例では、ポンプの摩擦損
失の大部分は、大気圧に近いＭト気ロ２Ｂ側、すなわち
渦流圧縮ポンプ段６で発生する。このポンプ段６の羽根
車６Ａは、遠心圧縮ポンプ段５の羽根車５Ａと数似形状
に形成され°Ｃいるため。In the conventional example having the above-mentioned configuration, most of the friction loss of the pump occurs on the side of the M air chamber 2B near atmospheric pressure, that is, on the vortex compression pump stage 6. This is because the impeller 6A of the pump stage 6 is formed in a similar shape to the impeller 5A of the centrifugal compression pump stage 5.
渦流圧縮ポンプ段６の圧縮比は周速に比例する。The compression ratio of the vortex compression pump stage 6 is proportional to the circumferential speed.
この周速を増大するには、前記羽根車６Ａの半径を増大
させるか、またはその回転数を増加させるかの二つの方
法がある。There are two ways to increase this circumferential speed: increasing the radius of the impeller 6A or increasing its rotational speed.
ところが後者の方法では、回転数は危険速度により制限
があるため、前者の方法すなわち半径を増大する方法を
採用しな番ブればならない。一方、摩擦損失は半径の５
乗に比例して増加するので、大径の羽根車では多量の熱
を発生する。しかるに、渦流圧縮ポンプ段６を流通する
気体は、その前段（遠心圧縮ポンプ段）までに可なり圧
縮されているため、体積は縮小されているから気体によ
る熱の伝達も小さいので、冷却が困難である。However, in the latter method, the number of rotations is limited by the critical speed, so the former method, that is, the method of increasing the radius, must be adopted. On the other hand, the friction loss is 5 of the radius.
Since it increases in proportion to the power of the power, a large diameter impeller generates a large amount of heat. However, the gas flowing through the vortex compression pump stage 6 has been compressed considerably by the stage before it (the centrifugal compression pump stage), so the volume is reduced and the heat transfer by the gas is also small, making cooling difficult. It is.
本発明は上記にかんがみ排気口圧力を大気圧付近に保ち
、かつ清浄な真′空をうろことができると共に、ポンプ
の最終段の摩擦損失を減少させて、所要動力を低減させ
ることを目的とするものである。In view of the above, the present invention has an object to maintain the exhaust port pressure near atmospheric pressure, to allow the pump to move in a clean vacuum, and to reduce the required power by reducing the friction loss in the final stage of the pump. It is something to do.
本発明は上記目的を達成するために、ノ）ウジングに設
けた吸気口から排気口に至る間のノ飄つジング内に、固
定板と回転円板または羽根車とからなるジーグバーン分
子ポンプ段、遠心圧縮ポンプ段および渦流圧縮ポンプ段
を順先に連設してなる真空ポンプにおいて、前記渦流圧
縮ポンプ段を、外周面に多数の羽根を有する羽根車と、
この羽根車を包囲する同板とにより構成すると共に、前
記羽根車と固定円板と１−より通風路を形成させたこと
を特徴とするものである。In order to achieve the above object, the present invention provides: (a) a Siegbahn molecular pump stage consisting of a fixed plate and a rotating disk or an impeller, which is provided in the housing between the intake port and the exhaust port; In a vacuum pump comprising a centrifugal compression pump stage and a vortex compression pump stage connected in sequence, the vortex compression pump stage is equipped with an impeller having a large number of blades on its outer peripheral surface;
It is characterized in that it is constituted by the same plate that surrounds the impeller, and that a ventilation path is formed by the impeller, the fixed disk, and 1-.
また、一方の発明はハウジングに設けた吸気口から排気
口に至る間のハウジング内に、固定円板またはケーシン
グと、回転円板または羽根車また１上 ｄ ← ｍ□八
へ 、１Ｎ ｉ ム ｆＪ＋ ｂ Ｊ＋−１−す−スノ
ー；乙−ぞ一ノイｒ）遠心圧縮ポンプ段および粘性ねじ
排気段を臀次に連設し、前記分子ポンプ段の固定円板お
よび回４１円板のいずれか一方にら旋状溝を設け、前記
粘性ねじ排気段のケーシングまたは固定円板および回転
円筒または回転円板のいずれか一方にねじ溝を設けたこ
とを特徴とするものである。Further, one invention has a fixed disk or a casing, a rotating disk or an impeller, and a fixed disk or a casing, and a rotating disk or an impeller, and a fixed disk or a casing, and a rotating disk or an impeller, and a fixed disk or a casing, and a rotary disk or an impeller, and a fixed disk or a casing, and a rotating disk or an impeller. b) A centrifugal compression pump stage and a viscous screw exhaust stage are connected to the buttock, and either the fixed disc of the molecular pump stage or the rotation 41 disc The present invention is characterized in that a helical groove is provided, and the thread groove is provided in either one of the casing, the fixed disk, the rotating cylinder, or the rotating disk of the viscous screw exhaust stage.
