JPS595326B2 - Steam drying tank using fluorinated chlorinated hydrocarbons - Google Patents
Steam drying tank using fluorinated chlorinated hydrocarbonsInfo
- Publication number
- JPS595326B2 JPS595326B2 JP9675281A JP9675281A JPS595326B2 JP S595326 B2 JPS595326 B2 JP S595326B2 JP 9675281 A JP9675281 A JP 9675281A JP 9675281 A JP9675281 A JP 9675281A JP S595326 B2 JPS595326 B2 JP S595326B2
- Authority
- JP
- Japan
- Prior art keywords
- chlorinated hydrocarbons
- fluorinated chlorinated
- liquid
- water
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Extraction Or Liquid Replacement (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning By Liquid Or Steam (AREA)
Description
【発明の詳細な説明】
この発明は弗素化塩素化炭化水素類を用いた蒸気乾燥槽
に関するものである。DETAILED DESCRIPTION OF THE INVENTION This invention relates to a steam drying tank using fluorinated chlorinated hydrocarbons.
弗素化塩素化炭化水素類を用いた蒸気乾燥槽は超音波洗
浄した精密部品の乾燥の為多く使用されているが、液状
の弗素化塩素化炭化水素類中に水、アルコール等が混入
し、これによつて被洗浄物にシミが付くことがあつた。
第1図は従来の代表的な弗素化塩素化炭化水素類を用い
た蒸気乾燥槽であり、槽本体1の下部に5 は液状の弗
素化塩素化炭化水素類2が溜められており、この槽本体
1の下面に配設されたヒーター3によつて、この液状の
弗素化塩素化炭化水素類2が加温され蒸気を発生させる
ようになつていた。Steam drying tanks using fluorinated chlorinated hydrocarbons are often used to dry precision parts that have been ultrasonically cleaned, but water, alcohol, etc. may get mixed into the liquid fluorinated chlorinated hydrocarbons. This sometimes caused stains on the items to be cleaned.
Figure 1 shows a typical conventional steam drying tank using fluorinated chlorinated hydrocarbons.At the bottom of the tank body 1, liquid fluorinated chlorinated hydrocarbons 2 are stored. The liquid fluorinated chlorinated hydrocarbons 2 were heated by a heater 3 disposed on the lower surface of the tank body 1 to generate steam.
そして乾燥を行うべき被洗浄物4は槽本体1の内10部
中央に位置される様になつており、この被洗浄物4の下
方には受皿5が設けられており、この被洗浄物4に触れ
て凝縮した液状の弗素化塩素化炭化水素類、水等を捕集
する様になつていた。更に槽本体1の上部側壁には冷却
水を通した凝縮パイ15プ6が配設されており、槽内の
弗素化塩素化炭化水素類の蒸気を凝縮させ、その下方に
設けられた環状をした樋状の受皿7で捕集する様になつ
ていた。そして前記受皿5、及び 、 は槽外の水分離
器8にパイプ9で接続さ札 これら受皿5、T20で捕
集した液体は水分離器8で液状の弗素化塩素化炭化水素
類とそれ以外のものに比重差により分離され、液状の弗
素化塩素化炭化水素類のみが槽内に還流されるようにな
つて。しかしこの従来の弗素化塩素化炭化水素類を用2
5いた蒸気乾燥槽では被洗浄物4、及び凝縮コイル6に
凝縮した水分や被洗浄物4に付着していたアルコール等
の洗浄液が受皿5、7に滴下する際その飛沫が槽内の液
状の弗素化塩素化炭化水素類2中に落下したり、槽の側
壁に結露した水分が槽内30の液状の弗素化塩素化炭化
水素類2から水や洗浄液を分離する手段も存在していな
かつた為、時間の経過と共に槽内の液状の弗素化塩素化
炭化水素類2中に次第にこれらが蓄積されその量が増加
することとなつていた。The object to be cleaned 4 to be dried is located at the center of the tenth section of the tank body 1, and a tray 5 is provided below the object to be cleaned 4. It was designed to collect liquid fluorinated chlorinated hydrocarbons, water, etc. that condensed on contact with the water. Furthermore, a condensing pipe 15 through which cooling water passes is disposed on the upper side wall of the tank body 1, which condenses the vapor of fluorinated chlorinated hydrocarbons in the tank, and condenses the annular pipe provided below. It was designed to be collected in a gutter-like saucer 7. The receivers 5 and T20 are connected to a water separator 8 outside the tank by a pipe 9. The liquid collected in the receivers 5 and T20 is transferred to the water separator 8 to remove liquid fluorinated chlorinated hydrocarbons and other liquids. The hydrocarbons are separated based on the difference in specific gravity, and only the liquid fluorinated chlorinated hydrocarbons are returned to the tank. However, when using conventional fluorinated chlorinated hydrocarbons,
In the steam drying tank 5, when the cleaning liquid such as the moisture condensed on the object 4 and the condensing coil 6 and the cleaning liquid such as alcohol adhering to the object 4 drips onto the saucers 5 and 7, the droplets drop into the liquid in the tank. There was also no means to separate the water or cleaning solution from the liquid fluorinated chlorinated hydrocarbons 2 in the tank 30, such as water that fell into the fluorinated chlorinated hydrocarbons 2 or condensed on the side walls of the tank. Therefore, as time passes, these are gradually accumulated in the liquid fluorinated chlorinated hydrocarbons 2 in the tank, and their amount increases.
