JPS5961817A - Pockels cell - Google Patents
Pockels cellInfo
- Publication number
- JPS5961817A JPS5961817A JP57172620A JP17262082A JPS5961817A JP S5961817 A JPS5961817 A JP S5961817A JP 57172620 A JP57172620 A JP 57172620A JP 17262082 A JP17262082 A JP 17262082A JP S5961817 A JPS5961817 A JP S5961817A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- pockels cell
- housing
- electrodes
- cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Communication System (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はレーザ発振器のＱスイッチ素子等として用いら
れるポッケルスセル（Ｐｏｃｋｅｌｓ Ｃｅ１ｌ ）に
関し、特に潮解性を有する結晶、例えばＫＤ＊Ｐ（Ｄｅ
ｕｔｅｒａｔｅｄ Ｐｏｔａｓｓｉｕｍ Ｄｉｈｙｒｏ
ｇｅｎ Ｐｈｏｓｐ−ｈａｔｅ）を用いたポッケルスセ
ルに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a Pockels cell used as a Q-switch element of a laser oscillator, and particularly to a Pockels cell used as a Q-switch element of a laser oscillator.
uterated Potassium Dihyro
gen Phosp-hate).
ポッケルスセルは、偏光器と組み合わせ印加電圧を可変
することによシ、光に対する透過率を変えることが出来
るので、光変調器やレーザ発振器のＱスイッチ素子とし
て広く利用されている。特にレーザ発振器のＱスイッチ
素子として利用するポッケルスセルには、レーザ共振器
の中で使用する為Ｑスイッチが透過状態（光を最大限透
過させる状態）において透過損失が少ないこと、又ポッ
ケルスセルを通過する際のレーザ光パワーが非常に高い
ので、レーザ光パワーによシボッヶルスモル内部の結晶
が損傷しないこと、又Ｑスイッチの切換速度の早いこと
（スイッチの遮断状態から透過状態に変わる時間が短い
こと）等が要求される。Pockels cells are widely used as Q-switch elements in optical modulators and laser oscillators because they can change the transmittance of light by changing the applied voltage in combination with a polarizer. In particular, the Pockels cell used as a Q-switch element in a laser oscillator has low transmission loss when the Q-switch is in a transmitting state (a state in which maximum light is transmitted) because it is used inside a laser resonator, and the Pockels cell is used as a Q-switch element in a laser oscillator. Since the laser beam power used during this process is very high, the crystal inside the Shibokkaru Smol will not be damaged by the laser beam power, and the switching speed of the Q switch is fast (the time required for the switch to change from the blocking state to the transmitting state is short). etc. are required.
これらの条件を満足するポッケルスセルの結晶としては
Ｋ Ｄ’￥’ （Ｄｅｕｔｅｒａｔｅｄ Ｐｏｔａｓｓ
ｉｕｍ Ｄｉｈｙｄｒｏ−ｇｅｎ Ｐｂｏｓｐｈａｔｅ
）が一般的でｓ、ｂ広＜利用され−ｃいる。A Pockels cell crystal that satisfies these conditions is K D'\' (Deuterated Potass
ium Dihydro-gen Pbosphate
) is common and widely used.
従来のＫＤＰを用いたポッケルスセルの断面図を第１図
に示す。円柱状のＫＤＰｌはその両端部に電界を印加す
るための電極２及び３が蒸着等により取り付けられてお
）、電極２はノ・−メチツク端子４と、電極３はハーメ
チック端子５と各に電気的に接続されている。ＫＤＰＩ
は絶縁物６及び７によシハウジング８に固定されている
。ノ・ウジング８の内部はガラス面板９及び１０．０リ
ング１１及び１２により気密構造となり、ＫＤ＊ＰＩの
潮解を防止している。ガラス面板９及び１０の外側の面
には光の反射ロスを防止する為の無反射コーティングが
施されている。ＫＤＰＩの入出射面Ｂ及びＢＫ無反射コ
ーティングを施す事は技術的に困難であるので、ハウジ
ング８の内部を屈折率整合用の液体で満たし反射損失を
防止している。A cross-sectional view of a Pockels cell using a conventional KDP is shown in FIG. Electrodes 2 and 3 for applying an electric field are attached to both ends of the cylindrical KDPl by vapor deposition, etc.), and the electrode 2 is connected to the no-metic terminal 4, and the electrode 3 is connected to the hermetic terminal 5. connected. KDPI
is fixed to the housing 8 by insulators 6 and 7. The interior of the housing 8 has an airtight structure with the glass face plate 9 and 10.0 rings 11 and 12, which prevents the KD*PI from deliquescence. The outer surfaces of the glass face plates 9 and 10 are coated with a non-reflective coating to prevent reflection loss of light. Since it is technically difficult to apply antireflection coatings to the entrance and exit surfaces B and BK of KDPI, the inside of the housing 8 is filled with a liquid for refractive index matching to prevent reflection loss.