〔発明の実施例〕 以下１本発明の実施例を図面について説明する。[Embodiments of the invention] An embodiment of the present invention will be described below with reference to the drawings.
第２図は第一実施例を示すもので、］、−Ｔ線を中心と
して左右対称に設けられており、その右半部の構造は下
記のとおりである。FIG. 2 shows the first embodiment, which is provided symmetrically with respect to the -T line, and the structure of the right half is as follows.
第２図において、ｌは吸気口２Ａと排気口２Ｂを有する
ハウジング２を貫通し、軸受７を介して回転自在シこ支
持された回転１１１１ ’ｔＦ 、−乙の一端は駆動源
（図示せず）に連結されている。ｌＯ〜１２は前記吸気
ｔコ２Ａ側から排気口２Ｂ側に至る間のハウジング２内
に順次に連設されたノーグバーン分子ポンプ段、遠心圧
縮ポンプ段および渦流圧縮ポンプ段である。In FIG. 2, l extends through a housing 2 having an intake port 2A and an exhaust port 2B, and is rotatably supported via a bearing 7. One end of -B is a drive source (not shown). ) is connected to. Reference numerals 10 to 12 denote a Norgburn molecular pump stage, a centrifugal compression pump stage, and a vortex compression pump stage, which are successively installed in the housing 2 from the intake port 2A side to the exhaust port 2B side.
上記ジーグバーン分子ポンプ段１０は２回転軸１に取付
けられた回転円＠】ＯＡとハウジング２の内壁に取付け
られた固定円＋＆ １０ Ｂとを交互に配置して構成さ
れている。しかも、その固定円板１０Ｂは第３図（ａ）
、（ｂ）に示すように、回転円板（図示上ず）に対向す
る面（第３図ａの右面）にら旋状溝ＬＯＢ、が設けられ
ている。The Siegbahn molecular pump stage 10 is constructed by alternately arranging two rotating circles OA attached to the rotating shaft 1 and fixed circles OA attached to the inner wall of the housing 2. Moreover, the fixed disk 10B is shown in FIG. 3(a).
, (b), a spiral groove LOB is provided on the surface (right surface in FIG. 3a) facing the rotating disk (not shown).
また、前記遠心圧縮ポンプ段１１は、第４図（ａ）、（
ｂ）に示すように表面に放射状に配置した複数個の羽根
１４を有し、かつ回転軸１に取付けられた羽根車１１．
Ａと、第４図（ａ）に示すようにハウジング２に取付け
られ、かつ前記羽根車１１Ａの表面（羽根１４を設けな
い面）に対向する面に、複数個のリターンチャンネル１
５を設けた固定円板１１． Ｂどを交互に配置しで構成
されている。Further, the centrifugal compression pump stage 11 is configured as shown in FIG. 4(a), (
As shown in b), an impeller 11 has a plurality of blades 14 arranged radially on its surface and is attached to the rotating shaft 1.
A and a plurality of return channels 1 attached to the housing 2 as shown in FIG.
Fixed disc 11 with 5. B is arranged alternately.
さらに、渦流圧縮ポンプ段１２は、第５図（ａ）１（ｂ
）に示すように固定ｉ１＋１１１１に取イ］けられ、外
周面に多数の羽根１６を放射状に設けた羽根車１２Ａと
、ハウジング（図示せず）に取付りられ、かつ前記羽根
車１２Ａを包囲する一対の固定円板１２Ｂとを組合せ、
第５図（ａ）に示すように通風路１７を形成した構造の
ものを並置して構成されている。Further, the vortex compression pump stage 12 is arranged as shown in FIGS.
), an impeller 12A is attached to a fixed i1+1111 and has a large number of blades 16 radially provided on its outer peripheral surface, and an impeller 12A is attached to a housing (not shown) and surrounds the impeller 12A. In combination with a pair of fixed discs 12B,
As shown in FIG. 5(a), a structure in which ventilation passages 17 are formed are arranged side by side.
