JPS60111143A - Humidity sensitive element - Google Patents
Humidity sensitive elementInfo
- Publication number
- JPS60111143A JPS60111143A JP58219164A JP21916483A JPS60111143A JP S60111143 A JPS60111143 A JP S60111143A JP 58219164 A JP58219164 A JP 58219164A JP 21916483 A JP21916483 A JP 21916483A JP S60111143 A JPS60111143 A JP S60111143A
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- sensing element
- whiskers
- humidity sensing
- change
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は湿度感知素子、特に詳しくはボイス力の如き繊
維状の炭化珪素または窒化珪素を感湿部として設けてな
る湿度感知素子に係わるものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a humidity sensing element, and more particularly to a humidity sensing element comprising fibrous silicon carbide or silicon nitride, such as Boyce, as a humidity sensing portion.
従来から使用されている湿度感知素子としては、毛髪や
、ナイロンリボンなどの吸湿による伸びを機械的に検出
するもの、吸湿による重量変化を例えば水晶発振子の共
振周波数変化として検出するもの、さらには吸湿による
素子の電気抵抗変化を検出するものなどがある。吸湿に
よる素子の電気抵抗値の変化を湿度感知器として用いる
ものには、例えば酸化物焼結体の吸湿によるイオン伝導
変化を利用するもの、カーボン粉末などの導電粒子を有
機樹脂中に分散して樹脂の吸湿膨潤を分散された導電粒
子の接触抵抗変化として利用するものなどがある。この
素子の電気抵抗変化を利用する湿度感知器はその出力を
増幅することが容易であり、遠隔測定が可能となるため
、多くの改良が試みられている。しかしながら、これら
はいずれも耐ガス性、耐熱性が不十分でこれらの改善さ
れた安定性のよい湿度感知素子は未だ見出されていない
。Conventionally used humidity sensing elements include those that mechanically detect the elongation of hair or nylon ribbons due to moisture absorption, those that detect weight changes due to moisture absorption as changes in the resonant frequency of a crystal oscillator, and others. There are some that detect changes in the electrical resistance of elements due to moisture absorption. Humidity sensors that use changes in the electrical resistance of an element due to moisture absorption include, for example, those that utilize changes in ionic conductivity due to moisture absorption in oxide sintered bodies, and those that use conductive particles such as carbon powder dispersed in organic resin. There are methods that utilize the hygroscopic swelling of resin as a change in contact resistance of dispersed conductive particles. Humidity sensors that utilize changes in the electrical resistance of this element can easily amplify their output, making remote measurement possible, and many improvements have been attempted. However, all of these have insufficient gas resistance and heat resistance, and a humidity sensing element with improved stability has not yet been found.
本発明の目的は、耐ガス性や耐熱性などに対して安定な
湿度感知素子を提供することにある。しかして、本発明
の湿度感知素子は、保持器にボイス力の如きＩＩＡＮ状
の炭化珪素または窒化珪素を充填させた感湿部を備えて
なるもので、雰囲気の湿度に応じて、外気と通じるよう
に保持器に充填されたポイス力間に湿気が吸着され、そ
の結果充填されているボイス力の電気的接触抵抗値が変
化するので、その抵抗値から、雰囲気湿度を測定するも
のである。An object of the present invention is to provide a humidity sensing element that is stable in terms of gas resistance, heat resistance, etc. Therefore, the humidity sensing element of the present invention includes a humidity sensing part in which a retainer is filled with IIAN-like silicon carbide or silicon nitride, such as Boyce, and communicates with the outside air depending on the humidity of the atmosphere. As such, moisture is adsorbed between the voids filled in the cage, and as a result, the electrical contact resistance value of the filled voids changes, and the atmospheric humidity is measured from this resistance value.
以下、本発明の湿度感知素子を一実施例を示す図面に基
づいて説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the humidity sensing element of the present invention will be explained based on the drawings showing one embodiment.