35従つて、この従来の装置ではヒーター3の加熱によ
つて液状の弗素化塩素化炭化水素類中に混入した水や洗
浄液も蒸発し、これらが被洗浄物4にシミを付ける原因
となつていた。35 Therefore, in this conventional device, the water and cleaning liquid mixed in the liquid fluorinated chlorinated hydrocarbons also evaporate due to heating by the heater 3, which causes stains on the object 4 to be cleaned. Ta.
この発明は弗素化塩素化炭化水素類を用いた蒸気乾燥槽
に関する上記欠点を除去したものであり、液状の弗素化
塩素化炭化水素類をポンプ循環によリオーバーフローさ
せて水分離器に強制に送り込み、液状の弗素化塩素化炭
化水素類中の水分及び洗浄液を水分離器で除き、弗素化
塩素化炭化水素類の蒸気のみを発生させる様にしたもの
であり、被洗浄物にシミを付けることなく乾燥を行うこ
とができるすぐれた弗素化塩素化炭化水素類を用いた蒸
気乾燥槽を提供することを目的とする。This invention eliminates the above-mentioned drawbacks of the steam drying tank using fluorinated chlorinated hydrocarbons, and the liquid fluorinated chlorinated hydrocarbons are forced to re-overflow to the water separator by pump circulation. The water and cleaning solution in the liquid fluorinated chlorinated hydrocarbons are removed by a water separator to generate only the vapor of the fluorinated chlorinated hydrocarbons, which stains the object being cleaned. It is an object of the present invention to provide a steam drying tank using excellent fluorinated chlorinated hydrocarbons that can be dried without any drying.
以下第2図に示すこの発明の一実施例に基づいてその構
成を詳細に説明する。凝縮コイル6の下方に位置する受
皿7をバイブ9で水分離器10に連通させ、被乾燥物4
下方の受皿5はバイブ11で水分離器10に連通させて
いる。Hereinafter, the configuration will be explained in detail based on an embodiment of the present invention shown in FIG. A saucer 7 located below the condensing coil 6 is communicated with a water separator 10 by a vibrator 9, and the material to be dried 4
The lower tray 5 is communicated with a water separator 10 through a vibrator 11.
一方液状の弗素化塩素化炭化水素類2を溜めている槽本
体1の下部の一側には液面と同じ高さに取水部12を設
けてオーバーフローした液状の弗素化塩素化炭化水素類
を受入れるようになつており、この取水部12はノマイ
プ121で水分離器10と連通させている。On the other hand, on one side of the lower part of the tank body 1 which stores liquid fluorinated chlorinated hydrocarbons 2, a water intake part 12 is provided at the same height as the liquid level to collect the overflowing liquid fluorinated chlorinated hydrocarbons. This water intake section 12 is communicated with the water separator 10 through a nomaipu 121.
又、取水部12と対向した側壁には液面に開口した吐出
孔13が設けられており、そしてこの吐出孔13はフィ
ルター14二及び加圧用ポンプ15を介して前記水分離
器10の排出孔16に接続されている。なお、前記水分
離器10は液状の弗素化塩素化炭化水素類ど他の液体の
比重差を利用して分離を行なう比重差式水分離器であり
、1゛7,18は入5水側と排出側を分ける隔壁である
。Further, a discharge hole 13 that opens to the liquid level is provided on the side wall facing the water intake part 12, and this discharge hole 13 is connected to the discharge hole of the water separator 10 via a filter 142 and a pressurizing pump 15. 16. The water separator 10 is a specific gravity type water separator that performs separation using the difference in specific gravity of other liquids such as liquid fluorinated chlorinated hydrocarbons. This is the bulkhead that separates the discharge side from the exhaust side.