上記の第１実施例によれば、ジーグバーン分子ポンプ段
１０は高圧縮比となるため、低圧まで分子ポンプ作用を
行う機能を有する。一方、粘性流領域で有効な遠心圧縮
ポンプ段１１は、大気圧から数トルク（Ｔｏｒｒ）の圧
力範囲で作動されるようになっているので、前記ジーグ
バーン分子ポンプ段１０に対して有利な作動環境かえら
れる。さらに、最終段である渦流圧縮ポンプ段１２の締
切点付近の圧力係数は、遠心圧縮ポンプ段１１に比べて
５〜１０倍と高くとれるので、同一圧縮比をつるために
羽根車１２Ａの直径を小さくすることができる。したが
って、羽根車１２Ａの摩擦損失を低減させると共に、晴
のスラスト力を減少させることができる。According to the first embodiment described above, the Siegbahn molecular pump stage 10 has a high compression ratio, so it has the function of performing a molecular pumping action up to a low pressure. On the other hand, the centrifugal compression pump stage 11, which is effective in a viscous flow region, is operated in a pressure range from atmospheric pressure to several Torr, which is an advantageous operating environment for the Siegbahn molecular pump stage 10. I can be hatched. Furthermore, the pressure coefficient near the cut-off point of the final stage, the vortex compression pump stage 12, can be set 5 to 10 times higher than that of the centrifugal compression pump stage 11, so the diameter of the impeller 12A can be adjusted to maintain the same compression ratio. Can be made smaller. Therefore, the friction loss of the impeller 12A can be reduced, and the thrust force of the air can be reduced.
第６図は第２実施例を示すもので、Ｉ−Ｉ線を中心とし
て左右対称に設けられており、その右半部の構造につい
て説明する。FIG. 6 shows a second embodiment, which is provided symmetrically with respect to the II line, and the structure of the right half will be described.
第６図において、ｌは吸気口２Ａと排気口２Ｂを有する
ハウジング２内に軸受７を介して回転自在に支持さ１し
た回転軸、２０〜２２は前記吸気口２Ａ側から排気口２
Ｂ側に至る間のハウジング２内に順次に連設された分子
ポンプ段、遠心圧縮ポンプ段とおよび粘性ねじ形排気段
である。In FIG. 6, l is a rotary shaft 1 rotatably supported via a bearing 7 in a housing 2 having an intake port 2A and an exhaust port 2B;
A molecular pump stage, a centrifugal compression pump stage and a viscous screw type exhaust stage are successively arranged in the housing 2 up to the B side.
上記分子ポンプ段２０は、ハウジング２の内壁に取（ｊ
けられたリング２０ａとハウジング２の内壁に取付けら
れ、ら旋状ｍ ２０ ｅを有する固定円板２０ｃ、２０
ｄ （第７図参照）と、この両固定円板２０ｃ、２Ｏｄ
問に、こ汎らと適宜間隔を保つように回転＠１に取付け
られた回転円板２０ ｋ＋とからなり、かつ前記固定円
板２０ｃ、２０ｄと回転円板２０ ｂどを組合せてなる
ポンプ並置して構成さＪしている。The molecular pump stage 20 is mounted on the inner wall of the housing 2 (j
Fixed discs 20c, 20 are attached to the hollowed ring 20a and the inner wall of the housing 2 and have a helical shape m 20 e.
d (see Fig. 7), and both fixed disks 20c and 2Od.
In question, there is a juxtaposed pump consisting of a rotary disk 20k+ attached to the rotary @1 so as to keep an appropriate distance from the pumps, and a combination of the fixed disks 20c, 20d and the rotating disk 20b, etc. It is composed of J.
また、前ｉ！８遠心圧縮ポンプ段２１は、固定板２１、
ａおよび交互に配置された羽根車２１ｂと固定円板２
１ｃからなり、この羽根車２１ｂは第８図に示すように
、心［２ｌ ｂ、の表面（第８図（、）では右側面）な
羽根２１ｂ２を放射状に配置して構成されている。また
」二記固定円板２１ｃは第９図に示すように、各板２】
ｃ、の表面（第８図（ａ）では右側面）に羽根２１ Ｃ
ｇを放射状に配置して構成されている。Also, Mae i! The 8 centrifugal compression pump stages 21 include a fixed plate 21,
a, and the impellers 21b and fixed discs 2 arranged alternately.
As shown in FIG. 8, this impeller 21b is constructed by radially arranging blades 21b2 on the surface of the center (the right side in FIG. 8(, )). In addition, as shown in FIG. 9, the fixing disk 21c is
There is a blade 21 on the surface of c (right side in Fig. 8(a)).
g are arranged radially.
