JPS5931247B2 - Suishiyo Shindoushi - Google Patents
Suishiyo ShindoushiInfo
- Publication number
- JPS5931247B2 JPS5931247B2 JP13784175A JP13784175A JPS5931247B2 JP S5931247 B2 JPS5931247 B2 JP S5931247B2 JP 13784175 A JP13784175 A JP 13784175A JP 13784175 A JP13784175 A JP 13784175A JP S5931247 B2 JPS5931247 B2 JP S5931247B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- arm
- suishiyo
- shindoushi
- crystal resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 13
- 238000005530 etching Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
- H03H9/215—Crystal tuning forks consisting of quartz
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】 本発明は薄型水晶振動子の形状に関する。[Detailed description of the invention] The present invention relates to the shape of a thin crystal resonator.
本発明の目的はエツチング技術を用いて製造される薄型
の水晶振動子の作業性を向上するために、新たに引出し
電極と位置決め、ツマミ用のアームを設けた事である。The purpose of the present invention is to newly provide an arm for extraction electrodes, positioning, and knobs in order to improve the workability of a thin crystal resonator manufactured using etching technology.
最近小型水晶振動子の進歩は数十ミクロンの薄い水晶ウ
ェハの加工とエツチング及び写真技術の進歩にともなっ
て急速に進み、時計等の基準振動体としてその生産量も
増加して来ている。Recently, the development of small crystal oscillators has progressed rapidly with advances in the processing and etching of crystal wafers as thin as several tens of microns, as well as advances in photographic technology, and their production as standard oscillators for watches and the like has also increased.
その形状は音叉形が製造の面からも、性能の面でも最も
理想的な形とされている。The tuning fork shape is considered to be the most ideal shape from both a manufacturing and performance standpoint.
しかしながら、この種の振動子は形状が単純であるにも
か又わらず、取り扱いの面では極めて注意を要するもの
である。However, although this type of vibrator has a simple shape, it requires extreme care in handling.
即ち、振動体全体に電極が形成されており、振動子をつ
まむ事は好ましくなく、互いに接触する事も避けなげれ
ばならない。That is, electrodes are formed over the entire vibrating body, and it is not preferable to pinch the vibrator, and contact with each other must be avoided.
従って振動子を枠から取りはずすことも、測定端子を振
動子に当てる事も大変難かしい作業技術を要するのであ
る。Therefore, very difficult work techniques are required to remove the vibrator from the frame and to apply the measurement terminal to the vibrator.
本発明はか〜る問題点を解決するために、将来振動子と
して働く一切の部分には絶対に触れることなく、振動子
の調整ないしは取りはずし搬送を行えるようにした事で
ある。In order to solve these problems, the present invention makes it possible to adjust or remove and transport the vibrator without ever touching any parts that will function as the vibrator in the future.
以下本発明の実施例について図面に従って詳しく説明す
る。Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図は従来からのエツチングによる複数個の振動子を
とり出すパターンの平面図で、薄い水晶板１に多数の振
動子２が形成され、連結部３で支持されている。FIG. 1 is a plan view of a pattern from which a plurality of vibrators are extracted by conventional etching. A large number of vibrators 2 are formed on a thin crystal plate 1 and supported by a connecting portion 3.
第２図は本発明の一実施例を示す部分拡大図で薄い水晶
板１１に多数の振動子１９がエツチングで形成され、各
々の振動子１９にはマウンティングの際の位置決め兼ツ
マミ用のアーム１２が設けられ、該アーム１２の両側に
該アーム１２より強度的に弱い２本のブリッジアーム１
３，１４が形成されている。FIG. 2 is a partially enlarged view showing an embodiment of the present invention, in which a large number of vibrators 19 are formed by etching on a thin crystal plate 11, and each vibrator 19 has an arm 12 for positioning and knob during mounting. are provided, and two bridge arms 1 which are weaker in strength than the arm 12 are provided on both sides of the arm 12.
3 and 14 are formed.
２本のブリッジアーム１３，１４上に（′Ｌ、振動子の
蒸着電極１５，１６と同極の引出し電極が蒸着されてお
り、水晶板の枠上の電極ターミナル１７，１Ｂと導通さ
せている。On the two bridge arms 13 and 14 ('L, extraction electrodes of the same polarity as the vapor-deposited electrodes 15 and 16 of the vibrator are vapor-deposited, and are electrically connected to the electrode terminals 17 and 1B on the frame of the crystal plate. .
この状態で振動子１９は電極ターミナル１７゜１Ｂを使
って周波数の調整や特性のチェックが行われ、次工程の
振動子のパッケージの工程に移される。In this state, the frequency of the vibrator 19 is adjusted and the characteristics are checked using the electrode terminal 17.degree. 1B, and the vibrator 19 is transferred to the next process of packaging the vibrator.
第３図はこの時の振動子とりはすしの様子を示している
。Figure 3 shows how the oscillator handles the sushi at this time.
