JPS5971243A - Uniform magnetic field generator - Google Patents

Uniform magnetic field generator

Info

Publication number
JPS5971243A
JPS5971243A JP18250382A JP18250382A JPS5971243A JP S5971243 A JPS5971243 A JP S5971243A JP 18250382 A JP18250382 A JP 18250382A JP 18250382 A JP18250382 A JP 18250382A JP S5971243 A JPS5971243 A JP S5971243A
Authority
JP
Japan
Prior art keywords
magnetic field
coil
coils
uniform magnetic
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18250382A
Other languages
Japanese (ja)
Inventor
Ichiro Takano
一郎 高野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP18250382A priority Critical patent/JPS5971243A/en
Publication of JPS5971243A publication Critical patent/JPS5971243A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To generate a highly uniform magnetic field, by installing a pair of auxiliary coils, which sandwich a magnetic field generating coil in between, in part of a group of coils capable of generating the uniform magnetic field, and adjusting the direction and size of its electric current whereby correcting the electrical center position. CONSTITUTION:A pair of auxiliary coils 3 and 4 are added to a uniform magnetic generator, which coaxially sets up a pair of round coils 1 and 2 centering on a Z-axis in a rectangular coordinate system, in a way of approaching the coil 1 and sandwiching it in between. And the direction of an electrical current flowing in these auxiliary coils 3 and 4 is set to the reverse each other, while the current value is made to be adjustable. Accordingly, when an interval between these coils 1 and 2 is dislocated apart from a specified distance, the electrical center position of a coil section inclusive of the coil 1 and these auxiliary coils 3 and 4 can be moved toward the Z-axis by adjustment of the current so that a highly uniform magnetic field can be secured in an easy manner without any adjustment for the mechanical position.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は高均一な磁界を発生する構成の簡単な均一磁界
発生装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a uniform magnetic field generating device with a simple configuration that generates a highly uniform magnetic field.

〔発明の技術的背景〕[Technical background of the invention]

均一磁界を用いて所定の仕事を行う装置が、例えば電子
ビーム転写装置を始めとして種々実用化されている。こ
れらの装置で用いられる均一磁界は、一般に複数の磁界
発生コイルを所定の位置関係に配置したコイル群を主要
部とする均一磁界発生装置によって発生される。2. Description of the Related Art Various devices that perform predetermined work using a uniform magnetic field have been put into practical use, including, for example, an electron beam transfer device. The uniform magnetic field used in these devices is generally generated by a uniform magnetic field generating device whose main part is a coil group in which a plurality of magnetic field generating coils are arranged in a predetermined positional relationship.

第１図はこの種のコイル群の基本的な構成を示すもので
、ここでは一対の円形コイル１，２が示される。これら
の円形コイル１，２は、同じ巻枠に巻装される等して直
交座標系（ｒ、θ。FIG. 1 shows the basic structure of this type of coil group, and here a pair of circular coils 1 and 2 are shown. These circular coils 1 and 2 are wound on the same winding frame, etc., and are arranged in an orthogonal coordinate system (r, θ.

