JPS5943327A - Intake air pressure senser - Google Patents

Intake air pressure senser

Info

Publication number
JPS5943327A
JPS5943327A JP15258282A JP15258282A JPS5943327A JP S5943327 A JPS5943327 A JP S5943327A JP 15258282 A JP15258282 A JP 15258282A JP 15258282 A JP15258282 A JP 15258282A JP S5943327 A JPS5943327 A JP S5943327A
Authority
JP
Japan
Prior art keywords
pressure sensor
intake pressure
magnetic
diaphragm
resistance effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15258282A
Other languages
Japanese (ja)
Inventor
Hiroichi Goto
博一 後藤
Shuzo Abiko
安彦 修三
Hiroshi Akiyama
秋山 弘
Masakazu Kuhara
正和 久原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Electronics Inc
Original Assignee
Canon Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Electronics Inc filed Critical Canon Electronics Inc
Priority to JP15258282A priority Critical patent/JPS5943327A/en
Publication of JPS5943327A publication Critical patent/JPS5943327A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/14Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means involving the displacement of magnets, e.g. electromagnets

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To achieve a very accurate action by providing a magnetic resistance effect element near a magnetism generating body fixed on a diaphragm. CONSTITUTION:A magnetism generating body 15 comprising a permanent magnet is provided at the tip of a shaft 6 and a magnetic resistance effect element (MR element) 16 is mounted near it. The MR element 16 in which the electric resistance value R varies depending on the magnetic field is made up of a magnetic body having a magnetic resistance effect such as Ni-Fe or Ni-Co formed on the surface of a substrate such as glass by the thin film accumulation employing etching in a specified pattern. With main current paths crossing at the right angle to one another, the MR element 16 has thin films A and B made of ferromagnetic material in a zigzag form the electrodes 17 and 18 connected to both ends thereof respectively. In the center thereof, an output terminal 19 is connected at the connection point between the ferromagnetic bodies A and B.

Description

【発明の詳細な説明】 (1)技術分野 本発明は吸気圧センサに係り、さらに詳しくは車載用の
吸気圧センサに関するものである。
DETAILED DESCRIPTION OF THE INVENTION (1) Technical Field The present invention relates to an intake pressure sensor, and more particularly to an intake pressure sensor for use in a vehicle.

(11)従来技術 車載用の吸気圧センサは高温、振動、衝撃、汚れ、浸水
、カッリン、ノイズに対する信頼性ど、低コストの量産
性が要求される。
(11) Prior Art Automotive intake pressure sensors are required to be mass-producible at low cost, with reliability against high temperatures, vibrations, shocks, dirt, water intrusion, crackling, and noise.

従来の自動車用吸気圧センサは第1図に示すように構成
されていた。
A conventional automobile intake pressure sensor was constructed as shown in FIG.

第1図において省月1で示すものはり一一一/ングで、
連絡口2を介して負圧源に接続されている。
In Figure 1, the number indicated by month 1 is 111/ng,
It is connected to a negative pressure source via a communication port 2.

ケーシング1とカバー3との間には直空バソギン4を介
してダイヤフラノ・5が取り付けられている。
A diaphragm 5 is attached between the casing 1 and the cover 3 via a direct air basogin 4.

ダイヤフラム5にはその中央部にンヤノl−6が固定さ
れており、その先端はカバー3に摺動自在に嵌合されて
おり、外方に臨まされている。このシャフト6と対応し
た状態でマイク「]スイノグー7が配置されており、そ
のアクチュエータ8が/ヤフl−6と接触しうる位置に
ある。
A ring l-6 is fixed to the diaphragm 5 at its center, and its tip is slidably fitted into the cover 3 and faces outward. A microphone 7 is disposed in correspondence with the shaft 6, and its actuator 8 is in a position where it can come into contact with the yaf l-6.

ケーシング1内は負圧室9となっており、カか−3側は
大気室10となっている。
The inside of the casing 1 is a negative pressure chamber 9, and the side of the casing 1 is an atmospheric chamber 10.

