JPS5997840U

JPS5997840U - Adsorption fixing device

Info

Publication number: JPS5997840U
Application number: JP19159882U
Authority: JP
Inventors: 芳地　茂樹; 域戸　一夫
Original assignee: 松下電器産業株式会社
Priority date: 1982-12-17
Filing date: 1982-12-17
Publication date: 1984-07-03

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来の吸着固定装置の平面図、第２図　−は第
１−図におけるＡ−Ａ線の断面図、第３図は第　　　１
図の゛部分拡犬羊面図、第４図は本考案の二実流側にお
ける吸着固定装置を切断装置に応用した場合の正面図、
第５図は本考案の一実施例における吸着固定装置の平面
図、第６図は第５図の中心位　　　　−１・・・シリカ
ンウェハ、４・・・載台、１０・・・吸着面、１１・・
・♀ア溝、１２・・・貫通孔。　　　　　、第２図第、４図Fig. 1 is a plan view of a conventional suction and fixing device, Fig. 2 - is a sectional view taken along line A-A in Fig. 1, and Fig. 3 is a sectional view taken along line A-A in Fig.
Figure 4 is a partially enlarged view of the sheep, and Figure 4 is a front view of the suction fixing device of the present invention applied to a cutting device.
FIG. 5 is a plan view of a suction and fixing device according to an embodiment of the present invention, and FIG. 6 is at the center of FIG. 5.・・・
・♀A groove, 12...through hole. , Figure 2, Figure 4

Claims

【実用新案登録請求の範囲】[Scope of utility model registration request]

（１）被吸着部材を吸着載置可能な載台と、この載台の
吸着面上に形成されたエア溝ど、前記載台の略中心に設
けられた貫通孔を介して前記エアー溝と連通５して設け
られた吸気装置とからなり、前記エア溝は前記貫通孔を
略中心とした渦巻状に形成してなる吸着固定装置。(1) A mounting base capable of suctioning and mounting a member to be attracted, and an air groove formed on the suction surface of this mounting base, and an air groove connected to the air groove through a through hole provided approximately at the center of the mounting base. The suction and fixing device is composed of an air intake device provided in communication with each other, and the air groove is formed in a spiral shape approximately centered on the through hole.

（２）　　前記エア溝は渦巻の外周部に進むに従って断
゛面部の面積が除々に小さくなるように形成して−なる
実用新案登録請求の範囲第１項記載の吸着固定装置。(2) The suction and fixing device according to claim 1, wherein the air groove is formed so that the cross-sectional area of the air groove becomes gradually smaller toward the outer periphery of the spiral.

（３）前記エア溝は１本または２本以上形成してなる実
用新案登録請求の範囲第１項又は第２項些載の吸着固定
装置。(3) The suction and fixing device according to claim 1 or 2, wherein the air groove is one or more than one.