JPS5960723A - Core formation of thin film magnetic head - Google Patents
Core formation of thin film magnetic headInfo
- Publication number
- JPS5960723A JPS5960723A JP17128582A JP17128582A JPS5960723A JP S5960723 A JPS5960723 A JP S5960723A JP 17128582 A JP17128582 A JP 17128582A JP 17128582 A JP17128582 A JP 17128582A JP S5960723 A JPS5960723 A JP S5960723A
- Authority
- JP
- Japan
- Prior art keywords
- core
- pattern
- magnetic
- magnetic field
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
（１）、発明の技術分野
この発゛明は薄膜磁気ヘッドのコア形成方法に係り、特
に基板上に７オトレジストでコアパターンを形成した後
、その部分に静磁界中で電気メッキを行う方式のコア形
成方法に関する。Detailed Description of the Invention (1) Technical Field of the Invention The present invention relates to a method for forming a core of a thin-film magnetic head, and in particular, after forming a core pattern on a substrate using a 7-photoresist, that portion is exposed to a static magnetic field. The present invention relates to a core forming method using electroplating.
（２）、技術の背景
近年、磁性媒体の高記録密度化に伴い、その記録再生に
使用される磁気ヘッドには薄膜磁気ヘッドが利用される
ようになってきている。特に高トラツク密度化が進むに
つれ、磁気記録媒体と摺接する薄膜ヘッド先端の幅が３
０μｍないしそれ以下になり、このようにヘッド幅が減
少してくると、コアの形状異方性磁界が大きくなって希
望する異方性の磁区構造が得にくく、ひいては再生効率
の低下、雑音発生を招来させる結果となる。したがって
、コアの形状に左右されない希望の異方性を有するコア
の出現が要望されている。(2) Background of the Technology In recent years, with the increase in the recording density of magnetic media, thin film magnetic heads have come to be used as magnetic heads used for recording and reproduction. In particular, as track density increases, the width of the tip of the thin film head that makes sliding contact with the magnetic recording medium increases by 3.
When the head width decreases to 0 μm or less, the anisotropic magnetic field of the core shape increases, making it difficult to obtain the desired anisotropic domain structure, which in turn reduces playback efficiency and generates noise. This results in the occurrence of Therefore, there is a demand for a core having a desired anisotropy that is not affected by the shape of the core.
（３）、従来技術の問題点
従来の薄膜磁気ヘッド用コアの成形方法としては、メタ
ライズ層を形成した基板上に７オトレシストによシコア
形状に応じたメッキマスクを形成し、このマスク部分に
靜磁界中でメッキする方法、あるいは電流の集中を避け
るために、特開昭５５−４２３７０号の如くメタライズ
した基板上にコアの輪郭形状に７オトレジストの枠を形
成し、そして靜磁界中で基板全面にパーマロイ等の磁性
膜をメッキによシ形成した後、コア以外の部分を除去し
て、第１図に示す如き形状の薄膜状コア１を形成する方
法が提案されている。(3) Problems with the Prior Art The conventional method for forming cores for thin-film magnetic heads involves forming a plating mask according to the shape of the core using a 7-oto-resist on a substrate on which a metallized layer is formed, and applying a thin film to this mask portion. In order to perform plating in a magnetic field or to avoid concentration of current, a frame of 7 otoresist is formed in the contour shape of the core on a metalized substrate as described in JP-A No. 55-42370, and the entire surface of the substrate is plated in a quiet magnetic field. A method has been proposed in which a magnetic film such as permalloy is formed by plating, and then parts other than the core are removed to form a thin film core 1 having a shape as shown in FIG.