すなわちＫＤ Ｐｉの屈折率に近い値を持った液体を入
れる事によ！＞、ＫＤ ＰＩの入出射面Ｂ及びＢ′にお
ける屈折率差を少なくし反射損失を低減している。０リ
ング１４及び栓１３は、屈折率整合用の液体を入れる為
のものである。一方弁えネジ１５及び１６はガラス面板
９及び１０をノ・ウジング８に固定する為のものである
。In other words, by adding a liquid with a refractive index close to that of KD Pi! >, KD The difference in refractive index between the entrance and exit surfaces B and B' of the PI is reduced to reduce reflection loss. The O-ring 14 and the stopper 13 are for containing a liquid for refractive index matching. On the other hand, the valve screws 15 and 16 are for fixing the glass face plates 9 and 10 to the housing 8.
以上の様に構成されたポッケルスセルをレーザ共振器中
で使用した場合、まず電極２及び３からのリード線長が
長くなシ、インダクタンスが厖加し高速度（ｌＱｎｓ以
下）のスイッチングには適しないと言う欠点がある。When the Pockels cell configured as described above is used in a laser resonator, first, the lead wire lengths from electrodes 2 and 3 are long, and inductance increases, making it unsuitable for high-speed switching (1Qns or less). There is a drawback that there is no.
一方周囲温度によシ、０リング１１及び１２の締め付は
状態が異７５ニジ、面板９及び１０の平行度が微小量変
化し、屈折率整合用液体が入っているためポッケルスセ
ル通過光の曲り量が異寿る。従ってレーザ共振器中でポ
ッケルスセルを使用する場合、周囲温度の変化によシレ
ーザ光軸が変化し、レーザ共振器のアライメントを乱し
、レーザ出力の低下をきたすと言う欠点がある。特に使
用温度範囲の広いレーザ兄振器においてｔ、ｌｊｌ、レ
ーザ光軸の変化量が大きくなりレーザ出力の大幅な低下
をきたす恐れがある。On the other hand, depending on the ambient temperature, the tightening of the O-rings 11 and 12 is different, the parallelism of the face plates 9 and 10 changes slightly, and because the refractive index matching liquid is contained, the light passing through the Pockels cell changes. The amount of bending is different. Therefore, when a Pockels cell is used in a laser resonator, there is a drawback that the laser optical axis changes due to changes in ambient temperature, which disturbs the alignment of the laser resonator and causes a decrease in laser output. Particularly in the case of a large laser oscillator that is used over a wide temperature range, the amount of change in t, ljl, and laser optical axis becomes large, and there is a risk that the laser output will be significantly reduced.
更に、ＫＤＰｌの電極２及び３間に印〃０する電圧は通
常３〜４ＫＶの高圧となるので、絶縁の為ハーメチック
端子４及び５が大きくなるとともに、ハウジング８とＫ
Ｄ ｐｌの間隔を大きくする必要がおるから、小型軽量
化が困難であると言う欠点がある。Furthermore, since the voltage applied between the electrodes 2 and 3 of the KDPl is usually a high voltage of 3 to 4 KV, the hermetic terminals 4 and 5 become large for insulation, and the housing 8 and the K
Since it is necessary to increase the distance between D pl, there is a drawback that it is difficult to reduce the size and weight.
本発明の目的は、小型軽量でインダクタンスの小さいポ
ッケルスセルの提供にある。An object of the present invention is to provide a Pockels cell that is small, lightweight, and has low inductance.
本発明の構成は、光軸方向の両端部に第１及び第２の電
極をそれぞれ備えるポッケルス結晶と、このポッケルス
結晶を内包し前記光軸方向に開口を有するハウジングと
、板面を前記光軸に直交させて前記開口を塞いでいる透
明板と、ノ・ウジ／グ内に満してあシ屈折率が前記ポッ
ケルス結晶と整合している液体とからなるポッケルスセ
ルにおいて、前記ハウジングは、前記第１及び第２の電
極の近傍外方部を少なくともそれぞれ覆う第１及び導電
体に、前記第２の電極は第４の導電体で前記第２の導電
１体にそれぞれ接続しであることを特徴とする。The configuration of the present invention includes: a Pockels crystal having first and second electrodes at both ends in the optical axis direction; a housing containing the Pockels crystal and having an opening in the optical axis direction; In the Pockels cell, the housing includes a transparent plate that is perpendicular to the opening and closes the opening, and a liquid that is filled in the nozzle and has a refractive index that matches that of the Pockels crystal. The second electrode is connected to the second conductor by a fourth conductor, and the second electrode is connected to the second conductor by a fourth conductor. Features.