２）の２軸を中心軸として同軸配置され、２＝０平面を
対称面として対称に配置される。しかして、このよう々
円形コイル１，２によ多構成されたコイル群内部におけ
る任意の点Ｐ（ｒ、ｚ）の磁界Ｂｒ、　Ｂ２は、上記点
Ｐと原点０との距離Ｒｐを Ｒ，＝メツ璽「マー としたとき、 Ｂｒ　　ａＩＲｐ　＋　ａ２Ｒｐ　十ａ３Ｒｐ　十・・
・Ｂ、　＝　Ｂｏ＋　ｂＩＲｉ　＋　ｂ２Ｒ：　＋　ｂ
３Ｒｊ　＋−・・として一般的に展開して示される。こ
こで今、前記円形コイル１．２の断面積が十分小さく、
且つコイル電流がそのコイル中心に集中しているものと
すれは、円形コイル１，２の２軸上での位置を ２　・　ｚ＝２　ｒ と設定することによって、前記磁界Ｂｒ、　Ｂ２のＲ２
に関する２次の項の成分を無くすことができる。但し、
ｒは円形コイル１，２の直径である。They are arranged coaxially with the two axes of 2) as central axes, and are arranged symmetrically with the 2=0 plane as the plane of symmetry. Therefore, the magnetic field Br, B2 at an arbitrary point P (r, z) inside the coil group made up of the circular coils 1 and 2 is calculated by changing the distance Rp between the point P and the origin 0 by R, ＝Metsu Seal ``When you make a mark, Br aIRp + a2Rp 10 a3Rp 10...
・B, = Bo+ bIRi + b2R: + b
It is generally expanded and shown as 3Rj +-.... Now, the cross-sectional area of the circular coil 1.2 is sufficiently small,
In addition, if the coil current is concentrated at the center of the coil, by setting the positions of the circular coils 1 and 2 on the two axes as 2 z = 2 r, the R2 of the magnetic fields Br and B2 can be reduced.
It is possible to eliminate the component of the quadratic term regarding . however,
r is the diameter of the circular coils 1 and 2.

つまシ、円形コイル１，２からなるコイル群が発生する
磁界を、点Ｐの位置によらず Ｂｒ夕Ｂ。The magnetic field generated by the coil group consisting of circular coils 1 and 2 is Br and B regardless of the position of point P.

として均一なものとすることができる。同、コイル断面
が大きい場合であっても、円形コイル１．２の位置を±
７ｒよシ若干ずれた位置に定めることによって、上述し
た均一磁界Ｂｒ（＝Ｂｏ）を得ることが可能となる。It can be made uniform as follows. Similarly, even if the coil cross section is large, the position of the circular coil 1.2 should be ±
By setting it at a position slightly shifted from 7r, it becomes possible to obtain the above-mentioned uniform magnetic field Br (=Bo).

このような構成のコイル群は、所謂ヘルムホルツコイル
として良く知られてお９、均一磁界発生装置として広く
応用されている。A coil group having such a configuration is well known as a so-called Helmholtz coil,9 and is widely used as a uniform magnetic field generator.

〔背景技術の問題点〕[Problems with background technology]

このように均一磁界を発生させる為には、円形コイル１
．２の直径ｒに対して、コイル１゜２の間隔を成る一定
の距離、例えば電流集中型のものでは直径ｒの７に高精
密に定めることが必要である。然し乍ら実際には、その
製造組立て誤差や、コイル１，２間の電磁力、更には超
電導コイルを用いてこれを実現するような場合における
常温から極低温に至る迄の熱収縮による寸法誤差等、上
記コイル間隔の設定条件を乱す要因が非常に多い。この
為、従来一般的には、一方の円形コイル１（２）の位置
を機械的に調整可能な構成とし、装置の作動状態、つま
シ磁界を発生させながらその磁界が均一となるべく上記
コイル位置を調整している。しかし、このようなコイル
位置の機械的調整は、これを３次元的に行う必要があシ
、多大な困難を伴う。しかも前述した超電導コイルを用
いてこれを構成した場合、常温部よシ極低温状態のコイ
ル位置を調整することは非常に困難であシ、その機構も
相当複雑化する。壕だこれによって冷媒の消費量も増え
る等の問題も生じた。In order to generate a uniform magnetic field in this way, a circular coil 1
．． For the diameter r of 2, it is necessary to set the coil spacing of 1.degree. 2 to a certain distance, for example, in the case of a current concentration type, to 7 of the diameter r. However, in reality, there are manufacturing and assembly errors, electromagnetic force between coils 1 and 2, and dimensional errors due to thermal contraction from room temperature to extremely low temperatures when using superconducting coils. There are many factors that can disturb the coil spacing setting conditions. For this reason, in general, conventionally, the position of one circular coil 1 (2) is mechanically adjustable. are being adjusted. However, such mechanical adjustment of the coil position must be performed three-dimensionally, which is accompanied by great difficulty. Moreover, when this is constructed using the above-mentioned superconducting coil, it is extremely difficult to adjust the coil position in the cryogenic state compared to the normal temperature part, and the mechanism becomes considerably complicated. This caused problems such as increased refrigerant consumption.

