JPS5971243A - Uniform magnetic field generator - Google Patents
Uniform magnetic field generatorInfo
- Publication number
- JPS5971243A JPS5971243A JP18250382A JP18250382A JPS5971243A JP S5971243 A JPS5971243 A JP S5971243A JP 18250382 A JP18250382 A JP 18250382A JP 18250382 A JP18250382 A JP 18250382A JP S5971243 A JPS5971243 A JP S5971243A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- coil
- coils
- uniform magnetic
- auxiliary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は高均一な磁界を発生する構成の簡単な均一磁界
発生装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a uniform magnetic field generating device with a simple configuration that generates a highly uniform magnetic field.
均一磁界を用いて所定の仕事を行う装置が、例えば電子
ビーム転写装置を始めとして種々実用化されている。こ
れらの装置で用いられる均一磁界は、一般に複数の磁界
発生コイルを所定の位置関係に配置したコイル群を主要
部とする均一磁界発生装置によって発生される。2. Description of the Related Art Various devices that perform predetermined work using a uniform magnetic field have been put into practical use, including, for example, an electron beam transfer device. The uniform magnetic field used in these devices is generally generated by a uniform magnetic field generating device whose main part is a coil group in which a plurality of magnetic field generating coils are arranged in a predetermined positional relationship.
第1図はこの種のコイル群の基本的な構成を示すもので
、ここでは一対の円形コイル1,2が示される。これら
の円形コイル1,2は、同じ巻枠に巻装される等して直
交座標系(r、θ。FIG. 1 shows the basic structure of this type of coil group, and here a pair of circular coils 1 and 2 are shown. These circular coils 1 and 2 are wound on the same winding frame, etc., and are arranged in an orthogonal coordinate system (r, θ.
2)の2軸を中心軸として同軸配置され、2=0平面を
対称面として対称に配置される。しかして、このよう々
円形コイル1,2によ多構成されたコイル群内部におけ
る任意の点P(r、z)の磁界Br、 B2は、上記点
Pと原点0との距離Rpを
R,=メツ璽「マー
としたとき、
Br aIRp + a2Rp 十a3Rp 十・・
・B、 = Bo+ bIRi + b2R: + b
3Rj +−・・として一般的に展開して示される。こ
こで今、前記円形コイル1.2の断面積が十分小さく、
且つコイル電流がそのコイル中心に集中しているものと
すれは、円形コイル1,2の2軸上での位置を
2 ・ z=2 r
と設定することによって、前記磁界Br、 B2のR2
に関する2次の項の成分を無くすことができる。但し、
rは円形コイル1,2の直径である。They are arranged coaxially with the two axes of 2) as central axes, and are arranged symmetrically with the 2=0 plane as the plane of symmetry. Therefore, the magnetic field Br, B2 at an arbitrary point P (r, z) inside the coil group made up of the circular coils 1 and 2 is calculated by changing the distance Rp between the point P and the origin 0 by R, =Metsu Seal ``When you make a mark, Br aIRp + a2Rp 10 a3Rp 10...
・B, = Bo+ bIRi + b2R: + b
It is generally expanded and shown as 3Rj +-.... Now, the cross-sectional area of the circular coil 1.2 is sufficiently small,
In addition, if the coil current is concentrated at the center of the coil, by setting the positions of the circular coils 1 and 2 on the two axes as 2 z = 2 r, the R2 of the magnetic fields Br and B2 can be reduced.
It is possible to eliminate the component of the quadratic term regarding . however,
r is the diameter of the circular coils 1 and 2.
つまシ、円形コイル1,2からなるコイル群が発生する
磁界を、点Pの位置によらず
Br夕B。The magnetic field generated by the coil group consisting of circular coils 1 and 2 is Br and B regardless of the position of point P.
として均一なものとすることができる。同、コイル断面
が大きい場合であっても、円形コイル1.2の位置を±
7rよシ若干ずれた位置に定めることによって、上述し
た均一磁界Br(=Bo)を得ることが可能となる。It can be made uniform as follows. Similarly, even if the coil cross section is large, the position of the circular coil 1.2 should be ±
By setting it at a position slightly shifted from 7r, it becomes possible to obtain the above-mentioned uniform magnetic field Br (=Bo).
このような構成のコイル群は、所謂ヘルムホルツコイル
として良く知られてお9、均一磁界発生装置として広く
応用されている。A coil group having such a configuration is well known as a so-called Helmholtz coil,9 and is widely used as a uniform magnetic field generator.