しかし、上記いずれの場合もコア１の幅ｔが減少するに
したがい、コアの形状異方性磁界が大きくなり、希望す
る異方性の付与が困難となる。即ち、上記のような方法
で形成されたコアｌの磁区構造は第２図に示すような分
布状態となり、特に磁気記録媒体と摺接するコア先端１
ａの磁区内の磁化方向がほぼ縦方向を向いてしまう。こ
の上うな磁区構造のコアでは、磁化された記録媒体との
相対移動によるコアの磁束密度の変化が制限され、記録
情報の再生効率を低下させるとともに、雑音発生の原因
となって、媒体上の情報読み取りに悪影響を及ばずこと
になる。したがって、コア先端１ａにおける磁区内の磁
化方向が横方向を向くような磁区構造とすることが望ま
れるのである。However, in any of the above cases, as the width t of the core 1 decreases, the core shape anisotropy magnetic field increases, making it difficult to provide the desired anisotropy. That is, the magnetic domain structure of the core l formed by the above method has a distribution state as shown in FIG.
The magnetization direction in the magnetic domain a is almost vertical. In addition, in a core with such a magnetic domain structure, changes in the magnetic flux density of the core due to relative movement with the magnetized recording medium are restricted, which reduces the reproduction efficiency of recorded information and causes noise generation. This will have no negative effect on information reading. Therefore, it is desirable to have a magnetic domain structure in which the magnetization direction within the magnetic domain at the core tip 1a is oriented in the horizontal direction.
（４）１発明の目的
そこでこの発明は、上記点に＠みなされたもので、薄膜
磁気へラドコアのコア幅を規定するフォトレジストパタ
ーンの外側にコア形状とは異なるパターンを同時形成し
、これによりコア形状によって定まるコアの形状異方性
磁界を打ち消し、希望する異方性の磁区構造を形成でき
るようにした薄膜磁気ヘッドのコア形成方法を提供する
ことを目的とする。(4) 1 Purpose of the Invention Therefore, the present invention addresses the above points, and simultaneously forms a pattern different from the core shape on the outside of the photoresist pattern that defines the core width of the thin film magnetic rad core. It is an object of the present invention to provide a method for forming a core of a thin-film magnetic head, which cancels the core shape anisotropy magnetic field determined by the core shape and forms a desired anisotropic magnetic domain structure.
（５）６発明の構成
上記目的を達成するためにこの発明は、磁性薄膜の形状
異方性を利用し、薄膜磁気へラドコアのコア幅を規定す
るフォトレジストパターンの外側に、メッキ時の外部印
加磁界の向きと平行に形状異方性をもつ磁気コントロー
ルパターンを同時に形成し、そのパターンの形状異方性
磁界と外部印加磁界とによってコアの形状異方性磁界を
打ち消してコアに希望する異方性が付与できるようにし
たものである。(5) 6 Structure of the Invention In order to achieve the above object, the present invention utilizes the shape anisotropy of a magnetic thin film to form an external layer on the outside of a photoresist pattern that defines the core width of a thin film magnetic rad core during plating. A magnetic control pattern having shape anisotropy is simultaneously formed parallel to the direction of the applied magnetic field, and the shape anisotropy magnetic field of the core is canceled by the shape anisotropy magnetic field of the pattern and the externally applied magnetic field to produce the desired anisotropy in the core. This allows for the provision of directionality.
（６）１発明の実施例
以下、この発明にかかる薄膜磁気ヘッドコア形成方法の
一実施例を、その製造工程を示す第３図〜第６図に基づ
いて説明する。(6) First Embodiment of the Invention An embodiment of the thin film magnetic head core forming method according to the present invention will be described below with reference to FIGS. 3 to 6 showing the manufacturing process thereof.
１ず、第３図（ａ） 、 （１）） 、 （ｃ）に示す
ようにセラミック等の基板１０土にメッキ用導ｔＭ１１
を蒸着などの手段により形成した後、メッキ用導電層１
１上に磁気へラドコアの輪郭形状に対応したコア用パタ
ーン１２をフォトレジストのノ（ターニングにより枠状
に形成するとともに、横方向の異方性がつきにくいコア
先端部分（コア用パターン１２の部分１２ａに相当）の
左右両側に横方向に−疑い異方性伺与用パターン１３を
フォトレジストのバターニングによシ枠状に形成する。1. As shown in FIGS. 3(a), (1)), and (c), a plating conductor tM11 is placed on a substrate 10 made of ceramic or the like.
is formed by means such as vapor deposition, and then a conductive layer 1 for plating is formed.