次に図面を参照して本発明の詳細な説明する。Next, the present invention will be described in detail with reference to the drawings.
第２図は本発明の一実施例を示す断面図であシ、円柱状
のＫＤＰＩの一端外周に円筒状に蒸着しておる電極２は
円筒状のスプリング２０によシハウジングの一部をなす
円筒状電極１７に、ＫＤＰｌの他端の電極３は円筒状の
スプリング２１によシハウジングの一部をなす円筒状電
極１８に電気的に接続されている。ポッケルスセルとし
てのハウジングは円筒状電極１７及び１Ｂとセラミック
等の円筒状絶縁物１９によシ構成されている。FIG. 2 is a cross-sectional view showing one embodiment of the present invention, in which an electrode 2 deposited in a cylindrical shape on the outer periphery of one end of a cylindrical KDPI forms a part of a housing along with a cylindrical spring 20. The cylindrical electrode 17 and the electrode 3 at the other end of the KDP1 are electrically connected to a cylindrical electrode 18 forming a part of the housing by a cylindrical spring 21. The housing as a Pockels cell is composed of cylindrical electrodes 17 and 1B and a cylindrical insulator 19 made of ceramic or the like.
ガラス面板９及び１０は、それぞれ電極１７及び１８に
直接接触しており、０リング１１．１２及び押えネジ１
５’、１６’によシボッケルセセルのハウジングを気密
化している。１りＤＰｌは円筒状スプリング２０及び２
１によシ保持されておυ、更にコイル状スプリング２３
によりスペーサ２２を介してガラス面板９に押しつけら
れ、より−）ｒ４ Ｕ（ｆ実に保持されている。栓１３
及びＯリング１．４ｈ、ＫＤ Ｐｌに対する屈折率整合
用の液体を入れるためのものである。The glass face plates 9 and 10 are in direct contact with the electrodes 17 and 18, respectively, and are in direct contact with the O-rings 11.12 and the cap screws 1.
5' and 16' make the housing of the seal cell airtight. 1 DPl is a cylindrical spring 20 and 2
1 is held by υ, and further a coiled spring 23
The stopper 13 is pressed against the glass face plate 9 through the spacer 22, and is held in place by the stopper 13.
and an O-ring 1.4h for containing liquid for refractive index matching to KD Pl.
第２図に示す構造よシ明らかな様に、ＫＤ＊Ｐ１の電極
２と円柱状電極１８間は円筒状のスプリング２０によシ
、又ＫＤ Ｐｌの電極３と円柱状電極１８間は円筒状ス
プリング２１にょシミ気的に接続されるためインダクタ
ンスが従来例に比較して少なくなシ高速度のスイッチン
グに適する。As is clear from the structure shown in FIG. 2, a cylindrical spring 20 is provided between the electrode 2 of KD*P1 and the cylindrical electrode 18, and a cylindrical spring 20 is provided between the electrode 3 of KD Pl and the cylindrical electrode 18. Since the spring 21 is electrically connected to the spring 21, the inductance is smaller than that of the conventional example, making it suitable for high-speed switching.
一方ガラス面板９は円筒状ｉ！棲１７に、ガラス面板１
０は電極１８に直＃接触させ、それぞれ押えネジ１５′
及び１６′にょシ固定している。従って周囲温度の変化
によシＯｙング１１及び１２の締めつけ状態が変化して
も、ガラス面板９及び１゜の平行度は変化しない事は明
らかであシ、ポッケルスセル通過光の曲シ量は周囲温度
に関係なく一定であシ、レーザ共振器のアライメントを
乱す恐れはない。On the other hand, the glass face plate 9 has a cylindrical shape i! 17, glass face plate 1
0 is in direct contact with the electrode 18, and each holding screw 15'
and 16' are fixed. Therefore, it is clear that even if the tightening conditions of the glasses 11 and 12 change due to changes in the ambient temperature, the parallelism of the glass face plates 9 and 1° will not change, and the amount of curvature of the light passing through the Pockels cell will not change. It is constant regardless of the ambient temperature, and there is no risk of disturbing the alignment of the laser resonator.
