JPS5965741A - Silicon pressure sensitive apparatus - Google Patents
Silicon pressure sensitive apparatusInfo
- Publication number
- JPS5965741A JPS5965741A JP17658882A JP17658882A JPS5965741A JP S5965741 A JPS5965741 A JP S5965741A JP 17658882 A JP17658882 A JP 17658882A JP 17658882 A JP17658882 A JP 17658882A JP S5965741 A JPS5965741 A JP S5965741A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- silicon
- pipe
- tire
- zirconium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/003—Fluidic connecting means using a detachable interface or adapter between the process medium and the pressure gauge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はシリコン感圧タイヤフラムの一面には基準圧力
が加わり、他面には前記ダイヤスラムの支持台と導圧管
を通して測定気体圧が加わるシリコン感圧装置に関する
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a silicon pressure-sensitive device in which a reference pressure is applied to one side of a silicon pressure-sensitive tire flammable member, and a measured gas pressure is applied to the other side of the diaphragm through a support base of the diaphragm and a pressure guide tube.
この揮のシリフン感圧装置は、例えば自動車の排気ガス
等のような腐蝕性の強い測定気体に対して使用されるこ
とが多いので、耐蝕性について充分に配慮されたものを
作ることが肝要である。This type of pressure-sensitive device is often used for highly corrosive measurement gases such as automobile exhaust gas, so it is important to make one with sufficient consideration for corrosion resistance. be.
従来のシリコン感圧装置を第１図に示す。シリコンタイ
ヤフラム１には、これと同じシリコン素材からなる支持
台２が、接合部５にてあらかじめ酸化膜等で絶縁化され
た上、さらに金属化処理をされ、半田接合されている。A conventional silicon pressure sensitive device is shown in FIG. A support base 2 made of the same silicon material is attached to the silicon tire flam 1 at a joint portion 5, which is insulated in advance with an oxide film or the like, further metallized, and soldered.
さらにこの支持台２には測定気体が通るように貫通した
中心孔が設けられている。そしてこの支持台２の、前記
接合部５と反対の側には、鉄−二、ヶルーフバルトから
なる１バ一ル合金で作られた感圧管３が接合部６にて半
田接合されている。そしてこの導圧管３にも貫通した中
心孔が設けられ、その上、孔の内側には腐蝕防止のため
の金メッキが被覆される。さらに導圧管３の中心孔と支
持台２の中心孔とは中心軸が一致するように接合される
。このような中心孔を通して、シリコンタイヤフラムｌ
の一面ニは測定気体圧が加わり、他面には以下に述べる
基准圧力室１３内の基準圧力が加わるように、一般のシ
リコン感圧装置は構成されるものである０通常、基単圧
力室１３内を臭突にしたときの圧力を基準圧力としてい
る。この基単圧力室は、導圧管３の接合部７で結合しか
つ容器底板１１に固定する環状支持体４と、この容器底
板１１に溶接され、シリコンダイヤフラム】をｆ〉うよ
うな容器蓋体１２と、前記容器底板１１、シリコンタイ
ヤフラム１およびこれに連結した支持台２．導圧管３と
から構成された９間であり、真仝忙保持されるよ５Ｖｃ
なっている。Furthermore, the support base 2 is provided with a central hole through which the gas to be measured passes. A pressure-sensitive tube 3 made of a 1-bar alloy made of iron-bisulfite is soldered to the side of the support base 2 opposite to the joint 5 at a joint 6. This impulse tube 3 is also provided with a penetrating center hole, and the inside of the hole is coated with gold plating to prevent corrosion. Furthermore, the center hole of the impulse tube 3 and the center hole of the support base 2 are joined so that their center axes coincide. Through such a center hole, insert the silicone tire flamm l
A typical silicon pressure sensitive device is constructed so that the measured gas pressure is applied to one side, and the reference pressure in the standard pressure chamber 13 described below is applied to the other side. The pressure when the inside of No. 13 is filled with odor is taken as the reference pressure. This base single pressure chamber consists of an annular support 4 which is connected to the joint 7 of the impulse pipe 3 and fixed to the container bottom plate 11, and a container lid which is welded to the container bottom plate 11 and has a silicon diaphragm. 12, the container bottom plate 11, the silicone tire flam 1, and a support base 2 connected thereto. 9 consisting of impulse pipe 3 and 5Vc, which is maintained in a real state.
It has become.