ケーシング1の前記/ヤヲト6と反対側には調整ねじ1
1が螺合されており、真空パツキン12をj’i’−1
〜で気密封11されている3、ご−の調整ねじ11(へ
−はばね受(・)13が固定さノ′1.で−L−1) 
、前記ダイヤフ′74′・5との間にスゲリンク14が
弾装されている。
There is an adjustment screw 1 on the opposite side of the casing 1 from the above-mentioned /yawoto 6.
1 are screwed together, and the vacuum packing 12 is j'i'-1.
3. The adjusting screw 11 (to which the spring receiver (・) 13 is fixed) is hermetically sealed 11.
, a sedge link 14 is mounted between the diaphragm '74' and the diaphragm '74'.5.

以上のようなtill)成のもとに負圧室9側に導かノ
1゜るt’]LLにより、夕゛イヤフラノ・5をスゲリ
ンク14のリリj発力に抗1ノーご変化させ、7・ヤフ
ト6を変位さぜ、71.クロス−fソチ7を]ン、オゴ
ノさせている。
Under the above-mentioned structure, the pressure is guided to the negative pressure chamber 9 side.・Displace Yaft 6, 71. Cross-f Sochi 7] is making me laugh.

イ」して、圧JJとダイヤフラノ・5の変位を調整する
ン′、−めには、ダイヤ−2・シl−J十力調整ねじ1
1を調整している。
To adjust the pressure JJ and the displacement of the diaphragm 5, use the diaphragm 2 sill J ten-force adjustment screw 1.
1 is being adjusted.

ところがこのような構造を有する従来の吸気LF士y 
−+t IJ、スイッチがマイクロスイ7ノヂ7という
機()((的なスイッチであるため以I−レ(1、’t
+jΣべるような欠点がちつ/c0 (1)  マイク「1スイツチが接触式であるだめ面j
久・ビ1に限界がある。
However, the conventional intake LF engineer with such a structure
-+t IJ, the switch is a microswitch 7 noji 7 ()((() type switch, so it is
+jΣFlaws that can be heard/c0 (1) Microphone ``One switch is a contact type.
There is a limit to Kyu-B1.

(2)機械的スイッチのため、オン、オフ時にチャタリ
5・夕が発ノドする。
(2) Since it is a mechanical switch, Chatari 5/Yu sounds when it is turned on or off.

(3) −4・1り「Fノ、イノチの」ン、オフにヒス
−】す〕/スがあり、その動作点かずh正確なス■ソチ
ノ〃゛が行なえない1、 (4)マイクロス1ソJは機械式であ2)/(−λ゛)
、倹せ。
(3) -4.1 There is a hiss in the OFF position, and the operating point cannot be adjusted accurately.1, (4) Micro S1 So J is mechanical2)/(-λ゛)
, Be frugal.

高精度を向上さ枇るのが困φ(fである。It is difficult to improve high accuracy φ(f).

(5)  マイ7り[]ススイッチよ機械式ス・エツチ
ングのため、温度及び振動に対シ5.て検出精度を1\
持するのが困知である。
(5) My 7-ring switch is mechanically etched, so it is resistant to temperature and vibration. The detection accuracy is 1\
It is difficult to have knowledge.

(6)マイク「1スイツチの製造上のばらつきが7(き
い。
(6) Mike: ``Manufacturing variations in each switch are 7 (high).''

(7)接点部分へのA・1ルやごみのイ・1矯に、Lり
導通不良を生じやすい。
(7) It is easy to cause poor conduction due to L in the A/1 line or dirt on the A/1 line to the contact part.

(8)接点部分の溶着が生じやすく、接点部151.が
出やすい、。
(8) Welding of the contact portion easily occurs, and the contact portion 151. It's easy to come out.

(iil)  目的 本発明は以上のような従来の欠点を除去1゛る/1−め
になさiたもので、確実な動作を行なうことができる吸
気1「センツを提供するととを、[」的としている。
(iii) Purpose The present invention has been made to eliminate the above-mentioned drawbacks of the conventional art, and to provide an air intake system that can perform reliable operation. It has been the target.

本発明においては上記の目的を達成するために吸気圧検
出手段として磁気抵抗効尿素子(以−1・ΔI■(。
In order to achieve the above object, the present invention employs a magnetoresistive element (hereinafter referred to as -1·ΔI■) as an intake pressure detection means.

素子という)を用い、ダイヤフラノ、側に発磁体を設け
/i−構造を採用した。
A magnetic element was installed on the side of the diaphragm, and an i-structure was adopted.

