JPS5932212A - Tuning fork type piezoelectric oscillator - Google Patents
Tuning fork type piezoelectric oscillatorInfo
- Publication number
- JPS5932212A JPS5932212A JP18557482A JP18557482A JPS5932212A JP S5932212 A JPS5932212 A JP S5932212A JP 18557482 A JP18557482 A JP 18557482A JP 18557482 A JP18557482 A JP 18557482A JP S5932212 A JPS5932212 A JP S5932212A
- Authority
- JP
- Japan
- Prior art keywords
- fork type
- tuning fork
- type piezoelectric
- electrodes
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims abstract description 9
- 238000005530 etching Methods 0.000 claims abstract description 5
- 244000025254 Cannabis sativa Species 0.000 claims 1
- 239000004744 fabric Substances 0.000 claims 1
- 239000013078 crystal Substances 0.000 abstract description 21
- 238000001259 photo etching Methods 0.000 abstract description 5
- 230000006866 deterioration Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000001771 vacuum deposition Methods 0.000 abstract 1
- 238000005520 cutting process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- RSMUVYRMZCOLBH-UHFFFAOYSA-N metsulfuron methyl Chemical compound COC(=O)C1=CC=CC=C1S(=O)(=O)NC(=O)NC1=NC(C)=NC(OC)=N1 RSMUVYRMZCOLBH-UHFFFAOYSA-N 0.000 description 1
- 230000005404 monopole Effects 0.000 description 1
- 238000013138 pruning Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】 本発明は音叉型圧型振動子の［ｂ−極分割に関する。[Detailed description of the invention] The present invention relates to [b-pole division] of a tuning fork type pressure type vibrator.
本発明の目的は音叉型圧型振動子のｉ（極形成万疹を改
善するζ、とに」：す、安価、かつ、高注叱圧電振動子
を提供するものであね、超小型、商（Ｒ朋水晶腕時削の
実用化を図る。The purpose of the present invention is to provide a tuning fork-type piezoelectric vibrator that improves the problem of polar formation. (Practice the practical use of R-ho crystal arm time cutting.
近年、水晶振動子σＪ小型１ヒが進み、これらの振動子
を水晶時ｉｆｌの時間標準として使わｉするよりになっ
た。これらの振動子に安来される条ｌ／１：は尚組板。In recent years, small-sized crystal oscillators σJ have become increasingly popular, and these oscillators have come to be used as time standards for crystal time ifl. The line 1/1 attached to these vibrators is the assembly plate.
小型で、しかも安価であることである。しかし、これら
の条件全光すには色々な点で問題があシ実用化が難しか
った。第１図ｔユ従米のＭ叉型水晶奈動子の■極分割を
示し、第？図ａ 、 ｌ）及びＣはそれぞれ分割万防全
示す。第２図ａ ｌ’Ｊ、 ）１４．横分割部分にスミ
入れする筆をボし、第２図ｂＶＪ、ダイヤモンドバー、
第２図Ｃはレーザー金下している。It is small and inexpensive. However, there were various problems in achieving full illumination under these conditions, making it difficult to put it into practical use. Figure 1 shows the ■ polar division of the M-shaped Suisho Naoko of the T-yu rice, and the ? Figures a, l) and C respectively show the complete division. Figure 2 al'J, )14. Brush off the brush to make the ink on the horizontal part, and use the diamond bar in Figure 2 bVJ.
Figure 2C shows laser metal deposition.
（ａ）のスミ入れによる方法は人が−イ固−（固潜くた
め１埒間が多くかかりすぎ、しかも手作業であ４）σ〕
で小型化した場合電極分割ができないとい９７に点金有
していた。（ｂ）のダイヤモンドバーによる’＋Ｉｔ
４ｊｄＨ分割は水晶を削り剪って道極分割を行なうもＱ
〕であるが水晶を削るため水晶表１ｈ１にクラック等を
生じるため電気特性の劣ｆヒを１ねく、こグツ方ωは手
作業であるため作条能率が悪く、小型１にできないとい
う欠点を有していた。（Ｃ，）のレーザーによる分割は
瞬間的に温度が上昇するため水晶表面に熱歪や。The method of (a), which involves inking, requires a lot of effort by a person.