第１図は斜視図、第２図は第１図のｘ−ｘ ”線におけ
る縦断面図である。図において１は炭化珪素又は窒化珪
素からなるボイス力である。該ボイス力１としては例え
ば炭化珪素によって製造された平均直径０．０５〜５μ
ｍ１平均長さ１０〜１００′０μｍの線状のものが適用
される。２は、ホイスカ１中に装着される銅電極、３は
ホイスカ１の充填される保持器である容器を構成する円
筒体で材質は例えばプラスチック、ガラス、陶磁器、Ｚ
ｒ ０２ 、ＭＱ ０１Ｂ ｅ ０１Ａｉ２０ａ等の
各種セラミック、熱伝導度の小さな金属、合金類など雰
囲気温度に合わせて選択される。また、これには、外気
が導通されて、ホイスカ１と接触するための多数の通気
孔４が設けられている。なお、該円筒体３はあみ状（メ
ツシュ状）構造のものでもよい。５は円筒体３の両端に
設けられ前記銅電極２を支持する非導電性の材質からな
るプラグで前記円筒体３と共にホイスカ１を充填する保
持器を構成している。なお通気孔は金属粉末焼結体の有
するポーラス状の孔でもよい。1 is a perspective view, and FIG. 2 is a vertical cross-sectional view taken along line xx'' in FIG. 1. In the figure, 1 is a voice force made of silicon carbide or silicon nitride. Average diameter 0.05-5μ made by silicon carbide
A linear type having an average length of m1 of 10 to 100'0 μm is applied. 2 is a copper electrode installed in the whisker 1; 3 is a cylindrical body constituting a container which is a holder in which the whisker 1 is filled; the material is, for example, plastic, glass, ceramics, Z
Various ceramics such as r 02 , MQ 01B e 01Ai20a, metals with low thermal conductivity, alloys, etc. are selected according to the ambient temperature. Further, this is provided with a large number of ventilation holes 4 through which outside air is conducted and comes into contact with the whisker 1. Note that the cylindrical body 3 may have a mesh-like structure. Numeral 5 is a plug made of a non-conductive material that is provided at both ends of the cylindrical body 3 and supports the copper electrode 2, and together with the cylindrical body 3, constitutes a holder for filling the whisker 1. Note that the ventilation holes may be porous holes in the metal powder sintered body.
上記においてボイス力１の保持器内における充填密度は
少なくとも１５…ｇ／−であることが好ましい。充填密
度は高い程相対湿度に対する電気抵抗値は直線的に大き
く変化するが１５１１ＩＯ／ｃｎ！以下では相対湿度の
変化に対する電気抵抗値の変化が小さい。In the above, it is preferable that the packing density in the holder for voice force 1 is at least 15...g/-. The higher the packing density, the greater the electrical resistance value with respect to relative humidity changes linearly, but it is 1511 IO/cn! Below, the change in electrical resistance value with respect to change in relative humidity is small.
第３図は本発明の湿度感知素子の他の例の斜視図であり
、感湿面積を増すため保持器本体が偏平な板状直方体形
状のものを示す。更に第４図は保持器が一対の電極を兼
ねた例を示す。FIG. 3 is a perspective view of another example of the humidity sensing element of the present invention, showing one in which the cage main body is shaped like a flat rectangular parallelepiped to increase the humidity sensing area. Furthermore, FIG. 4 shows an example in which the holder also serves as a pair of electrodes.
本発明の湿度感知素子は以上のべたように、保持器にボ
イス力の如き繊維状の炭化珪素、または窒化珪素を充填
してなるもので、熱雰囲気下において安定性があり、ま
た、相対湿度に対して、電気的抵抗値が直線的に変化す
るので、湿度の測定に極めて好適なものである。次１に
本発明を実施例によって説明する。As described above, the humidity sensing element of the present invention has a retainer filled with fibrous silicon carbide or silicon nitride such as Boyce, and is stable in a hot atmosphere and has relative humidity. On the other hand, since the electrical resistance value changes linearly, it is extremely suitable for measuring humidity. Next, the present invention will be explained with reference to examples.
実施例
第１図及び第２図に示すような外径２０ｍｍ、内径１４
．４ｍｍのホイスカ充填部を有する、長さ５０１Ｉ１１
１で、周囲を直径１．５１１１１１１の通気孔４を２８
個穿設した非金属からなる円筒体３で囲んだ円筒状保持
器に、直径１．４ｍｍの銅電極２．２をホイスカ充填部
に貫通させ、ホイスカ充填部には炭化珪素これは充填率
１８．５６ｍ９／ｃｒ／ｌ Ａ、３３゜５６１１１ＣＩ
／ｃｙＡ Ｂ及び窒化珪素２３．９０１１１０／ｃｒＡ
Ｃを充填した３種類の本発明に係わる湿度感知素子及び
比較例として炭化珪素１１．００１１１（］／−を充填
した湿度感知素子りを作成した。これらを第４図の測定
系ブロック図に従って接続し、恒温、恒湿槽中に５０℃
で３０分間保持し電気抵抗値を測定した。結果を第５図
に示す。これがら明らかなようにホイスカ充填率１５１
１１Ｏ／ａＡ以上の本発明の湿度感知素子は、相対湿度
の変化に対し、電気抵抗値は直線的かつ敏感によく変化
することが分かる。Example: As shown in Figures 1 and 2, the outer diameter is 20 mm and the inner diameter is 14 mm.
