JPS5981604A - Optical element rotation position adjusting device of photospectroscope or the like - Google Patents
Optical element rotation position adjusting device of photospectroscope or the likeInfo
- Publication number
- JPS5981604A JPS5981604A JP19158382A JP19158382A JPS5981604A JP S5981604 A JPS5981604 A JP S5981604A JP 19158382 A JP19158382 A JP 19158382A JP 19158382 A JP19158382 A JP 19158382A JP S5981604 A JPS5981604 A JP S5981604A
- Authority
- JP
- Japan
- Prior art keywords
- axis
- around
- optical element
- axes
- rotated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
- G02B7/004—Manual alignment, e.g. micromanipulators
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は光学素子の３直交軸周わシの位置調整を器壁の
外から行うだめの装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device for adjusting the position of an optical element around three orthogonal axes from outside the instrument wall.
一般に光学素子は直交３軸周シの位置調整が可能なこと
が要求される。例えば第１図に示すような回折格子にお
いて、２軸周シの回転は波長送り方向の回転であり、Ｘ
軸周りの回転は格子線をＸｙ平面に対して垂直にするだ
めの調整回転でｙ軸周シの回転は格子面の仰拝を修正す
るだめの回転で、ｘｙｚ３軸周シに回転可能なことが必
要である。通常回折格子のＸ、ｙ両軸周りの回転は分光
器外筐を開いて行うことができるが、高真空中での分光
測定が必要な場合には−々外筐を開くことは許されない
から、外筐の外から３軸周シの回転を操作できることが
必要となる。しかし従来このような場合に適した光学素
子の３直交軸周りの回転装置はなかった。Generally, optical elements are required to be adjustable in position around three orthogonal axes. For example, in a diffraction grating as shown in Fig. 1, rotation around two axes is rotation in the wavelength feeding direction, and
Rotation around the axis is an adjustment rotation to make the grid lines perpendicular to the XY plane, and rotation around the y axis is a rotation to correct the orientation of the grid plane, and it is possible to rotate around the three axes of x, y, and z. is necessary. Normally, rotation of the diffraction grating around both the X and Y axes can be performed by opening the spectrometer outer casing, but if spectroscopic measurements are required in a high vacuum, opening the outer casing is not allowed. , it is necessary to be able to operate the rotation around three axes from outside the outer casing. However, there has been no apparatus for rotating an optical element around three orthogonal axes that is suitable for such a case.
本発明は高真空を要求される外筐の外から光学素子の３
直交軸周わシの回転操作を行うに適した装置を得ること
を目的としてなされたものである。In the present invention, three optical elements can be removed from the outside of the outer casing, which requires high vacuum.
The purpose of this invention is to obtain a device suitable for rotating a carousel around an orthogonal axis.
本発明は３軸周シの回転を全て一軸周りの回転に変換し
て操作部材と連結した３軸周９調整装置を提供する。以
下実施例によって本発明を説明する。The present invention provides a three-axis circumferential adjustment device that converts all three-axis circumferential rotations into rotations around one axis and is connected to an operating member. The present invention will be explained below with reference to Examples.
第１図は本発明の実施例の概念を示す斜視図である。Ｇ
は光学素子で例えば回折格子である。ｌは装置本体Ｂに
Ｘ軸周りに回転可能に支承された中間枠で光学素子Ｇは
枠１にＸ軸周りに回動自在に支承されている。ｇｌは光
学素子Ｇと一体的な傘歯車で装置本体ＢにＸ軸周りに回
動可能な傘歯車ｇ２と噛合いｇ２と傘歯車ｇ３とは共軸
連動でｇ３は傘歯車ｇ４と噛合いｇ４は傘歯車ｇ５と噛
合っている。歯車ｇ５の軸ｚ１を回わすと光学素子Ｇを
Ｘ軸周りに回転させることができる。枠］。FIG. 1 is a perspective view showing the concept of an embodiment of the present invention. G
is an optical element, for example a diffraction grating. Reference numeral 1 denotes an intermediate frame that is rotatably supported on the apparatus main body B around the X-axis, and the optical element G is supported on the frame 1 so as to be rotatable around the X-axis. gl is a bevel gear integrated with the optical element G, and meshes with a bevel gear g2 that can rotate around the X axis in the device body B. g2 and g3 are coaxially interlocked, and g3 meshes with a bevel gear g4. meshes with bevel gear g5. By rotating the axis z1 of the gear g5, the optical element G can be rotated around the X axis. frame].
には一体的にｙ軸を中心とする傘歯車ｇ６があり、ｙ軸
を中心として装置本体に軸支されＸ軸周りにれだ傘歯車
ｇ８と噛合っている。この歯車ｇ８の軸ｚ２を回わすこ
とにより、枠１をＸ軸周りに回動させることができる。There is integrally a bevel gear g6 centered on the y-axis, which is pivotally supported by the main body of the device about the y-axis and meshes with a bevel gear g8 around the x-axis. By rotating the axis z2 of this gear g8, the frame 1 can be rotated around the X axis.
