JPS5973641A - Anti-tilting and vibration insulating device - Google Patents
Anti-tilting and vibration insulating deviceInfo
- Publication number
- JPS5973641A JPS5973641A JP18373682A JP18373682A JPS5973641A JP S5973641 A JPS5973641 A JP S5973641A JP 18373682 A JP18373682 A JP 18373682A JP 18373682 A JP18373682 A JP 18373682A JP S5973641 A JPS5973641 A JP S5973641A
- Authority
- JP
- Japan
- Prior art keywords
- rigid member
- base
- tilt
- support
- supporting platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
- F16F15/067—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only wound springs
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Vibration Prevention Devices (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は少くとも一つの方向には傾斜を防止するよう
にした傾斜防止防振装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an anti-tilt vibration isolator that prevents tilting in at least one direction.
従来防振ばねに支持される支持台に作用する荷重の位置
変動等による支持台の傾斜を防止するようにした防振装
置は皆無であった。例えば複数個の空気ばねで支持台を
支持していて支持台が傾斜すると水平になるようにそれ
ぞれの空気ばねへ圧縮空気を出入させるようにした自動
レベリング機構が設けてあっても支持台が一度傾斜した
後復元するまでに時間を要するものであった。しかしな
がら、例えば三次元距離測定機等のように傾斜を全く伴
わないようにして下方から伝達されてくる上下振動と水
平振動を防止する必要がある場合適当な防振装置がなく
て測定等を行うため不便であった。Conventionally, there has been no vibration isolating device that prevents the support stand supported by a vibration isolating spring from tilting due to changes in the position of the load acting on the support stand. For example, even if a support stand is supported by multiple air springs and an automatic leveling mechanism is installed that allows compressed air to flow in and out of each air spring so that when the support stand is tilted, it becomes horizontal, the support stand is It took time to restore the structure after it was tilted. However, when it is necessary to prevent vertical vibrations and horizontal vibrations transmitted from below without any inclination, such as with a three-dimensional distance measuring machine, measurements are carried out without an appropriate vibration isolator. This was inconvenient.
この発明はとのような点を解消して荷重の位置変動等の
種々の原因によって少くとも一つ方向には傾斜しないよ
うにした傾斜防止防振装置を提供するものである。The present invention solves the above problems and provides an anti-tilt vibration isolator which prevents tilting in at least one direction due to various causes such as changes in the position of the load.
以下図面を参照し々がらこの発明の一実施例について説
明する。An embodiment of the present invention will be described below with reference to the drawings.
図に示すこの発明の一実施例において、１ｏは基台、１
１はこの基台の上方に配置した支持台である。この支持
台としては支持される物品自体の台等を用いることがで
きる。１２は基台ｌｏ上に配置して支持台１１を支持し
て防振ばねを構成する空気ばねで、図示してない制御装
置により配管１３から圧縮空気を出入させて支持台１１
の高さをほぼ一定に保持するようになっている。一般に
防振ばねとして空気ばねは何個用いてあってもよく、か
つ空気ばね以外のコイルばね等地のばねでもよい。支持
台１１上には図示してない各種計測機、精密機械、定盤
等の被支持体が支持されることになる。In one embodiment of the invention shown in the figure, 1o is a base;
Reference numeral 1 denotes a support stand placed above this base. As this support stand, the stand of the article itself to be supported can be used. Reference numeral 12 denotes an air spring that is arranged on the base lo to support the support stand 11 and constitute a vibration isolation spring, and compressed air is caused to enter and exit from the pipe 13 by a control device (not shown) to support the support stand 11.
The height is kept almost constant. Generally, any number of air springs may be used as the vibration isolation spring, and any spring other than air springs, such as a coil spring, may be used. On the support stand 11, supported objects such as various measuring instruments, precision instruments, surface plates, etc. (not shown) are supported.
１５は基台１０と支持台１１間に配置した２個の傾斜防
止装置で、それぞれ次に述べるように構成しである。す
なわち、１６は剛性を有する筒体よりなる剛性部材で、
中心の軸線１７が水平になっておシ、かつ基台１０上に
設けた２個の支持片ｇ
板ばね−は剛性部材１６の水平方向の移動を規制すると
ともに軸線１７回わりの回動と上下方向の移動を許容す
るようにした水平移動規制手段を構成するものである。Reference numeral 15 denotes two anti-tilt devices disposed between the base 10 and the support 11, each of which is constructed as described below. That is, 16 is a rigid member made of a rigid cylindrical body,
The center axis 17 is horizontal, and the two support pieces g provided on the base 10 restrict horizontal movement of the rigid member 16 and also prevent rotation about the axis 17. This constitutes a horizontal movement regulating means that allows movement in the vertical direction.
