JPS5994010A - Detector - Google Patents
DetectorInfo
- Publication number
- JPS5994010A JPS5994010A JP20418582A JP20418582A JPS5994010A JP S5994010 A JPS5994010 A JP S5994010A JP 20418582 A JP20418582 A JP 20418582A JP 20418582 A JP20418582 A JP 20418582A JP S5994010 A JPS5994010 A JP S5994010A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- output
- waveform
- detector
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/247—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using time shifts of pulses
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は、磁気センサと被測定体とにより主に長さを
検出する検出器に関するもので、とくに磁気センサの改
団に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a detector that mainly detects length using a magnetic sensor and an object to be measured, and particularly relates to a modification of the magnetic sensor.
従来のこの種の検出器を第１図以下の図面を用いて説明
する。A conventional detector of this type will be explained with reference to FIG. 1 and the following drawings.
第１図は検出器の概略説明図であり、第２図は従来の検
出器における磁気検出体を説明するための要部説明図で
あろう
第１図、第２図にお（・て、１は被測定体で、幅りより
なる磁性体１ａが等間隔χで配列されている。Fig. 1 is a schematic explanatory diagram of the detector, and Fig. 2 is an explanatory diagram of the main part for explaining the magnetic detecting body in a conventional detector. Reference numeral 1 denotes an object to be measured, in which magnetic bodies 1a having different widths are arranged at equal intervals χ.
そして、この被測定体１の製作にあたっては、非磁性体
よりなる基板上に磁性体１ａを固着するか、あるいは、
第１図に図示したように、磁性体よりなる基板をプレス
加工などによりパンチングしであるいはエツチング加工
などにより貫通穴ｉｂを加工することによって残余の部
分を磁性体１ａとして形成してやって尤よい。２は磁気
センサで、磁気検出体ろと、この磁気検出体乙の上側に
位置したバイアス用永久磁石４とを有している。In manufacturing the object to be measured 1, the magnetic material 1a is fixed on a substrate made of a non-magnetic material, or
As shown in FIG. 1, the remaining portion may be formed as the magnetic material 1a by punching or etching a substrate made of a magnetic material by punching or etching. Reference numeral 2 denotes a magnetic sensor, which has a magnetic detection body B and a bias permanent magnet 4 located above the magnetic detection body B.
磁気検出体ろは第２図に拡大図示したように、ＩｎＳｂ
、 ＱａＡｓ などの化学式で表わされる物質を主成
分とする半導体の磁気抵抗効果を利用した２つの磁気抵
抗素子５ａ、５ｂを、上述した被測定体１の磁気体１ａ
の間隔χに対して１７々χずらして差動接続した第１の
磁気検出体５と、同じく２つの磁気抵抗素子６ａ、６ｂ
を１／２χずらして差動接続した第２の磁気検出体６と
からなり、第１の磁気検出体５と第２の磁気検出体６と
を互いに１／４χずらして一直線上にくし目状に、すな
わち、５ａ、６ａ、５ｂ、６１）の順に交互に位置する
ように形成されている。As shown in the enlarged view in Figure 2, the magnetic detector is InSb.
, two magnetoresistive elements 5a and 5b that utilize the magnetoresistive effect of a semiconductor whose main component is a substance represented by a chemical formula such as QaAs are attached to the magnetic body 1a of the object to be measured 1 described above.
A first magnetic detection body 5 differentially connected with a difference of 17 χ from the interval χ, and two magnetoresistive elements 6a and 6b
The first magnetic detecting body 5 and the second magnetic detecting body 6 are shifted by 1/4χ from each other and connected differentially in a comb shape. 5a, 6a, 5b, 61) are arranged alternately in this order.
７は第１及び第２の磁気検出体５．６の入力端子、８は
アース端子、９．１０はそれぞれ第１及び第２の磁気検
出体５、乙の出力端子である。そして、いま入力端子７
に直流電圧を印加して、磁気センサ２を被測定体１に対
して移動させると、出力端子９．１０から互いに１／４
χ（９０°）位相のずルたほぼ正弦波状の信号が得られ
ることになる。つぎに、磁気センサ２と被測定体１とを
相対的に移動させたときに第１の磁気検出体５より生ず
る正弦波状の信号について第３図に図示した概略図を参
照しながら説明する。7 is an input terminal of the first and second magnetic detectors 5.6, 8 is a ground terminal, and 9.10 is an output terminal of the first and second magnetic detectors 5 and B, respectively. And now input terminal 7
When a DC voltage is applied to the magnetic sensor 2 and the magnetic sensor 2 is moved relative to the measured object 1, the output terminals 9 and 10 are 1/4
A substantially sinusoidal signal with a phase shift of χ (90°) is obtained. Next, a sinusoidal signal generated by the first magnetic detection body 5 when the magnetic sensor 2 and the object to be measured 1 are moved relative to each other will be explained with reference to the schematic diagram shown in FIG. 3.
第６図（イ）の状態から同図（ニ）の状態まで、磁気セ
ンサ２と被測定体１の磁性体のうちあるひとつの磁性体
１ａが相対的に移動するものとし、磁性体１ａノ幅トハ
各磁気抵抗素子５ａ、６ａ、５１）、６ｂの幅（／−１
）とこれら磁気抵抗素子同志のすき間ｔの２倍を加えた
長さ、すなわちＩ、＝ ｌ ＋１とする。From the state shown in FIG. 6(a) to the state shown in FIG. The width of each magnetoresistive element 5a, 6a, 51), 6b (/-1
) and twice the gap t between these magnetoresistive elements, that is, I, = l +1.
