JPS5950329A - Differential pressure measuring device - Google Patents
Differential pressure measuring deviceInfo
- Publication number
- JPS5950329A JPS5950329A JP16148582A JP16148582A JPS5950329A JP S5950329 A JPS5950329 A JP S5950329A JP 16148582 A JP16148582 A JP 16148582A JP 16148582 A JP16148582 A JP 16148582A JP S5950329 A JPS5950329 A JP S5950329A
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- diaphragm
- measuring
- pressure receiving
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】 本発明は差圧測定装置に関するものである。[Detailed description of the invention] The present invention relates to a differential pressure measuring device.
更に詳述すれば、測定受圧素子の両側にシールダイアフ
ラムの配置され姿勢誤差補償・過大圧保護機構の設けら
れた差圧測定装置に関するものである。More specifically, the present invention relates to a differential pressure measuring device in which seal diaphragms are arranged on both sides of a measuring pressure receiving element and a posture error compensation/overpressure protection mechanism is provided.
第１図は、従来より一般に使用されている従来例の構成
説明図である。FIG. 1 is a diagram illustrating the configuration of a conventional example that has been commonly used.
図において、１は円板状の測定ダイアフラム、２は測定
ダイアフラム１の周辺部を挟持する角柱状のボデーで、
ボデー２ａ、２ｂよｐなる。２１゜２２は測定ダイアフ
ラム１０両側のボデー２に設けられた凹部である。２３
．２４は凹部２１．２２と外部とを連結する連結孔であ
る。３１．３２は四部２１．２２の測定ダイアフラム１
と対向する面に設けられた固定容量電極である６４に固
定容量電極３１．３２をボデー２よｐ絶縁する絶縁体で
、この場合は、ガラス材が用いられている。５，６はボ
デー２の外事面を覆い、それぞれ室５１．６１を形成す
るシールダイアフラムである。５２．６２は、それぞれ
シールダイアフラム５．６の周縁をボデー２に固定する
押えリングである。５３．６３は、それぞれ凹部２１．
２２と連通孔２３．２４及び室５１．６１を満すシリコ
ンオイル等の封入液である。In the figure, 1 is a disk-shaped measurement diaphragm, 2 is a prismatic body that holds the peripheral part of the measurement diaphragm 1,
The bodies 2a and 2b are p. 21 and 22 are recesses provided in the body 2 on both sides of the measuring diaphragm 10. 23
．． 24 is a connecting hole that connects the recesses 21 and 22 with the outside. 31.32 is the measuring diaphragm 1 of the four parts 21.22
An insulator is used to insulate the fixed capacitance electrodes 31 and 32 from the body 2, which is a fixed capacitance electrode 64 provided on the surface facing the fixed capacitance electrode 64, and in this case, a glass material is used. Seal diaphragms 5 and 6 cover the outer surface of the body 2 and form chambers 51 and 61, respectively. Reference numerals 52 and 62 denote presser rings that fix the peripheral edge of the seal diaphragm 5.6 to the body 2, respectively. 53 and 63 are recessed portions 21.
22, communication holes 23, 24, and chambers 51, 61 are filled with a liquid such as silicone oil.
７．８は、それぞれ、シールダイアフラム５，６と押え
リング５２．６２’に覆い、導圧室７１，８１を形成す
るカバーである。7.8 are covers that cover the seal diaphragms 5, 6 and the presser rings 52, 62', respectively, and form the pressure chambers 71, 81.
このようなものにおいて、たとえば、導圧室７１に低い
測定圧が導入され、導圧室８１に高い測定圧力が導入さ
れると、それぞれの圧力は、シールダイアフラム５，６
、封入液５３．６３”ｉ介して測定ダイアフラム１０両
面に加えられ、測定ダイアフラム１は差圧に応じて変位
する。この変位を、測定ダイアフラム１を移動容量電極
とし、固定容量電極３１．３２との静電容量の差を検出
することにより電気信号として検出することができる。In such a device, for example, when a low measurement pressure is introduced into the pressure impulse chamber 71 and a high measurement pressure is introduced into the pressure impulse chamber 81, the respective pressures are
, is applied to both sides of the measuring diaphragm 10 via the filled liquid 53.63''i, and the measuring diaphragm 1 is displaced in accordance with the differential pressure. It can be detected as an electrical signal by detecting the difference in capacitance between the two.
しかしながら、このようなものにおいては、下記に示す
如き、姿勢誤差を有する。However, such a device has an attitude error as shown below.