〔発明の目的〕[Purpose of the invention]

本発明はこのような事情を考慮してなされたもので、そ
の目的とするところは、コイル群が発生する磁界を簡易
に高均一化することのできる簡易で実用性の高い構成の
均一磁界発生装置を提供することにある。The present invention was made in consideration of these circumstances, and its purpose is to generate a uniform magnetic field with a simple and highly practical configuration that can easily make the magnetic field generated by a group of coils highly uniform. The goal is to provide equipment.

〔発明の概要〕[Summary of the invention]

本発明は均一磁界を発生させるべく設けられたコイル群
の少なくとも一部に磁界発生コイルを挟んで一対の補助
コイルを設け、この補助コイルの通電電流の向きを相互
に異ならせると共にその電流値を調整することによって
前記コイル群断面における電気的中心位置を補正し、と
５− れによって機械的位置調整を行うことなしに高均一な磁
界を得るようにしたものである。In the present invention, a pair of auxiliary coils is provided in at least a part of a group of coils provided to generate a uniform magnetic field, with the magnetic field generating coil sandwiched therebetween, and the direction of current flowing through the auxiliary coils is made different from each other, and the current value is changed. The electrical center position in the cross section of the coil group is corrected by the adjustment, and a highly uniform magnetic field can be obtained without mechanical position adjustment.

〔発明の効果〕〔Effect of the invention〕

従って本発明によれば、新たに設けた補助コイルの通電
電流を電気的に調整するだけでコイル群断面における電
気的中心位置を補正して、コイル間の位置関係を等測的
に調整して均一な磁界を容易に得ることができる。しか
も機械的位置調整を必要としないので、コイル群を超電
導コイルを用いて構成した場合であっても、上述した従
来の問題を全く招くことがない。Therefore, according to the present invention, the electrical center position in the cross section of the coil group can be corrected by simply electrically adjusting the energizing current of the newly installed auxiliary coil, and the positional relationship between the coils can be adjusted isometrically. A uniform magnetic field can be easily obtained. Furthermore, since mechanical position adjustment is not required, even if the coil group is constructed using superconducting coils, the above-mentioned conventional problems are not caused at all.

〔発明の実施例〕[Embodiments of the invention]

以下、図面を参照して本発明の一笑施例につき説明する
。Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

第２図は実施例装置の概略構成図で、図中１゜２は磁界
発生用の円形コイルである。これらの円形コイル１，２
は、均一な磁界を発生させるべく、例えば図示しない巻
枠に同軸的に巻装されて所定の位置関係に設けられたも
のであシ、これらによってコイル群が形成されている。FIG. 2 is a schematic configuration diagram of an embodiment of the apparatus, in which reference numeral 1.degree.2 indicates a circular coil for generating a magnetic field. These circular coils 1, 2
are coaxially wound around a winding frame (not shown) and provided in a predetermined positional relationship in order to generate a uniform magnetic field, and these form a coil group.

し６− かして、本装置が特徴とするところは、上記コイル群の
一部に、ここでは円形コイル１に近接させ、且つこれを
挟んで同軸に補助コイル３゜４を設けた点にある。この
補助コイル３，４はその通電電流の向きが相互に逆向き
に定められ、且つその電流値が外部よシ調整されるもの
であり、前記コイル群と一体的に装置本体に組込まれる
。However, the feature of this device is that an auxiliary coil 3°4 is provided in a part of the above-mentioned coil group, in this case, close to the circular coil 1 and coaxially sandwiching it. be. The auxiliary coils 3 and 4 have their current flowing in opposite directions, and have their current values adjusted externally, and are integrated into the main body of the device together with the coil group.