さらに、前記粘性ねじ形排気段２２は、ハウジング２の
内壁に取付けらり、かつ円筒部２２ａ。Furthermore, the viscous threaded exhaust stage 22 is attached to the inner wall of the housing 2 and has a cylindrical portion 22a.
を有するケーシング２２ａと、その円筒部２２ａ。and a cylindrical portion 22a thereof.
内に挿入され、かつ回転軸１に取イ］けられた回転円筒
２２ｂとからなり、この回転円筒２２ｂの外周面にはね
じ溝（せ旋状溝）２２ｃが設けられている。前記回転円
板２０ｂ、羽根車２１ｂおよび回転円筒２２ｂはナツト
２４を介して回転軸１に固定されている。また、前記ケ
ーシング２２ａとハウジング側壁２ｃとの間にはスペー
サ２３が設けられている。The rotary cylinder 22b is inserted into the rotary shaft 1 and taken on the rotary shaft 1, and a threaded groove (helical groove) 22c is provided on the outer peripheral surface of the rotary cylinder 22b. The rotating disk 20b, impeller 21b and rotating cylinder 22b are fixed to the rotating shaft 1 via a nut 24. Further, a spacer 23 is provided between the casing 22a and the housing side wall 2c.
この第２実施例（第６図）では、分子ポンプ段２０の固
定円板２０ｃ、２０ｄにら旋状溝２０ｅを、また粘状ね
じ形排気段２２の回転円筒２２ｂにら旋状溝２２ｃをそ
れぞれ設けたが、ひれら代り前記ら旋４に瀧２１１ｒ、
ｃ＊、２Ｏｒし４）準ゼ゛ノゴ目ν２０の回転円板２０
ｂおよび粘性ねじ形排気段２２のケーシング円筒部２２
ａ、にそれぞれ設けてもよい。In this second embodiment (FIG. 6), the fixed disks 20c and 20d of the molecular pump stage 20 are provided with helical grooves 20e, and the rotating cylinder 22b of the viscous threaded exhaust stage 22 is provided with a helical groove 22c. They were installed respectively, but instead of fins, waterfall 211r was installed on the spiral 4,
c*, 2Or 4) Rotating disk 20 of quasi-genus ν20
b and the casing cylindrical part 22 of the viscous threaded exhaust stage 22
a, respectively.
次に上記のような構成からなる第２実施例の作用につい
て説明する。Next, the operation of the second embodiment configured as described above will be explained.
ハウジング２の吸気口２Ａより流入した排気される気体
は、環状流路を形成するリング２０ａを経て、分子ポン
プ段２０の固定円板２０ｅのら旋状溝２０ｅに流入する
。この流入した気体は、回転円板２０ｂのドライブ作用
により対向側のｔａ定円板２０ｄのら旋状溝２０ ｐ、
を流通する。このような動作を以降も繰返し行った後、
分子ボ〉・ブ段２０から流出した気体は遠心圧縮ポンプ
段２１に流入する。このポンプ段２１に流入した気体は
、固定板２１ａと羽根車２］Ｌ＋の心根２１ｂ、とによ
り形成された流路を流通した後、羽根車２１ｂに設けた
長、短羽根２１ｂ、、２１ｂ：１間を流通する。このよ
うな動作を以降も緑返し行つノミ・後、遠心圧縮ポンプ
段２１から流出した気体は、粘性ねじ形排気段２２に流
入し、ねじ溝２２ｃを有する回転円筒２２ｂの粘性作用
により圧縮された後に排気口２Ｂから排出される。The gas to be exhausted that has flowed in through the intake port 2A of the housing 2 flows into the helical groove 20e of the fixed disk 20e of the molecular pump stage 20 through the ring 20a forming an annular flow path. Due to the driving action of the rotating disk 20b, this inflowing gas flows through the spiral groove 20p of the ta fixed disk 20d on the opposite side.
be distributed. After repeating this operation,
The gas flowing out from the molecular bomb stage 20 flows into the centrifugal compression pump stage 21. The gas flowing into the pump stage 21 flows through the flow path formed by the fixed plate 21a and the core root 21b of the impeller 2]L+, and then the long and short blades 21b, 21b provided on the impeller 21b: It circulates between 1 and 2. After continuing this operation, the gas flowing out from the centrifugal compression pump stage 21 flows into the viscous screw type exhaust stage 22 and is compressed by the viscous action of the rotating cylinder 22b having the thread groove 22c. After that, it is discharged from the exhaust port 2B.