２１は剛性部材１６の両端にそれぞれ一体として固着し
て両側に延びてそれぞれ腕２２を形成した端面部、２３
は各腕２２の端部に設けた取付部である。２５は連結体
で、大径で剛性の大きい棒状の主体部２６の両端部にそ
れぞれ螺合させて取付けた小径部２７を有しており、こ
の小径部は伸縮はできないがあらゆる横方向に弾性的湾
曲ができるようになっている。この連結体２５は剛性部
材１６について軸線１７に対して両側に２個ずつ合計４
個設けてあってほぼ上下方向に延びている。軸線１７に
対して一方側に配置した２個の連結体２５は上端の小径
部２７をそれぞれ別の取付部２３に螺合させ固着しであ
るとともに下端の小径部２７を基台１０に設けた取付部
３０に螺合させ固着してあり、かつ軸線１７に対して反
対側に配置した２個の連結体２５は下端の小径部２７を
それぞれ別の取付部２３に螺合させ固着しであるととも
に上端の小径部２７を支持台１１に設けた取付部３０に
螺合させ固着しである。２組の傾斜防止装置１５の剛性
部材１６の軸線１７は直角に配置するようにしであるが
、平行でない限り直角以外の種々の角度にしてもよい。Reference numeral 21 indicates end face portions 23 which are integrally fixed to both ends of the rigid member 16 and extend to both sides to form arms 22, respectively.
is a mounting portion provided at the end of each arm 22. Reference numeral 25 denotes a connecting body, which has small diameter portions 27 screwed onto both ends of a rod-shaped main body portion 26 having a large diameter and high rigidity.This small diameter portion cannot be expanded or contracted, but is elastic in all lateral directions. It is now possible to curve the target. This connecting body 25 has a total of 4 connecting bodies 25, 2 on each side with respect to the axis 17 of the rigid member 16.
They are provided individually and extend substantially in the vertical direction. The two connecting bodies 25 disposed on one side with respect to the axis 17 have small diameter portions 27 at their upper ends screwed to separate mounting portions 23 and are fixed, and small diameter portions 27 at their lower ends are provided on the base 10. The two connecting bodies 25 are screwed and fixed to the mounting part 30 and arranged on opposite sides with respect to the axis 17, and the small diameter part 27 at the lower end is screwed and fixed to the separate mounting part 23. At the same time, the small diameter portion 27 at the upper end is screwed into a mounting portion 30 provided on the support base 11 and fixed thereto. Although the axes 17 of the rigid members 16 of the two sets of anti-tilt devices 15 are arranged at right angles, they may be arranged at various angles other than right angles as long as they are not parallel.
前述したように構成したものにおいて、支持台１１に支
持された被支持体で発生する振動は空気ばね１２により
防振されて基台１ｏに伝達するのを防止されかつ基台１
ｏに作用する振動も同様に支持台１１へ伝達するのを防
止するようになっている。支持台１１が下降する場合に
は第７図に示すように支持台１１に取付けた連結体２５
が下降するため剛性部材１６がわずかに回動し板ばね１
８は湾曲しかつ各連結体２５の小径部２７が湾曲するこ
とにより連結体２５が傾斜する。この場合剛性部材１６
にねじれを生じないため両側の回動角度が等しくて各剛
性部材１６の軸線１７と直交する方向の軸線回わりには
支持台１１が傾斜しなくて水平を維持するようになって
いる。支持台１１が上昇する場合にも同様にして支持台
１１が傾斜しない。したがって、支持台１１は水平を維
持し々から上下方向に昇降できることになる。支持合１
１が水平に移動する場合には剛性部材１６が板げね１８
により基台１０に固定しであるため第８図に示すように
単に一端を支持台１１に固着した連結体２５のみが傾斜
するようにその小径部２７が湾曲することに々る。この
ような連結体２５が用いであるのはこの連結体２５の弾
性と剛性部材１６の質量とその分布に基づく固有振動数
を十分高くして被支持体で発生したり基台１０から伝達
してくる振動に共振しないようにするためである。又、
このようにしても板ばね１８を用いない場合には剛性部
材１６が水平方向に振動し易いものであり、板ばね１８
を用いることにより水平方向の変位が規制されて振動を
生じなくなるものである。In the configuration as described above, vibrations generated in the supported body supported by the support base 11 are damped by the air springs 12 and prevented from being transmitted to the base 1o.