また、第６図（イ）〜同図（ニ）における相対的な移動
過程によって生ずる信号の波形状態を第４図の波形図に
示す。尚、第４図中縦軸は印加電圧レベルを、横軸に移
動距離をとり、第６図の（イ）に示すように磁気抵抗素
子５ａの左端面と磁性体１ａの右端面とが一致した状態
では、２つの磁気抵抗素子５ａ、５１〕を差動接続した
ため出力端子９の出力電圧は印加電圧■の１／／２の中
点レベル（１／２ Ｖ ）に安定している。この状態か
ら第３図（ロ）に示す状態まで磁性体１ａを図の矢印方
向（右方向）に徐々に移動する過程では、磁気抵抗素子
５ａにバイアス磁石４（第１図に図示）からの磁束が多
くなり、抵抗値が増加するため、印加電圧Ｖレベルすな
わちピーク値Ｖまで電圧が増加していく。Further, the waveform state of the signal generated by the relative movement process in FIGS. 6(A) to 6(D) is shown in the waveform diagram of FIG. 4. In addition, in FIG. 4, the vertical axis represents the applied voltage level, and the horizontal axis represents the moving distance, and as shown in FIG. In this state, since the two magnetoresistive elements 5a, 51] are differentially connected, the output voltage of the output terminal 9 is stabilized at the midpoint level (1/2 V) of 1/2 of the applied voltage (2). In the process of gradually moving the magnetic body 1a in the direction of the arrow (rightward) in the figure from this state to the state shown in FIG. 3(B), the magnetoresistive element 5a is Since the magnetic flux increases and the resistance value increases, the voltage increases to the applied voltage level V, that is, the peak value V.
第３図（ロ）の状態から第６図（ハ）の状態まで磁性体
１ａが距離２ｔだけ移動する過程においては、磁気抵抗
素子５ａへの磁束は一定のため、すなわち抵抗値は変化
しないためピーク値Ｖはそのまま保持される。第３図（
ハ）の状態から第ろ図（ニ）の状態まで磁性体１ａが移
動する過程においては、磁気抵抗素子５ａへ作用する磁
石よりの磁束が低下されるため徐々に出力電圧が低下し
て行き、第６図（ニ）の状態では第６図（イ）の状態の
時と同じ位加電圧Ｖの１／２の中点レベル１／２Ｖに達
する。また、図示はしな（・が、以下同様に磁性体１ａ
を第６図（ニ）の状態からさらに矢印方向（右方向）に
移動していくと、今度は、磁気抵抗素子５ａと差動接続
さ八たアース側の磁気抵抗素子５１）ンよって、第４図
に図示したように電圧のゼロレベル側で波形が変化して
いくことになる。尚、と八までは第１の磁気検出体５に
ついてのみ説明してきたが、第１の磁気検出体５と１／
４χ（９０°）位相をずらして２つの磁気抵抗素子６ａ
、６ｂを差動接続した第２の磁気検出体６の出力端子１
０からも同様に正弦波状の出力信号が得られる。この第
２の磁気検出体６の出力信号波形を第４図中破線で図示
する。そこで、つぎに第４図に示したピーク値■での波
形の平坦部分を解消すべ（、第５図に図示したように磁
性体１ａの幅りを各磁気抵抗素子５ａ、６ａ、５１）、
６＋）の幅（ｌ−１）と等しく、すなわち■ノー１−１
として第６図及び第４図で説明したと同様に磁性体１ａ
を第１の磁気検出体５の差動接続された磁気抵抗素子５
ａ、５１）に対して第５図（イ）から（ニ）まで移動さ
せたとき、第６図の実線で示したような出力波形が得ら
れた。第６図に示した出力波形をみると、ピーク値■に
おける波形の平坦部分はなくなったが、今度は中点レベ
ルである１／２■において波形の平坦部分が現わｎでし
まった。（尚、第６図中破線で示した波形は第２の磁気
検出体乙による出力波形を示す。）このことは、第５図
（ハ）の状態から同図（ニ）の状態までの移動距離であ
るすき間ｔの２倍の距離間において、入力端子７側に接
続された磁気抵抗素子５ａとアース端子８側に接続され
た磁気抵抗素子５１〕との不感帯域すなわち安定位置に
磁性体１ａが位置しているためであることが分った。こ
のように、第２図に図示した従来の磁気検出体の配置構
造のように、第１と第２の磁気検出体５．６を同一直線
」二に交互に配着する構造では、それぞへの磁気抵抗素
子間にすき間ｔを設けてやらなければならず、どうして
も出力波形に平坦部分が生じてしまい、この平坦部分を
有した出力信号をゼロクロス点でコンパレータを通して
矩形波に波形整形してパルスを作り、これを計測信号と
して分割したとき、分割精度の悪化を起たし検出器と１
−ての粘度が低下するといった不都合を生じていた。During the process in which the magnetic body 1a moves by a distance of 2t from the state shown in FIG. 3(B) to the state shown in FIG. 6(C), the magnetic flux to the magnetoresistive element 5a is constant, that is, the resistance value does not change. The peak value V is maintained as it is. Figure 3 (
In the process in which the magnetic body 1a moves from the state of (c) to the state of (d), the output voltage gradually decreases because the magnetic flux from the magnet acting on the magnetoresistive element 5a is reduced. In the state shown in FIG. 6(d), the voltage reaches the midpoint level 1/2V of 1/2 of the applied voltage V, which is the same as in the state shown in FIG. 6(a). Also, although not shown in the figure, the magnetic material 1a is
6(d) further in the direction of the arrow (to the right), the magnetoresistive element 51) on the ground side, which is differentially connected to the magnetoresistive element 5a, becomes As shown in Figure 4, the waveform changes on the zero level side of the voltage. Incidentally, up to 8, only the first magnetic detecting body 5 has been explained, but the first magnetic detecting body 5 and 1/
Two magnetoresistive elements 6a with a 4χ (90°) phase shift
, 6b are differentially connected to the output terminal 1 of the second magnetic detection body 6.
Similarly, a sinusoidal output signal can be obtained from 0. The output signal waveform of this second magnetic detector 6 is illustrated by a broken line in FIG. Therefore, it is necessary to eliminate the flat part of the waveform at the peak value ■ shown in FIG. 4 (as shown in FIG.