上述した第２実施例によれば、最終段すなわち粘性ねじ
形排気段２２の回転円筒２２ｂの直径を著しく小さくす
ることができるので１Ｍ擦損失を大幅に低減させること
が可能であるから、ポンプ全体の動力減少をはかること
ができる。According to the second embodiment described above, the diameter of the rotating cylinder 22b of the final stage, that is, the viscous screw type exhaust stage 22, can be significantly reduced, and the 1M friction loss can be significantly reduced. The power reduction can be measured.
前記粘性ねじ形排気段２２（第６図）は、軸流形式の単
体に形成されているが、これに代り第１０図に示すよう
に、ハウジング２の内壁に取付けられた固定円板２２′
ａと、回転軸１に取（＝Ｊけられ、前記固定円板２２′
ａに対する裏面にら旋状溝２２’ｄｔｉ−設けると共に
、表面（遠心圧縮ポンプ段２１側）に長い羽根２２’ｃ
、および短い羽根２２’ｃ、を交互に、かつ放射状に改
番ブた羽根車２２’ｂ（第１１図参照）とにより構成し
てもよい。その他の構造は第６図に示す実施例と同一で
あるから説明を省略する。このように構成すれば、粘性
ねじ形Ｍト気段２２′の軸方向長さを短縮できる利点が
ある。The viscous screw type exhaust stage 22 (FIG. 6) is formed as a single piece of axial flow type, but instead, as shown in FIG.
a, and the fixed disk 22' is attached to the rotating shaft 1 (=J).
A spiral groove 22'dti- is provided on the back surface of a, and a long blade 22'c is provided on the surface (centrifugal compression pump stage 21 side).
, and short blades 22'c may be arranged alternately and radially with a numbered impeller 22'b (see FIG. 11). The rest of the structure is the same as the embodiment shown in FIG. 6, so a description thereof will be omitted. With this configuration, there is an advantage that the axial length of the viscous threaded M-air stage 22' can be shortened.
第１２図に示す第４実施例は、第６図に示す実施例とほ
ぼ同一の構造である。すなわち第４実施例では、粘性ね
じ形排気段２２のケーシング２２ａにリーク用孔２５を
設け、このリーク用孔２５に例えばふた２６ａとばね２
６ｂからなる開閉機構２６を設けた点が第一実施例と異
なり、その他の構造は同一であるから説明を省略する。The fourth embodiment shown in FIG. 12 has almost the same structure as the embodiment shown in FIG. That is, in the fourth embodiment, a leak hole 25 is provided in the casing 22a of the viscous screw type exhaust stage 22, and a lid 26a and a spring 2 are inserted into the leak hole 25, for example.
This embodiment differs from the first embodiment in that an opening/closing mechanism 26 consisting of 6b is provided, and the other structures are the same, so a description thereof will be omitted.
上記開閉機構２６のふｋ ２６ ａは、吸気口２Ａ側の
圧力が排気口２Ｂ側の圧力より低い場合、すなわち、ふ
た２６ａの内側（リース用孔２４内）の圧力が、ふた２
６ａの外側（排気口２Ｂ側）の圧力より低い場合には、
ばね２６ｂの力に抗して閉じられる。The lid 26a of the opening/closing mechanism 26 is configured such that when the pressure on the intake port 2A side is lower than the pressure on the exhaust port 2B side, that is, the pressure inside the lid 26a (inside the lease hole 24)
If the pressure is lower than the pressure outside 6a (exhaust port 2B side),
It is closed against the force of spring 26b.
逆にリース用孔２５内の圧力が排気口２Ｂ側の圧力より
高い場合には、ばね２６ｂの伸長力と相まってふた２６
ａは開かれる。Conversely, when the pressure inside the lease hole 25 is higher than the pressure on the exhaust port 2B side, the expansion force of the spring 26b causes the lid 26 to
a is opened.
一般に始動時には吸込圧が高いため、ポンプ内の圧力は
吐出側圧力よりも高くなっているので、遠心圧縮ポンプ
段で圧縮された高圧流体は、開閉機構２６の開放により
リーク用孔２５を経て排気口２Ｂより排出される。この
結果、ポンプ内の圧力低下により、粘性ねじ形排気段２
２が作動すると、開閉機構２６のふた２６ａは閉じて定
常運転状態になる。したがって、始動時には粘性ねじ形
排気段２２を流通する流体が減少し、前記開閉機構の閉
塞を防ぐことができるため、所要の真空度をうる所要時
間を短縮することが可能である。Generally, at startup, the suction pressure is high, so the pressure inside the pump is higher than the discharge side pressure, so the high-pressure fluid compressed in the centrifugal compression pump stage is exhausted through the leak hole 25 by opening the opening/closing mechanism 26. It is discharged from the port 2B. As a result, the pressure drop inside the pump causes the viscous threaded exhaust stage 2 to
2 is activated, the lid 26a of the opening/closing mechanism 26 is closed to enter a steady operating state. Therefore, at the time of startup, the fluid flowing through the viscous screw type exhaust stage 22 is reduced, and the opening/closing mechanism can be prevented from being blocked, thereby shortening the time required to obtain the required degree of vacuum.