又第２図に示す構造よシ明らかな様に、ＫＤ＊Ｐ１の電
極２と円筒状電極１７間、及びＫＤ＊ＰＩの電極３と円
筒状電極１８間は電気的絶縁を考慮する必要がなく、機
構上可能な限シ近づけることが出来、更に電極としてハ
ーメチック端子を使用しないので、ポッケルスセルのハ
ウジングを構成する円筒状電極１７．１８及び円筒状絶
縁物１９の径を大幅に小型化出来き、ポッケルスセルと
して小型軽量化となる。Furthermore, as is clear from the structure shown in FIG. 2, there is no need to consider electrical insulation between the electrode 2 of KD*P1 and the cylindrical electrode 17, and between the electrode 3 of KD*PI and the cylindrical electrode 18. , the diameters of the cylindrical electrodes 17 and 18 and the cylindrical insulator 19 that make up the Pockels cell housing can be significantly reduced because the electrodes can be made as close as possible mechanically, and since hermetic terminals are not used as electrodes. , it becomes smaller and lighter as a Pockels cell.
なお、前記従来例に比較してハーメチックシールとＫＤ
Ｐｌの電極を結ぶリード線の接合工事が不要となシ、ポ
ッケルスセルの組み立て工事が容易になると言う利点も
ある。In addition, compared to the conventional example, the hermetic seal and KD
There is also the advantage that there is no need to work on joining the lead wires that connect the Pl electrodes, and the assembly work of the Pockels cell becomes easier.
以上本発明の一実施例について説明したが、本発明の主
旨を損なうことなく種々の変形が可能である。例えばガ
ラス面板１０及び１１は押えネジで固定する必要はなく
接着剤等によシ固定してもよく、又ポッケルスセル結晶
を円柱状に限定する必要もなく、角柱状の結晶を用いて
もよい。又ポッケルスセル結晶の電極として、光を通過
させる穴のあいた電極をポッケルスセル端面に接触させ
た方式にも本発明を適用出来る事は明らかである。Although one embodiment of the present invention has been described above, various modifications can be made without departing from the gist of the present invention. For example, the glass face plates 10 and 11 do not need to be fixed with presser screws, but may be fixed with an adhesive or the like, and the Pockels cell crystal does not need to be limited to a cylindrical shape, and a prismatic crystal may be used. . It is clear that the present invention can also be applied to a method in which an electrode with a hole through which light passes is brought into contact with the end face of the Pockels cell as the electrode of the Pockels cell crystal.
本発明によるポッケルスセルには、以上説明したように
、絶縁物とその両端に密着した一対の電極よシ構成され
るハウジングの内部に一対の電極を備えたポッケルス結
晶を内包し、ハウジングの両端部に一対のガラス面板を
密着させ、ハウジングの一部をポッケルスセルの電極と
して利用する様構成した事により、小型軽量で、電気的
インダクタンスが従来例に比して大幅に少なくなシ高速
度のスイッチングに適し、更に周囲温度の変化に一メチ
ツクシールとポッケルスセル結晶の電極とをリード線で
接続する工事が不用となシ、ポッケルスセルの組立工事
が容易になると１゛う効果もある。As explained above, the Pockels cell according to the present invention includes a Pockels crystal with a pair of electrodes inside the housing, which is composed of an insulator and a pair of electrodes in close contact with both ends of the housing. By attaching a pair of glass face plates to the housing and using a part of the housing as the electrode of the Pockels cell, it is small and lightweight, has significantly less electrical inductance than conventional models, and has high-speed switching. Furthermore, there is the additional effect that the assembly work of the Pockels cell becomes easier, since there is no need to connect the mesh seal and the electrode of the Pockels cell crystal with a lead wire in response to changes in ambient temperature.
第１図は従来のポッケルスセルの断面図であシ、第２図
は本発明の１実施例を示す断面図である。
１・・・・・・円柱状ＫＤＰ、２，３・・・・・・円柱
状ＫＤ Ｐの電極、４，５・・・・・・ハーメチック端
子、６，７・・・・・・ＫＤ Ｐ保持用絶縁物、８・・
・・・・ポッケルスセルのハウジング、９．１０・・・
・・・ガラス面板、１１．１２・・・・・・０リング、
１３・・・・・・栓、１４・・・・・・０リング、１５
．１５’ 、１６，１６’・・・・・・押えネジ、１７
，１８・・・・・・ポッケルスセルのハウジングの一部
をシす円筒状電極、１９・・・・・・ポッケルスセルの
ハウジングの一部をなす円筒状絶縁物、２０．２１・・
・・・・円筒状スプリング、２２・・・・・・スペーサ
、２３・・・・・・コイルｔ（スプリング。
代理人 弁理士 内 原 晋FIG. 1 is a sectional view of a conventional Pockels cell, and FIG. 2 is a sectional view showing one embodiment of the present invention. 1...Cylindrical KDP, 2,3...Cylindrical KDP electrode, 4,5...Hermetic terminal, 6,7...KD P Holding insulator, 8...