6+) is equal to the width (l-1), i.e. ■No 1-1
As explained in FIGS. 6 and 4, the magnetic body 1a
The differentially connected magnetoresistive element 5 of the first magnetic detection body 5
When moving from (a) to (d) in FIG. 5 with respect to a, 51), an output waveform as shown by the solid line in FIG. 6 was obtained. Looking at the output waveform shown in FIG. 6, the flat part of the waveform at the peak value ■ has disappeared, but now a flat part of the waveform has appeared at the midpoint level 1/2 ■, which is n. (The waveform indicated by the broken line in Figure 6 shows the output waveform from the second magnetic detector B.) This means that the movement from the state in Figure 5 (C) to the state in Figure 5 (D) The magnetic body 1a is placed in a dead zone, that is, at a stable position, between the magnetoresistive element 5a connected to the input terminal 7 side and the magnetoresistive element 51 connected to the ground terminal 8 side, between a distance twice the gap t, which is the distance. It was found that this was due to the location of In this way, in a structure in which the first and second magnetic detectors 5 and 6 are arranged alternately in the same straight line, as in the conventional arrangement structure of magnetic detectors shown in FIG. It is necessary to provide a gap t between the magnetoresistive elements, which inevitably causes a flat part in the output waveform, so the output signal with this flat part is passed through a comparator at the zero cross point and shaped into a rectangular wave. When creating a pulse and dividing it as a measurement signal, the division accuracy deteriorates and the detector and 1
- The problem was that the viscosity of the liquid decreased.
この発明は係る上記の欠点に鑑みなされたもので、出力
波形上の平坦部分を引きおこす要因である磁気抵抗素子
間のすき間ｔに着目して実験を重ね、このすき間ｔを無
（すことによって、波形上の平坦部分の全く生じない出
力信号が得ら九る精度の向上した検出器の補供をその目
的としたものである。This invention was made in view of the above-mentioned drawbacks, and after repeated experiments focused on the gap t between the magnetoresistive elements, which is a factor that causes flat parts on the output waveform, by eliminating this gap t, The purpose of this is to provide a detector with improved accuracy by which an output signal without any flat portions on the waveform can be obtained.
上記の目的を達成するための、この発明の要旨とすると
ころは、前掲の特許請求の範囲に掲記した通りである。The gist of the present invention to achieve the above object is as stated in the claims above.
つぎに、この発明の好適な実施例につい・で、第７図以
下の図面を参照して詳細に説明する。尚、以下に説明す
る磁気検出体の配置構造以外は第１図に示した構造と同
一である、
第７図はこの発明の磁気検出体の配置構造を示した説明
図で、符号１１はＩｎｃｈ、ＧａＡ、ｓ などの物質
を主成分とする半導体の磁気抵抗効果を利用した２つの
磁気抵抗素子ｔ１ａ、１１１）を被測定体１の磁性体１
ａの間隔χに対して１／／２χずらして差動接続した第
１の磁気検出体であり、符号１２は同じく半′導体の磁
気抵抗効果を利用した２つの磁気抵抗素子１２ａ、１２
ｂを磁性体１ａの間隔χに対して１／２χずらして差動
接続した第２の磁気検出体である。Next, a preferred embodiment of the present invention will be described in detail with reference to FIG. 7 and the following drawings. Note that the structure other than the arrangement structure of the magnetic detection body explained below is the same as that shown in FIG. 1. FIG. Two magnetoresistive elements t1a, 111) that utilize the magnetoresistive effect of semiconductors whose main components are materials such as , GaA, and S are connected to the magnetic body 1 of the object to be measured 1.
The first magnetic detection body is differentially connected by being shifted by 1/2χ with respect to the interval χ of a, and the reference numeral 12 denotes two magnetoresistive elements 12a, 12 which also utilize the magnetoresistive effect of semiconductors.
This is a second magnetic detection body which is differentially connected with b shifted by 1/2χ with respect to the interval χ between the magnetic bodies 1a.
これら第１及び第２の磁気検出体１１及び１２は、同一
平面上で、互いに１／４χ位相をずらして、しかも互い
に交わることがないように適宜なギャップＧを隔てて平
行線上に平行配置さｒている。そして、各磁気抵抗素子
１１ａ、１１１）、１２ａ、 １２＋） ノ幅ｌは等し
く、−シかも第２図に図示した従来例のように一直線上
にくし目状に配列したとき、各磁気抵抗素子間にはすき
間（第２図中符号ｔで示された部分）が生じることがな
いように形成されてぃる。１６及び１４は第１の磁気検
出体１１の入力端子及び出力端子、１５及び１６は第２
の磁気検出体１２の入力端子及び出力端子、１７はアー
ス端子である。尚、第１及び第２の磁気検出体１１及び
１２にそれぞれ入力端子１３．１４を設けたのは、異な
る入力波形、たとえば交流のようにＳＩＮ波形とＣＯ８
波形をそれぞれに入力できるようにしたものであり、直
流電圧を印加する場合には、第２図の従来例のように共
通入力端子としてやっても勿論よい。These first and second magnetic detection bodies 11 and 12 are arranged in parallel on parallel lines on the same plane, with a 1/4χ phase shifted from each other, and separated by an appropriate gap G so that they do not intersect with each other. I'm here. The width l of each magnetoresistive element 11a, 111), 12a, 12+) is the same, and when the width l of each magnetoresistive element 11a, 111), 12a, 12+) is the same, and the width l of the magnetoresistive element 11a, 111), 12a, and They are formed so that no gap (the part indicated by the symbol t in FIG. 2) is created between them. 16 and 14 are the input terminal and output terminal of the first magnetic detection body 11, and 15 and 16 are the second
The input terminal and output terminal of the magnetic detection body 12, 17 is a ground terminal. The reason why the input terminals 13 and 14 are provided for the first and second magnetic detectors 11 and 12 is that the input terminals 13 and 14 are provided for different input waveforms, for example, a SIN waveform and a CO8 waveform such as an alternating current.
It is designed so that waveforms can be input to each terminal, and when applying a DC voltage, it is of course possible to use a common input terminal as in the conventional example shown in FIG.