1, a core pattern 12 corresponding to the contour shape of the magnetic helad core is formed into a frame shape by turning a photoresist. Patterns 13 for imparting suspicious anisotropy are formed laterally on both the left and right sides of the photoresist (corresponding to 12a) in the form of a frame by patterning the photoresist.
このとき、コア用パターン１２の部分１２ａと異方性付
与用パターン１３間の隙間ｄは後述するメッキ膜厚以下
とすることが望丑しい。次に上記バター７１２．１３を
形成したメッキ用導電層１１上に第４図（ａ） 、 （
ｂ）に示す如く矢印Ａで示す方向に外部磁界を印加した
状態で・く−マロイなどの磁性膜１４を電気メッキによ
り形成する。このように磁場中でメッキを行うと、異方
性伺与用パターン１３内に形成される磁性膜部分１４ａ
では横方向（パターン１４ａの長手方向）に異方性がつ
き易くなり、これに伴い磁性膜部分１４ａ、１４ａ間に
挾まれているコア先端部分に相当する磁性膜部分１４ｂ
もその影響を受ける。即ち、磁性膜部分１４ａの形状異
方性磁界と矢印Ａに示す外部印加磁界とによってコア先
端部分に相当する磁性膜部分１４ｂの形状異方性磁界を
打ち消して、第７図に示す如く磁区内の磁化方向が横に
なる横方向の異方性を有する状態にコントロールできる
ことになる。At this time, it is preferable that the gap d between the portion 12a of the core pattern 12 and the anisotropy imparting pattern 13 be equal to or less than the plating film thickness, which will be described later. 4(a), (
As shown in b), a magnetic film 14 made of Coomalloy or the like is formed by electroplating while an external magnetic field is applied in the direction shown by arrow A. When plating is performed in a magnetic field in this way, the magnetic film portion 14a is formed within the anisotropy imparting pattern 13.
In this case, anisotropy tends to occur in the lateral direction (longitudinal direction of the pattern 14a), and as a result, the magnetic film portion 14b corresponding to the core tip portion sandwiched between the magnetic film portions 14a, 14a.
is also affected by it. That is, the shape anisotropy magnetic field of the magnetic film portion 14b corresponding to the core tip portion is canceled by the shape anisotropy magnetic field of the magnetic film portion 14a and the externally applied magnetic field shown by arrow A, so that the shape anisotropy magnetic field of the magnetic film portion 14b corresponding to the core tip portion is canceled out, and the magnetic field inside the magnetic domain as shown in FIG. This means that it can be controlled to have lateral anisotropy in which the magnetization direction is horizontal.
次に第５図（ａ） 、 （ｂ）に示すようにコア用パタ
ーン１２及び該コア用パターン１２により包囲されたコ
アに相当する磁性膜部分１４ｃの表面をフォトレジスト
ｗ１１５のパターニングにより被俊し、しかる後、フオ
トレジス） ノ會１ 、＞で被覆された部分を除く異方
性付与用パターン１３、これで囲まれた磁性膜部分１４
ａ及び他の磁性膜１４を除去し、さらにフォトレジスト
層１５、 及びコア用パターン１２をエツチングによ
、１去して、第６図に示す目的のコア１６を形成する０
このようにして形成されたコア１６の磁区構造は第７図
に示すような分布状態となり、特に記録媒体と摺接する
コア先端部１７ａの磁区内の磁化方向は横を向いた状態
にすることができる。また、このような磁区分布にする
ことにより、再生効率の低下及び雑音の発生を防止でき
、良好な再生出力が得られるのでめる。Next, as shown in FIGS. 5(a) and 5(b), the surface of the core pattern 12 and the magnetic film portion 14c corresponding to the core surrounded by the core pattern 12 is patterned with photoresist w115. , after that, the photoresist) No. 1, the anisotropy imparting pattern 13 excluding the portion covered with >, and the magnetic film portion 14 surrounded by this.
