JPS59224076A - Large area thin film lithium cell - Google Patents
Large area thin film lithium cellInfo
- Publication number
- JPS59224076A JPS59224076A JP58095737A JP9573783A JPS59224076A JP S59224076 A JPS59224076 A JP S59224076A JP 58095737 A JP58095737 A JP 58095737A JP 9573783 A JP9573783 A JP 9573783A JP S59224076 A JPS59224076 A JP S59224076A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- large area
- discharge
- film lithium
- pole material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/056—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
- H01M10/0561—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
- H01M10/0562—Solid materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M6/00—Primary cells; Manufacture thereof
- H01M6/14—Cells with non-aqueous electrolyte
- H01M6/18—Cells with non-aqueous electrolyte with solid electrolyte
- H01M6/185—Cells with non-aqueous electrolyte with solid electrolyte with oxides, hydroxides or oxysalts as solid electrolytes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Secondary Cells (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、放電容量の大きい、かつ、大電流で放電でき
る薄膜リチウム二次電池に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a thin film lithium secondary battery that has a large discharge capacity and can be discharged at a large current.
薄膜リチウム二次′屯池は、小型化薄型化が町ν広範囲
の材料上に作製可能、などという特長をもつため、時計
用ＩＣや半導体メモリーなどの小型電子機器用のバック
アップ電源として注目されている。しかし、これまでに
実用的なものとしては本発明者らが先に出願したｈ ｒ
／ Ｌ１２，６ Ｓ ｌｏ、ａＰｏ、４０４ ／Ｔｉ
Ｓ２なる構成のものが数少い例でめった。またＮさらに
、上記の電池においても、放電電流および放電谷量奮増
加させるため面噴會大きくすると自己放電が大きくなる
という問題点がめった。Thin-film lithium secondary batteries are attracting attention as a backup power source for small electronic devices such as watch ICs and semiconductor memories because they have the advantage of being small and thin and can be fabricated on a wide range of materials. There is. However, so far, the only practical one is the hr.
/ L12,6 S lo, aPo, 404 /Ti
There were only a few cases where the S2 configuration was used. Furthermore, in the above-mentioned batteries, when the surface jetting is increased in order to increase the discharge current and the discharge trough amount, the self-discharge increases.
チウム二次電池を提供することｔ目的とする。An object of the present invention is to provide a lithium secondary battery.
薄膜リチウム二次電池は薄膜プロセスで作製するため、
全面積のうちに短絡しやすい部分が若干ではめるが発生
してしまう。本発明は、薄膜リチウム二次電池を独立な
要素電池に分割し、短絡しやすい部分の影響を除去する
という着想で見出し友ものでるる。Thin-film lithium secondary batteries are manufactured using a thin-film process, so
There are some parts of the total area that are prone to short circuits, but short circuits still occur. The present invention is based on the idea of dividing a thin film lithium secondary battery into independent element batteries to eliminate the influence of parts that are prone to short circuits.
薄膜リチウム二次電池の構造について、先に本発明者ら
が特許出願し７’ｃ Ｌ ｊ ／ Ｌ ｊ３．ａ Ｓ
’ ｏ、６Ｐｏ、、＋０４／Ｔｌ５Ｉ＋なる構成のもの
ｒ例にと９説明する。Regarding the structure of a thin film lithium secondary battery, the present inventors previously filed a patent application and published 7'c L j / L j3. aS
'o,6Po,,+04/Tl5I+'9 will be explained as an example.
第１図に示したのがこの電池の原理図でめる。Figure 1 shows the principle of this battery.
基板４上にＴｌ５２３’ｋＣＶＤ法で形成し、その上に
スパッタリング法でＬｉ３．ｓｓ １１１．６Ｐ１１．
４０４なる組成の非晶質薄膜２を形成し、さらに、真空
蒸着法でＬｉ薄膜１を形成しである。ところで、この電
池では第２図のようにＴ １８ ｘ薄膜の表面の凹凸６
が激しかったり、Ｌ ｊａ、ｇｓ ｊ ｏ、ａ Ｐｏ、
４ＬＪ４薄膜にピンホール５があると自己放電が起り、
ひどい場合には短絡してしｌい起電力が出なくなる楊会
もある。このような短絡・自己放電（以下、短絡という
百葉で説明する。）は電池面積？大きくすると発生する
可能性が増大する。Tl523'k is formed on the substrate 4 by the CVD method, and Li3. ss 111.6P11.
An amorphous thin film 2 having a composition of 404 was formed, and a Li thin film 1 was further formed by vacuum evaporation. By the way, in this battery, as shown in Fig. 2, the surface irregularities of the T 18 x thin film 6
It was intense, L ja, gs j o, a Po,
If there is a pinhole 5 in the 4LJ4 thin film, self-discharge will occur,
In severe cases, there are some cases where short circuit occurs and no electromotive force is generated. Does this type of short circuit/self-discharge (hereinafter referred to as short circuit) affect the battery area? Increasing the number increases the possibility of occurrence.