(1v)実施例 り、1−1[ツ1面にzleす実施例に基づいて本発明
の詳細な説明す6゜ 第1の−に流側 第12図〜第・1図は本発明の一実施例を説明するもの
で、各図中第1図と同一部分には同−F1号をf・1シ
フ、その説明は省略する。
(1v) Detailed explanation of the present invention based on the embodiments shown in 1-1. This is to explain one embodiment, and in each figure, the same parts as those in FIG.

1\−t−、IO+1’A1にあってはシャフト6の先
す114部に永久磁イーI智ズハらなる発磁体15を設
け、その近傍においてrvut、H子16を取り例けで
ある。
1\-t-, IO+1'A1, a magnetizing body 15 made of permanent magnet EI is provided at the front 114 part of the shaft 6, and an rvut and H element 16 are provided in the vicinity thereof. .

へ・II(、−:i;丁は素子の電気抵抗仙1(、が磁
界によって第・化−す・ぐ罹(、ので、ガラス等の基板
の表面にNi −1・゛(・−i !(:はN i −
(、’(+のような磁気抵抗効果を有する(1りζ1−
11ト5.・肋膜11t(II/2二によって形成しま
たもので、所定の・・ターンにエツチングに」、り形成
される。
Since the electrical resistance of the element is affected by the magnetic field, the surface of the substrate such as glass is coated with Ni -1. !(: is N i −
(, '(+) has a magnetoresistive effect (1riζ1−
11 5. - The pleura 11t (formed by II/2 and etched in predetermined turns) is formed.

第、1図はM R,素−〔の具体的な構成の一例を示す
も・7)−C11電流通路が互いにi自交I−ており、
かつ、蛇イー1して形成さitた強磁性体(の薄膜、以
F同様)A、13と、その両端に接続された電極17.
18を有し、中央部は強磁性体A 、 Bの接続点に」
9・いて出力端子19が接続されている。
Figure 1 shows an example of a specific configuration of MR, element 7) -C11 current paths are orthogonal to each other,
In addition, a ferromagnetic material (thin film, hereinafter F) A, 13 formed of a ferromagnetic material 1, and electrodes 17 connected to both ends thereof.
18, and the central part is the connection point of ferromagnetic materials A and B.
9. The output terminal 19 is connected.

このような構潰のMll、素子の動作原理図を第4図に
示す。
FIG. 4 shows a diagram of the principle of operation of such a collapsed Mll and element.

第4図において今、強磁性体A、、  I3を飽和磁化
さぜるのに充分な磁界11を強磁性体A、I(をζ≧I
’r平面内において、強磁性体I−(の主′tlfi流
路に対し7でθの角度をなすように作用させ/ζ場合、
強磁・1′1体A、13の電気抵抗■転、R,が変化し
、その変化[鋒は次の(1) 、 (2)式で表わさノ
Lる。
In Fig. 4, a magnetic field 11 sufficient to saturate the ferromagnetic materials A, I3 is applied to the ferromagnetic materials A, I (ζ≧I
In the 'r plane, when the main 'tlfi flow path of the ferromagnetic material I-( is acted upon at an angle of θ at 7/ζ,
The electrical resistance R of the ferromagnetic 1'1 body A and 13 changes, and the change is expressed by the following equations (1) and (2).

R,A= Ro斗−Δ)(、α)S2(90−一〇 )
31.、、 、、、 、、、 、、、 (+)R,、=
 Ro4ΔR,瀉2θ ・・・ ・・・ ・・・(2)
(1)、 (2)式において1もOは強磁性体A、  
13を十′市流路と平行に飽和磁化した時の′1b、気
抵抗値−C1ΔIt。
R, A = Roto - Δ) (, α) S2 (90 - 10)
31. ,, ,,, ,,, ,,, (+)R,,=
Ro4ΔR, 〉2θ ... ... (2)
In equations (1) and (2), 1 and O are ferromagnetic A,
13 is saturated magnetized parallel to the To'ichi flow path, '1b, air resistance value -C1ΔIt.

は最大抵抗変化にを示す。indicates the maximum resistance change.

゛マタ、 出しj哩喘−f−19ノ41T V (θt
iqt強<at<t f+ A 。
゛Mata, out j-gasp-f-19-41T V (θt
iqt strong<at<t f+ A.

