JPS592481A - Method for compensating sensitivity of sensor array - Google Patents

Abstract

PURPOSE:To improve the efficiency percentage, by forming an amount of compensation write written on a sensitivity compensating layer on a photodetecting position of each unit sensor and performing compensating write while scanning each unit element, for compensating the variance in the sensitivity of sensors after manufacturing stage. CONSTITUTION:When a retrieval signal A is inputted, a very short luminous amount for check obtained via a multiplexer MX17 and an amplifier 11 is given to a unit sensor through a write layer not exposed of a sensor array 5 via a laser unit 6. A signal detected from the array 5 is sampled and held 13 and the result of this signal obtained by comparing it with a reference signal 14 at a comparator 15 is given to a retrieval circuit 16. The circuit 16 indexes the result of a table prepared in advance at the transmission of the write layer not exposed and the photosensitivity of the write layer in response to the amplitude of the signal as the result of comparison and sets an illuminating time of the unit 6 to write it in the write layer. In this case, the MX17 passes this signal when a mode FF18 is set. When the write is finished, the register 9 is advanced, the next address is designated, a motor 8 drives a scanning mechanism 7 to write signal on the next not-exposed sensitive layer.

Description

【発明の詳細な説明】 （４）分野 本発明は光学偉読取装置等の、像を画素に変換するだめ
のセンサアレイに係シ、特に単位センサを線あるいは面
上に集積したセンサアレイの各即位センナ間の感度のむ
ら；いわゆるシェーディングを補正したセンサアレイの
製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION (4) Field The present invention relates to sensor arrays for converting images into pixels, such as optical reading devices, and in particular to sensor arrays in which unit sensors are integrated on a line or surface. The present invention relates to a method of manufacturing a sensor array that corrects for unevenness in sensitivity between enthroned sensors; so-called shading.

ＣＢ）　　従来技術 近年テレビカメラ・ＯＣＲ装置等の像読取部は同体化さ
れ、基板上に集積され展開配置された多数の単位センサ
とこれら単位センサの検出した信号を順次走査出力する
手段よシ成るセンサアレイが多く１６＝用される様にな
って来ているが製造上の問題点は製造ロッ）Ｋよって感
度がばらつくことと、センサアレイ１個の中の各単位セ
ンサ間で感度のはもつき＝（分布むら）が生ずることで
ある。CB) Prior Art In recent years, image reading sections of television cameras, OCR devices, etc. have been integrated into one unit, and consist of a large number of unit sensors integrated and deployed on a substrate and means for sequentially scanning and outputting the signals detected by these unit sensors. Many sensor arrays are being used, but the problem in manufacturing is that the sensitivity varies due to the manufacturing lot, and the sensitivity varies between each unit sensor in one sensor array. This means that tsuki = (distribution unevenness) occurs.

特傾後者は全体の感度レベル調整では補正出来ないため
、＠食の上許容限を越えるものは不良として来た。いｔ
おい公正りを確保するためには工さ″ 程管理をきびしくせ杉るを得ず、コスト畠になる傾向が
あった。Since the latter cannot be corrected by adjusting the overall sensitivity level, those exceeding the upper tolerance limit were considered defective. It
In order to ensure fairness, strict process control was unavoidable, and this tended to increase costs.

そしてセンサアレーの単位センサ素子数が多く、多素子
化するＫつれますます良品歩止シが低下するＯ もちろん各センサアレー夫々に、これらのセンサアレー
の走査順アドレスに対応する各単位センサについての感
度較正用データを、対応させ、夫々の走査順アドレスで
の感度を走査に交１応して補償することも不可能ではな
いが使用時のコストが高くなると云う欠点を有する。As the number of unit sensor elements in the sensor array increases, and as the number of elements increases, the yield rate of good products decreases. Although it is not impossible to make the sensitivity calibration data correspond to each other and compensate the sensitivity at each scan order address in accordance with the scan, it has the drawback that the cost during use increases.