しかして今、円形コイル１．２の間隔が成る一定の距離
よりも短くなった場合、補助コイル３には円形コイル１
と同一方向に電流が流され、且つ、補助コイル４には逆
向きに電流が流される。これによって、円形コイル１と
補助コイル３．４とを含むコイル断面の電気的中心位置
が２軸の正方向に移動する。しかも、補助コイル３．４
の電流の向きが相互に逆向きなので、これによる円形コ
イル１への影響が相殺されることになる。この結果、等
価的に円形コイル１゜２間の距離が成る一定の条件に定
１す、前述した均一磁界を得る為の条件が整うことにな
る。However, if the distance between the circular coils 1.2 becomes shorter than a certain distance, the auxiliary coil 3 will have the circular coil 1.
A current is passed through the auxiliary coil 4 in the same direction, and a current is passed through the auxiliary coil 4 in the opposite direction. As a result, the electrical center position of the coil cross section including the circular coil 1 and the auxiliary coil 3.4 moves in the positive direction of the two axes. Moreover, the auxiliary coil 3.4
Since the directions of the currents are opposite to each other, the influence of this on the circular coil 1 is canceled out. As a result, the conditions for obtaining the above-mentioned uniform magnetic field are established, where the distance between the circular coils is equivalently set to a constant distance of 1.degree.2.

また、円形コイル１，２間の間隔が広い場合には、補助
コイル３に円形コイル１とは逆向きの電流を流し、補助
コイル４に同一方向に電流を流せば、そのコイル断面に
おける電気的中心位置が下方（２軸負方向）に移動し、
これによって上記間隔を等価的に一定の条件に定めるこ
とが可能となる。Furthermore, when the distance between the circular coils 1 and 2 is wide, if a current is passed through the auxiliary coil 3 in the opposite direction to that of the circular coil 1, and a current is passed through the auxiliary coil 4 in the same direction, the electrical current in the cross section of the coil The center position moves downward (in the negative direction of 2 axes),
This makes it possible to equivalently set the above-mentioned interval to a constant condition.

このように補助コイル３，４の通電電流を調整すること
によって、円形コイル１の機械的位置を変えることなし
に、その雷１気的中心位置を簡易に変えて円形コイル２
との位置関係を等価的に高精度に定めることができる。By adjusting the current flowing through the auxiliary coils 3 and 4 in this way, the mechanical center position of the circular coil 1 can be easily changed without changing the mechanical position of the circular coil 1.
It is possible to equivalently determine the positional relationship with high precision.

これ故、極めて高均一な磁界を容易に発生させることが
可能となる。しかも、従来のようにコイルの機械的位置
調整機構を全く必要としないので、装置構成の大幅な簡
素化を図ることができる。更には従来の機械的位置調整
は３次元的な要素であるのに対し、本装置における補助
コイル３，４の電流調整は一次元的であり、これによっ
て円形コイル１に対して磁気的な悪影響を及ぼすことが
ないので、その調整も極めて容易である。Therefore, it becomes possible to easily generate an extremely highly uniform magnetic field. Moreover, since there is no need for a mechanical position adjustment mechanism for the coil as in the conventional case, the device configuration can be greatly simplified. Furthermore, whereas the conventional mechanical position adjustment is a three-dimensional element, the current adjustment of the auxiliary coils 3 and 4 in this device is one-dimensional, which causes negative magnetic effects on the circular coil 1. The adjustment is also extremely easy.

また超電導コイルを用いてコイル群を構成した場合、超
電導コイルの極超低温環境を破ることなしに上述した調
整を簡易に行い得るので、調整機構を介した熱侵入等の
低温下での問題も生じない。これ故、副次的には冷媒の
無駄な消費を抑え得る等の効果も奏せられる。従って、
超電導コイルを用いた均−磁界発生装置への適用に著し
い効果が期待される。Furthermore, when a coil group is constructed using superconducting coils, the above-mentioned adjustment can be easily performed without breaking the extremely low temperature environment of the superconducting coils, so problems at low temperatures such as heat intrusion through the adjustment mechanism may occur. do not have. Therefore, secondary effects such as being able to suppress wasteful consumption of refrigerant can also be achieved. Therefore,
Significant effects are expected when applied to uniform magnetic field generators using superconducting coils.