このような構成において、入力端子１３及び１５に直流
電圧を印加し、磁気センサ２を被゛測定体１に対して移
動さぜたときの、第１の磁気検出体１１の出力端子１４
に得られる出力信号波形について、第８図及び第９図を
参照して説明する。尚、磁性体１ａの幅［Ｊは各磁気抵
抗素子１１ａ、１１１］、１２ａ 、１２１）の幅ｅと
同一であるものとして説明する。In such a configuration, when a DC voltage is applied to the input terminals 13 and 15 and the magnetic sensor 2 is moved relative to the object to be measured 1, the output terminal 14 of the first magnetic detection body 11
The output signal waveform obtained will be explained with reference to FIGS. 8 and 9. The description will be made assuming that the width of the magnetic body 1a [J is the same as the width e of each magnetoresistive element 11a, 111], 12a, 121).
第８図（イ）に示すように磁気抵抗素子１１ａの左端面
と磁性体１ａの右端面とが一致した状態では、２つの磁
気抵抗素子１１ａ、１１１〕を差動接続したため出力端
子１４の出力電圧は印加電圧Ｖの１／／２の中点レベル
＜ １／２ Ｖ ）で安定している。この状態から第８
図（ロ）に示す状態まで磁性体１ａを図の矢印方向（右
方向）に徐々に移動する過程では、磁気抵抗素子１１ａ
にバイアス磁石４からの磁束が多くなり、磁気抵抗素子
１１ａの抵抗値が増加するため、印加電圧Ｖレベルすな
わちピーク値■まで電圧が増加して行く。第８図（ロ）
の状態から第８図（）・）の状態まで磁性体１ａが移動
する過程においては、磁気抵抗素子１１ａへ作用する磁
束が徐々に低下するため、出力電圧も徐々に低下し、第
８図（・・）の状態では第８図（イ）の出力電圧と同様
中点レベルの電圧１／２Ｖとなる。第８図（・・）の状
態から第８図（ニ）の状態 まで移動する過程において
は、今度は磁気抵抗素子１１ａと差動接続さ九たアース
側の磁気抵抗素子１１１〕と磁性体１ａとの関係になる
ため、出力端子１４よりの出力電圧はアース、すなわち
ゼロレベル側に振られることになるため、出力波形は、
１／／２ｖレベルからゼロレベルに向って徐々に低下し
ていき、第８図（ニ）の時点では、ゼロレベル点に達す
る。第８図（ニ）の状態から、さらに磁性体１ａを移動
して第８図（ホ）、すなわち第８図（イ）の状態まで移
動する過程では、アース側の磁気抵抗素子１１１）の磁
束が低下するため、出力波形は１／２Ｖレベルに向って
徐々に増加していき、第８図（ホ）（第８図（イ））の
時点では１／２Ｖレベル点に達して、出力波形の１周期
すなわち磁性体１ａの間隔χの１サイクルが終り、第８
図（ホ）の状態からさらに磁性体１ａを移動すると第９
図に示した出力波形が周期的に出力されることになる。As shown in FIG. 8(A), when the left end surface of the magnetoresistive element 11a and the right end surface of the magnetic body 1a match, the output terminal 14 outputs the two magnetoresistive elements 11a and 111] because they are differentially connected. The voltage is stable at the midpoint level of 1/2 of the applied voltage V (<1/2 V). From this state, the 8th
In the process of gradually moving the magnetic body 1a in the direction of the arrow (rightward) in the figure until it reaches the state shown in figure (b), the magnetoresistive element 11a
Since the magnetic flux from the bias magnet 4 increases and the resistance value of the magnetoresistive element 11a increases, the voltage increases to the applied voltage V level, that is, the peak value ■. Figure 8 (b)
In the process of the magnetic body 1a moving from the state shown in FIG. 8() to the state shown in FIG. ...), the voltage becomes 1/2V at the midpoint level, similar to the output voltage in FIG. 8(a). In the process of moving from the state shown in Fig. 8 (...) to the state shown in Fig. 8 (D), this time, the magnetoresistive element 111 on the earth side, which is differentially connected to the magnetoresistive element 11a, and the magnetic body 1a. Because of this relationship, the output voltage from the output terminal 14 will be swung toward the ground, that is, the zero level side, so the output waveform will be:
The voltage gradually decreases from the 1//2v level toward the zero level, and reaches the zero level point at the time of FIG. 8(d). In the process of further moving the magnetic body 1a from the state shown in Fig. 8 (d) to the state shown in Fig. 8 (e), that is, Fig. 8 (a), the magnetic flux of the magnetoresistive element 111) on the ground side As the voltage decreases, the output waveform gradually increases toward the 1/2V level, and at the time of Figure 8 (E) (Figure 8 (A)), it reaches the 1/2V level point, and the output waveform One period of , that is, one cycle of the interval χ of the magnetic body 1a is completed, and the eighth
When the magnetic body 1a is further moved from the state shown in Figure (E), the ninth
The output waveform shown in the figure will be output periodically.
尚、この第１の磁気検出体１１と１／４χ（９０°）位
相をずらして配置された第２の磁気検出体１２の差動接
続された２つの磁気抵抗素子１２ａ、１２ｂと磁性体１
ａとの移動によって出力端子１６より得ら汎る出力波形
については第９図中破線で図示さ扛るように第１の磁気
検出体１１の出力端子１４より得らする出力波形と９０
°位相がずれた同一波形となることは容易に理解できよ
う。このように、この発明よりなる第７図図示の磁気検
出体配置構造をとることにより、その出力端子からの出
力波形は、従来の出力波形と比べ、ピーク値Ｖレベル、
ゼロレベルあるいは１／２Ｖレベル点を含む全ての時点
において平坦部分を生ずることがない連続した一様な出
力波形が得られ、後段の分割精度の向上が得られること
になろう
また、上記実施例では、磁気検出体（１１，１２）は出
力端子の左右にひとつづつの磁気抵抗素子を直列接続し
て、一方に入力端子を、他方にアース端子を設けた差動
接続の場合について説明してきたが、磁気抵抗素子間の
配列ピッチの製作誤差、磁気抵抗素子における抵抗変化
特性のバラツキ、あるいは磁性体間隔のバラツキなど実
際の製作工程上で生ずる種々のバラツキを平均化して安
定した出力波形を得るため、および磁気抵抗素子による
消費電流の低減化な計るために、出力端子を中心にして
入力端子側とアース端子側に複数の等しい数の磁気抵抗
素子な差動接続した場合の磁気検出体について以下の図
面を参照しながら説明する。Note that the two differentially connected magnetoresistive elements 12a and 12b of the second magnetic detector 12, which is arranged with a phase shift of 1/4χ (90°) from the first magnetic detector 11, and the magnetic body 1
The output waveform obtained from the output terminal 16 due to the movement with a is shown by the broken line in FIG.