またその気体圧測定については、前述のように導圧管３
の中心孔を通して、測定気体圧をシリコンタイヤフラム
１に受け、これにより生じたシリコンの歪をピエゾ抵抗
効果による抵抗値の変化によって重線信号に変換し、シ
リコンタイヤフラム１の表面に設けられた増幅回路と温
度補償回路（いずれも図示せず）Ｋて増幅、および温度
補正して、容器底板１１上のセラミック基板１４に形成
された外部出力回路（図示せず）および外部出力端子１
７に各々導線１５．、１６にて伝え、測定圧を外部へ出
力するようになっている。In addition, regarding the gas pressure measurement, as mentioned above, the pressure
The measured gas pressure is applied to the silicone tire flamm 1 through the center hole of the silicone tire flamm 1, and the resulting strain in the silicone is converted into a heavy line signal by a change in resistance value due to the piezoresistance effect. Amplification and temperature compensation are performed using an amplifier circuit and a temperature compensation circuit (both not shown), and an external output circuit (not shown) and external output terminal 1 are formed on the ceramic substrate 14 on the container bottom plate 11.
7 and conductor wire 15. , 16, and the measured pressure is output to the outside.
このように、シリコン感圧装置は測定気体圧によるシリ
コンタイヤフラム１の歪を、［気信号に変換して、□検
出するものであり、測定線体圧以外に起因するタイヤフ
ラム１の歪は極力除去きれねばならない。従って、従来
、シリコンタイヤフラム１の支持台２は前述のようにシ
リコンかあるい（′ｌ−必彫張併数の近似した力゛シス
でｆ乍られることが多いのである。また前述のよ５に、
支持台２と導圧管３か別々の材料で作られると、その組
立構造が復雑になるので、これらを一体化して構造を簡
単にすることが望まねる。しかしシリコンで一体化する
とその価格が置くなりすぎ、また−万ガラスの場合は、
前述のコバール合金導圧管のような腐蝕防止用の会メ、
キが困難であるので、一体化が難０・し℃・。また前記
導圧管３のようなコパール合金だけで一体化した場合も
、価格的には安くできる７Ｊ′−シ１１コンとの熱膨張
係数の差が比較的大きいので、シリコンタイヤフラムｌ
に余計な歪が発生する問題があり、やはり使用が困難で
ある。In this way, the silicon pressure sensitive device detects the distortion of the silicon tire flamm 1 caused by the measured gas pressure by converting it into an air signal, and the distortion of the tire flamm 1 caused by factors other than the measured line body pressure is detected. It must be removed as much as possible. Therefore, conventionally, the support base 2 of the silicon tire flamm 1 is often made of silicon or (f) with a force similar to 5,
If the support base 2 and the impulse tube 3 are made of different materials, the assembly structure will be complicated, so it is desirable to simplify the structure by integrating them. However, if it is integrated with silicon, the price will be too high, and in the case of 10,000 glass,
Corrosion prevention materials such as the aforementioned Kovar alloy impulse pipe,
Since the temperature is difficult, it is difficult to integrate. Furthermore, even when integrated with only copper alloy like the impulse pipe 3, there is a relatively large difference in thermal expansion coefficient between the silicone tire flange and the cheaper 7J'-Si11 condenser.
However, there is a problem in that unnecessary distortion occurs, which makes it difficult to use.
本発明の目的はこれらの問題点を除去し、特に自動車の
排気ガスに幻する耐蝕性を有し、かつ構造が簡単で安価
なシリコン感圧装置を提供することである。The object of the present invention is to eliminate these problems and provide a silicon pressure-sensitive device that has corrosion resistance comparable to that of automobile exhaust gases, has a simple structure, and is inexpensive.
本発明によればこの目的はシリフン感圧装置にオイテ、
シリコンタイヤフラムを固定スル支持台と、この支持台
に連結される導圧管とをジルコン（’１ｒｏ２・Ｓｉｏ
、Ｊｆｌ成物）で一体に成形することにより達成される
。According to the invention, this purpose is achieved by using a pressure sensitive device.
A support base for fixing the silicon tire flam and a pressure pipe connected to this support base are made of Zircon ('1RO2・Sio
, Jfl composition).
以下、本発明の一実施例を第２図により説明する。An embodiment of the present invention will be described below with reference to FIG.
本発明により得られるジルコン導圧管８は、第１図で示
した支持台２と導圧管３を一体化したものに相当し、シ
リコンの熱膨張係数４．□ｘ １０ ／℃（４０〜４
００℃）に近似した３７〜４．２Ｘ １０ ／℃（４
０〜４００℃）の値の熱膨張係数をもつジルコン（Ｚｒ
Ｑ□・５ｉＱ２４ｆｔ成物）により成形されるものであ
る。このジルコン導圧管８は、その一端でシリコンタイ
ヤフラム１が接合される部分９と、環状支持体４が接合
するその（ｌｌｌ１面部分１０とにおいて、あらかじめ
クロム、モリブテン、タングステン等のいずれかの金属
化処理がされ、さらにその上に重ねてニッケル、金等の
半田に濡れやすい金属がメッキ処理にて被覆されてから
、各々半田にて接合される。The zircon impulse tube 8 obtained by the present invention corresponds to the integrated support base 2 and impulse tube 3 shown in FIG. 1, and has a thermal expansion coefficient of silicon of 4. □x 10/℃ (40~4
37-4.2X 10 /℃ (4
Zircon (Zr
Q□・5iQ24ft compound). This zircon impulse tube 8 is made of metal such as chromium, molybdenum, tungsten, etc. in advance at a part 9 where the silicon tire flamm 1 is joined at one end and at a surface part 10 where the annular support 4 is joined. After that, a metal that is easily wetted by solder, such as nickel or gold, is coated on top of it by plating, and then each is joined with solder.