伺、本発明は上述した実施例にのみ限定されるものでは
ない。例えば二重へルムホルツコイル型の均−磁界発生
装置等にも同様に適用することができる。また均一磁界
発生の為のコイル群を構成するコイルの形式およびその
数は特に限定されるものではなく、補助コイルも各磁界
発生コイル毎にそれぞれ設けるようにしてもよい。つ筐
シ、各コイル毎に対を為す補助コイルを対応させて設け
るようにしてもよい。要するに本発明はその要旨を逸脱
しない範囲で種々変形して実施することができる。However, the present invention is not limited to the embodiments described above. For example, the present invention can be similarly applied to a double Helmholtz coil type uniform magnetic field generator. Further, the type and number of coils constituting the coil group for generating a uniform magnetic field are not particularly limited, and an auxiliary coil may also be provided for each magnetic field generating coil. For each coil, a pair of auxiliary coils may be provided in correspondence with each coil. In short, the present invention can be implemented with various modifications without departing from the gist thereof.

９−9-

【図面の簡単な説明】[Brief explanation of drawings]

第１図は均一磁界発生装置の基本構成とその問題点を説
明する為の図、第２図は本発明の一実施例装置の基本構
成図である。 １．２・・・円形コイル、３，４・・・補助コイル。 出願人代理人　　弁理士　鈴　江　武　彦１０−FIG. 1 is a diagram for explaining the basic configuration of a uniform magnetic field generating device and its problems, and FIG. 2 is a diagram of the basic configuration of an embodiment of the device of the present invention. 1.2...Circular coil, 3,4...Auxiliary coil. Applicant's agent Patent attorney Takehiko Suzue 10-

Claims (2)

【特許請求の範囲】[Claims] （１）均一な磁界を発生させるべく複数の磁界発生コイ
ルを所定の位置関係に設けてなるコイル群と、このコイ
ル群の少なくとも１つの磁界発生コイルを挟んで設けら
れて相互に異なる向きに電流が流される少なくとも１対
の補助コイルと、これらの補助コイルの通電電流を調整
して前記コイル群断面における発生磁界の電気的中心位
置を補正する手段とを具備したことを特徴とする均一磁
界発生装置。(1) A coil group consisting of a plurality of magnetic field generating coils arranged in a predetermined positional relationship in order to generate a uniform magnetic field, and a coil group provided with at least one magnetic field generating coil in the coil group, and currents flowing in mutually different directions. Uniform magnetic field generation characterized by comprising: at least one pair of auxiliary coils through which a current is passed; and means for adjusting the current flowing through these auxiliary coils to correct the electrical center position of the generated magnetic field in the cross section of the coil group. Device. （２）複数の磁界発生コイルおよび補助コイルは、１つ
の巻枠に巻装されて同軸配置されたものである特許請求
の範囲第１項記載の均一磁界発生装置。(2) The uniform magnetic field generating device according to claim 1, wherein the plurality of magnetic field generating coils and auxiliary coils are wound around one winding frame and arranged coaxially.
JP18250382A 1982-10-18 1982-10-18 Uniform magnetic field generator Pending JPS5971243A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18250382A JPS5971243A (en) 1982-10-18 1982-10-18 Uniform magnetic field generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18250382A JPS5971243A (en) 1982-10-18 1982-10-18 Uniform magnetic field generator

Publications (1)

Publication Number Publication Date
JPS5971243A true JPS5971243A (en) 1984-04-21

Family

ID=16119426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18250382A Pending JPS5971243A (en) 1982-10-18 1982-10-18 Uniform magnetic field generator

Country Status (1)

Country Link
JP (1) JPS5971243A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100435248B1 (en) * 2001-02-01 2004-06-11 봅스트 쏘시에떼 아노님 Device for sheets conveyance

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100435248B1 (en) * 2001-02-01 2004-06-11 봅스트 쏘시에떼 아노님 Device for sheets conveyance

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