以上説明したように本発明によれば、排気口圧力を大気
圧付近に保ち、かつ清浄な真空をうろことができると共
に、ポンプの損失、特に最終段の摩擦損失を低減させ、
所要動力を減少させることができる。As explained above, according to the present invention, the exhaust port pressure can be maintained near atmospheric pressure and a clean vacuum can be maintained, and the loss of the pump, especially the friction loss in the final stage, can be reduced.
Power requirements can be reduced.
第１図は従来の真空ポンプの断面図、第２図は本発明の
真空ポンプの第１実施例を示す断面図、第３図（ａ）、
（ｂ）は第１実施例のジーグバーン分子ポンプ段の断面
図および正面図、第４図は（ａ）。
（ｂ）は第１実施例の遠心圧縮ポンプ段の要部断面図お
よび羽根車の正面図、第５図（ａ）、 （ｂ）は第１実
施例の渦流圧縮ポンプ段の要部断面図および羽根車正面
図、第６図は本発明に係わる第２実施例を示す断面図、
第７図（ａ）、 （ｂ）は第２実施例の分子ポンプ段の
固定円板の断面図および正面図。
第８図（ａ）、（ｂ）は第２実施例の遠心圧縮ポンプ段
の回転円板の断面図および正面図、第９図（ａ）。
（ｂ）は第２実施例の固定円板の断面図および正面図、
第１０図は本発明に係わる第３実施例の断面図、第１１
図（ａ）〜（ｃ）は第３実施例の粘性ねじ形排気段の回
転円板の表面図、断面図および裏面図、第１２図は本発
明に係わる第４実施例の断面図である。
１・・・回転軸、２・・・ハウジング、２Ａ・・・吸入
口、２Ｂ・・・吐出口、１０．２０・・・分子ポンプ段
、１１゜２１・・・遠心圧縮ポンプ段、１２，２２，２
２’・・・粘性ねじ形排気段、１２Ａ、２０ｂ、２２’
ｂ・・・回転円板、１２Ｂ、２０ｃ、２２ｄ、２２’
ａ −固定円板、１６・・・羽根、１７・・・通風路、
２０ｅ。
２２ｃ、２２’ｄ・・・ら旋状溝、２２ａ・・・ケーシ
ング、２５・・・リーク用孔、２６・・・開閉機構。
η ３ （２）
χ ４ 図
第 ’ｌ 図
（θ−） （ｌＡ）
ＺＯＣ（ＺＯｄ）
！ｆＩ３ 図
（０−）（り
罵り 図
仏） （幻Fig. 1 is a sectional view of a conventional vacuum pump, Fig. 2 is a sectional view showing a first embodiment of the vacuum pump of the present invention, Fig. 3(a),
(b) is a sectional view and a front view of the Siegbahn molecular pump stage of the first embodiment, and FIG. 4 is (a). (b) is a sectional view of the main part of the centrifugal compression pump stage of the first embodiment and a front view of the impeller, and FIGS. 5(a) and (b) are sectional views of the main part of the vortex compression pump stage of the first embodiment. and a front view of the impeller; FIG. 6 is a sectional view showing a second embodiment of the present invention;
FIGS. 7(a) and 7(b) are a sectional view and a front view of the fixed disk of the molecular pump stage of the second embodiment. FIGS. 8(a) and 8(b) are a cross-sectional view and a front view of a rotating disk of a centrifugal compression pump stage of the second embodiment, and FIG. 9(a). (b) is a sectional view and a front view of the fixed disk of the second embodiment,
FIG. 10 is a sectional view of the third embodiment according to the present invention, and FIG.