A and other magnetic films 14 are removed, and the photoresist layer 15 and core pattern 12 are removed by etching to form the desired core 16 shown in FIG. The magnetic domain structure of the core 16 thus obtained has a distribution state as shown in FIG. 7, and in particular, the magnetization direction within the magnetic domain of the core tip 17a that makes sliding contact with the recording medium can be made to be in a horizontal state. Further, by adopting such a magnetic domain distribution, it is possible to prevent a reduction in reproduction efficiency and the generation of noise, and to obtain a good reproduction output.
上記実施例では、フォトレジストの枠を形成してメッキ
成膜を行った場合について述べたが、これに限定される
ものではない。例えば第８図に示すようにコア形状に相
轟するパターン２０及び異方性付与用パターン２１の部
分を除いてフォトレジストによりパターニングし、上記
パターン２０．２１の部分のみにメッキ薄膜を形成する
ようにしても上記実施例と同様な効果が得られる。In the above embodiment, a case was described in which a photoresist frame was formed and plating film formation was performed, but the present invention is not limited to this. For example, as shown in FIG. 8, patterning is performed using photoresist except for the pattern 20 and the anisotropy imparting pattern 21 that overlap with the core shape, and a plating thin film is formed only on the pattern 20 and 21. Even in this case, the same effect as in the above embodiment can be obtained.
また、異方性付与用パターンは除去されるのが−ｆＨ通
であるが、製品として残す場合もある。Further, although the anisotropy imparting pattern is generally removed in -fH, it may be left as a product.
この場合、パターンが残存することにより、磁気ヘッド
の記録動作時にコア幅より広く記録することになる。ま
た、再生時にはコア幅部分のみが再生を行うため、所謂
ワイド・タイト・ナロー・リードが実現でき、良好な再
生信号が得られる。In this case, since the pattern remains, recording is performed wider than the core width during the recording operation of the magnetic head. Furthermore, since only the core width portion is reproduced during reproduction, a so-called wide-tight-narrow read can be realized, and a good reproduced signal can be obtained.
（７）０発明の効果
以上詳述したようにこの発明のコア形成方法によれば、
薄膜磁気へラドコアのコア幅を規定するフォトレジスト
パターンの外側に、メッキ時の外部印加磁界の向きと平
行に形状異方性をもつ薄膜パターンを同時形成し、その
パターンの形状異方性磁界と外部印加磁界とによってコ
アの形状異方性磁界を打ち消すようにしたものであるか
ら、コア、特に記録媒体と摺接するコア先端部に横方向
の異方性を容易に付与することができ、かつコアの磁化
反転速度の＾速比も可能になる利点がある。(7) Effects of the invention As detailed above, according to the core forming method of the invention,
A thin film pattern with shape anisotropy parallel to the direction of the externally applied magnetic field during plating is simultaneously formed on the outside of the photoresist pattern that defines the core width of the thin film magnetic rad core. Since the shape anisotropy magnetic field of the core is canceled by an externally applied magnetic field, it is possible to easily impart lateral anisotropy to the core, especially the tip of the core that makes sliding contact with the recording medium, and There is an advantage that the speed ratio of the magnetization reversal speed of the core can be adjusted.
第１図は従来における薄膜磁気へラドコアの説明図、Ｍ
２図はその磁区構造を示す説明図、第３図〜第６図はこ
の発明にかかるコア形成方法の製造工程を説明するだめ
の一例を示すもので、第３図（ａ）はフォトレジストパ
ターン形成時の平面図、同図（ｂ） 、 （ｅ）はそれ
ぞれ第３図（ａ）のＢ−Ｂ線、Ｃ−Ｃ線に沿う断面図、
第４図（ａ）は磁場中での磁性膜形成時の平面図、同図
（ｂ）はそのＢ−Ｂ線に沿う断面図、第５図（ａ）はコ
ア部分にフォトレジストをパターニングした状態を示す
平面図、同図（ｂ）はそのＢ−Ｂ線に沿う断面図、第６
図（ａ）は周辺部エツチング除去後のコア児成後の平面
図、同図（ｂ）はそのＢ−Ｂ線に沿う断面図、第７図は
この発明により形成されたコアの磁区構造を示す説明図
、８Ｆ！８図はこの発明の他の実施例を示すフォトレジ
ストパターンの平面図である。
生な符号の説明
１０は基板、１１はメッキ用導’ＦＩＬ層、１２はコア
用パターン、１３は異方性付与用パターン、１４は磁性
膜、１５はフォトレジスト層、１６はコアである。Figure 1 is an explanatory diagram of a conventional thin film magnetic herad core, M
FIG. 2 is an explanatory diagram showing the magnetic domain structure, FIGS. 3 to 6 are an example of the manufacturing process of the core forming method according to the present invention, and FIG. 3(a) is an illustration of the photoresist pattern. A plan view at the time of formation, FIGS. 3(b) and 3(e) are cross-sectional views taken along line B-B and line C-C in FIG.