Similarly, vibrations acting on the support base 11 are also prevented from being transmitted to the support base 11. When the support stand 11 is lowered, the connecting body 25 attached to the support stand 11 as shown in FIG.
is lowered, the rigid member 16 rotates slightly, and the leaf spring 1
8 is curved, and the small diameter portion 27 of each connector 25 is curved, so that the connector 25 is inclined. In this case, the rigid member 16
In order to avoid twisting, the rotation angles on both sides are the same, and the support base 11 does not tilt around the axis perpendicular to the axis 17 of each rigid member 16, but remains horizontal. Similarly, even when the support base 11 rises, the support base 11 does not tilt. Therefore, the support stand 11 can be raised and lowered in the vertical direction while maintaining the horizontal position. Support 1
1 moves horizontally, the rigid member 16
Since it is fixed to the base 10, as shown in FIG. 8, the small diameter portion 27 of the connecting body 25 is often curved so that only the connecting body 25 whose one end is fixed to the support base 11 is inclined. The reason why such a connecting body 25 is used is to make the natural frequency based on the elasticity of the connecting body 25, the mass of the rigid member 16, and its distribution sufficiently high so that it is not generated in the supported body or transmitted from the base 10. This is to prevent resonance from the coming vibrations. or,
Even with this arrangement, if the leaf spring 18 is not used, the rigid member 16 is likely to vibrate in the horizontal direction, and the leaf spring 18
By using this, displacement in the horizontal direction is regulated and vibrations do not occur.
この発明において、例えば被支持体が研磨盤等のように
一方向にのみ荷重移動を生じて傾斜を発生するような場
合にはこの方向と直角の方向の軸線回わりにのみ傾斜を
防止するようにした単に１組の傾斜防止装置１５を用い
るように構成してあってもよい。剛性部材１６は中空で
なくてもよく、例えば四角形断面等種々の断面形状のも
のを用いることができ、かつ支持台１１が昇降する場合
水平な軸線回わりに回動する必要がある。又、剛性部材
１６は基台１０に対して水平方向の移動を規制されるこ
となく支持台１１に対して板ばねを介して取付けること
により水平方向の移動を規制されるようにしてもよい。In this invention, if the supported object is a polishing disk or the like, which causes a load shift in only one direction and causes inclination, the inclination is prevented only around the axis in the direction perpendicular to this direction. Alternatively, only one set of anti-tilt devices 15 may be used. The rigid member 16 does not have to be hollow, and can have various cross-sectional shapes, such as a rectangular cross-section, and needs to rotate about a horizontal axis when the support base 11 moves up and down. Alternatively, the rigid member 16 may be attached to the support stand 11 via a leaf spring without being restricted from moving in the horizontal direction with respect to the base 10, so that its movement in the horizontal direction is restricted.
一般に剛性部材１６を基台１０に対して取付けたり支持
台１１に対して取付ける板ばね１８等は１個又は３個以
上であってもよい。さらに又、剛性部材１６を基台１０
又は支持台１１に対して水平方向の移動を規制して上下
方向の移動を許容するため板ばね１８等を用いることな
く、剛性部材１６の両端から軸部を突出させこの軸部を
上下方向のみに案内する基台１０又は支持台１１に取付
けた案内部材を設けてあってもよい。連結体２５は主体
部２６と小径部２７により構成することなく単一構造で
伸縮できないように々っており、かつあらゆる横方向に
弾性的屈曲が可能に々っておシ、さらに荷重によってざ
屈しないようになっているならば十分であシ、材料も鋼
、軟鋼、硬質合成樹脂等被支持体に応じて種々の材料の
ものを用いることができる。さらに又、連結体２５は剛
性部材１Ｇの軸線１７の一方側に基台１０へ連結するも
のが２個以上ありかつ他方側に支持体１１へ連結するも
のが２個以上あればよい。又、傾斜防止装置１５は３組
以上設けてあってもよい。Generally, the number of plate springs 18 and the like that attach the rigid member 16 to the base 10 or the support base 11 may be one or three or more. Furthermore, the rigid member 16 is attached to the base 10.
