JPS59230000A - Ultrasonic ceramic microphone - Google Patents
Ultrasonic ceramic microphoneInfo
- Publication number
- JPS59230000A JPS59230000A JP10218284A JP10218284A JPS59230000A JP S59230000 A JPS59230000 A JP S59230000A JP 10218284 A JP10218284 A JP 10218284A JP 10218284 A JP10218284 A JP 10218284A JP S59230000 A JPS59230000 A JP S59230000A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- bimorph
- vibrator
- metal diaphragm
- folded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 230000010355 oscillation Effects 0.000 abstract description 8
- 238000005452 bending Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- MOFOBJHOKRNACT-UHFFFAOYSA-N nickel silver Chemical compound [Ni].[Ag] MOFOBJHOKRNACT-UHFFFAOYSA-N 0.000 description 1
- 239000010956 nickel silver Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
- G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、圧電磁器振動子と金属製振動板とを貼り合わ
せてなるバイモルフ振動子を備えた超音波セラミックマ
イクロホンに関するものであり、特に高感度で、安定し
た共振特性を持つ超音波セラミックマイクロホンを提供
するものである。[Detailed Description of the Invention] The present invention relates to an ultrasonic ceramic microphone equipped with a bimorph vibrator made by laminating a piezoelectric ceramic vibrator and a metal diaphragm, and which has particularly high sensitivity and stable resonance characteristics. The present invention provides an ultrasonic ceramic microphone with
従来のこの種類の超音波セラミックマイクロホンは第１
図で示すように、金属材料として、アルミニウム、洋白
よりなる平板状の金属製振動板１を用い、圧電磁器振動
子２を前記振動板１の下面の中央部に貼り合せてバイモ
ルフ振動子３を構成している。４は円錐状共振子、５は
バイモルフ振動子３を支持する弾性接着剤、６は端子板
、７はケースである。上記構成の従来の超音波セラミッ
クマイクロホンにおいては、金属製振動板１は製造の際
の打抜き加工時にパリが生じるとともに、圧電磁器振動
子２との貼り合せ部と、金属製振動板１のみの部分とに
分かれるため、振動発生時に高次共振が発生しやず＜、
壕だ圧電磁器振動子２の径方向振動への漏れが太きいだ
め振動減衰が大きかった。This type of conventional ultrasonic ceramic microphone is the first
As shown in the figure, a flat metal diaphragm 1 made of aluminum or nickel silver is used as a metal material, and a piezoelectric ceramic oscillator 2 is bonded to the center of the lower surface of the diaphragm 1 to form a bimorph oscillator 3. It consists of 4 is a conical resonator, 5 is an elastic adhesive that supports the bimorph resonator 3, 6 is a terminal plate, and 7 is a case. In the conventional ultrasonic ceramic microphone having the above configuration, the metal diaphragm 1 has cracks during the punching process during manufacturing, and the part where it is bonded to the piezoelectric ceramic vibrator 2 and the part where only the metal diaphragm 1 is formed. Because it is divided into two parts, higher-order resonance does not occur when vibration occurs.
The leakage to the radial vibration of the trench piezoelectric ceramic vibrator 2 was large, and the damping of the trench vibration was large.
本発明は金属製振動板の加工性を考慮し、打ち抜き製造
時のパリの影ヤ１５をなくシ、振動効率を向上させた超
音波セラミックマイクロホンを提供するものである。The present invention takes into account the workability of a metal diaphragm, and provides an ultrasonic ceramic microphone that eliminates the shadow 15 of Paris during punching manufacturing and improves vibration efficiency.
以下、本発明の一実施例について第２図をもとにして詳
細に説明する。同図において８は外縁部が折り重ねられ
た金属製振動板であり、この金属製振動板８の下面にこ
の金属製振動板８と中心を一致させた圧電磁器振動子９
を貼り合ぜてバイモルフ振動子１０を形成している。１
０ａ、１０ｂはリード線であり、これらｄ、それぞれ金
属製振動板８を貼シ合ぜていない圧電磁器振動子９の裏
側の電極面８ａおよび金属製振動板８における折り曲げ
られた縁部に接続される。１１は金属製寸たは樹脂より
なる円錐状共振子で、バイモルフ振動子１ｏの上面の中
央部に固定される。１２は端子板で、弾性接着剤１３を
介してバイモルフ振動子１０が接着−されている。１４
はケースであり、このケース１４はバイモルフ振動子１
０５円ε１１．状共振子１１および端子板１２を収納し
ている０１４ａ、１４ｂはリード線１０ａ、１０ｂと接
続され電気信号の入出力を行なう端子である。Hereinafter, one embodiment of the present invention will be described in detail with reference to FIG. In the figure, reference numeral 8 denotes a metal diaphragm whose outer edge is folded over, and a piezoelectric ceramic vibrator 9 whose center is aligned with the metal diaphragm 8 on the lower surface of the metal diaphragm 8.
