JPS5996521A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPS5996521A JPS5996521A JP20517482A JP20517482A JPS5996521A JP S5996521 A JPS5996521 A JP S5996521A JP 20517482 A JP20517482 A JP 20517482A JP 20517482 A JP20517482 A JP 20517482A JP S5996521 A JPS5996521 A JP S5996521A
- Authority
- JP
- Japan
- Prior art keywords
- head
- thin film
- spinel
- monocrystal
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、Ｍｉ／Ａ４２０４単結晶を基板として用いた
薄膜ヘッドに関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thin film head using Mi/A4204 single crystal as a substrate.
従来の長手方向磁気記録方式の場合、磁性微分末を塗布
した記録媒体が多く用いられている。これに対して垂直
磁気記録方式等ではコバルトクロノ・簿膜などの金属薄
膜を記録媒体として用いることが考えられている。コバ
ルトクロム薄膜ｖ膜」―で接触型のヘッドを用いた場合
、コバルトクロム薄膜の一部が削取られ、これによって
発生したコバルトクロムの微分末が、媒体、ヘッドの両
方を傷つける現象が見られる。In the case of conventional longitudinal magnetic recording methods, recording media coated with magnetic differential powder are often used. On the other hand, in perpendicular magnetic recording systems and the like, it has been considered to use a metal thin film such as cobalt chronograph film as a recording medium. When a contact type head is used with a "cobalt chromium thin film V film", a part of the cobalt chromium thin film is scraped off, and the resulting cobalt chromium differential powder damages both the medium and the head. .
また、従来のリング型ヘッドは、その利賀として、フェ
ライト、セラミック等が用いられており、簿膜ヘッドの
基板としても、セラミック等が使われている。セラミッ
クの様な焼結体は、微小な領域で一様でないために表面
をかなり研磨しても空孔や、硬さの一定でないＭ；分が
存在する。Further, in the conventional ring type head, a material such as ferrite or ceramic is used for the material, and a material such as ceramic is also used for the substrate of the film head. A sintered body such as a ceramic is not uniform in a minute area, so even if the surface is polished considerably, there are pores and uneven hardness.
薄膜ヘッドの場合、その基板の表面状態により薄膜の磁
気特性が大きく左右される。ヘッドとしての磁気特性を
損わないためには、基板利料の表面精度のよさが要求さ
れる。In the case of a thin film head, the magnetic properties of the thin film are greatly influenced by the surface condition of the substrate. In order not to impair the magnetic properties of the head, the surface precision of the substrate is required to be high.
本発明は、かかる点を鑑みてなされたもので、その目的
は、ヘッドの基板の表面性をよくし、記録媒体とヘッド
との間の磨耗を少なくし、またヘッドとしての磁気特性
を向」ニさせることにある。The present invention has been made in view of these points, and its purpose is to improve the surface quality of the substrate of the head, reduce wear between the recording medium and the head, and improve the magnetic properties of the head. The goal is to make people feel better.
（ＭｆＡ７２ｏ４ ）単結晶（以下スピネルと呼ぶ）は
、単結晶であるが故に研磨された表面−にでは研磨によ
る表面粗さ以上の欠陥は存在しない。したがって十分に
研磨すればかなり表面性を良くすることが可能である。Since the (MfA72o4) single crystal (hereinafter referred to as spinel) is a single crystal, there are no defects on the polished surface that are worse than the surface roughness caused by polishing. Therefore, by polishing sufficiently, it is possible to improve the surface quality considerably.
前に述べた記録媒体からのコハルトクロム微粉末の発生
を、このことにより少なくすることができる。This makes it possible to reduce the generation of cohalt chromium fine powder from the recording medium mentioned above.
摩耗により、一旦コバルトクロム微粉末が発生した場合
、それによって削られないだげの硬さがヘッドには要求
される。コバルトクロム合金の硬度は、Ｈｖ７００から
Ｈｖ１２Ｑ’０であり、スピネル（ＭＳ’Ａｔ２０４
）単結晶はＨｖ１２００である。Once cobalt chromium fine powder is generated due to wear, the head must be hard enough to avoid being scraped by it. The hardness of cobalt chromium alloy is Hv700 to Hv12Q'0, and spinel (MS'At204
) Single crystal has Hv1200.
したがってスピネル単結晶は十分な硬度をもっている。Therefore, spinel single crystal has sufficient hardness.
以上のようなことからスピネル単結晶を用いた垂直磁気
記録用薄膜ヘッドは耐久性にすぐれている。For the above reasons, thin film heads for perpendicular magnetic recording using spinel single crystals have excellent durability.
また、表面性を向上させ得ることにより、基板の表面の
粗さによる軟磁性薄膜の透磁率の減少、保磁力の増大と
いう欠点を改善することが可能になった。Furthermore, by improving the surface properties, it has become possible to improve the drawbacks of a decrease in magnetic permeability and an increase in coercive force of the soft magnetic thin film due to the roughness of the surface of the substrate.
次にスピネル単結晶を用いた磁気ヘッドの耐久性試験の
実施例を示す。Next, an example of a durability test of a magnetic head using spinel single crystal will be shown.