（ＣＪ　　目的 本発明はこうした背−ＩＮＫかんがみ、センサアレイの
構成各単位センサ間の感度のばらつきを製造工稈後の補
正によって補償して良品化することであり、本発明の特
徴は、上記目的を複数の単位センサを線上あるいは面上
に集積Ｌ、：４Ｌ積された単の 位センサ群の感知面げ近傍に感度補償層を有するセンサ
アレイの製造方法において、上記感度補償層を未書込の
書込可能体で形成し、基ｉｉ／ｊ照度の光源で照射した
時のセンサアレイの各単位センサからの出力を記録し、
基準レベル設定手段に設定した出力と上記各単位センナ
の出力と比較して、各単位センサの受光位置上の感度補
償Ｒ４に書き込む補償書込量を作成する手段と書込・走
査手段を有走査しながら袖イバ宵込を行うことにより実
現することである。(CJ Purpose) The purpose of the present invention is to compensate for variations in sensitivity among the unit sensors of the back-INK sensor array through correction after the manufacturing process, and to improve the quality of the product. A method for manufacturing a sensor array having a sensitivity compensation layer near the sensing surface of a group of unit sensors L, in which a plurality of unit sensors are integrated on a line or a plane: 4L, wherein the sensitivity compensation layer is not written. record the output from each unit sensor of the sensor array when irradiated with a light source of base ii/j illuminance;
Comparing the output set in the reference level setting means with the output of each unit sensor, the means for creating a compensation writing amount to be written in the sensitivity compensation R4 on the light receiving position of each unit sensor and the writing/scanning means are scanned. This can be achieved by doing Sodeiba Yoigomi while doing so.

０））実施例 第１図は本発明の一実施例の説明図で、対象であるセン
サアレイの構成を示し、図の（ａ）は受光（ｎｌ側より
見た正面図、（ｂ）は立断面図を示す。0)) Embodiment Figure 1 is an explanatory diagram of an embodiment of the present invention, showing the configuration of the target sensor array. An elevational sectional view is shown.

し］中１は基板、２は単位センサの集合であるセンサア
レーのセンサ部３け書込層のベース、４は書込層、５は
センサアレーの総称、なを書込１−のベースと書込層は
基板」二内センサ部近傍に配置されほぼ密接して同着さ
れているものとする。1 is the substrate, 2 is the base of the 3-piece writing layer of the sensor section of the sensor array which is a collection of unit sensors, 4 is the writing layer, 5 is the general term for the sensor array, and 1 is the base of writing 1-. It is assumed that the writing layer is disposed near the sensor portion within the substrate and adhered thereto almost closely.

第２図は本発明の一実施例の説明図でセンサアレーの各
幣位センサに対応する書込層の位ｉ鑞に補償情報を書込
みし［定−する方法を説明するものである。FIG. 2 is an explanatory diagram of one embodiment of the present invention, and is intended to explain a method for writing and fixing compensation information in the position i of the writing layer corresponding to each banknote level sensor of the sensor array.

図中、５はセンサアレイ、６はレーザを含む光学系ユニ
ット、７はノド、査機構、８は走査用駆動モータ、９は
走査アドレスレジスタ、１０はドライバ、１１はレーザ
のドライバ、１２は信号ドライバ、１３はｉｔＳ号のサ
ンプルボールド回路、１４は晶藺信号回路、１５は比較
器、１６は補償書込時１１）Ｉテーブルの検策回路、１
７けマルチプレクサ、今光学系ユニット６がセンサアレ
イ５上の岩から検出書込補償を行うこととする。また光
学ユニットのビームスポットｔｄ　４１ｊ（Ｏセンサ相
当の分解能（吐あるものとする。また書込層のベースは
基板１に固定されているものとする。In the figure, 5 is a sensor array, 6 is an optical system unit including a laser, 7 is a throat, a scanning mechanism, 8 is a scanning drive motor, 9 is a scanning address register, 10 is a driver, 11 is a laser driver, and 12 is a signal Driver, 13 is itS sample bold circuit, 14 is crystal signal circuit, 15 is comparator, 16 is compensation writing time 11) I table test circuit, 1
Assume that the optical system unit 6 performs detection write compensation from the rock on the sensor array 5 using the 7-digit multiplexer. It is also assumed that the beam spot td41j of the optical unit has a resolution equivalent to that of an O sensor.It is also assumed that the base of the writing layer is fixed to the substrate 1.