Bが1θ列接続であるプζめ電源at:圧をX′0と−
f/′、・)、次の(3)式で表わされる、。
B is a 1θ series connection, and the power supply at:
f/', ·), expressed by the following equation (3).

(3)式においで右辺の第1.[貞(りL基厚7■も川
を・tシ5、第2 H4は変化1.3を小す。
In equation (3), the first . [Sada (ri L basic thickness 7 ■ also river / tshi 5, second H4 reduces change 1.3.

すなわ1ハ この八′IF(・素子に近接しで発磁体を
移A R,・V !1イリさ(凡と出力電圧としこ]n譜豆部′θを得る
(−とができる。この出力が出力レベ7+とし7て不充
分な」↓h合は差動アンプ等により増幅すればよい。
In other words, 1C This 8' IF (・Move the magnetic body close to the element AR,・V! If the output is insufficient as an output level of 7+, it may be amplified by a differential amplifier or the like.

本実施例は以上の」:うに溝成さ)1ているため、ス・
fノヂングが非接触であり、」/、37時のグー乙。
This example has the above ``uni-groove structure'', so
f Noding is non-contact,''/, 37 o'clock goo.

A・リングの発生をなくすことができ、耐久性を大幅に
向上さぜることができ、さらQ・こオイルやごみの1・
1着や溶着が牛しることがない。   −寸だ、MR,
素トをfjF、□l和磁化することにより、スイッチン
グのオン、オフのヒステリシスを減少できる。例えば、
従来のマイクロスイッチではヒステリシスによるスイッ
チングの誤差量が01〜o2胴あったのが、本発明にお
いては11tlTl〜]、 Ottmにすることができ
、検出イ′Δ度を大幅に増大させることができる。
It can eliminate the occurrence of A-rings, greatly improve durability, and it can also remove oil and dirt from Q-rings.
There is no problem with first wear or welding. -It's a size, MR.
By magnetizing the element fjF, □l, the hysteresis of switching on and off can be reduced. for example,
In the conventional microswitch, the switching error amount due to hysteresis was 01 to o2, but in the present invention, it can be reduced to 11tlTl~], Ottm, and the detection angle can be greatly increased.

捷た、M ]、L素子は薄膜堆積法により形成できるた
め、大間生産が可能で、製造−Lのばらつきが小さく低
コスト化を実現できる。
Since the twisted, M], L element can be formed by a thin film deposition method, it can be produced over a long period of time, and the manufacturing cost can be reduced with small variations in manufacturing L.

さらに、温度(でよる出力の変動は強磁ti1体A、、
IJを直列接続しているな、め、柿で小さく、へ・IT
(素r=自体が可動部がなめため振動に対して極めて強
い。。
Furthermore, the variation in output due to temperature (ferromagnetic Ti1 body A,...
IJ is connected in series, it's small with a persimmon, to IT
(The element r itself has smooth moving parts, so it is extremely resistant to vibration.)

第2の実施例 第5図は本発明の他の実施例を示すもので、本実施例に
あっては、/ヤント6を軟磁性体から形成しンヤノト6
の基部に発磁体15を設け/こ構造を採用している。
Second Embodiment FIG. 5 shows another embodiment of the present invention. In this embodiment, the /yanto 6 is made of a soft magnetic material.
A magnetic body 15 is provided at the base of the structure.

このような構造を採用すると発磁体15の磁界が強1”
ぎる場合に用いられ、軟磁性体からなる/ヤフトの長さ
を適当に選択することにより、へ41(。
If such a structure is adopted, the magnetic field of the magnet generator 15 will be strong 1"
By appropriately selecting the length of the shaft made of soft magnetic material, it is possible to

素子16の近傍の磁界の大きさを調整することができる
The magnitude of the magnetic field in the vicinity of element 16 can be adjusted.

第3の実施例 第6図は本発明のもう一つの実施例を説明するもので本
実施例にあっては/ヤフト6及びダ・1−\・フラム1
をプラスチックマグネット等から一体成形することによ
り、製造下杵、組みN’71て工程を簡略化することが
できる。
Third Embodiment FIG. 6 explains another embodiment of the present invention. In this embodiment,
By integrally molding the N'71 from a plastic magnet or the like, it is possible to simplify the manufacturing and assembling processes.