are bonded together to form a bimorph resonator 10. 1
0a and 10b are lead wires, and these d are connected to the electrode surface 8a on the back side of the piezoelectric ceramic vibrator 9 to which the metal diaphragm 8 is not attached, and to the bent edge of the metal diaphragm 8, respectively. be done. Reference numeral 11 denotes a conical resonator made of metal or resin, and is fixed to the center of the upper surface of the bimorph resonator 1o. Reference numeral 12 denotes a terminal plate to which the bimorph vibrator 10 is adhered via an elastic adhesive 13. 14
is a case, and this case 14 is a bimorph oscillator 1
05 yen ε11. 014a and 14b housing the shaped resonator 11 and the terminal plate 12 are terminals connected to the lead wires 10a and 10b for inputting and outputting electrical signals.
上記実施例の特徴は金属製振動板の外周を内方に折り曲
げて２重にし金属製振動板の外周厚みを厚くとることに
より、外周部質量を増加さぜ、振動振幅を大きくしてい
ることである。The feature of the above embodiment is that the outer circumference of the metal diaphragm is doubled inward by bending it inward and the outer circumference of the metal diaphragm is made thicker, thereby increasing the mass of the outer circumference and increasing the vibration amplitude. It is.
第３図ａ、ｂはそれぞれ従来および本実施例に効果的な
振動をしていることを示す。FIGS. 3a and 3b show effective vibration in the conventional case and in this embodiment, respectively.
まだ、第４図ａ、ｂはそれぞれ従来および本実施例のバ
イモルフ振動子を備えた超音波セラミックマイクロホン
における周波数とアドミッタンスの関係を示している。Furthermore, FIGS. 4a and 4b show the relationship between frequency and admittance in the conventional ultrasonic ceramic microphone and the ultrasonic ceramic microphone equipped with the bimorph vibrator of this embodiment, respectively.
この図より本発明のバイモルフ振動子１ｏにおいてはた
わみ振動の基本波１５ａのみが残り、たわみの振動の高
調波成分１５ｂ、１５ＣｉｌＪ：従来の場合に比べてき
わめて小さくなっていることがわかる。これは、金属製
振動板８の外縁部をｖｌり曲げることにより、パリによ
って生じてい／こ／こわみ振動の高調波成分が除去され
たことによる。丑だ、本発明においてｄ：径方向振動共
振１６も従来の場合に比較して犬１１１７Δに小さくな
っている。From this figure, it can be seen that in the bimorph vibrator 1o of the present invention, only the fundamental wave 15a of the deflection vibration remains, and the harmonic components 15b and 15CilJ of the deflection vibration are extremely small compared to the conventional case. This is because by bending the outer edge of the metal diaphragm 8, the harmonic components of the vibration caused by the vibrations are removed. In the present invention, d: radial vibration resonance 16 is also reduced to 1117Δ compared to the conventional case.