．． Length 501I11 with 4mm whisker filling
1, the circumference of the vent hole 4 with a diameter of 1.5111111 is 28
A copper electrode 2.2 with a diameter of 1.4 mm is passed through a whisker-filled portion of a cylindrical holder surrounded by a cylindrical body 3 made of a non-metallic material, and silicon carbide is used in the whisker-filled portion, which has a filling rate of 18. .56m9/cr/l A, 33°56111CI
/cyA B and silicon nitride 23.901110/crA
Three types of humidity sensing elements according to the present invention filled with C and a humidity sensing element filled with silicon carbide 11.00111(]/- as a comparative example were created.These were connected according to the measurement system block diagram in Fig. 4. 50℃ in a constant temperature and humidity chamber.
The sample was held for 30 minutes and the electrical resistance was measured. The results are shown in Figure 5. As is clear from this, the whisker filling rate is 151.
It can be seen that the electrical resistance value of the humidity sensing element of the present invention of 11 O/aA or more changes linearly and sensitively with respect to changes in relative humidity.
第１図は本発明の湿度感知素子の一例の斜視図、第２図
は、第１図のｘ−ｘ ′線における縦断面図、第３図は
本発明の湿度感知素子の他の例の斜視図、第４図は本発
明の湿度感知素子を接続した測定系ブロック図、第５図
は、５０℃における本発明の湿度感知素子による相対湿
度と電気抵抗値との関係を示す図、第６図は保持器と電
極を兼ねた例を示す斜視図である。
１・・・ボイスカ
２・・・銅電極
３・・・円筒体
４・・・通気孔
５・・・プラグ
代理人 弁理士 足立勉
他１名
第１図
第２図
第３図
第４図
」
第５図
２１
）介
１目プ丁う詔ｖＡ乏ｔ″／６ノ
第６図FIG. 1 is a perspective view of an example of the humidity sensing element of the present invention, FIG. 2 is a longitudinal cross-sectional view taken along the line x-x' of FIG. 1, and FIG. 3 is a perspective view of another example of the humidity sensing element of the present invention. 4 is a block diagram of a measurement system in which the humidity sensing element of the present invention is connected; FIG. 5 is a diagram showing the relationship between relative humidity and electrical resistance value using the humidity sensing element of the present invention at 50°C; FIG. 6 is a perspective view showing an example that serves as both a holder and an electrode. 1...Voice probe 2...Copper electrode 3...Cylindrical body 4...Vent hole 5...Plug agent Patent attorney Tsutomu Adachi and 1 other person Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 21) Figure 6
Claims (1)
化珪素を充填し、その湿度による電気抵抗値の変化を利
用することを特徴とする湿度感知素子。 ２ 保持器の材質がプラスチック、ガラス、陶器、セラ
ミック、合金のいずれかよりなる特許請求の範囲第１Ｔ
ｎ記戦の湿度感知素子。 ３ ホイース力の充填密度が少なくとも１５ｍ ａ／α
ｄである特許請求の範囲第１項又は第２項記載の湿度感
知素子。 ４ 保持器が多数の通気孔を備えた容器である特許請求
の範囲第１項、第２項又は第３項記載の湿度感知素子。 ５ 保持器が一対の電極である特許請求の範囲第１．２
．３．４項のいずれかに記載の湿度感知素子。[Scope of Claims] 1. A humidity sensing element characterized in that a retainer is filled with fibrous silicon carbide or silicon nitride such as Boyce force, and the change in electrical resistance value due to humidity is utilized. 2 Claim 1T in which the material of the cage is made of plastic, glass, ceramic, ceramic, or alloy
Humidity sensing element of n-kisen. 3 Whisker force packing density is at least 15 m a/α
d. The humidity sensing element according to claim 1 or 2. 4. The humidity sensing element according to claim 1, 2 or 3, wherein the holder is a container provided with a large number of ventilation holes. 5 Claim 1.2 in which the retainer is a pair of electrodes
．． The humidity sensing element according to any one of Section 3.4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58219164A JPS60111143A (en) | 1983-11-21 | 1983-11-21 | Humidity sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58219164A JPS60111143A (en) | 1983-11-21 | 1983-11-21 | Humidity sensitive element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60111143A true JPS60111143A (en) | 1985-06-17 |
Family
ID=16731201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58219164A Pending JPS60111143A (en) | 1983-11-21 | 1983-11-21 | Humidity sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60111143A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030013234A (en) * | 2001-08-07 | 2003-02-14 | 삼성전자주식회사 | Microwave oven |
-
1983
- 1983-11-21 JP JP58219164A patent/JPS60111143A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030013234A (en) * | 2001-08-07 | 2003-02-14 | 삼성전자주식회사 | Microwave oven |
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