そしてざらに第１図に示すものと同様にして、環状支持
体４により、このジルコン導圧管８は容器底板１１に固
定される。そしてやはり第１図と同様にして構成１され
る基進圧力室■３附の圧力を基準圧力として、ジルコン
導圧管８を通してへ入されるｆＩ１１定気圧体を検知し
、邦゛気信号に変換し、外部出力端子１７より測定圧を
出力する〇
このようにして％１気絶縁性νＣ優れたジルコンに−Ｃ
１支持台と導圧管を一体化したので、従来のように支持
台２のシリコンに絶縁部を形成したり、あるいは他の絶
縁体を介在させる必要がない。さらに、ジルコン自利、
耐蝕性が良好であるので、 ・従来のよ５に、あえて金
メツ千をしなくても、特に自＠直のυトラガスによる腐
蝕に対して充分な信頼性が得られる。The zircon impulse tube 8 is fixed to the container bottom plate 11 by the annular support 4 in a manner roughly similar to that shown in FIG. Then, using the pressure in the basic pressure chamber 3 constructed as shown in FIG. Then, the measured pressure is output from the external output terminal 17 〇 In this way, the %1 gas insulation νC excellent zircon -C
Since the support base 1 and the impulse tube are integrated, there is no need to form an insulating part on the silicon of the support base 2 or to intervene with another insulator, as in the conventional case. In addition, zircon self-interest,
Since the corrosion resistance is good, ・Sufficient reliability can be obtained, especially against corrosion caused by natural υ tragus, without the need for special measures as in the conventional case.
す上の説明では、基準圧力室を有し、その内の圧力を基
進圧力とするシリコン感圧装置について述べてきたが、
この基準圧力は、このような場合に限られることなく、
前記基準圧力室に大気開放口を設け、大気そのものを基
準圧力とするものも含む。さらに２種力１の気体の圧力
２：を検知する相対圧感圧装置にも同罎の構造であるの
で適用できる。In the above explanation, we have described a silicon pressure-sensitive device that has a reference pressure chamber and uses the pressure inside the chamber as the reference pressure.
This reference pressure is not limited to such cases, but
It also includes a case where the reference pressure chamber is provided with an atmosphere opening port and the atmosphere itself is used as the reference pressure. Further, since it has the same structure, it can be applied to a relative pressure sensing device that detects the pressure 2 of a gas of type 1.
本発明の一実施１９１１を示すシリコン感圧装置Ｆｔの
じ［面図である。FIG. 19 is a side view of a silicon pressure sensitive device Ft showing one embodiment 1911 of the present invention.
１・・・シリコン！；多圧タイヤフラム、８・・・ンル
フン導圧管。1...Silicon! ; Multi-pressure tire flam, 8...Nrufun impulse pipe.
Claims (1)
、他面には前記タイヤフラムの支持台と導圧管を通して
測定気体の圧力が加わるシリコン感圧装置において、前
記支持台と導圧管をジルコン（ＺｒＯ２・Ｓ ｉＱ２組
成物）で一体に成形したことを特徴とするシリフン感圧
装置。In a silicon pressure-sensitive device, a reference pressure is applied to one side of a silicon pressure-sensitive tire flammable device, and the pressure of a gas to be measured is applied to the other side through a supporting stand and a pressure guiding pipe of the tire flam. - A Sirifun pressure-sensitive device characterized by being integrally molded with SiQ2 composition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17658882A JPS5965741A (en) | 1982-10-07 | 1982-10-07 | Silicon pressure sensitive apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17658882A JPS5965741A (en) | 1982-10-07 | 1982-10-07 | Silicon pressure sensitive apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5965741A true JPS5965741A (en) | 1984-04-14 |
Family
ID=16016183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17658882A Pending JPS5965741A (en) | 1982-10-07 | 1982-10-07 | Silicon pressure sensitive apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5965741A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61199641U (en) * | 1985-06-04 | 1986-12-13 | ||
| JPH0319939U (en) * | 1989-02-22 | 1991-02-27 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5524423A (en) * | 1978-08-10 | 1980-02-21 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
-
1982
- 1982-10-07 JP JP17658882A patent/JPS5965741A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5524423A (en) * | 1978-08-10 | 1980-02-21 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61199641U (en) * | 1985-06-04 | 1986-12-13 | ||
| JPH0319939U (en) * | 1989-02-22 | 1991-02-27 |
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