まずＡに検査信号を入れる：マルチプレクサ１７アンブ
１１を介してごく短い検を用光量を未感光の書込層全通
して単位センサに送シ込み検出した信号を１３の回路で
サンプルホールドし、１５の回路で基準信号回路１４の
レベルと比較し結果を模策回路１６に送ると検策回路１
６は核結果の信号の大きさに応じて■未感光の書込層の
透過性、＠引込層の感光感度およびガンマ、０スポツト
の解崩、等であらかじめ定められ該回路内にすでに用意
されているデープルの結果を引き当て、感度補償のため
書込層に書き込むためのし一ザユニノト６の発光時間を
ｐ′−定する０このときマルチプレクサ１７はモードＩ
”Ｆ１８が七ノドでこの信号を通過させる。所定の書込
がおわり信号が終了すると立ち下りでモードＦＦがリセ
ットされ、その出力でレジスタ９を走進させ、次のアド
レスを指定する。このときモータ８は走査機構７を駆動
し、レーザユニット６を次のアドレスに歩進させ次のア
ドレスに対応する単位センサと未感光の書込層について
、先の動作をくυかえず。First, input a test signal into A: send a very short test light amount through the unsensitized writing layer to the unit sensor via the multiplexer 17 and amplifier 11.The detected signal is sampled and held in the circuit 15. When the circuit compares the level with the reference signal circuit 14 and sends the result to the test circuit 16, the test circuit 1
6 is predetermined in accordance with the magnitude of the signal of the nuclear result, such as the transparency of the unexposed writing layer, the photosensitivity and gamma of the drawing layer, the cancellation of the 0 spot, etc., and is already prepared in the circuit. At this time, the multiplexer 17 is set to mode I.
"F18 passes this signal at seven nodes. When the specified write is completed and the signal ends, the mode FF is reset at the falling edge, and the output advances register 9 to specify the next address. At this time The motor 8 drives the scanning mechanism 7 to advance the laser unit 6 to the next address without changing the previous operation for the unit sensor and unexposed writing layer corresponding to the next address.

こうして最後の単位センザ寸で検査と補正書込が完了す
ると書き込まれた智込層を有するセンサアレイ５を組立
体のままで書込１砦の現像定着を行い、必要あれば現像
定着された１込層の上に保護膜を装着し７て感度調整さ
れたセンサアレイ５を完成する。In this way, when the inspection and correction writing is completed with the last unit sensor size, the sensor array 5 having the written knowledge layer is developed and fixed for the writing 1 while the sensor array 5 is assembled, and if necessary, the developed and fixed 1 A protective film is attached on top of the mixed layer 7 to complete a sensor array 5 with adjusted sensitivity.

なを、面に集積されたセンサアレイの場合はＸ。X for a sensor array integrated on a surface.

７両方向に上記手順で検査、補正書込を行えば良いし、
上記検査、補正書込は、アドレスさえトラツキノブ寸れ
ば検査をアドレス全部について行いそのあとで補止書込
をしても同じことである。7 You can perform inspection and correction writing in both directions using the above procedure,
The above-mentioned inspection and correction writing are the same even if the inspection is performed on all addresses and the supplementary writing is performed after that, as long as the address is as long as the tracking knob.

ｔだ本発明では書込層を固定しだま憧で旬、下の現象定
着を行うので位置ぎめの心配は全くない。In the present invention, the writing layer is fixed and the phenomena at the bottom are fixed at the same time, so there is no need to worry about positioning.