今、封入液５３．６３の装置の姿勢によるヘッドｔＨ，
比重をγ、測定ダイアフラム１の有効面積ｆ Ａｅ ’
、傾斜角をθ、測定ダイアフラム１の重量Ｉｗとすると
、姿勢変化によって生じる誤差成分は、第２図に示す如
く図の上下方向に対してθ度傾くとすれば（ＨγＡｅ
＋ Ｗ ） ｓｉｎθ となる。Now, the head tH depending on the attitude of the device with the filled liquid 53.63,
The specific gravity is γ, the effective area of the measuring diaphragm 1 f Ae '
, the inclination angle is θ, and the weight of the measuring diaphragm 1 is Iw. If the error component caused by the change in posture is tilted by θ degrees with respect to the vertical direction of the figure as shown in FIG. 2, then (HγAe
+W) sinθ.
小さい差圧、たとえは％ １００１１Ｈ２０以下の差圧
を測定するときには傾き角θが小さくても、上記の値が
太きく影響し、姿勢誤差の大なる差圧測定装置となる。When measuring a small differential pressure, for example a differential pressure of %10011H20 or less, even if the tilt angle θ is small, the above value will have a large influence, resulting in a differential pressure measuring device with a large attitude error.
本発明は、この問題点を解決するものである。The present invention solves this problem.
本発明の目的は、姿勢誤差が少く、耐振性及び過大圧保
護の良好な差圧測定装置を提供するにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a differential pressure measuring device with few posture errors, good vibration resistance, and good protection against excessive pressure.
第３図は、本発明の一実施例の構成説明図である。FIG. 3 is an explanatory diagram of the configuration of an embodiment of the present invention.
図において、第１図と同一記号は同一機能を示す。以下
、第１図と相違部分のみ説明する。In the figure, the same symbols as in FIG. 1 indicate the same functions. Hereinafter, only the differences from FIG. 1 will be explained.
９１−Ｊ：ボデー２ＶＣ設けられた補償ダイアフラムで
、測定ダイアフラムｌよりばね剛性が小さく構成されて
いる。９１．９２にボデー２内に補償ダイアフラムの両
側に接して設けられた補償室である。９３は補償ダイア
フラム９に固定された所要重量（後に詳述する。、）ヲ
なす中央板である。９４は凹部２１と補償室９２とを結
ぶ連結管である。９５は補償室９１と室６１とを結ぶ連
結管、９６は凹部２２と室５１とを結ぶ連結管である。91-J: A compensating diaphragm provided with a body 2VC, which has a smaller spring rigidity than the measuring diaphragm 1. 91 and 92 are compensation chambers provided in the body 2 in contact with both sides of the compensation diaphragm. Reference numeral 93 denotes a center plate fixed to the compensation diaphragm 9 and having a required weight (described in detail later). 94 is a connecting pipe connecting the recess 21 and the compensation chamber 92. 95 is a connecting pipe that connects the compensation chamber 91 and the chamber 61, and 96 is a connecting pipe that connects the recess 22 and the chamber 51.
９７に凹部２１、補償室９２と連結管９４とを満す封入
液、９８は補償室９１．室６１と連結管９５とを満す封
入液、９９は凹部２２．室５１と連結管９６とを満す封
入液である。封入液９７，９８．９９はこの場合はシリ
コーンが用いられている。97 is the recess 21, the filling liquid fills the compensation chamber 92 and the connecting pipe 94, and 98 is the compensation chamber 91. A sealed liquid 99 fills the chamber 61 and the connecting pipe 95 in the recess 22. This is a sealed liquid that fills the chamber 51 and the connecting pipe 96. In this case, silicone is used as the filling liquids 97, 98, and 99.
以上の構成において、導圧室７１．８１にそれぞれ測定
圧が導入された場合に、補償ダイアフラム９は測定ダイ
アフラム１に比し、はね剛性が小さく、黍いので、動作
は第１図従来例と同じである。In the above configuration, when measurement pressure is introduced into each of the pressure chambers 71 and 81, the compensation diaphragm 9 has a smaller spring rigidity than the measurement diaphragm 1, and therefore the operation is as shown in the conventional example shown in FIG. is the same as
而して、第３図矢印Ｙに示す方向に重力加速度が働いて
いる場合には、測定ダイアフラム１には差圧以外の力は
働かない。Therefore, when gravitational acceleration is acting in the direction shown by arrow Y in FIG. 3, no force other than differential pressure acts on the measuring diaphragm 1.
しかし、姿勢が変って、加速度の方向が矢印Ｘに示す方
向になった場合においては測定値に影響を及ばず。（以
下、このように測定（１１“口Ｃ影響を及はす加速度を
「測定方向加速度」と称する。）先ず、測定ダイアフラ
ム１のみの動作を考慮する。However, when the attitude changes and the direction of acceleration becomes the direction shown by arrow X, the measured value is not affected. (Hereinafter, the acceleration that affects measurement in this way will be referred to as "measurement direction acceleration.") First, the operation of only the measurement diaphragm 1 will be considered.