ところで、MJgイの特徴としてへHL素子は面内成分
の外部磁場に対しては敏感であるが、面内に対して重重
方向の外部磁場にズt しては鈍感であるという1イI
質がある。この性質が外部ノイズに対しでは強いという
長所となるが、而内方向の外部磁場に関しては直接的に
出力に影響し7てくる。
By the way, one of the characteristics of the MJg is that the HL element is sensitive to an external magnetic field with an in-plane component, but is insensitive to an external magnetic field in the gravity direction relative to the in-plane component.
It has quality. This property has the advantage of being strong against external noise, but external magnetic fields in the internal direction directly affect the output.

吊子の実施例 この外部磁場の影響を除去する構造を採用したのが第7
図に示す実施例である。
Example of a hanger The seventh model adopted a structure that eliminates the influence of external magnetic fields.
This is an example shown in the figure.

本実施例にあってはMIt素子を軟磁性体からなる磁気
/−ルド20で囲むことにより、而内方向からの外部磁
気ノイズに対しても影響がなく S、/N比を向上さゼ
ることかできる。
In this embodiment, by surrounding the MIt element with a magnetic shield 20 made of a soft magnetic material, there is no effect on external magnetic noise from internal directions, and the S/N ratio is improved. I can do it.

第9の実施例 第8図は本発明のさらに他の実Mrj例を説明するもの
で、本実施例にあってはへ=Il(、素子16の近傍に
バイアス磁界発生用の発磁体21を設け、MI?・素子
−にバイアス磁界を印加することにより/ギフト6に設
けた発磁体を省略することができる構造を採用した。こ
の場合にはノー・フト6を軟磁性体で作成するか、また
はノー\・ノド6の先端部に軟磁性体22を設けること
によりMR・素子の出力をイ!することができる。
Ninth Embodiment FIG. 8 explains still another practical Mrj example of the present invention. By applying a bias magnetic field to the MI?・element, we have adopted a structure in which the magnetizing body provided in the gift 6 can be omitted.In this case, the no-ft 6 can be made of a soft magnetic material. Alternatively, by providing a soft magnetic material 22 at the tip of the nose 6, the output of the MR element can be increased.

このような構造を採用することにより、・・□j −/
’ス磁磁界へのM flu素子を一体成形することがで
き、単体でも特性の評価ができる。この結果、バイアス
磁界がない場合にゾヤフl−6側の発磁体15の磁化方
向を調整する必要があるのに対し、/′−\′フト6に
軟磁性体を取り付けるたりでよいため、組み立て時の調
整を必要としないという効果がある3、()効果 以上の説明から明らかなように本発明によ)Lば吸気圧
センサのスイッチングをM 1.L素子によって行なう
構造を採用しているため極めて確実な動イ′[を行なう
吸気圧センサを得ることができる。
By adopting such a structure...□j −/
It is possible to integrally mold the Mflu element to the magnetic field, and the characteristics can be evaluated even as a single unit. As a result, while it is necessary to adjust the magnetization direction of the magnetizing element 15 on the Zoyaf l-6 side when there is no bias magnetic field, it is only necessary to attach a soft magnetic material to the /'-\' foot 6, so the assembly is easy. 3. (2) Effects As is clear from the above explanation, the present invention has the effect that the switching of the intake pressure sensor is not required. Since the structure employs the L element, it is possible to obtain an intake pressure sensor that performs extremely reliable movement.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来構造を説明する縦断側面図、第2図〜第4
図は本発明の一実施例を説明するもので第21jj、4
iは縦断側面図、第3図はN・1.1(、素子部の拡入
−゛1′−面図、第・1図は動イ/Y7臣叩の説(1)
1図、第5図〜第8[司は本発明のそ)1−ぞ−J+−
異なった他の実施例を・J−1す縦断側面図である。 1・・ウー、・ング   5・夕■ヤ−7ラノ、67′
ヤノト     14  スブリンク15  発(ム体
     16、− M J(、素子20  磁気/−
ルド  2トハイアス磁界発生川発磁体 第1図 第2図 第3図 第4図 B 第5図 \  11 1 第6図 第7囚 、215 第8図
Figure 1 is a vertical side view explaining the conventional structure, Figures 2 to 4
The figure is for explaining one embodiment of the present invention.
i is a longitudinal side view, Figure 3 is an enlarged view of the element section N.
Figure 1, Figure 5 to Figure 8 [The main part is the part of the present invention] 1-zo-J+-
It is a longitudinal cross-sectional side view of J-1 of another different embodiment. 1...Woo,...Ng 5.Yu ■Ya-7 Rano, 67'
Yanoto 14 Sublink 15 (Mu body 16, - M J (, element 20 Magnetic/-
Figure 2 Figure 3 Figure 4 B Figure 5\ 11 1 Figure 6 Figure 7 Prisoner, 215 Figure 8