It is easy to understand that the waveforms are the same with a phase shift. As described above, by adopting the magnetic detector arrangement structure shown in FIG. 7 according to the present invention, the output waveform from the output terminal has a peak value V level,
A continuous and uniform output waveform without flat portions can be obtained at all points including the zero level or 1/2V level point, and the division accuracy in the subsequent stage can be improved. So far, we have explained the case where the magnetic detector (11, 12) is a differential connection in which one magnetic resistance element is connected in series on each side of the output terminal, and one has an input terminal and the other has a ground terminal. However, it is possible to obtain a stable output waveform by averaging various variations that occur during the actual manufacturing process, such as manufacturing errors in the arrangement pitch between magnetoresistive elements, variations in the resistance change characteristics of the magnetoresistive elements, and variations in the spacing between magnetic bodies. In order to reduce current consumption due to magnetoresistive elements, we will introduce a magnetic detector in the case where an equal number of magnetoresistive elements are differentially connected to the input terminal side and the ground terminal side with the output terminal at the center. This will be explained with reference to the drawings below.
第１０図はこの発明に係る検出器の磁気−検出体の他の
実施例を示した説明図である。FIG. 10 is an explanatory diagram showing another embodiment of the magnetic detection body of the detector according to the present invention.
この実施例においては、先に第７図乃至第９図にお（°
て説明した第１実施例の第１及び第２の磁気検出体の場
合に比べ、出力端子を中心にして入力端子側とアース端
子側にそｔぞれ２つ・づつの磁気抵抗素子を接続し、１
つの磁気検出体とし′でヲマ２ｎ （ｎ ＝ １．２．
４．６、・・・）における１１−２、すなわち合芭１４
つの磁気抵抗素子をイ史用して、差動接続した場合の例
が示され・て（・る、第１０図において、符号２０は第
１の磁気検出体で、４つの磁気抵抗素子２０ａ 、 ２
０ｂ 、 ２０ｃ、２０ｄを有している。これら４つの
磁気抵抗素子２０ａ・・・２０ｄは出力端子２ろを中心
にして、入力端子２２４ｆＡ＋１に２つの磁気抵抗素子
２０ａ、２０Ｃカ１前述の被氾１１定体１の磁性体１ａ
の間隔χと等し噂間隔入で重々１１接続されており、ま
たアース端子２４側に２つの磁気抵抗素子２０１〕、２
０ｄが間隔χで直列接続されて℃・る。In this embodiment, firstly refer to FIGS. 7 to 9 (°
Compared to the first and second magnetic detectors of the first embodiment described above, two magnetic resistance elements are connected to the input terminal side and the ground terminal side with the output terminal as the center. 1
Assuming two magnetic detectors, there are 2n (n = 1.2.
11-2 in 4.6,...), that is, combination 14
An example is shown in which two magnetoresistive elements are used and differentially connected. 2
0b, 20c, and 20d. These four magnetoresistive elements 20a...20d are centered around the output terminal 2, and two magnetoresistive elements 20a and 20C are connected to the input terminal 224fA+1.
11 are connected at intervals equal to the interval χ, and two magnetoresistive elements 201] and 2 are connected on the ground terminal 24 side.
0d are connected in series with an interval χ.
そして、これら４つの磁気抵抗素子間家、幅ｌ＝１／４
χで、全体として２０ａ、２０ｂ、２０Ｃ５２０ｄの１
１＠にそれぞれ１／２λ間隔で一直線上に配列され゛て
（・る。Then, between these four magnetoresistive elements, width l=1/4
χ, overall 1 of 20a, 20b, 20C520d
They are arranged in a straight line at intervals of 1/2λ at 1@.
符号２１は第２の磁気検出体で、第１の磁気検出体２０
と同様４つの磁気抵抗素子２１ａ、２１ｂ、２１Ｃ１２
１ｄを有している。こｒも４つのイａ気抵抗素子２１ａ
、・・・２１ｄは出力端子２６を１１＋ ４１”にし゛
て、入力端子２５側に２つの磁気抵抗素子２１ａ、２１
Ｃ力１間隔χで直列接続されており、アース端子２４４
１１１に２つの磁気抵抗２１１）、２１ｄが間隔χで重
々１１接続されている。これら４つの磁気抵抗素子＆−
１Ｉｆｆ、 ｌ ＝ １／４χで、全体として２１ａ
、 ２１ｂ、２１Ｃ１２１（１の１順に、それぞれ１／
２λ間隔で一直線上に自己グ１ｊさｎ′で（・る。Reference numeral 21 denotes a second magnetic detection body, which is similar to the first magnetic detection body 20.
Similarly, four magnetoresistive elements 21a, 21b, 21C12
1d. There are also four electric resistance elements 21a.
,...21d has the output terminal 26 set to 11+41'' and two magnetic resistance elements 21a, 21 on the input terminal 25 side.
C force is connected in series with 1 interval χ, and the ground terminal 244
Two magnetic resistors 211) and 21d are connected to 111 with an interval χ. These four magnetoresistive elements &-
1Iff, l = 1/4χ, overall 21a
, 21b, 21C121 (1/1 each in order of 1)
Self-grained on a straight line at intervals of 2λ with n' (·ru).