...Pockels cell housing, 9.10...
...Glass face plate, 11.12...0 ring,
13...Bung, 14...0 ring, 15
．． 15', 16, 16'... Cap screw, 17
, 18... Cylindrical electrode forming part of the Pockels cell housing, 19... Cylindrical insulator forming part of the Pockels cell housing, 20.21...
... Cylindrical spring, 22 ... Spacer, 23 ... Coil t (spring. Agent: Susumu Uchihara, patent attorney)
Claims (1)
るポッケルス結晶と、このポッケルス結晶を内包し前記
光軸方向に開口を有するハウジングと、板面を前記光軸
に直交させて前記開口を塞いでいる透明板と、ハウジン
グ内に満してあシ屈折率が前記ポッケルス結晶と整合し
ている液体とからなるポッケルスセルにおいて、前記ハ
ウジングは、前記第１及び第２の電極の近傍外方部を少
なくともそれぞれ覆う第１及び第２の導電体と、前記第
１及び第２の導電体を絶縁する物体とからなり、前記第
１の電極は第３の導電体で前記第１の導電体に、前記第
２の電極は第４の導電体で前記第２の導電体にそれぞれ
接続しであることを特徴とするポッケルスセル。A Pockels crystal including first and second electrodes at both ends in the optical axis direction, a housing containing the Pockels crystal and having an opening in the optical axis direction, and a housing with a plate surface perpendicular to the optical axis and the opening. In the Pockels cell, the housing includes a transparent plate blocking the first and second electrodes, and a liquid filled in the housing and having a refractive index matching that of the Pockels crystal. The first electrode is a third conductor and the first conductor is a third conductor. A Pockels cell, wherein the second electrodes are respectively connected to the second conductors by fourth conductors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57172620A JPS5961817A (en) | 1982-10-01 | 1982-10-01 | Pockels cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57172620A JPS5961817A (en) | 1982-10-01 | 1982-10-01 | Pockels cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5961817A true JPS5961817A (en) | 1984-04-09 |
Family
ID=15945245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57172620A Pending JPS5961817A (en) | 1982-10-01 | 1982-10-01 | Pockels cell |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5961817A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005059634A1 (en) * | 2003-11-25 | 2005-06-30 | Linos Photonics Gmbh & Co. Kg | Electrooptical element |
| WO2007078649A1 (en) * | 2005-12-20 | 2007-07-12 | Bookham Technology Plc | Electro-optic modulator |
| CN109387951A (en) * | 2018-12-07 | 2019-02-26 | 中国工程物理研究院激光聚变研究中心 | The Alignment technology of optical device dress smoothing platform and single port diameter electrooptical switching |
| WO2019038410A1 (en) * | 2017-08-24 | 2019-02-28 | Trumpf Laser Gmbh | Vibration-damped pockels cell |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4712936U (en) * | 1971-03-08 | 1972-10-16 | ||
| JPS4915447A (en) * | 1972-05-18 | 1974-02-09 |
-
1982
- 1982-10-01 JP JP57172620A patent/JPS5961817A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4712936U (en) * | 1971-03-08 | 1972-10-16 | ||
| JPS4915447A (en) * | 1972-05-18 | 1974-02-09 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005059634A1 (en) * | 2003-11-25 | 2005-06-30 | Linos Photonics Gmbh & Co. Kg | Electrooptical element |
| US7324266B2 (en) | 2003-11-25 | 2008-01-29 | Linos Photonics Gmbh & Co. Kg | Electrooptical element |
| WO2007078649A1 (en) * | 2005-12-20 | 2007-07-12 | Bookham Technology Plc | Electro-optic modulator |
| US7463397B2 (en) | 2005-12-20 | 2008-12-09 | Bookham Technology Plc | Electro-optic modulator |
| WO2019038410A1 (en) * | 2017-08-24 | 2019-02-28 | Trumpf Laser Gmbh | Vibration-damped pockels cell |
| CN109387951A (en) * | 2018-12-07 | 2019-02-26 | 中国工程物理研究院激光聚变研究中心 | The Alignment technology of optical device dress smoothing platform and single port diameter electrooptical switching |
| CN109387951B (en) * | 2018-12-07 | 2023-09-22 | 中国工程物理研究院激光聚变研究中心 | Assembling and calibrating process for single-aperture electro-optical switch |
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