なお、第３図は本発明の補償原理のれ（１明Ｍで、上記
各単位センサに対する補償を説明するものである。It should be noted that FIG. 3 illustrates the compensation principle of the present invention (in 1 M), and explains the compensation for each of the above-mentioned unit sensors.

図中（ａ）は検査用光量に対する各単位センサの出力（
感度）、（ｂ）は補償用書込光量、（Ｃ）は現像定着さ
れだ夷込層の透過率、■）は囚と（Ｃ）を重ね合わせた
補償後の感度を示す。In the figure, (a) shows the output of each unit sensor (
(b) shows the amount of writing light for compensation, (C) shows the transmittance of the impurity layer after being developed and fixed, and (■) shows the sensitivity after compensation, which is obtained by superimposing the image and (C).

（ト）効果 以上説明した如く、以上の様な感度調整ケ行ったセンサ
アレイは、製造後のばらつきを書込層によシ補ｆｌ’ｔ
するので全体感度はおさえられるとしても、感度のばら
つきを高４％＋ｉ度におさえ込むことが出来るので部分
的感胚むらの少いセンサアレイを容易に得ることが出来
使用に耐え４４ｒる良品の公正捷りを最小限の付加物と
検査コストの追加により大巾に向上出来るものである。(g) Effects As explained above, the sensor array that has undergone the sensitivity adjustment described above does not compensate for post-manufacturing variations by using the writing layer.
Therefore, even though the overall sensitivity can be suppressed, the variation in sensitivity can be suppressed to a high 4% + i degree, so it is possible to easily obtain a sensor array with less unevenness of partial sensitization, and a good product that can withstand use and is 44r. Fairness can be greatly improved by adding minimal additional materials and inspection costs.

第１図は本ざ凸明の一実Ｍ１１例の説１図、第２図は本
発明の一実Ｍｉｊ例の説２明図、第３図は本発明の補イ
ｎ原理の説明図。FIG. 1 is a first diagram illustrating an example of M11 of the present invention, FIG. 2 is a second diagram illustrating an example of Mij of the present invention, and FIG. 3 is an explanatory diagram of the complementary in principle of the present invention.

図中５はセンナアレイ、２けセ／す部、４は書込層、６
は光孝系ユニット、７は走査ｔ：！’、’４構、９はア
ドレスレジスタ、Ｉ３はサンプルホールド回路、１６は
検事回路。In the figure, 5 is a senna array, 2-digit cell part, 4 is a writing layer, and 6 is a senna array.
is a light-filtering unit, and 7 is a scanning t:! ',' 4 structures, 9 is an address register, I3 is a sample hold circuit, and 16 is a prosecutor circuit.

Claims (1)

【特許請求の範囲】 複数の単位センサを線上あるいは面上に集積し、の 集積された単位センサ群の感知面Ｗ近傍に感度補照度の
光源で照射した時のセンサアレイの各単位センサからの
出力を記録し、基準レベル設定手段に設定した出力と上
記各単位センサの出力と比較して、名単位センサの受光
位置上の感度補償層に書き込む補償書込量を作成する手
段と書込・走査手段を有し、上記補償書込量にもとすき
、各単位素子上を走査しながら補償書込を行うことを特
徴とするセンサアレイの感度補償法。[Scope of Claims] A plurality of unit sensors are integrated on a line or a plane, and when a light source with sensitivity supplementary illumination is irradiated near the sensing surface W of the integrated unit sensor group, the light from each unit sensor of the sensor array is means for recording the output and comparing the output set in the reference level setting means with the output of each of the unit sensors to create a compensation writing amount to be written to the sensitivity compensation layer above the light receiving position of the unit sensor; A method for compensating the sensitivity of a sensor array, comprising a scanning means, and performing compensation writing while scanning each unit element with the amount of compensation written as described above.