装置本体Ｂは分光器外筐（不図示）に２軸を軸として回
転可能に支承されている。この構成によって光学素子Ｇ
は２軸方向の軸Ｚｌ、Ｚ２．Ｚ３にＪ：ってｘ、ｙ、
ｚ３３軸りに回動させることができる。The device main body B is rotatably supported by a spectrometer outer casing (not shown) about two axes. With this configuration, the optical element G
are two axes Zl, Z2. Z3 to J: x, y,
It can be rotated around the z33 axis.
光学素子ＧをＸ軸周りに回動させるには軸ｚ２、Ｚ３を
クランプして軸Ｚｌだけを回わせばよい。To rotate the optical element G around the X-axis, it is sufficient to clamp the axes z2 and Z3 and rotate only the axis Zl.
光学素子ＧをＸ軸周りに回動させるには軸Ｚｌ。To rotate the optical element G around the X axis, use the axis Zl.
ｚ３をクランプしてｚ２を回わす。光学素子Ｇを２軸周
シに回動させるにはＺｌ、Ｚ２．Ｚ３の３軸を一体的に
回転させる。Clamp z3 and turn z2. To rotate the optical element G around two axes, Zl, Z2. Rotate the three axes of Z3 integrally.
傘歯車ｇ”ｔ ｇ ”ｒ ６８間のバックラッシュ
を消すには傘歯車ｇ′７を第２図でＸ軸方向に摺動可能
にして同歯車の背後から右向きにばねで押圧しておけば
よい。傘歯車ｇ１・ ｇ２＋ ｇ３＋ ｇ’・６５
間のバックラッシュは光学素子ＧをＸ軸周シに一方向に
ばねで付勢しておくことによって除くことができる。To eliminate the backlash between the bevel gears g"t g"r68, make the bevel gear g'7 slidable in the X-axis direction as shown in Figure 2 and press it to the right from behind with a spring. good. Bevel gear g1・g2+ g3+ g'・65
The backlash between the two can be eliminated by biasing the optical element G in one direction around the X-axis with a spring.
第２図ではｚ３軸はＺｌ、２２両軸とは三重軸として同
方向に出ているが、ｚ３軸を反対方向に出すことも可能
である。In FIG. 2, the z3 axis and both the Zl and 22 axes are triple axes, extending in the same direction, but it is also possible to have the z3 axis extending in the opposite direction.
２１〜ｚ３軸を分光器外筐から外側へ貫通させて駆動す
ることも可能であるが、高真空が要求される場合には回
転部分の気密保持が困難であるから、第３図に示すよう
に軸Ｚ１．． ｚ２．Ｚ３は外筐壁Ｗを貫通させず各
軸にクランクＣ（図では一軸についてだけ画いである）
を固着し、外筐壁Ｗを貫通する操作棒ＲとクランクＣと
を連結し、連結棒Ｒと外筐壁Ｗとの間はベローＢＬによ
って気密を保つようにする。It is also possible to drive the 21 to z3 axes by penetrating them outward from the spectrometer outer casing, but if a high vacuum is required, it is difficult to maintain the rotating parts airtight, so axis Z1. ．． z2. Z3 has a crank C on each axis without penetrating the outer casing wall W (the figure shows only one axis)
The operating rod R passing through the outer casing wall W is connected to the crank C, and the connection rod R and the outer casing wall W are kept airtight by bellows BL.
第４図は上述実施例の斜視図で、２は分光器外筐に固定
して立てられた固定枠で装置本体Ｂはこの固定枠に２軸
周シに回転可能に保持されている。FIG. 4 is a perspective view of the above-mentioned embodiment, in which reference numeral 2 denotes a fixed frame fixedly erected on the spectroscope outer casing, and the device main body B is held by this fixed frame so as to be rotatable around two axes.
３は回折格子保持枠で第２図におけるＧに相当する。そ
の他相２図の各部に相当する部分には第２図と同じ符列
がつけである。3 is a diffraction grating holding frame, which corresponds to G in FIG. Other parts corresponding to the parts of the Phase 2 diagram are given the same reference numbers as in Figure 2.