第４図に示す如く、測定ダイアフラム１からシールダイ
アフラム５までの距離’ｃＨ４、封入液９８の密度をγ
とすると、封入液９８にγＨ１の圧力を生じ、連結管９
５によって測定ダイアフラム１に矢印Ｘ方向と逆方向の
力を与える。（第３図においては左方向、第４図におい
て（仕上方向）この力は、測定ダイアフラム１の有効面
積ｔｈ、とすればγ馬Ａ、である。As shown in FIG.
Then, a pressure of γH1 is generated in the sealed liquid 98, and the connecting pipe 9
5 applies a force to the measuring diaphragm 1 in the direction opposite to the direction of the arrow X. (In the left direction in FIG. 3 and in the finishing direction in FIG. 4), this force is γA, assuming that the effective area th of the measuring diaphragm 1 is th.
同様に、測定ダイアフラム１からシールダイアフラム６
までの距離をＨ２、封入液９９の密度をγとすると、γ
Ｈ２Ａ、の力が測定ダイアフラム１に矢印Ｘ方向と逆方
向の力を加える。Similarly, from measuring diaphragm 1 to sealing diaphragm 6
If the distance to H2 is H2 and the density of the filled liquid 99 is γ, then γ
The force H2A exerts a force on the measuring diaphragm 1 in the direction opposite to the direction of the arrow X.
したがって、シールダイアフラム５からシールダイアフ
ラム６まで厚さ寸法Ｈとすれば、測定ダイアフラム１に
矢印Ｘ方向と逆方向に加わる力Ｆ。Therefore, if the thickness dimension from seal diaphragm 5 to seal diaphragm 6 is H, force F is applied to measurement diaphragm 1 in the direction opposite to the direction of arrow X.
は Ｆ、＝γＡ、 （）Ｉ、＋Ｈ２）＝γＡ、Ｈとなる。teeth F, = γA, ()I, +H2) = γA,H.
次に、補償ダイアフラム９のみの動作を考慮する。Next, consider the operation of only the compensation diaphragm 9.
第５図に示す如く、補償ダイアフラム９からシールダイ
アフラム５までの距離ｔ■１、シールダイアフラム６ま
での距離ヲＨし封入液９８．９９の密度をγ・補償ダイ
アフラム９の有効面積ヲＡ、とすれば、補償ダイアフラ
ム９に矢印方向と逆方向に加わる力Ｆ２は
Ｆ２＝γＡ、（Ｈ１＋Ｈ′２）＝ｒＡ９Ｈとなる。As shown in FIG. 5, the distance t■1 from the compensation diaphragm 9 to the seal diaphragm 5, the distance from the seal diaphragm 6 to H, the density of the sealed liquid 98.99 is γ, the effective area of the compensation diaphragm 9 is Then, the force F2 applied to the compensation diaphragm 9 in the direction opposite to the direction of the arrow becomes F2=γA, (H1+H'2)=rA9H.
次に、測定ダイアフラム１と補償ダイアフラム９との両
者の動作を考慮する。Next, the operation of both the measuring diaphragm 1 and the compensation diaphragm 9 will be considered.
室２１と補償室９２は連結管９４により連通されている
ので、測定ダイアフラム１と補償ダイアフラム９の測定
方向加速度による容積変化ｖは等しく、各々の容積変化
Ｖに要した吸収圧力の和が、それぞれ力Ｆ、とＦ２とな
る。厚さＨに、構造上小さくすることができない。Since the chamber 21 and the compensation chamber 92 are communicated with each other by the connecting pipe 94, the volume changes v due to the measurement direction acceleration of the measurement diaphragm 1 and the compensation diaphragm 9 are equal, and the sum of the absorption pressures required for each volume change V is The forces become F and F2. Due to the structure, the thickness cannot be reduced to H.
ここで、本発明においては、中央板９３と補償ダイアフ
ラム９との重ｔ［ヲ力Ｆ２ と等しくなる値に構成され
ている。Here, in the present invention, the weight t of the center plate 93 and the compensation diaphragm 9 is configured to have a value equal to the force F2.
この結果、測定方向加速度に基づき、測定ダイアフラム
１に作用する力にゼロとなる。即ち、姿勢誤差の少ない
ものが得られ、耐震性の良好なものが得られる。As a result, the force acting on the measuring diaphragm 1 becomes zero based on the acceleration in the measuring direction. That is, it is possible to obtain a structure with few posture errors and a structure with good earthquake resistance.