Claims (3)

【特許請求の範囲】[Claims] (1)圧力変化によるダイヤフラムの変位により吸気圧
を検出する吸気圧セン現において、前記ダイヤフラムに
発磁体を固定し、との発磁体の近傍に磁気抵抗効果素子
を設けたことを特徴とする吸気圧センサ。
(1) In an intake pressure sensor that detects intake pressure by displacement of a diaphragm due to pressure change, a magnetoresistive element is fixed to the diaphragm, and a magnetoresistive element is provided near the magnetoresistive element. Barometric pressure sensor.
(2)磁気抵jブL効果素子を軟磁性体により磁気/−
ルドしブζことを特徴とする特¥1請求の範囲第1項記
載の吸気圧セン−リ。
(2) The magnetoresistive L effect element is magnetized by a soft magnetic material.
1. The intake pressure sensor according to claim 1, wherein the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that the intake pressure sensor is characterized in that:
(3)磁気抵抗効果素子の・・イアスIaWを印hll
 1.、、、ダイヤフラム側の発磁体を除去したことを
特徴とする特J′1品求の範囲第1項記載の吸気圧セン
サ。
(3) Insert IaW of the magnetoresistive element... hll
1. . . . An intake pressure sensor according to item 1 of the specification J'1, characterized in that the magnetizing body on the diaphragm side is removed.
JP15258282A 1982-09-03 1982-09-03 Intake air pressure senser Pending JPS5943327A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15258282A JPS5943327A (en) 1982-09-03 1982-09-03 Intake air pressure senser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15258282A JPS5943327A (en) 1982-09-03 1982-09-03 Intake air pressure senser

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP22671490A Division JPH03115749A (en) 1990-08-30 1990-08-30 Intake pressure sensor

Publications (1)

Publication Number Publication Date
JPS5943327A true JPS5943327A (en) 1984-03-10

Family

ID=15543612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15258282A Pending JPS5943327A (en) 1982-09-03 1982-09-03 Intake air pressure senser

Country Status (1)

Country Link
JP (1) JPS5943327A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2570822A1 (en) * 1984-09-27 1986-03-28 Nihon Radiator Co PRESSURE CONVERTER ESTABLISHING AN ELECTRICAL SIGNAL THAT REPRESENTS THE VALUE OF THE PRESSURE APPLIED
JPS62121327A (en) * 1985-11-21 1987-06-02 Kanbayashi Seisakusho:Kk Pressure sensor
US6510792B1 (en) 1996-09-26 2003-01-28 Heidelberger Druckmaschinen Aktiengesellschaft Device for forming a sheet pile for a sheet fed rotary printing press
JP2008024315A (en) * 2006-07-18 2008-02-07 Meiji Rubber & Chem Co Ltd Non slip material for synthetic resin-made pallet, and synthetic resin-made pallet with non slip material fixed thereto

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034260A (en) * 1973-06-12 1975-04-02
JPS5528979B2 (en) * 1977-05-20 1980-07-31

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034260A (en) * 1973-06-12 1975-04-02
JPS5528979B2 (en) * 1977-05-20 1980-07-31

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2570822A1 (en) * 1984-09-27 1986-03-28 Nihon Radiator Co PRESSURE CONVERTER ESTABLISHING AN ELECTRICAL SIGNAL THAT REPRESENTS THE VALUE OF THE PRESSURE APPLIED
JPS62121327A (en) * 1985-11-21 1987-06-02 Kanbayashi Seisakusho:Kk Pressure sensor
US6510792B1 (en) 1996-09-26 2003-01-28 Heidelberger Druckmaschinen Aktiengesellschaft Device for forming a sheet pile for a sheet fed rotary printing press
JP2008024315A (en) * 2006-07-18 2008-02-07 Meiji Rubber & Chem Co Ltd Non slip material for synthetic resin-made pallet, and synthetic resin-made pallet with non slip material fixed thereto

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