そして、第１及び第２の磁気検出体２０及び２１（ま同
一平面上で、互いに１／４λ（１）Ｑ相をすらし゛てじ
かも互いに交わることがな（・、Ｌうに適宜なギャップ
Ｇを隔てて平行線りに平行配置され・て（・る、このよ
うな構成におい゛て、入力す；動子２２及び２５にｉｆ
流雷電圧印加し、磁気センサ２を被泪１１定体１に対し
て移動させたときの、第１の磁気検出体２０の出力端子
２６に得られる出力信号波形につ（・“て、第１１図お
よび第１２図を参照し゛て貢見明する。尚、磁性体１ａ
の幅りは各磁気抵抗素子２０ａ、・・−２ｎｄ、２１ａ
、・・・２１ｄの幅ｌと１司−であるものとし′で説明
する。The first and second magnetic detecting bodies 20 and 21 (are on the same plane, have a 1/4λ(1)Q phase with each other, and do not even intersect with each other). In such a configuration, if input to movers 22 and 25,
Regarding the output signal waveform obtained at the output terminal 26 of the first magnetic detection body 20 when a lightning voltage is applied and the magnetic sensor 2 is moved relative to the fixed body 1 of the first magnetic detection body 20, The details will be explained with reference to Figures 11 and 12.The magnetic material 1a
The width of each magnetoresistive element 20a,...-2nd, 21a
, . . 21d, and the width 1 and the width 1 are assumed to be 1 and 21d, respectively.
第１１図（イ）に示すように磁気抵抗素子２０ａの左端
面とひとつの磁性体１ａの右端面とが一致した状態では
磁気抵抗素子２０Ｃは磁気抵抗素子２０ａと間隔χで配
置されているため、他の磁性体１ａの右端面とこの磁気
抵抗素子２０Ｃの左端面とが一致する。As shown in FIG. 11(a), when the left end surface of the magnetoresistive element 20a and the right end surface of one magnetic body 1a are aligned, the magnetoresistive element 20C is arranged with a distance χ from the magnetoresistive element 20a. , the right end surface of the other magnetic body 1a and the left end surface of this magnetoresistive element 20C coincide.
この状態では第１の磁気検出体２０は出力端子２６を中
心にして差動接続されているため、入力端子２２側とア
ース端子２４側の抵抗値が等しくなり、出力端子２３は
入力端子２２の印加電圧Ｖの１／２の中点レベルの電圧
、すなわち１／２Ｖが出力される。この状態から第１１
図（ロ）に示す状態まで磁性体１ａを図の矢印方向（右
Ｊｊ向）に徐々に移動する過程では磁気抵抗素子２０ａ
と２０ｃにバイアス磁石４からの磁束が多くなり、磁気
抵抗素子２０ａと２０Ｃの抵抗値が増加するため、印加
電圧ｖレベルすなわちピーク値■まで電圧が増加して行
く。第１１図（ロ）の状態から第１１図（ハ）の状態ま
で磁性体１ａが移動する過程においては、２つの磁気抵
抗素子２０ａと２０ｃへ作用する磁束が徐々に低下する
ため出力電圧が徐々に低下し、第１１図（ハ）の状態で
は第１１図（イ）の出力電圧と同様中点レベルの電圧１
／２’Ｖとなる。第１１図（ハ）の状態から第１１図（
ニ）の状態まで移動する過程においては、今度は磁気抵
抗素子２０ａ、２０ｃと差動接続さｔたアース側の磁気
抵抗素子２０ｂ、２０ｄと磁性体１ａとの関係になるた
め、出力端子２３よりの出力電圧はアース、すなわち七
ロレベル側に振られることになり、出力電圧は１／２ｖ
レベルからゼロレベルに向って徐々ｃ低下していき、第
１１図（ニ）の時点ではゼロレベルに達する。第１１図
（ニ）の状態からさらに磁性体１ａを移動して第１１図
（ホ）、すなわち第１１図（イ）の状態まで移動する過
程では、アース側の磁気抵抗素子２０１）、２０ｄの磁
束が低下するため、出力電圧は１／２Ｖレベルに向って
徐々に増加して行き、第１１図（ホ）（第１１図（イ）
）の時点では１／２ Ｖレベル点に戻り、出力波形の１
周期、すなわち磁性体１ａの間隔χの１サイクルが終り
、第１１図（ホ）の状態からさらに磁性体１ａ（被測定
体１）を移動すると第１２図に示した出力波形が周期的
に出力されることになる。In this state, the first magnetic detector 20 is differentially connected around the output terminal 26, so the resistance values on the input terminal 22 side and the ground terminal 24 side are equal, and the output terminal 23 is the same as the input terminal 22. A voltage at a midpoint level of 1/2 of the applied voltage V, that is, 1/2V is output. From this state, the 11th
In the process of gradually moving the magnetic body 1a in the direction of the arrow in the figure (right Jj direction) until the state shown in figure (b), the magnetoresistive element 20a
20c, the magnetic flux from the bias magnet 4 increases, and the resistance values of the magnetoresistive elements 20a and 20C increase, so that the voltage increases to the applied voltage level v, that is, the peak value ■. In the process of the magnetic body 1a moving from the state shown in FIG. 11(b) to the state shown in FIG. 11(c), the magnetic flux acting on the two magnetoresistive elements 20a and 20c gradually decreases, so the output voltage gradually decreases. In the state shown in Fig. 11 (c), the voltage 1 is at the midpoint level, similar to the output voltage in Fig. 11 (a).
/2'V. From the state shown in Fig. 11(C) to Fig. 11(C)
In the process of moving to the state d), the relationship between the magnetic body 1a and the ground-side magnetoresistive elements 20b and 20d, which are differentially connected to the magnetoresistive elements 20a and 20c, is such that the output terminal 23 The output voltage will be swung to the ground, that is, the 7th level, and the output voltage will be 1/2v.
C gradually decreases from the level to the zero level, and reaches the zero level at the time of FIG. 11(d). In the process of further moving the magnetic body 1a from the state shown in FIG. 11(d) to the state shown in FIG. 11(e), that is, FIG. As the magnetic flux decreases, the output voltage gradually increases toward the 1/2V level, as shown in Figure 11 (E) (Figure 11 (A)).
), it returns to the 1/2 V level point and the output waveform becomes 1
When one cycle of the period, that is, the interval χ of the magnetic body 1a, is completed and the magnetic body 1a (measured object 1) is further moved from the state shown in FIG. 11 (e), the output waveform shown in FIG. 12 is periodically output. will be done.