97 had a dot metal because it was impossible to separate the electrodes when miniaturized. '+It by the diamond bar in (b)
4jdH division is done by cutting and pruning the crystal, but Q
] However, due to the cutting of the crystal, cracks etc. occur on the crystal surface 1h1, resulting in poor electrical properties.Since the cutting method is done by hand, the production efficiency is poor, and the disadvantage is that it cannot be made small. It had When dividing (C,) using a laser, the temperature rises instantaneously, causing thermal distortion on the crystal surface.
熱双晶を生じる。このため電気的特性の劣化を１ねく。Generates thermal twinning. This causes deterioration of electrical characteristics.
又水晶を小型、薄型にした場合水晶の裏面電極をも切っ
てし１つため薄型、小型化が不可能であった。本発明は
前記の欠点を除去したものである０次に本発明について
詳ｉ己する。第５図は。Furthermore, when the crystal is made smaller and thinner, the back electrode of the crystal is also cut, making it impossible to make the crystal thinner and smaller. The present invention eliminates the above-mentioned drawbacks.The present invention will now be described in detail. Figure 5 is.
本発明の基極分割をフォトエツチングによる゛万広の一
実施例を示し、（ａ） 、 （ｂ） 、 （ｃ） 、
（ｄ）に各１−桿ケ示し２ている。以下、市１極分割方
チを上程Ｉｌｌ Ｋ説明する。第６図（ａ）に卦いて、
１′は音叉型水晶撮動子の片側励（取部の断面全示し、
その表裏面と側面には電極２′が蒸看等［よって全面に
配置されている。An embodiment of the present invention in which the base electrode is divided by photoetching is shown, and (a), (b), (c),
In (d), each 1-rod is shown 2. Hereinafter, the method for dividing the city into one pole will be explained in detail. Referring to Figure 6(a),
1' is one side excitation of the tuning fork type crystal camera (the entire cross section of the cutout is shown,
Electrodes 2' are arranged on the front, back, and side surfaces of the device.
第３図（ｂ）ではさらに電極の上にｌ−ンスト６′を施
（７ている。次に、第６図（ｃ）では単極の必要部分全
フォトマスクを通してＩＫ光する。露光された８１１分
はエツチングによって残り、ｍＷ光されない１４ｉｓ
５ｆはエツチングｖＣＪ：つて除去される。第３図（ｄ
）は１本発明のフォトエツチングによっで）Ｗ、４１分
割きえした断面形状でるる。実際にｔよ、フォトマスク
は任意形状に股引、製作が出来るので、必幹とする単極
分割Ｊヒ状奮容易に得ゐことかできる。また、不発明Ｉ
ｃＪ：れば、水晶の表面に熱ろるい（・よ機砿的歪ケ加
えないため、振動子の頃気特性を劣化させることなく、
水晶振動子本来の特性を得ることができる。In Fig. 3(b), a laser beam 6' is further applied on the electrode.Next, in Fig. 6(c), IK light is applied to all the necessary parts of the monopole through a photomask. 811 minutes remain due to etching and 14 is not exposed to mW light.
5f is removed by etching vCJ:. Figure 3 (d
) is obtained by photo-etching according to the present invention, resulting in a cross-sectional shape which is divided into 41 parts. In fact, since a photomask can be fabricated into any shape, it is easy to achieve the monopolar splitting condition that is essential. Also, non-invention I
cJ: Because it does not add thermal distortion to the surface of the crystal, it does not deteriorate the vibration characteristics of the vibrator.
The original characteristics of a crystal resonator can be obtained.
そして、水晶に熱歪ろゐいは機械的歪が生じないため、
エージング特性が優れ、その結果、面積度の腕時計が実
用比されるよりになつｒｖｅフォトマスクは微細加工が
可能でろるため、振動子を小型。And, since there is no thermal or mechanical strain in the crystal,
It has excellent aging characteristics, and as a result, it has become possible to make surface area watches more practical.Since RVE photomasks can be microfabricated, the oscillator can be made smaller.