他は従来と同様なので、同一符号を付し説明を省略する
。この発明は叙上の様な構成を有するものであり、従来
のものと同様槽本体1下部の液状の弗素化塩素化炭化水
素類2をヒーター3で加温して弗素化3塩素化炭化水素
類の蒸気を発生させこの蒸気によつて洗浄工程を終えた
被洗浄物4を乾燥させる。そして凝縮コイル6及び被洗
浄物4に触れて凝縮した液状の弗素化塩素化炭化水素類
及び水分は受皿5,7で捕集され、水分離器10に送ら
れフロ4ン液と水、洗浄液が分離される液状の弗素化塩
素化炭化水素類のみがポンプ15によつて加圧さへフィ
ルター14によつて濾過され吐出孔13から槽1内のフ
ロン液面に吐出される。一方、液状の弗素化塩素化炭化
水素類は水や洗浄液より比重が極めて大きく、水や洗浄
液が混入している場合はこれらは液状の弗素化塩素化炭
化水素類の上部に浮んで層をなしているので、前記のよ
うに圧送された液状の弗素化塩素化炭化水素類を吐出孔
13から吐出させると液状の弗素化塩素化炭化水素類面
上に浮上している水と洗浄液は液状の弗素化塩素化炭化
水素類の上面を取水部12の方向へ押し流さへ この取
水部12で捕集され、水分離器10に送られ分離が行わ
れ、液状の弗素化塩素化炭化水素類のみが槽本体1へ還
流される。Since the rest is the same as the conventional one, the same reference numerals are given and the explanation is omitted. This invention has the above-mentioned configuration, and like the conventional one, the liquid fluorinated chlorinated hydrocarbons 2 in the lower part of the tank body 1 are heated with the heater 3 to convert them into fluorinated trichlorinated hydrocarbons. The object to be cleaned 4 which has completed the cleaning process is dried by this steam. The liquid fluorinated chlorinated hydrocarbons and moisture that condensed on contact with the condensing coil 6 and the object to be cleaned 4 are collected in the trays 5 and 7, and sent to the water separator 10, where they are mixed with fluorocarbon liquid, water, and cleaning liquid. Only the liquid fluorinated chlorinated hydrocarbons to be separated are pressurized by the pump 15, filtered by the filter 14, and discharged from the discharge hole 13 onto the fluorocarbon liquid surface in the tank 1. On the other hand, liquid fluorinated chlorinated hydrocarbons have a much higher specific gravity than water or cleaning liquid, so if water or cleaning liquid is mixed in, they will float on top of the liquid fluorinated chlorinated hydrocarbons and form a layer. Therefore, when the liquid fluorinated chlorinated hydrocarbons pumped as described above are discharged from the discharge hole 13, the water floating on the surface of the liquid fluorinated chlorinated hydrocarbons and the cleaning liquid are mixed together. The upper surface of the fluorinated chlorinated hydrocarbons is swept away in the direction of the water intake section 12. The water intake section 12 collects the fluorinated chlorinated hydrocarbons, sends them to the water separator 10, and separates them, leaving only the liquid fluorinated chlorinated hydrocarbons. It is refluxed to the tank body 1.
従つて被洗浄物に付着した洗浄液や凝縮した水分が受皿
に衝突して飛沫となつて槽本体の液状の弗素化塩素化炭
化水素類中に落下したり、凝縮コイルや槽本体の側壁に
水分が凝縮して液状の弗素化塩素化炭化水素類中に滴下
して液状の弗素化塩素化炭化水素類中に水や洗浄液等の
不純物が混入してもこれらの不純物は絶えず液状の弗素
化塩素化炭化水素類から分離されている為、極めて純度
の高い弗素化塩素化炭化水素類蒸気を発生させることが
でき、従来の弗素化塩素化炭化水素類を用いた蒸気乾燥
槽の様に被洗浄物にシミを付けることなく乾燥を行うこ
とができるすぐれた効果を有するものである。Therefore, the cleaning liquid or condensed water adhering to the object to be cleaned collides with the saucer, becomes droplets, and falls into the liquid fluorinated chlorinated hydrocarbons in the tank body, or moisture builds up on the condensing coil or the side wall of the tank body. Even if impurities such as water or cleaning fluid are mixed into the liquid fluorinated chlorinated hydrocarbons by condensation and dropping into the liquid fluorinated chlorinated hydrocarbons, these impurities are constantly removed from the liquid fluorinated chlorine. Because it is separated from fluorinated hydrocarbons, extremely pure fluorinated chlorinated hydrocarbon vapor can be generated, and it can be cleaned like a conventional steam drying tank using fluorinated chlorinated hydrocarbons. It has an excellent effect of drying things without staining them.