このように、本発明の超音波セラミックマイクロホンは
、振動効率を向」ニさせることができ、また圧電磁器振
動子の厚み、外務を変えることなく、前記金属製振動板
の外径と折９曲げ寸法を調整することにより、バイモル
フ振動子の周波数を制御することが可能である。金属製
振動板の加工時に発生ずる、バ１ハおよ□びひずみにつ
いても、折り曲げ部を設けることにより、その影響を抑
え、インピーダンス特性の高次共振を小さくすることが
出来る。まだ、前述のように振動効率を向上した結果、
径方向振動の共振を小さくし、圧電磁器振動子を２枚貼
り合せたバイモルフ振動子の共振特性に近似さぜること
か出来、高感度で、安定した共振特性を示す超音波セラ
ミックマイクロホンをうろことができた。また本発明に
よれば、発振回路に組み込んだ場合に生じる７ａ流の発
振ひずみが−著しく減衰するため、安定した発振装置の
探求に十分対応できるものとなった。As described above, the ultrasonic ceramic microphone of the present invention can improve the vibration efficiency, and can be bent to the outer diameter of the metal diaphragm without changing the thickness or external aspects of the piezoelectric ceramic vibrator. By adjusting the dimensions, it is possible to control the frequency of the bimorph oscillator. By providing a bent portion, it is possible to suppress the influence of the ba 1 and □ distortion that occur when processing a metal diaphragm, and to reduce the high-order resonance of the impedance characteristics. However, as a result of improving vibration efficiency as mentioned above,
It is possible to reduce the resonance of radial vibrations and approximate the resonance characteristics of a bimorph vibrator made by bonding two piezoelectric ceramic vibrators together. I was able to do it. Further, according to the present invention, the oscillation distortion of the 7a flow that occurs when the oscillation circuit is incorporated into an oscillation circuit is significantly attenuated, so that the present invention can sufficiently respond to the search for a stable oscillation device.
以上説明したように本発明は、簡単な構成にして実用的
価値の犬なるものである８As explained above, the present invention has a simple structure and is of practical value8.
第１図は従来の超音波セラミックマイクロホンの正面…
テ面図、第２図は本発明の一実施例における超音波セラ
ミックマイクロホンの正面断面図、第３図ａ、ｂは従来
および本発明実施例におけるバイモルフ振動子の振動モ
ードの説明図、第４図ａ、ｂは従来および本発明の実施
例におけるインピーダンス特性図である。
８・・・・・・金属製振動板、９・・川・圧電磁器振動
子、１ｏ・・・・・バイモルフ振動子、１１・・・・・
・円ζ１１゜状共振子、１２・・・・端子板、１３・・
・・・（ｐｉｆ性接着接着剤４・・・・・ケース。
代理人の氏名 弁理士 中 尾 敏 男 はが１名第１
図
４
第 ３ 図
仏 ｂ
第４図
Ｒ僚秩Figure 1 shows the front of a conventional ultrasonic ceramic microphone...
FIG. 2 is a front sectional view of an ultrasonic ceramic microphone according to an embodiment of the present invention, FIGS. Figures a and b are impedance characteristic diagrams in the conventional and embodiments of the present invention. 8...Metal diaphragm, 9...River/piezoelectric ceramic vibrator, 1o...Bimorph vibrator, 11...
・Circular ζ11° resonator, 12...Terminal board, 13...
...(pif adhesive adhesive 4...Case. Name of agent: Patent attorney Toshi Nakao, 1st person)
Figure 4 Figure 3 Buddha b Figure 4 R Ryochichi
Claims (1)
い金属製振動板を貼シ合ぜ、前記金属製振動板の外縁部
を折り重ねてバイモルフ振動子を形成し、このバイモル
フ振動子の上面に円錐状共振子を設けるとともに下面に
弾性接着剤を介して端子板を固定し、前記バイモルフ振
動子１円錐状共振子および端子板をケースに収納してな
る超音波セラミックマイクロホン。A metal diaphragm having an outer diameter larger than the piezoelectric ceramic oscillator is laminated onto the piezoelectric ceramic oscillator, and the outer edge of the metal diaphragm is folded over to form a bimorph oscillator. An ultrasonic ceramic microphone comprising a conical resonator provided on the upper surface, a terminal plate fixed to the lower surface via an elastic adhesive, and the bimorph vibrator 1 conical resonator and the terminal plate housed in a case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10218284A JPS6025958B2 (en) | 1984-05-21 | 1984-05-21 | ultrasonic ceramic microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10218284A JPS6025958B2 (en) | 1984-05-21 | 1984-05-21 | ultrasonic ceramic microphone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59230000A true JPS59230000A (en) | 1984-12-24 |
| JPS6025958B2 JPS6025958B2 (en) | 1985-06-21 |
Family
ID=14320527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10218284A Expired JPS6025958B2 (en) | 1984-05-21 | 1984-05-21 | ultrasonic ceramic microphone |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6025958B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63199060U (en) * | 1987-06-10 | 1988-12-21 | ||
| JP2019139972A (en) * | 2018-02-09 | 2019-08-22 | 住友化学株式会社 | Nonaqueous electrolyte solution secondary battery |
-
1984
- 1984-05-21 JP JP10218284A patent/JPS6025958B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6025958B2 (en) | 1985-06-21 |
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