Figures (a) to (c) are a front view, a cross-sectional view, and a back view of a rotating disk of a viscous screw type exhaust stage according to a third embodiment, and Fig. 12 is a cross-sectional view of a fourth embodiment according to the present invention. . DESCRIPTION OF SYMBOLS 1...Rotating shaft, 2...Housing, 2A...Suction port, 2B...Discharge port, 10.20...Molecular pump stage, 11°21...Centrifugal compression pump stage, 12, 22,2
2'...Viscous screw type exhaust stage, 12A, 20b, 22'
b...Rotating disk, 12B, 20c, 22d, 22'
a - fixed disk, 16... blade, 17... ventilation duct,
20e. 22c, 22'd... Spiral groove, 22a... Casing, 25... Leak hole, 26... Opening/closing mechanism. η 3 (2) χ 4 Figure 'l (θ-) (lA) ZOC(ZOd) ! fI3 Figure (0-) (Cursing Figure Buddha) (Illusion)
Claims (1)
られた固定円板と、そのハウジング内に回転自在に支持
された回転軸に取付けられた回転円板または羽根車とか
らなるジーグバーン分子ポンプ段、遠心圧縮ポンプ段お
よび渦流圧縮ポンプ段を、前記吸気口側から排気口側に
至る間のハウジング内に順次に連設してなる真空ポンプ
において、前記渦流圧縮ポンプ段を外周面に多数の羽根
を有する羽根車と、この羽根車を包囲する固定円板とに
より構成すると共に。 前記羽根車および固定円板により通風路を形成させたこ
とを特徴とする真空ポンプ。 ２、吸気口と排気口を有するハウジングの内壁に取付け
られた固定円板またはケーシングと、そのハウジング内
に回転自在に支持された回転軸に１回転円板または羽根
車または回転円筒の】−＋ ノー＋ ｔ＋Ｊ、、Ｉ’、
−す１７−１−ヱｉ」−ノーｆ日ル −告、ン１ロＣ勿
々□、奮？ンプ段および粘性ねじ形排気段を順次に連設
し。 前記分子ポンプ段の固定円板および回転円板のいずれか
一方にら旋状溝を設け、前記粘性ねじ形排気段のケーシ
ングまたは固定円板および回転円筒または回転円板のい
ずれか一方にら旋状溝を設けたことを特徴とする真空ポ
ンプ。 ３、上記粘性ねじ形排気段のケーシングにり−ク用孔を
設けると共に、このリーク用孔に開閉機構を取付けたこ
とを特徴とする特許請求の範囲第２項記載の真空ポンプ
。[Claims] 1. A fixed disk attached to the inner wall of a housing having an intake port and an exhaust port, and a rotating disk or impeller attached to a rotating shaft rotatably supported within the housing. In a vacuum pump comprising a Siegbahn molecular pump stage, a centrifugal compression pump stage, and a vortex compression pump stage, which are successively arranged in a housing between the intake port side and the exhaust port side, the vortex compression pump stage is It consists of an impeller having a large number of blades on its outer peripheral surface, and a fixed disk surrounding the impeller. A vacuum pump characterized in that a ventilation passage is formed by the impeller and the fixed disc. 2. A fixed disk or casing attached to the inner wall of the housing having an intake port and an exhaust port, and a rotating disk, impeller, or rotating cylinder that rotates once on a rotating shaft rotatably supported within the housing.]-+ No+t+J,,I',
-su17-1-ei''-nofdayru-announcement, n1roC matron□, is it? A pump stage and a viscous screw type exhaust stage are installed in sequence. A spiral groove is provided in one of the fixed disk and the rotating disk of the molecular pump stage, and a spiral groove is provided in either the casing or the fixed disk and the rotating cylinder or the rotating disk of the viscous threaded exhaust stage. A vacuum pump characterized by having a shaped groove. 3. The vacuum pump according to claim 2, wherein a leak hole is provided in the casing of the viscous screw type exhaust stage, and an opening/closing mechanism is attached to the leak hole.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22415783A JPS60116895A (en) | 1983-11-30 | 1983-11-30 | Vacuum pump |
| DE19843442843 DE3442843A1 (en) | 1983-11-30 | 1984-11-23 | Vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22415783A JPS60116895A (en) | 1983-11-30 | 1983-11-30 | Vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60116895A true JPS60116895A (en) | 1985-06-24 |
| JPH0477160B2 JPH0477160B2 (en) | 1992-12-07 |
Family
ID=16809422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22415783A Granted JPS60116895A (en) | 1983-11-30 | 1983-11-30 | Vacuum pump |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS60116895A (en) |
| DE (1) | DE3442843A1 (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63266188A (en) * | 1987-04-24 | 1988-11-02 | Osaka Shinku Kiki Seisakusho:Kk | Complex vacuum pump |
| JPS6447994U (en) * | 1987-09-18 | 1989-03-24 | ||