また、この第１の磁気検出体２０と１／４χ（９０°）
位相をずらして差動接続された４つの磁気抵抗素子２１
ａ、・・・２１（１を有する第２の磁気検出体２１の出
力端子２６より得られる出力波形については第１２図中
破線で図示されるように、第１の磁気検出体２０の出力
端子２ろより得られる出力波形と９０°位相がずれた同
一波形となることはこれまでの説明から容易に理解でき
よう。Also, this first magnetic detection body 20 and 1/4χ (90°)
Four magnetoresistive elements 21 differentially connected with a phase shift
a,...21 (1) As shown by the broken line in FIG. 12, the output waveform obtained from the output terminal 26 of the second magnetic detector 21 having It can be easily understood from the previous explanation that the output waveform obtained from the second filter is the same waveform with a phase shift of 90 degrees.
・このように、第１０図乃至第１２図で説明した第２実
施例のように出力端子を中心に入力端子側及びアース端
子側に複数の同数よりなる磁気抵抗素子を配列して全体
として差動接続した磁気検出体を互いに１／４χずらし
て平行配置した構成をとることによって、平坦部分のな
い連続した一様な出力波形が得られ、後段の分割精度の
向上が得られることになる。・In this way, as in the second embodiment explained in FIGS. 10 to 12, a plurality of magnetoresistive elements of the same number are arranged on the input terminal side and the ground terminal side with the output terminal as the center, and the overall difference is achieved. By adopting a configuration in which the dynamically connected magnetic detection bodies are arranged in parallel and shifted by 1/4χ from each other, a continuous and uniform output waveform without flat portions can be obtained, and the division accuracy in the subsequent stage can be improved.
尚、これまでの説明においては、磁性体１ａの幅りを磁
気抵抗素子の幅ｅと等しい場合について説明してきたが
、磁性体の幅りは、間隔χから磁気抵抗素子の幅ｌを差
し引いたＬ−（χ−ｌ）であっても、第９図及び第１２
図に示した連続した一様な出力波形を周期的に得ること
ができる。また、第１の磁気検出体の入力端子に交流の
Ｓｉｎ波、第２の検出体の入力端子に交流のＣＯ８波を
入力し、磁気センサと被測定体とを相対的に移動させ第
１、第２の磁気検出体の出力端子より出力を得る場合、
従来例の素子パターンでは、第１、第２の磁気検出体が
同一平面上でかつ、同−右線一ヒに並んで、近接してい
る為、第１、第２の磁気検出体に入力したＳｉｎ波、Ｃ
ｏｓ波が、互いに影響し合い、出力端子より得られる出
力波形がひずんでしまうという現象が起き、分割精度を
低下させてしまうという不都合もあったが、この発明よ
りなる素子パターンでは、第１、第２の磁気検出体は互
いに交わることなく平行配置されているので入力するＳ
ｉｎ波、Ｃｏｓ波相方での影響が少なくなり、出力波形
のひずみを押えることができ、精度を向上することもで
きる。In addition, in the explanation so far, we have explained the case where the width of the magnetic body 1a is equal to the width e of the magnetoresistive element, but the width of the magnetic body is calculated by subtracting the width l of the magnetoresistive element from the interval χ. Even if L-(χ-l), Figures 9 and 12
The continuous and uniform output waveform shown in the figure can be obtained periodically. In addition, an AC sine wave is input to the input terminal of the first magnetic detection body, and an AC CO8 wave is input to the input terminal of the second magnetic detection body, and the magnetic sensor and the measured body are relatively moved. When obtaining output from the output terminal of the second magnetic detector,
In the conventional element pattern, the first and second magnetic detectors are on the same plane, lined up along the same line, and are close to each other, so that the input to the first and second magnetic detectors is sine wave, C
There was a problem that the OS waves influenced each other and the output waveform obtained from the output terminal was distorted, resulting in a decrease in division accuracy. However, in the element pattern according to the present invention, the first, Since the second magnetic detection bodies are arranged in parallel without intersecting each other, input S
The influence of the in wave and cos wave on the other hand is reduced, distortion of the output waveform can be suppressed, and accuracy can also be improved.
第１図は検出器の概略説明図、第２図は従来の検出器に
おける磁気検出体の配列構造説明図、第６図は第２図に
示した磁気検出体と被測定体とを相対的に移動した状態
を示した説明図、第４図は第ろ図に示した各状態におけ
る出力端子よりの出力波形図、第５図は第２図に示した
従来の磁気検出体の配列構造において被測定体の磁性体
の幅りを変化した場合における磁気検出体と被測定体と
を相対的に移動した状態を示した説明図、第６図は第５
図に示ｔ〜だ各状態における出力端子よりの出力波形図
、第７図はこの発明よりなる検出器の磁気検出体の配列
構造説明図、第８図は第７図に示した磁気検出体と被側
定体とを相対的に移動した状態を示す説明図、第９図は
第８図に示した各状態における出力端子よりの出力波形
図、第１０図はこの発明よりなる検出器の他の磁気検出
体の配列構造説明図、第１１図は１０図に示した磁気検
出体と被測定体とを相対的に移動した状態を示す説明図
、第１２図は第１１図に示した各状態における出力端子
よりの出力波形図である。
１・被測定体、１ａ・磁性体、Ｌ・・磁性体の幅、χ・
・磁性体の間隔、２ 磁気センサ、３・・磁気検出体、
４ ・バイアス用永久磁石、５．１１．２ｏ・第１の磁
気検出体、６．１２．２１ ・第２の磁気検出体、５ａ
、５ｂ、６ａ、６１）、１１ａ、 １１ｂ、１２ａ、
１２ｂ、２０ａ、２０ｂ、２０Ｃ１２０ｄ 、 ２
１ａ 、 ２１ｂ、２ＩＣ１２１ｄ ・＝磁気抵抗素子
、７．１３．１５．２２．２５ 人力端子、８．１７
．２４・アース端子、９．１０．１４．１６．２３．２
６・・・出力端子。
手 続 補 正 書 （自 発−）特許庁長官
若杉 和夫 殿
〕事件の表示
昭和５７年特許願第 ２０４１８５ 号２、発明の名
称
検 出 器
３、補正をする者
電話０５５５−３−１２３１
自 発
６、補正の対象
（１） 願 書
（２） 明 細 書
７補正の内容
（１） 別紙の通シ
（２） 明細書の浄書（内容に変更なし）手 続
補 正 書
昭和 年 月 日
特許庁長官若杉和夫殿
］事件の表示
昭和５７年特許願第 ２０４１８５ 号２、発明の名
称
検 出 器
３、補正をする者
電話０５５５−３−１２３ ：Ｌ
６、補正の対象
明細書の「発明の詳細な説明」の欄
７、補正の内容
（１）明細書２頁１９行目「磁気体１ａの」とあるを「
磁性体１ａの」と訂正する。
（２）明細書４頁５行目「印加電圧しべ」とあ石を「出
力電圧レベ」と訂正する。
（３）明細書１４頁５行目「磁気抵抗２１ｂ１２１（ｌ
が」とあるを「磁頷抵抗素子２１ｂ１２１ｄが」と訂正
する。Fig. 1 is a schematic explanatory diagram of the detector, Fig. 2 is an explanatory diagram of the arrangement structure of magnetic detecting bodies in a conventional detector, and Fig. 6 is a relative diagram of the magnetic detecting body shown in Fig. 2 and the object to be measured. 4 is an explanatory diagram showing the state in which the magnetic detector has moved to the position shown in FIG. 4. FIG. 4 is an output waveform diagram from the output terminal in each state shown in FIG. An explanatory diagram showing the relative movement of the magnetic detection body and the measured object when the width of the magnetic material of the measured object is changed, and FIG.