実験に用いたヘッドは、接触面を５ＯＲに球面如上した
スピネル単結晶を用い、記録媒体との接触圧を５ｏｏｆ
／−とし直径約１芦η、・の接触面積を保つようにした
。比較のためノぐイレソクスガラス、チタン酸バリウム
で同型のヘッドを作成して１ｍ１じ条件で実験を行なっ
た。The head used in the experiment was a spinel single crystal with a spherical contact surface of 5OR, and the contact pressure with the recording medium was 5oof.
/- to maintain a contact area of approximately 1 dia. For comparison, a head of the same type was made of porcelain glass and barium titanate, and experiments were conducted under the same conditions.
次表に実験の結果を表す。時間は記録媒体σ〕薄膜に割
れが生じた時点で終了とした。フレキシブルディスクの
耐久性は３００万、＜ス（毎分３００回転で１６７時間
）の連続使用に耐えることが必要とされるので、媒体に
割れが生じなかった場合は、その時点で終了とした。The following table shows the results of the experiment. The time was determined to end when cracks appeared in the thin film of the recording medium σ. The durability of the flexible disk is required to withstand continuous use for 3 million seconds (167 hours at 300 revolutions per minute), so if the medium did not crack, it was considered to be finished at that point.
第１表 耐久性試験
ヘッド側の傷の状態は、スピネル単結晶は浅い傷が数本
つくのに対し、他は一本あるいけ二本の深い傷がつくこ
とが多かった。Table 1: Durability Test Regarding the state of scratches on the head side, the spinel single crystal had several shallow scratches, whereas the others often had one or two deep scratches.
また、それぞれのヘッドの表面を実験前に段差甜でル、
１べた結果を第１〜５図に示す。In addition, the surface of each head was polished before the experiment.
The results of the first test are shown in Figures 1-5.
、次に、スピネル彫結晶、バイレックス、チタン酸バリ
ウムに、パーマロイ（Ｎ１−Ｆ６−’に４ｏ−Ｍ？ｌ）
９コバルト一ニオフーシルコニウム非＋％ｆｆ７．コバ
ルト−タンタル非晶質の薄膜をＲＦスパッタ法で作成し
た場合の磁気特性を次表に示す。, then permalloy (4o-M?l on N1-F6-') on spinel carved crystal, virex, barium titanate.
9 cobalt one-nio-silconium non+%ff7. The magnetic properties of a cobalt-tantalum amorphous thin film prepared by RF sputtering are shown in the following table.
以上のことにより、薄膜ヘッド基板として、Ｍｆｆｉ、
ｔ、Ｏ，単結晶を用いることは、ヘッド、記録媒体相方
の耐久性を向」ニさせ、ヘッドとしての磁気特性を優れ
たものにすることが可能になる。As a result of the above, Mffi,
The use of t,O, single crystals improves the durability of both the head and the recording medium, and makes it possible to improve the magnetic properties of the head.
第１図は、スピネル）ｌ結晶を５０ＲＫ球面加工したも
のを段差計で測定したものである。
同様に第２図はパイレックスガラス、第３図ａまチタン
酸バリウムのものである。
各図のａは、縦軸１０万倍、横軸２０倍、ｂは縦軸５０
万倍、横軸５０１〕倍である。
以 」二
第１図
第２図FIG. 1 shows a spinel (1) crystal processed into a 50RK spherical surface and measured using a level difference meter. Similarly, FIG. 2 shows a glass made of Pyrex glass, and FIG. 3 a shows a glass made of barium titanate. In each figure, a is 100,000 times the vertical axis, 20 times the horizontal axis, and b is 50 times the vertical axis.
10,000 times, and 501 times on the horizontal axis. Figure 1 Figure 2
Claims (1)
特徴とする薄膜磁気ヘッド。A thin film magnetic head characterized in that a MfA t204 single crystal is used as a substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20517482A JPS5996521A (en) | 1982-11-22 | 1982-11-22 | Thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20517482A JPS5996521A (en) | 1982-11-22 | 1982-11-22 | Thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5996521A true JPS5996521A (en) | 1984-06-04 |
Family
ID=16502644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20517482A Pending JPS5996521A (en) | 1982-11-22 | 1982-11-22 | Thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5996521A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5060098A (en) * | 1988-04-18 | 1991-10-22 | Hitachi, Ltd. | Magnetic recorder provided with a magnetic head slider having a non-magnetic oxide of spinel structure |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49126312A (en) * | 1973-04-03 | 1974-12-03 | ||
| JPS51134615A (en) * | 1975-05-16 | 1976-11-22 | Seiko Epson Corp | Integrated magnetic head |
-
1982
- 1982-11-22 JP JP20517482A patent/JPS5996521A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49126312A (en) * | 1973-04-03 | 1974-12-03 | ||
| JPS51134615A (en) * | 1975-05-16 | 1976-11-22 | Seiko Epson Corp | Integrated magnetic head |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5060098A (en) * | 1988-04-18 | 1991-10-22 | Hitachi, Ltd. | Magnetic recorder provided with a magnetic head slider having a non-magnetic oxide of spinel structure |
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