| JPH01187396A (en) * | 1988-01-22 | 1989-07-26 | Hitachi Ltd | Vacuum pump |
| JPH0223297A (en) * | 1988-07-13 | 1990-01-25 | Osaka Shinku Kiki Seisakusho:Kk | Circular groove vacuum pump |
| JPH0255897A (en) * | 1988-08-17 | 1990-02-26 | Osaka Shinku Kiki Seisakusho:Kk | Combined vacuum pump |
| JPH0275796A (en) * | 1988-09-12 | 1990-03-15 | Osaka Shinku Kiki Seisakusho:Kk | Composite vacuum pump |
| CN103423160A (en) * | 2013-09-04 | 2013-12-04 | 张周卫 | Variable pitch spiral compression machine head of spiral compression-expansion refrigerator |
| CN103644118A (en) * | 2013-12-17 | 2014-03-19 | 储继国 | Parallel circulating pump, combined circulating pump, complex circulating pump and air-bleed set |
| RU2543917C1 (en) * | 2014-03-24 | 2015-03-10 | Общество с ограниченной ответственностью "Владимирский центр механической обработки" | Two-flow turbomolecular vacuum pump with hybrid air-gas channels |
| JP2017020502A (en) * | 2015-07-01 | 2017-01-26 | プファイファー・ヴァキューム・ゲーエムベーハー | Split flow vacuum pump and vacuum system having split flow vacuum pump |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61247893A (en) * | 1985-04-26 | 1986-11-05 | Hitachi Ltd | Vacuum pump |
| DE3728154C2 (en) * | 1987-08-24 | 1996-04-18 | Balzers Pfeiffer Gmbh | Multi-stage molecular pump |
| US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
| DE4314418A1 (en) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Friction vacuum pump with differently designed pump sections |
| US5449270A (en) * | 1994-06-24 | 1995-09-12 | Varian Associates, Inc. | Tangential flow pumping channel for turbomolecular pumps |
| DE10114585A1 (en) * | 2001-03-24 | 2002-09-26 | Pfeiffer Vacuum Gmbh | vacuum pump |
| US8109744B2 (en) * | 2008-03-26 | 2012-02-07 | Ebara Corporation | Turbo vacuum pump |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5048512A (en) * | 1973-03-30 | 1975-04-30 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2405890A1 (en) * | 1974-02-07 | 1975-08-14 | Siemens Ag | SIDE CHANNEL RING COMPRESSOR |
| US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
-
1983
- 1983-11-30 JP JP22415783A patent/JPS60116895A/en active Granted
-
1984
- 1984-11-23 DE DE19843442843 patent/DE3442843A1/en not_active Withdrawn
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5048512A (en) * | 1973-03-30 | 1975-04-30 |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63266188A (en) * | 1987-04-24 | 1988-11-02 | Osaka Shinku Kiki Seisakusho:Kk | Complex vacuum pump |
| JPS6447994U (en) * | 1987-09-18 | 1989-03-24 | ||
| JPH01187396A (en) * | 1988-01-22 | 1989-07-26 | Hitachi Ltd | Vacuum pump |
| JPH0223297A (en) * | 1988-07-13 | 1990-01-25 | Osaka Shinku Kiki Seisakusho:Kk | Circular groove vacuum pump |
| JPH0255897A (en) * | 1988-08-17 | 1990-02-26 | Osaka Shinku Kiki Seisakusho:Kk | Combined vacuum pump |
| JPH0275796A (en) * | 1988-09-12 | 1990-03-15 | Osaka Shinku Kiki Seisakusho:Kk | Composite vacuum pump |
| CN103423160A (en) * | 2013-09-04 | 2013-12-04 | 张周卫 | Variable pitch spiral compression machine head of spiral compression-expansion refrigerator |
| CN103423160B (en) * | 2013-09-04 | 2015-11-25 | 张周卫 | Variable pitch spiral compression machine head of spiral compression-expansiorefrigerator refrigerator |
| CN103644118A (en) * | 2013-12-17 | 2014-03-19 | 储继国 | Parallel circulating pump, combined circulating pump, complex circulating pump and air-bleed set |
| RU2543917C1 (en) * | 2014-03-24 | 2015-03-10 | Общество с ограниченной ответственностью "Владимирский центр механической обработки" | Two-flow turbomolecular vacuum pump with hybrid air-gas channels |
| JP2017020502A (en) * | 2015-07-01 | 2017-01-26 | プファイファー・ヴァキューム・ゲーエムベーハー | Split flow vacuum pump and vacuum system having split flow vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0477160B2 (en) | 1992-12-07 |
| DE3442843A1 (en) | 1985-06-05 |
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