The output waveforms from the output terminals in the various states shown in the figure, FIG. 7 is an explanatory diagram of the arrangement structure of the magnetic detector of the detector according to the present invention, and FIG. 8 is the magnetic detector shown in FIG. 7. FIG. 9 is an explanatory diagram showing a state in which the fixed body and the target body are moved relative to each other. FIG. 9 is a diagram of the output waveform from the output terminal in each state shown in FIG. 8. FIG. An explanatory diagram of the arrangement structure of other magnetic detecting bodies, Fig. 11 is an explanatory diagram showing a state in which the magnetic detecting body shown in Fig. 10 and the measured object are relatively moved, and Fig. 12 is the same as shown in Fig. FIG. 4 is an output waveform diagram from an output terminal in each state. 1. Object to be measured, 1a. Magnetic material, L.. Width of magnetic material, χ.
- Spacing between magnetic bodies, 2. Magnetic sensor, 3. Magnetic detection body,
4 ・Permanent magnet for bias, 5.11.2o ・First magnetic detection body, 6.12.21 ・Second magnetic detection body, 5a
, 5b, 6a, 61), 11a, 11b, 12a,
12b, 20a, 20b, 20C120d, 2
1a, 21b, 2IC121d ・= Magnetoresistive element, 7.13.15.22.25 Human power terminal, 8.17
．． 24・Ground terminal, 9.10.14.16.23.2
6...Output terminal. Procedural amendment written by Mr. Kazuo Wakasugi, Commissioner of the Japan Patent Office] Indication of the case Patent Application No. 204185 of 1982 2, Invention title detector 3, Person making the amendment Telephone: 0555-3-1231 Voluntary submission 6. Subjects to be amended (1) Application (2) Description Contents of amendment to the description 7 (1) Announcement of appendix (2) Procedures for engraving the description (no change in content)
[Amendment] Mr. Kazuo Wakasugi, Commissioner of the Japan Patent Office] Display of the case Patent Application No. 204185 of 1982 2, Name of invention detector 3, Person making the amendment Telephone: 0555-3-123: L 6, Amendment Column 7 of "Detailed Description of the Invention" of the subject specification, content of amendment (1) On page 2, line 19 of the specification, the phrase "of the magnetic body 1a" has been changed to "
"of the magnetic material 1a" is corrected. (2) On page 4, line 5 of the specification, "applied voltage level" is corrected to "output voltage level." (3) Specification page 14 line 5 “Magnetic resistance 21b121(l
The phrase "is" is corrected to "the magnetic nodal resistance element 21b121d is."
Claims (1)
定体に対向配置で少なくとも２ｎ（但し、１１−１．２
．３．４．５、・・・）の磁気抵抗素子を１／２χ間隔
で差動接続した第１及び第２の磁気検出体と、この第１
及び第２の磁気検出体の上に近接配置されたバイアス用
永久磁石とを有した磁気センサとを備え、前記第１の磁
気検出体と第２の磁気検出体とは同一平面」二で互いに
１／４χ位相をずらして、しかも互いに交わることなく
平行配置してなる検出器。At least 2n (however, 11-1.2
．． 3.4.5,...) magnetoresistive elements are differentially connected at 1/2χ intervals, and this first
and a bias permanent magnet disposed close to a second magnetic detector, the first magnetic detector and the second magnetic detector being on the same plane and mutually arranged. Detectors are arranged in parallel with a 1/4χ phase shift and do not intersect with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20418582A JPS5994010A (en) | 1982-11-20 | 1982-11-20 | Detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20418582A JPS5994010A (en) | 1982-11-20 | 1982-11-20 | Detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5994010A true JPS5994010A (en) | 1984-05-30 |
Family
ID=16486238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20418582A Pending JPS5994010A (en) | 1982-11-20 | 1982-11-20 | Detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5994010A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01212313A (en) * | 1988-02-19 | 1989-08-25 | Sankyo Seiki Mfg Co Ltd | Magnetism detecting device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52121356A (en) * | 1976-04-05 | 1977-10-12 | Ibm | Converter for displacement detection |
| JPS53120547A (en) * | 1977-03-30 | 1978-10-21 | Denki Onkyo Co Ltd | Mechanicallelectrical transducer applying magnetic resistance element |
-
1982
- 1982-11-20 JP JP20418582A patent/JPS5994010A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52121356A (en) * | 1976-04-05 | 1977-10-12 | Ibm | Converter for displacement detection |
| JPS53120547A (en) * | 1977-03-30 | 1978-10-21 | Denki Onkyo Co Ltd | Mechanicallelectrical transducer applying magnetic resistance element |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01212313A (en) * | 1988-02-19 | 1989-08-25 | Sankyo Seiki Mfg Co Ltd | Magnetism detecting device |
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