第1図は従来の弗素化塩素化炭化水素類を用いた蒸気乾
燥槽の断面図、第2図はこの発明の一実施例の断面図で
ある。
又、図中1は乾燥槽本体、2は液状の弗素化塩素化炭化
水素類、3はヒーター、4は被洗浄物、5は受皿、6は
凝縮コイル、7は受皿、8は水分離器、9はバイブ′S
lOは水分離器、11はノ督ス12は取水部、13は吐
出孔、14はフィルター、15は加圧用ホン入16は排
出孔、17は隔壁を夫々表わす。FIG. 1 is a sectional view of a conventional steam drying tank using fluorinated chlorinated hydrocarbons, and FIG. 2 is a sectional view of an embodiment of the present invention. In the figure, 1 is the drying tank body, 2 is liquid fluorinated chlorinated hydrocarbons, 3 is a heater, 4 is an object to be cleaned, 5 is a saucer, 6 is a condensing coil, 7 is a saucer, and 8 is a water separator. , 9 is vibe'S
10 is a water separator, 11 is a nozzle 12 is a water intake part, 13 is a discharge hole, 14 is a filter, 15 is a pressurizing hole 16 is a discharge hole, and 17 is a partition wall.
Claims (1)
を溜め、これを加温して該弗素化塩素化炭化水素類の蒸
気を発生させ、槽内の被洗浄物4を乾燥させ、被洗浄物
4の下方に位置した受皿5及び上部の凝縮コイル6の下
方に位置した受皿7を水分離器10に連通させた弗素化
塩素化炭化水素類を用いた蒸気乾燥槽において、液状の
弗素化塩素化炭化水素類2の液面と同じ高さの一側にオ
ーバーフローした該液状の弗素化塩素化炭化水素類を受
ける取水部12を設けて水分離器10に連通させ、取水
部12と対向する側壁面に水分離器10と加圧ポンプ1
5を介して連通する吐出孔13を開口したことを特徴と
する弗素化塩素化炭化水素類を用いた蒸気乾燥槽。1 Liquid fluorinated chlorinated hydrocarbons 2 in the lower part of the tank body 1
is stored and heated to generate vapor of the fluorinated chlorinated hydrocarbons, and the object to be cleaned 4 in the tank is dried. In a steam drying tank using fluorinated chlorinated hydrocarbons, in which a saucer 7 located below 6 is connected to a water separator 10, a drying tank 7 is placed at the same height as the liquid level of the liquid fluorinated chlorinated hydrocarbons 2. A water intake part 12 for receiving the overflowing liquid fluorinated chlorinated hydrocarbons is provided on one side and communicates with the water separator 10, and a water separator 10 and a pressure pump 1 are provided on the side wall facing the water intake part 12.
1. A steam drying tank using fluorinated chlorinated hydrocarbons, characterized in that a discharge hole 13 is opened and communicated through a fluorinated chlorinated hydrocarbon.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9675281A JPS595326B2 (en) | 1981-06-24 | 1981-06-24 | Steam drying tank using fluorinated chlorinated hydrocarbons |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9675281A JPS595326B2 (en) | 1981-06-24 | 1981-06-24 | Steam drying tank using fluorinated chlorinated hydrocarbons |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58201A JPS58201A (en) | 1983-01-05 |
JPS595326B2 true JPS595326B2 (en) | 1984-02-03 |
Family
ID=14173393
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9675281A Expired JPS595326B2 (en) | 1981-06-24 | 1981-06-24 | Steam drying tank using fluorinated chlorinated hydrocarbons |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS595326B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS597151B2 (en) * | 1978-08-25 | 1984-02-16 | 株式会社日立製作所 | magnetic bubble memory gate circuit |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3273282B2 (en) * | 1994-02-15 | 2002-04-08 | 東京エレクトロン株式会社 | Processing equipment |
JP3424119B2 (en) * | 1999-02-05 | 2003-07-07 | 東京エレクトロン株式会社 | Processing equipment |
-
1981
- 1981-06-24 JP JP9675281A patent/JPS595326B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS597151B2 (en) * | 1978-08-25 | 1984-02-16 | 株式会社日立製作所 | magnetic bubble memory gate circuit |
Also Published As
Publication number | Publication date |
---|---|
JPS58201A (en) | 1983-01-05 |
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