本発明装置は上述したような構成で、光学素子の直交３
軸周りの回動が共心的な３軸の回動に変換されているの
で、操作部材を分光器外筐壁を貫通させて外に出すこと
が可能となり、真空中に駆動用モータ等を組入れること
なく、また外筐内の真空を破らずに光学素子の位置調整
、波長送９等が可能となる。直交３軸をそのま＼延長し
て外筐外に引出すようにすると例えば２軸周りの波長走
査のだめの回転によってＸ軸Ｉ ｙ軸が２軸周りに回転
して向きを変えるため、ｙ軸、Ｘ軸周りの回転操作部材
は外筐壁にｘｙ平面に治った方向の長孔を穿って外筐外
に引出さねばならず、外筐内の気密保持はきわめて困難
となるのである。まだ真空内にモータ等を置くとモータ
の巻線等が吸蔵しているガスが放出されて高真空を得る
ことは困難であるから、モータ等を用いず外筐外から操
作できることの効果は大きい。The device of the present invention has the above-mentioned configuration, and the orthogonal three optical elements are
Since the rotation around the axis is converted to rotation on three concentric axes, it is possible to pass the operating member through the spectrometer outer casing wall and expose it to the outside, allowing the drive motor etc. to be placed in a vacuum. Position adjustment of the optical element, wavelength transmission 9, etc. can be performed without assembling the optical element and without breaking the vacuum inside the outer casing. If the three orthogonal axes are extended as they are and brought out of the outer casing, for example, the rotation of the wavelength scanning mechanism around the two axes will cause the X-axis, I, and y-axis to rotate around the two axes and change direction. The rotating operation member around the X-axis must be drawn out of the outer casing by drilling a long hole in the outer casing wall in the direction of the xy plane, making it extremely difficult to maintain airtightness within the outer casing. If a motor etc. is still placed in a vacuum, the gas stored in the motor windings etc. will be released and it will be difficult to obtain a high vacuum, so being able to operate it from outside the outer casing without using a motor etc. is very effective. .
第１図は回折格子の直交３軸周シの回転を示す斜視図、
第２図は本発明の一実施例装置の概念を示す斜視図、第
３図は回転軸操作機構の一例の斜視図、第４図は第１図
に示す実施例の具体的な斜視図である。
Ｇ・・・光学素子、１・・・中間枠、Ｂ・・・装置本体
、Ｚｌ、Ｚ２．Ｚ３・・・回動操作軸、Ｃ・・・クラン
ク、Ｒ・・・操作棒、Ｗ・・・分光器外筐壁。
代理人 弁理士 縣 浩 介
脚２図FIG. 1 is a perspective view showing the rotation of the diffraction grating around three orthogonal axes;
FIG. 2 is a perspective view showing the concept of an embodiment of the device of the present invention, FIG. 3 is a perspective view of an example of the rotating shaft operating mechanism, and FIG. 4 is a specific perspective view of the embodiment shown in FIG. be. G...Optical element, 1...Intermediate frame, B...Device main body, Zl, Z2. Z3...Rotating operation shaft, C...Crank, R...Operation rod, W...Spectroscope outer casing wall. Agent: Hiroshi Agata, patent attorney, figure 2
Claims (1)
Ｘ軸周りに回転可能に支承し、上記光学記装置本体を分
光器等の外筐に２軸周シに回転可能に支承させ、ｚ軸方
向に共軸的に延びる上記各２軸周りに回転可能な傘歯車
の軸と上記装置本体のＺ方向軸とを分光器等の外筐外の
操作部材と連結した分光器等における光学素子回転位置
調整装置。An optical element is rotatably supported around the X-axis by an intermediate frame that is rotatable around the y-axis on the main body of the device, and the main body of the optical recording device is supported so as to be rotatable around the 2-axis around an outer casing of a spectrometer, etc. and a shaft of a bevel gear rotatable around each of the two axes extending coaxially in the Z-axis direction and the Z-direction axis of the device main body are connected to an operating member outside the outer casing of the spectrometer, etc. Optical element rotation position adjustment device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19158382A JPS5981604A (en) | 1982-10-30 | 1982-10-30 | Optical element rotation position adjusting device of photospectroscope or the like |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19158382A JPS5981604A (en) | 1982-10-30 | 1982-10-30 | Optical element rotation position adjusting device of photospectroscope or the like |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5981604A true JPS5981604A (en) | 1984-05-11 |
| JPS6310407B2 JPS6310407B2 (en) | 1988-03-07 |
Family
ID=16277059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19158382A Granted JPS5981604A (en) | 1982-10-30 | 1982-10-30 | Optical element rotation position adjusting device of photospectroscope or the like |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5981604A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0636452B2 (en) * | 1986-05-08 | 1994-05-11 | ヒユーズ・エアクラフト・カンパニー | Method and apparatus for aligning diffraction grating for laser output tuning |
| JP2014026013A (en) * | 2012-07-25 | 2014-02-06 | Hitachi High-Technologies Corp | Diffraction grating holder, diffraction grating evaluation device, and measuring device |
| JP2020507119A (en) * | 2017-01-29 | 2020-03-05 | ニューポート コーポレーション | Diffraction grating gimbal mount |
-
1982
- 1982-10-30 JP JP19158382A patent/JPS5981604A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0636452B2 (en) * | 1986-05-08 | 1994-05-11 | ヒユーズ・エアクラフト・カンパニー | Method and apparatus for aligning diffraction grating for laser output tuning |
| JP2014026013A (en) * | 2012-07-25 | 2014-02-06 | Hitachi High-Technologies Corp | Diffraction grating holder, diffraction grating evaluation device, and measuring device |
| JP2020507119A (en) * | 2017-01-29 | 2020-03-05 | ニューポート コーポレーション | Diffraction grating gimbal mount |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6310407B2 (en) | 1988-03-07 |
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