次に、シールダイアフラム５、あるいは、６に過大圧が
加わった場合ｖＩＣ１−Ｉ、測定ダイアフラム１が凹部
２１、あるいは、凹部２２にバックアンプされ封入液９
７，９８．９９の流れは止まり、測定ダイアフラム１と
補償ダイアフラム９とが破壊されることはない。補償ダ
イアフラム９’ｆ−測定ダイアフラムと兼用させて、測
定ダイアフラム１をはぶく事も考えられるが、中央板９
３が可動電極として機能しなければならず、中央板９３
の平坦度の精度を得る加工が難しい。また、たとえ、高
い精度の平坦度か得られても、補償ダイアフラム９に中
央板９３を固定した状態で相対的に平担な面を実現する
ことはきわめて困難である。また、過大圧力に対する保
瞳も得にくい。Next, when excessive pressure is applied to the seal diaphragm 5 or 6, vIC1-I, the measurement diaphragm 1 is back-amplified into the recess 21 or 22, and the sealed liquid 9
The flow of 7,98,99 is stopped and the measuring diaphragm 1 and the compensation diaphragm 9 are not destroyed. Compensating diaphragm 9'f - It is also possible to use it as the measuring diaphragm and removing the measuring diaphragm 1, but the center plate 9'
3 must function as a movable electrode, and the central plate 93
It is difficult to process to obtain flatness accuracy. Moreover, even if highly accurate flatness is obtained, it is extremely difficult to realize a relatively flat surface with the center plate 93 fixed to the compensation diaphragm 9. Furthermore, it is difficult to maintain pupil protection against excessive pressure.
８ｇ７図は、本発明の他の実施例の構成説明図である。FIG. 8g7 is a configuration explanatory diagram of another embodiment of the present invention.
本発明においては、測定ダイアフラムｊの変位検出を、
コイル１００のインダクタンス変化として検出するよう
に構成したものである。In the present invention, displacement detection of the measurement diaphragm j is performed by
The configuration is such that it is detected as a change in the inductance of the coil 100.
なお、前述の実施例においては、二つの測定圧の差圧の
測定の場合について説明したが、たとえば、専圧室７１
を真空室にして、絶対圧を測定する等圧力測定にも使用
できることば勿論である。In the above-mentioned embodiment, the case where the differential pressure between two measurement pressures is measured is explained.
Of course, it can also be used for isopressure measurement in which the absolute pressure is measured by making it into a vacuum chamber.
また、０１１述の実施例においては、受圧素子として、
測定ダイアフラム１を用いたものについて説明したが、
これに限ることはな１く、たとえば、ベローズでもよく
、要するに、差圧全受圧して変位する受圧素子であれば
よい。In addition, in the embodiment described in 011, as a pressure receiving element,
Although we have explained the method using the measurement diaphragm 1,
The present invention is not limited to this, and for example, a bellows may be used. In short, any pressure receiving element that is displaced upon receiving the entire differential pressure may be used.
また、変位全検出する変位検出器として、電気容量検出
方式、あるいは、コイル金層いたインダクタンス方式の
装置について説明したが、これに限ることはなく、たと
えば、光ファイバを用いた光式変位変換素子でもよく、
要するに、変位を検出できるものであればよい。In addition, as a displacement detector that detects the entire displacement, an electric capacitance detection method or an inductance method with a gold coil layer has been described, but the device is not limited to this. For example, an optical displacement conversion element using an optical fiber is used. But okay,
In short, any device that can detect displacement will suffice.
捷た、差圧測定部分と変位検出部とが別体に作られ、こ
れを、連結管９５．９６で連結するものであつ℃もよい
ことは勿論である、
以上説明したように、本発明によれば、姿勢誤差が小さ
く、耐震性及び過大圧保護の良好な差圧測定装置を実現
することができる。It goes without saying that the differential pressure measuring part and the displacement detecting part are made separately and connected by a connecting pipe 95,96, and that the temperature is good.As explained above, the present invention According to the above, it is possible to realize a differential pressure measuring device with small posture error, good earthquake resistance, and good protection against excessive pressure.