このように均一磁界を発生させる為には、円形コイル1
.2の直径rに対して、コイル1゜2の間隔を成る一定
の距離、例えば電流集中型のものでは直径rの7に高精
密に定めることが必要である。然し乍ら実際には、その
製造組立て誤差や、コイル1,2間の電磁力、更には超
電導コイルを用いてこれを実現するような場合における
常温から極低温に至る迄の熱収縮による寸法誤差等、上
記コイル間隔の設定条件を乱す要因が非常に多い。この
為、従来一般的には、一方の円形コイル1(2)の位置
を機械的に調整可能な構成とし、装置の作動状態、つま
シ磁界を発生させながらその磁界が均一となるべく上記
コイル位置を調整している。しかし、このようなコイル
位置の機械的調整は、これを3次元的に行う必要があシ
、多大な困難を伴う。しかも前述した超電導コイルを用
いてこれを構成した場合、常温部よシ極低温状態のコイ
ル位置を調整することは非常に困難であシ、その機構も
相当複雑化する。壕だこれによって冷媒の消費量も増え
る等の問題も生じた。In order to generate a uniform magnetic field in this way, a circular coil 1
.. For the diameter r of 2, it is necessary to set the coil spacing of 1.degree. 2 to a certain distance, for example, in the case of a current concentration type, to 7 of the diameter r. However, in reality, there are manufacturing and assembly errors, electromagnetic force between coils 1 and 2, and dimensional errors due to thermal contraction from room temperature to extremely low temperatures when using superconducting coils. There are many factors that can disturb the coil spacing setting conditions. For this reason, in general, conventionally, the position of one circular coil 1 (2) is mechanically adjustable. are being adjusted. However, such mechanical adjustment of the coil position must be performed three-dimensionally, which is accompanied by great difficulty. Moreover, when this is constructed using the above-mentioned superconducting coil, it is extremely difficult to adjust the coil position in the cryogenic state compared to the normal temperature part, and the mechanism becomes considerably complicated. This caused problems such as increased refrigerant consumption.
本発明はこのような事情を考慮してなされたもので、そ
の目的とするところは、コイル群が発生する磁界を簡易
に高均一化することのできる簡易で実用性の高い構成の
均一磁界発生装置を提供することにある。The present invention was made in consideration of these circumstances, and its purpose is to generate a uniform magnetic field with a simple and highly practical configuration that can easily make the magnetic field generated by a group of coils highly uniform. The goal is to provide equipment.
本発明は均一磁界を発生させるべく設けられたコイル群
の少なくとも一部に磁界発生コイルを挟んで一対の補助
コイルを設け、この補助コイルの通電電流の向きを相互
に異ならせると共にその電流値を調整することによって
前記コイル群断面における電気的中心位置を補正し、と
5−
れによって機械的位置調整を行うことなしに高均一な磁
界を得るようにしたものである。In the present invention, a pair of auxiliary coils is provided in at least a part of a group of coils provided to generate a uniform magnetic field, with the magnetic field generating coil sandwiched therebetween, and the direction of current flowing through the auxiliary coils is made different from each other, and the current value is changed. The electrical center position in the cross section of the coil group is corrected by the adjustment, and a highly uniform magnetic field can be obtained without mechanical position adjustment.
従って本発明によれば、新たに設けた補助コイルの通電
電流を電気的に調整するだけでコイル群断面における電
気的中心位置を補正して、コイル間の位置関係を等測的
に調整して均一な磁界を容易に得ることができる。しか
も機械的位置調整を必要としないので、コイル群を超電
導コイルを用いて構成した場合であっても、上述した従
来の問題を全く招くことがない。Therefore, according to the present invention, the electrical center position in the cross section of the coil group can be corrected by simply electrically adjusting the energizing current of the newly installed auxiliary coil, and the positional relationship between the coils can be adjusted isometrically. A uniform magnetic field can be easily obtained. Furthermore, since mechanical position adjustment is not required, even if the coil group is constructed using superconducting coils, the above-mentioned conventional problems are not caused at all.
以下、図面を参照して本発明の一笑施例につき説明する
。Hereinafter, one embodiment of the present invention will be described with reference to the drawings.