Alternatively, in order to restrict movement in the horizontal direction and allow movement in the vertical direction with respect to the support base 11, a shaft portion may be protruded from both ends of the rigid member 16 and the shaft portion may be moved only in the vertical direction without using the leaf spring 18 or the like. A guide member attached to the base 10 or support 11 may be provided to guide the user. The connecting body 25 does not consist of a main body part 26 and a small diameter part 27, but has a single structure that cannot be expanded or contracted, and can be elastically bent in all lateral directions, and can be bent under load. It is sufficient that the material is not bent, and various materials such as steel, mild steel, hard synthetic resin, etc. can be used depending on the material to be supported. Furthermore, it is sufficient that there are two or more connecting bodies 25 connected to the base 10 on one side of the axis 17 of the rigid member 1G, and two or more connecting bodies 25 connected to the support body 11 on the other side. Further, three or more sets of tilt prevention devices 15 may be provided.
この発明は前述したように構成した傾斜防止装置１５が
少くとも１組設けであるから、支持台１１がこの傾斜防
止装置の剛性部材１６の回動の軸線１７と直角方向に延
びる軸線回わりには全く傾斜しないようにした防振装置
が得られるようになるという効果を有している。In this invention, since at least one set of anti-tilt devices 15 configured as described above is provided, the support base 11 does not rotate around the axis extending perpendicularly to the rotational axis 17 of the rigid member 16 of the anti-tilt device. This has the effect that a vibration isolating device that is not tilted at all can be obtained.
なお、この発明において剛性部材１６の回動の軸線１７
が平行でなく水平方向にある角度を有するようにした少
くとも２組の傾斜防止装置１５を設けたものは支持台１
１に全く傾斜を伴うことなくして被支持体を防振支持で
きるものである。In addition, in this invention, the rotational axis 17 of the rigid member 16
The support stand 1 is provided with at least two sets of anti-tilt devices 15, which are not parallel but have a certain angle in the horizontal direction.
1, it is possible to support the supported object in a vibration-proof manner without any inclination at all.
？図はこの発明の一実施例を示す正面図、第２図はその
一部を除去して示す平面図、第３図は傾斜防止装置の正
面図、第４図はその側面図、第５図は剛性部材を断面と
して示す一部の側面図、第６図は連結体を示す側面図、
第７図と第８図は動作説明図である。
１０は基台、１１は支持台、１２は空気ばね、１５は傾
斜防止装置、１６は剛性部材、１７は軸線、１８は板ば
ね、２５は連結体、２６は主体部、２７は小径部。
代理人 弁理士 勝 部 明 長
事１ 職
＄ Ｚ Ｑ
事Ｊｌｆｉ? The figure is a front view showing one embodiment of the present invention, FIG. 2 is a partially removed plan view, FIG. 3 is a front view of the tilt prevention device, FIG. 4 is a side view thereof, and FIG. 5 6 is a partial side view showing a rigid member in cross section, FIG. 6 is a side view showing a connecting body,
FIG. 7 and FIG. 8 are operation explanatory diagrams. 10 is a base, 11 is a support base, 12 is an air spring, 15 is an anti-tilt device, 16 is a rigid member, 17 is an axis, 18 is a leaf spring, 25 is a connecting body, 26 is a main body part, and 27 is a small diameter part. Agent Patent Attorney Akira Katsube Chief 1 Jlfi
Claims (1)
台トに配置して支持台を支持するようにした防振ばねと
を有するものにおいて、前記基台と支持台間において水
平方向に延びた剛性部材と、この剛性部材が上下方向に
ある程度移動することと水平な軸線回わシに回動するこ
とを許容するとともに前記基台又は支持台に対して水平
方向に移動することを規制するようにした水平移動規制
手段と、前記剛性部材の前記軸線から水平方向に離れた
一方側で一端を剛性部材に固着し他端を基台に固着した
少くとも２個のほぼ上下方向に延びて伸縮はしないがあ
らゆる横方向に弾性的湾曲が可能な≠僻連結部材と、前
記剛性部材の軸線から前記≠→連結部材と反対側で水平
方向に離れた位置で一端を剛性部材に固着し他端を支持
台に固着した少くとも２個のほぼ上下方向に延びて伸縮
はし々いがあらゆる横方向に弾性的湾曲が可能なセ慟連
結部材とを設けた少くとも一つの傾斜防止装置を包含す
ることを特徴とする傾斜防止防振装置。 ２、特許請求の範囲第１項記載の装置であって、前記傾
斜防止装置の水平移動規制手段は基台又は支持台に固着
しかつ剛性部材の軸線に向かって水平に延びて剛性部材
に固着する板ばねにより構成しであることを特徴とする
傾斜防止防振装置。 ３、特許請求の範囲第１項又は第２項記載の装置であっ
て、前記傾斜防止装置と同じく構成した少くとももう一
つの傾斜防止装置を包含し、この傾斜防止装置の剛性部
材の回動の軸線は前記傾斜防止装置の剛性部材の回動の
軸線と平行でなく水平方向にある角度を有するようにな