Fig. 4(a) is a plan view of the magnetic film formed in a magnetic field, Fig. 4(b) is a cross-sectional view taken along line B-B, and Fig. 5(a) is a photoresist patterned on the core part. A plan view showing the state, the same figure (b) is a sectional view along the line B-B,
Figure (a) is a plan view of the core formed after peripheral etching has been removed, figure (b) is a sectional view taken along line B-B, and Figure 7 shows the magnetic domain structure of the core formed according to the present invention. Explanatory diagram shown, 8F! FIG. 8 is a plan view of a photoresist pattern showing another embodiment of the present invention. 10 is a substrate, 11 is a conductive FIL layer for plating, 12 is a core pattern, 13 is an anisotropy imparting pattern, 14 is a magnetic film, 15 is a photoresist layer, and 16 is a core.
Claims (1)
し、静磁界中で電気メツキ成膜を行う磁気へラドコアの
形成方法において、上記コア用パターンの外側にメッキ
時の靜磁界の向きと平行に形状異方性をもつ異方性付与
用パターンを同時形成することを特徴とする薄膜磁気ヘ
ッドのコア形成方法。In the method of forming a magnetic core in which a pattern for the υ core is formed using photoresist on the second substrate and electroplating is performed in a static magnetic field, a pattern is formed on the outside of the core pattern parallel to the direction of the static magnetic field during plating. A method for forming a core of a thin-film magnetic head, comprising simultaneously forming an anisotropy-imparting pattern having shape anisotropy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17128582A JPS5960723A (en) | 1982-09-30 | 1982-09-30 | Core formation of thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17128582A JPS5960723A (en) | 1982-09-30 | 1982-09-30 | Core formation of thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5960723A true JPS5960723A (en) | 1984-04-06 |
Family
ID=15920482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17128582A Pending JPS5960723A (en) | 1982-09-30 | 1982-09-30 | Core formation of thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5960723A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62159096A (en) * | 1986-01-08 | 1987-07-15 | 株式会社東芝 | Output region monitor |
| JPH0271413A (en) * | 1988-05-12 | 1990-03-12 | Digital Equip Corp <Dec> | Manufacture of pole piece having improved magnetic domain structure |
| FR2651600A1 (en) * | 1989-09-06 | 1991-03-08 | Commissariat Energie Atomique | PROCESS FOR PRODUCING A MAGNETIC HEAD WITH A SIMILAR MAGNETIC AXIS, AND PROPERLY ORIENTED MAGNETIC HEAD, OBTAINED BY THIS PROCESS. |
-
1982
- 1982-09-30 JP JP17128582A patent/JPS5960723A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62159096A (en) * | 1986-01-08 | 1987-07-15 | 株式会社東芝 | Output region monitor |
| JPH0271413A (en) * | 1988-05-12 | 1990-03-12 | Digital Equip Corp <Dec> | Manufacture of pole piece having improved magnetic domain structure |
| FR2651600A1 (en) * | 1989-09-06 | 1991-03-08 | Commissariat Energie Atomique | PROCESS FOR PRODUCING A MAGNETIC HEAD WITH A SIMILAR MAGNETIC AXIS, AND PROPERLY ORIENTED MAGNETIC HEAD, OBTAINED BY THIS PROCESS. |
| US5113575A (en) * | 1989-09-06 | 1992-05-19 | Commissariat A L'energie Atomique | Process for producing a magnetic head with an appropriately oriented easy axis of magnetization |
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