第2図は実施例装置の概略構成図で、図中1゜2は磁界
発生用の円形コイルである。これらの円形コイル1,2
は、均一な磁界を発生させるべく、例えば図示しない巻
枠に同軸的に巻装されて所定の位置関係に設けられたも
のであシ、これらによってコイル群が形成されている。FIG. 2 is a schematic configuration diagram of an embodiment of the apparatus, in which reference numeral 1.degree.2 indicates a circular coil for generating a magnetic field. These circular coils 1, 2
are coaxially wound around a winding frame (not shown) and provided in a predetermined positional relationship in order to generate a uniform magnetic field, and these form a coil group.
し6−
かして、本装置が特徴とするところは、上記コイル群の
一部に、ここでは円形コイル1に近接させ、且つこれを
挟んで同軸に補助コイル3゜4を設けた点にある。この
補助コイル3,4はその通電電流の向きが相互に逆向き
に定められ、且つその電流値が外部よシ調整されるもの
であり、前記コイル群と一体的に装置本体に組込まれる
。However, the feature of this device is that an auxiliary coil 3°4 is provided in a part of the above-mentioned coil group, in this case, close to the circular coil 1 and coaxially sandwiching it. be. The auxiliary coils 3 and 4 have their current flowing in opposite directions, and have their current values adjusted externally, and are integrated into the main body of the device together with the coil group.
しかして今、円形コイル1.2の間隔が成る一定の距離
よりも短くなった場合、補助コイル3には円形コイル1
と同一方向に電流が流され、且つ、補助コイル4には逆
向きに電流が流される。これによって、円形コイル1と
補助コイル3.4とを含むコイル断面の電気的中心位置
が2軸の正方向に移動する。しかも、補助コイル3.4
の電流の向きが相互に逆向きなので、これによる円形コ
イル1への影響が相殺されることになる。この結果、等
価的に円形コイル1゜2間の距離が成る一定の条件に定
1す、前述した均一磁界を得る為の条件が整うことにな
る。However, if the distance between the circular coils 1.2 becomes shorter than a certain distance, the auxiliary coil 3 will have the circular coil 1.
A current is passed through the auxiliary coil 4 in the same direction, and a current is passed through the auxiliary coil 4 in the opposite direction. As a result, the electrical center position of the coil cross section including the circular coil 1 and the auxiliary coil 3.4 moves in the positive direction of the two axes. Moreover, the auxiliary coil 3.4
Since the directions of the currents are opposite to each other, the influence of this on the circular coil 1 is canceled out. As a result, the conditions for obtaining the above-mentioned uniform magnetic field are established, where the distance between the circular coils is equivalently set to a constant distance of 1.degree.2.
また、円形コイル1,2間の間隔が広い場合には、補助
コイル3に円形コイル1とは逆向きの電流を流し、補助
コイル4に同一方向に電流を流せば、そのコイル断面に
おける電気的中心位置が下方(2軸負方向)に移動し、
これによって上記間隔を等価的に一定の条件に定めるこ
とが可能となる。Furthermore, when the distance between the circular coils 1 and 2 is wide, if a current is passed through the auxiliary coil 3 in the opposite direction to that of the circular coil 1, and a current is passed through the auxiliary coil 4 in the same direction, the electrical current in the cross section of the coil The center position moves downward (in the negative direction of 2 axes),
This makes it possible to equivalently set the above-mentioned interval to a constant condition.
このように補助コイル3,4の通電電流を調整すること
によって、円形コイル1の機械的位置を変えることなし
に、その雷1気的中心位置を簡易に変えて円形コイル2
との位置関係を等価的に高精度に定めることができる。By adjusting the current flowing through the auxiliary coils 3 and 4 in this way, the mechanical center position of the circular coil 1 can be easily changed without changing the mechanical position of the circular coil 1.
It is possible to equivalently determine the positional relationship with high precision.
これ故、極めて高均一な磁界を容易に発生させることが
可能となる。しかも、従来のようにコイルの機械的位置
調整機構を全く必要としないので、装置構成の大幅な簡
素化を図ることができる。更には従来の機械的位置調整
は3次元的な要素であるのに対し、本装置における補助
コイル3,4の電流調整は一次元的であり、これによっ
て円形コイル1に対して磁気的な悪影響を及ぼすことが
ないので、その調整も極めて容易である。Therefore, it becomes possible to easily generate an extremely highly uniform magnetic field. Moreover, since there is no need for a mechanical position adjustment mechanism for the coil as in the conventional case, the device configuration can be greatly simplified. Furthermore, whereas the conventional mechanical position adjustment is a three-dimensional element, the current adjustment of the auxiliary coils 3 and 4 in this device is one-dimensional, which causes negative magnetic effects on the circular coil 1. The adjustment is also extremely easy.