っていることを特徴とする傾斜防止防振装置。[Claims] 1. A device comprising a base, a support placed above the base, and an anti-vibration spring placed on the base to support the support. A rigid member extending in the horizontal direction between the base and the support base, and allowing the rigid member to move vertically to some extent and rotate around a horizontal axis, and with respect to the base or support base. a horizontal movement regulating means configured to restrict movement in the horizontal direction by the rigid member; ≠ remote connecting members that extend substantially vertically and do not expand or contract but are capable of elastically curving in all lateral directions; At least two horizontal connecting members that extend substantially vertically, are slightly expandable and contractible, but are elastically curveable in all lateral directions, and have one end fixed to a rigid member and the other end fixed to a support base. An anti-tilt vibration isolator, characterized in that it includes at least one anti-tilt device provided. 2. The device according to claim 1, wherein the horizontal movement regulating means of the tilt prevention device is fixed to a base or a support, extends horizontally toward the axis of the rigid member, and is fixed to the rigid member. An anti-tilt vibration isolator, characterized in that it is constructed of a leaf spring. 3. The device according to claim 1 or 2, which includes at least another anti-tilt device configured in the same manner as the anti-tilt device, and which prevents rotation of the rigid member of the anti-tilt device. An anti-tilt anti-vibration device characterized in that the axis of the rigid member of the anti-tilt device is not parallel to the rotational axis of the rigid member but is at a certain angle in the horizontal direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18373682A JPS5973641A (en) | 1982-10-21 | 1982-10-21 | Anti-tilting and vibration insulating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18373682A JPS5973641A (en) | 1982-10-21 | 1982-10-21 | Anti-tilting and vibration insulating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5973641A true JPS5973641A (en) | 1984-04-25 |
Family
ID=16141069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18373682A Pending JPS5973641A (en) | 1982-10-21 | 1982-10-21 | Anti-tilting and vibration insulating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5973641A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4732357A (en) * | 1986-04-01 | 1988-03-22 | W. Vinten Limited | Lightweight tilt mounting heads |
| JPS63180746A (en) * | 1987-01-23 | 1988-07-25 | Ohbayashigumi Ltd | Structure for vibration-proof floor |
| US5005326A (en) * | 1989-02-15 | 1991-04-09 | Shinji Ishimaru | Structure vibration proofing or suppressing system with differential double lever mechanism |
| EP1903157A3 (en) * | 2006-09-19 | 2008-05-14 | Integrated Dynamics Engineering GmbH | Ambient noise shielding device |
| CN110857718A (en) * | 2018-08-23 | 2020-03-03 | 张家铭 | Geometric non-linear vibration isolation system |
-
1982
- 1982-10-21 JP JP18373682A patent/JPS5973641A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4732357A (en) * | 1986-04-01 | 1988-03-22 | W. Vinten Limited | Lightweight tilt mounting heads |
| JPS63180746A (en) * | 1987-01-23 | 1988-07-25 | Ohbayashigumi Ltd | Structure for vibration-proof floor |
| US5005326A (en) * | 1989-02-15 | 1991-04-09 | Shinji Ishimaru | Structure vibration proofing or suppressing system with differential double lever mechanism |
| EP1903157A3 (en) * | 2006-09-19 | 2008-05-14 | Integrated Dynamics Engineering GmbH | Ambient noise shielding device |
| JP2008147621A (en) * | 2006-09-19 | 2008-06-26 | Integrated Dynamics Engineering Gmbh | Environmental noise shielding apparatus |
| JP4680970B2 (en) * | 2006-09-19 | 2011-05-11 | インテグレイテッド ダイナミクス エンジニアリング ゲーエムベーハー | Environmental noise shielding device |
| US10513846B2 (en) | 2006-09-19 | 2019-12-24 | Integrated Dynamics Engineering Gmbh | Environmental noise shielding apparatus |
| CN110857718A (en) * | 2018-08-23 | 2020-03-03 | 张家铭 | Geometric non-linear vibration isolation system |
| CN110857718B (en) * | 2018-08-23 | 2021-06-04 | 张家铭 | Geometric non-linear vibration isolation system |
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