即ち前記のブリッジアーム１３，１４は搬送部材のチッ
プ２１，２２の矢印の方向の動きで簡単に折り取られ、
同時にツマミアーム１２を搬送部材チップ２Ｌ２２で挾
まれ、次工程ステーションに移され、位置決めされる。That is, the bridge arms 13 and 14 are easily broken off by the movement of the chips 21 and 22 of the conveying member in the direction of the arrow.
At the same time, the knob arm 12 is held between the transport member chips 2L22, and is moved to the next process station and positioned.
かくして振動子に何ら触れることな（、測定及び調整が
なされ、不用になると、折り取られ、つまみをもって次
工程に移されるというワンタッチ方式で自動組立等も可
能になり、その効果は極めて大なるものがある。In this way, it is possible to automatically assemble the vibrator in a one-touch manner, in which the vibrator is measured and adjusted, and when it is no longer needed, it is broken off and transferred to the next process using the knob, which is extremely effective. There is.
枠部の電極１８は勿論複数個分が共通した電極方式をと
っている。Of course, the electrodes 18 on the frame part are of a common electrode type.
（図省略）(Figure omitted)
第１図は従来の薄型水晶振動子パターンを示す平面図、
第２図は本発明による薄型水晶振動子の形状と電極を示
す部分拡大図、第３図は本発明の説明をするための略図
である。
１．１１・・・・・・薄い水晶板、２，１９・・・・・
・水晶振動子、３・・・・・・連結部、４・・・・・・
折れた連結部、１２・・・・・・位置決め兼ツマミアー
ム、１３，１４・・・・・・ブリッジアーム、１５，１
６・・・・・・電極、１７，１８・・・・・・電極ター
ミナル、２１，２２・・・・・・搬送部材チップ。Figure 1 is a plan view showing a conventional thin crystal resonator pattern.
FIG. 2 is a partially enlarged view showing the shape and electrodes of a thin crystal resonator according to the present invention, and FIG. 3 is a schematic diagram for explaining the present invention. 1.11...Thin crystal plate, 2,19...
・Crystal oscillator, 3... Connection part, 4...
Broken connection part, 12... Positioning/knob arm, 13, 14... Bridge arm, 15, 1
6... Electrode, 17, 18... Electrode terminal, 21, 22... Transport member chip.
Claims (1)
び該アームの両側に該アームより強度的に弱い２本の電
極ブリッジを設けたことを特徴とする水晶振動子。1. A crystal resonator characterized in that a support part of the thin tuning fork crystal resonator is provided with a knob arm and two electrode bridges having a weaker strength than the arm on both sides of the arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13784175A JPS5931247B2 (en) | 1975-11-18 | 1975-11-18 | Suishiyo Shindoushi |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13784175A JPS5931247B2 (en) | 1975-11-18 | 1975-11-18 | Suishiyo Shindoushi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5261986A JPS5261986A (en) | 1977-05-21 |
| JPS5931247B2 true JPS5931247B2 (en) | 1984-08-01 |
Family
ID=15208061
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13784175A Expired JPS5931247B2 (en) | 1975-11-18 | 1975-11-18 | Suishiyo Shindoushi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5931247B2 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2464595A1 (en) * | 1979-08-31 | 1981-03-06 | Ebauches Sa | METHOD FOR DETECTING THE ASYMMETRY OF DIAPASON-SHAPED PIEZOELECTRIC CRYSTAL RESONATORS AND RESONATORS FOR ITS IMPLEMENTATION |
| JP4877796B2 (en) * | 2007-02-13 | 2012-02-15 | セイコーインスツル株式会社 | Tuning-fork crystal unit manufacturing equipment |
| JP4877797B2 (en) * | 2007-02-15 | 2012-02-15 | セイコーインスツル株式会社 | Tuning-fork crystal unit manufacturing equipment |
| JP5055593B2 (en) * | 2007-02-16 | 2012-10-24 | セイコーインスツル株式会社 | Tuning-fork crystal unit manufacturing equipment |
| JP5185650B2 (en) * | 2008-02-14 | 2013-04-17 | セイコーインスツル株式会社 | Method for manufacturing piezoelectric vibrating piece and wafer |
| JP5138407B2 (en) * | 2008-02-14 | 2013-02-06 | セイコーインスツル株式会社 | Wafer and wafer polishing method |
| JP2009194629A (en) * | 2008-02-14 | 2009-08-27 | Seiko Instruments Inc | Method of manufacturing piezoelectric vibration piece, piezoelectric vibration piece, wafer, piezoelectric vibrator, oscillator, electronic equipment, and radio clock |
| JP5184142B2 (en) * | 2008-02-26 | 2013-04-17 | セイコーインスツル株式会社 | Piezoelectric vibrating piece, piezoelectric vibrator, oscillator, electronic device, radio timepiece, and method of manufacturing piezoelectric vibrating piece |
| JP6525789B2 (en) * | 2015-07-27 | 2019-06-05 | 京セラ株式会社 | Quartz crystal vibrator assembly wafer |
| JP6525788B2 (en) * | 2015-07-27 | 2019-06-05 | 京セラ株式会社 | Quartz crystal vibrator assembly wafer |
-
1975
- 1975-11-18 JP JP13784175A patent/JPS5931247B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5261986A (en) | 1977-05-21 |
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