薄型化した場合でも基極分割が容易でわり、また。Even when it is made thinner, it is easier to separate the base electrodes.
一度に大振の振動子を処理することができるから安価に
製造することができ、そのに業的１曲値は著しく大きい
。Since it is possible to process a large number of vibrators at one time, it can be manufactured at low cost, and the commercial value per song is extremely large.
第１図は一般に使用されでいる音叉型水晶撮動子のｅｔ
１ｃＪｔ図、第２図（ａ） 、 （ｔ＋）および（Ｃ
） ｒ、ｌ：上記音叉型水晶撮動子の延棒分割法の説明
図、第３図（ａ） 、 （ｂ）。
（ｃ）ｂ工ひ（ｄ）は本発明の音叉型水晶撮動子の■極
分割のフォトエツチングに、ｃ′６エ桿Ｉｌｌ ｆ示す
説明図で゛める。
１・・・・音叉型水晶振動子
２・・・・・・表面の電極分割部
３、・４・・・１ｌｌｔ１面の電極分割部１′・・・・
・・水晶
２′・・・・・・露光
６′・・・・Ｉ７ジスト
４′・・・・・ｒ、＝ｎ ′ｙｔさノしたレジストＧＪ
上
出願人 株式会ｉ１． ン君二１青工合代理人 弁理
」：最Ｆ、 務
６ＣFigure 1 shows a commonly used tuning fork type crystal camera.
1cJt diagram, Figure 2 (a), (t+) and (C
) r, l: An explanatory diagram of the rod division method of the tuning fork type crystal camera, FIGS. 3(a) and (b). (c)b Technique (d) is an explanatory diagram showing the photoetching of pole division of the tuning fork type crystal sensor of the present invention. 1... Tuning fork type crystal oscillator 2... Electrode division parts 3, 4... 1llt electrode division parts 1' on the surface...
・・Crystal 2′・・・Exposure 6′・・・・I7 Resist 4′・・・・r,=n′yt slanted resist GJ
Applicant above: Co., Ltd. i1. Ng-kun 21 Seiko Joint Agent Patent Attorney: 1F, 6C
Claims (1)
型圧■振動子の表襲面と側１自１に■′極を配置（−１
次に、北極のににレジス１１布し、〕）トエッチングに
よって表ａ ｉｉ＋ど側面の草極？分割１゜たことを！
１′ｆ徴とする■叉型用Ｔ［振ｊｋＪ１子の市極分割力
法。In the pole dividing method of the tuning fork type pressure vibrator, ■' poles are placed on the surface and side 1 of the tuning fork type pressure vibrator (-1
Next, apply 11 sheets of resist cloth to the north pole, and etching the surface a ii + which side of the grass pole? The division was 1°!
1'f characteristic ■Fork type T [shake jk J1 child's city pole division force method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18557482A JPS5932212A (en) | 1982-10-22 | 1982-10-22 | Tuning fork type piezoelectric oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18557482A JPS5932212A (en) | 1982-10-22 | 1982-10-22 | Tuning fork type piezoelectric oscillator |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8694876A Division JPS5312295A (en) | 1976-07-21 | 1976-07-21 | Tuning fork type piezoelectric vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5932212A true JPS5932212A (en) | 1984-02-21 |
Family
ID=16173185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18557482A Pending JPS5932212A (en) | 1982-10-22 | 1982-10-22 | Tuning fork type piezoelectric oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5932212A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03503991A (en) * | 1987-10-30 | 1991-09-05 | トライ‐テック システムズ インターナショナル インコーポレイテッド | Plastic closures for containers and cans and methods of making such closures |
-
1982
- 1982-10-22 JP JP18557482A patent/JPS5932212A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03503991A (en) * | 1987-10-30 | 1991-09-05 | トライ‐テック システムズ インターナショナル インコーポレイテッド | Plastic closures for containers and cans and methods of making such closures |
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