また超電導コイルを用いてコイル群を構成した場合、超
電導コイルの極超低温環境を破ることなしに上述した調
整を簡易に行い得るので、調整機構を介した熱侵入等の
低温下での問題も生じない。これ故、副次的には冷媒の
無駄な消費を抑え得る等の効果も奏せられる。従って、
超電導コイルを用いた均−磁界発生装置への適用に著し
い効果が期待される。Furthermore, when a coil group is constructed using superconducting coils, the above-mentioned adjustment can be easily performed without breaking the extremely low temperature environment of the superconducting coils, so problems at low temperatures such as heat intrusion through the adjustment mechanism may occur. do not have. Therefore, secondary effects such as being able to suppress wasteful consumption of refrigerant can also be achieved. Therefore,
Significant effects are expected when applied to uniform magnetic field generators using superconducting coils.
伺、本発明は上述した実施例にのみ限定されるものでは
ない。例えば二重へルムホルツコイル型の均−磁界発生
装置等にも同様に適用することができる。また均一磁界
発生の為のコイル群を構成するコイルの形式およびその
数は特に限定されるものではなく、補助コイルも各磁界
発生コイル毎にそれぞれ設けるようにしてもよい。つ筐
シ、各コイル毎に対を為す補助コイルを対応させて設け
るようにしてもよい。要するに本発明はその要旨を逸脱
しない範囲で種々変形して実施することができる。However, the present invention is not limited to the embodiments described above. For example, the present invention can be similarly applied to a double Helmholtz coil type uniform magnetic field generator. Further, the type and number of coils constituting the coil group for generating a uniform magnetic field are not particularly limited, and an auxiliary coil may also be provided for each magnetic field generating coil. For each coil, a pair of auxiliary coils may be provided in correspondence with each coil. In short, the present invention can be implemented with various modifications without departing from the gist thereof.
9−9-
第1図は均一磁界発生装置の基本構成とその問題点を説
明する為の図、第2図は本発明の一実施例装置の基本構
成図である。
1.2・・・円形コイル、3,4・・・補助コイル。
出願人代理人 弁理士 鈴 江 武 彦10−FIG. 1 is a diagram for explaining the basic configuration of a uniform magnetic field generating device and its problems, and FIG. 2 is a diagram of the basic configuration of an embodiment of the device of the present invention. 1.2...Circular coil, 3,4...Auxiliary coil. Applicant's agent Patent attorney Takehiko Suzue 10-
Claims (2)
ルを所定の位置関係に設けてなるコイル群と、このコイ
ル群の少なくとも1つの磁界発生コイルを挟んで設けら
れて相互に異なる向きに電流が流される少なくとも1対
の補助コイルと、これらの補助コイルの通電電流を調整
して前記コイル群断面における発生磁界の電気的中心位
置を補正する手段とを具備したことを特徴とする均一磁
界発生装置。(1) A coil group consisting of a plurality of magnetic field generating coils arranged in a predetermined positional relationship in order to generate a uniform magnetic field, and a coil group provided with at least one magnetic field generating coil in the coil group, and currents flowing in mutually different directions. Uniform magnetic field generation characterized by comprising: at least one pair of auxiliary coils through which a current is passed; and means for adjusting the current flowing through these auxiliary coils to correct the electrical center position of the generated magnetic field in the cross section of the coil group. Device.
の巻枠に巻装されて同軸配置されたものである特許請求
の範囲第1項記載の均一磁界発生装置。(2) The uniform magnetic field generating device according to claim 1, wherein the plurality of magnetic field generating coils and auxiliary coils are wound around one winding frame and arranged coaxially.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18250382A JPS5971243A (en) | 1982-10-18 | 1982-10-18 | Uniform magnetic field generator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18250382A JPS5971243A (en) | 1982-10-18 | 1982-10-18 | Uniform magnetic field generator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5971243A true JPS5971243A (en) | 1984-04-21 |
Family
ID=16119426
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18250382A Pending JPS5971243A (en) | 1982-10-18 | 1982-10-18 | Uniform magnetic field generator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5971243A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100435248B1 (en) * | 2001-02-01 | 2004-06-11 | 봅스트 쏘시에떼 아노님 | Device for sheets conveyance |
-
1982
- 1982-10-18 JP JP18250382A patent/JPS5971243A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100435248B1 (en) * | 2001-02-01 | 2004-06-11 | 봅스트 쏘시에떼 아노님 | Device for sheets conveyance |
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