第１図は従来より一般に使用されている従来例の構成説
明図、第２図Ｆｉ第１図の動作説明図、第３図は本発明
の一実施例の構成説明図、第４図〜第６図は第３図の動
作説明図、第７図は不発明の他の実施例の構成説明図で
ある。
１・・・測定ダイアフラム、２，２ａ、２ｂ・・・ボデ
ー、２１．２２・・・凹部、２３．２４・・・連結孔、
３１．３．２・・・固定容量′電極、４・・・絶縁体、
５，６・・・シールダイアンラム、５１．６１・・・室
、５２゜６２・・・押えり／グ、５３．６３・・・封入
液、７．８・・・カバー、７１．８１・・・導圧室、９
・・・補償ダイアフラム、９１．’９２・・・補償室、
９３・・・中央板、９４．９５．９６・・・連結管、９
７，９８．９９・・・封入数、１００・・・コイル。
％ Ｉ 圀
第 ２ 図
第 ３ 口
第４ 図
芽 ７（２１Fig. 1 is an explanatory diagram of the configuration of a conventional example commonly used in the past, Fig. 2 is an explanatory diagram of the operation of Fig. 1, Fig. 3 is an explanatory diagram of the configuration of an embodiment of the present invention, and Figs. 6 is an explanatory diagram of the operation of FIG. 3, and FIG. 7 is an explanatory diagram of the configuration of another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Measuring diaphragm, 2, 2a, 2b...Body, 21.22...Recessed part, 23.24...Connecting hole,
31.3.2...Fixed capacitance' electrode, 4...Insulator,
5,6... Seal dian ram, 51.61... Chamber, 52゜62... Presser foot/g, 53.63... Filled liquid, 7.8... Cover, 71.81. ...Pressure chamber, 9
...Compensation diaphragm, 91. '92...compensation room,
93...Central plate, 94.95.96...Connecting pipe, 9
7,98.99...Number of enclosures, 100...Coil. % I Country 2nd figure 3rd mouth 4th figure bud 7 (21
Claims (1)
素子が内部に設けられたボデーと、該ボデー内部に前記
受圧素子の両側ｖｃ接してそれぞれ設けられた測定室と
、前記ボデーに設けられ前記受圧素子の変位を検出する
検出手段と、前記ボデー内部に設けられた補償受圧素子
と、前記ボデー内に前記補償受圧素子の両側に接して設
けられた補償室と、前記補償受圧素子に固定され所要重
是全なす中央板と、前記ボデーの外側表面を覆ってそれ
ぞれ設けられ一面側が該ボデーと受圧室を構成し他面側
が測定流体に接するシールダイアフラムと、前記測定室
と前記補償室と前記受圧室とをそれぞれ満す封入液と、
前記測定室と前記補償室の互いに近接する一方の室を連
通ずる連結管と、前記封入液が測定方向加速度に基づき
前記受圧室に作用する力と該測定方向加速度に基づき前
記補償受圧素子と前記中央板との質量により生ずる力と
が平衡するように前記他方の測定室と前記一方の受圧室
及び前記他方の補償室と前記他方の受圧室とをそれぞれ
連通する連結管とを具備してなる差圧測定装置。A measurement pressure receiving element that is displaced by receiving measurement fluid pressure, a body in which the pressure receiving element is provided, a measurement chamber provided in the body in contact with both sides of the pressure receiving element, and a measurement chamber provided in the body. a detection means for detecting the displacement of the pressure receiving element; a compensation pressure receiving element provided inside the body; a compensation chamber provided in the body in contact with both sides of the compensation pressure receiving element; a central plate that is fixed and provides the necessary protection; a seal diaphragm that is provided to cover the outer surface of the body and whose one side forms a pressure receiving chamber with the body and whose other side is in contact with the measuring fluid; and the measuring chamber and the compensating chamber. and a sealed liquid that fills the pressure receiving chamber, respectively;
a connecting pipe that communicates one of the measurement chamber and the compensation chamber that are close to each other; a force that the sealed liquid acts on the pressure receiving chamber based on the acceleration in the measurement direction; A connecting pipe is provided that communicates the other measurement chamber with the one pressure receiving chamber and the other compensation chamber with the other pressure receiving chamber so that the force generated by the mass with the center plate is balanced. Differential pressure measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16148582A JPS5950329A (en) | 1982-09-16 | 1982-09-16 | Differential pressure measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16148582A JPS5950329A (en) | 1982-09-16 | 1982-09-16 | Differential pressure measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5950329A true JPS5950329A (en) | 1984-03-23 |
Family
ID=15735973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16148582A Pending JPS5950329A (en) | 1982-09-16 | 1982-09-16 | Differential pressure measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5950329A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63172408U (en) * | 1987-04-27 | 1988-11-09 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4925231A (en) * | 1972-06-27 | 1974-03-06 |
-
1982
- 1982-09-16 JP JP16148582A patent/JPS5950329A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4925231A (en) * | 1972-06-27 | 1974-03-06 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63172408U (en) * | 1987-04-27 | 1988-11-09 |
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