しかしながらＮ電池面積は大きくとも短絡する部分は微
少な領域であるから、したがって、本発明のように、独
立した小さい電池？作製し、短絡していないもののみで
大面積の電池ケ作製すれは、自己放電のない大面積の電
池？作製することが可能となる。なお、第１図では基板
上に正極材料ケまず作製した構造を示したが、このよう
な作製手順はとくに本発明では重要でなく、本発明の構
造をとることによシ目的は十分達成できる。However, even if the area of the N battery is large, the short-circuited area is a small area, so it is possible to use an independent small battery as in the present invention? Is it possible to fabricate a large area battery with only those that are not short-circuited?Is it possible to fabricate a large area battery that does not self-discharge? It becomes possible to produce Although FIG. 1 shows a structure in which the positive electrode material is not deposited on the substrate, such a manufacturing procedure is not particularly important in the present invention, and the purpose can be sufficiently achieved by adopting the structure of the present invention. .
以下に実施りｌＪｋろけて本発明の内科を詳細に説明す
る。The internal medicine of the present invention will be explained in detail below.
実施例
５０咽φ×０．２順ｔの石英基板に、ＴｌＣ２゜０．１
８％、Ｈ２Ｓ３．６％、Ａｔ残部なる組成の混ゾ
合カスｆＫＶ−スガスとして厚さ１５μｍのＴ Ｉ Ｓ
２薄膜？作製した。基板温度は４７０Ｃ，反応系内圧
は５ ＋ｕ＋ Ｈｇ 、 ＣＶ Ｄ時間は１時間である
。そして−Ｌｉ２０．ｈＩａ、ａ Ｓ ｊｏ、ａ Ｐｏ
、４ｕ４ ペレットケタ−ゲットとし、０２ ／ Ａ
ｒ ＝ ４０ ／ ６０なる雰囲気ガス”ｚ １０−
２ｗｎＨｇとなるよう尋人しなからスバッタ９フフフ行
い、厚さ２μｍの１．ｒ Ｉａ、６Ｓ ’ｏ、ａｐＨ，
４０４なる非晶質電解質薄膜？作製した。そして、ステ
ンレススチール製のマスフケ用い、この上に厚さ２μＩ
ｌ’ｌのＬｉ傳膜’７４ ｒｉｍ口の大きさで２５個作
製した。このようにして作製した２５個の電池のうち、
８個には大きな自己放電がみられた。Example 50 TlC2゜0.1 on a quartz substrate of diameter φ x 0.2 order t
8% H2S, 3.6% H2S, and the remainder At, the mixed gas fKV-ss gas has a thickness of 15 μm.
2 thin film? Created. The substrate temperature was 470C, the reaction system internal pressure was 5+u+Hg, and the CVD time was 1 hour. And-Li20. hIa, a S jo, a Po
, 4u4 pellet ket target, 02/A
Atmospheric gas "z 10-" where r = 40/60
2wnHg was obtained by performing 9 huffing from Hironto and 2 μm thick 1. r Ia, 6S 'o, apH,
404 amorphous electrolyte thin film? Created. Then, using a stainless steel mass dandruff, a thickness of 2 μI was applied on top of this.
25 pieces were made with the size of the Li'l Li film '74 rim opening. Of the 25 batteries produced in this way,
Large self-discharge was observed in 8 of them.
したがって、もし、Ｌｌ薄膜に１枚の’ＪＥ同面積とな
るよう作製しｆｃ、ｖｌするいは、これらのＬｉ薄膜上
に來亀体としてたとえばＮｉ薄膜を作製すれは自己放電
のめる電池となってしまう。Therefore, if one 'JE is made to have the same area as the Ll thin film, fc and vl, or if a Ni thin film, for example, is made as a body on top of these Li thin films, it becomes a battery that can handle self-discharge. Put it away.
一方、第３図に原理金示したように短絡していない電池
上のみが開孔するように５ｊ０２薄膜８を作製し、その
のち、こ扛ら全ての上にＮｉ薄膜９ヶ作製したところ、
自己放電のない電池が作製できた。On the other hand, as shown in FIG. 3, a 5j02 thin film 8 was prepared so that holes were formed only on the non-shorted battery, and then nine Ni thin films were formed on all of these.
A battery without self-discharge was created.
本災施例では絶縁膜として５ＩＯ２に用い友が。In this disaster example, 5IO2 was used as an insulating film.
Ｌｉと反応しない他の無機材料・有機材料でも目的とす
る幼果は侍られるのはあきらかである。ｌた、均一に絶
縁膜をあらかじめ全面に作製したのち、短絡しない部分
のみに穴倉開け、その後、集電体膜を作製してもよい。It is obvious that the desired young fruit can be obtained using other inorganic or organic materials that do not react with Li. Alternatively, an insulating film may be formed uniformly over the entire surface in advance, holes are drilled only in areas that will not be short-circuited, and then a current collector film is formed.
以上のように、本発明の効果は、前記構造をとれば、そ
の作製法には依存しない。As described above, the effects of the present invention do not depend on the manufacturing method as long as the above structure is adopted.
ま＾固体電解質材料としては、ｌ、ｉ２Ｕ ５ｉｏ２−
Ｐ２ Ｏ１ｌ糸、 ｌ、、＋２０ ＺｒＯ２Ｓ Ｉ（Ｊ
２系などが好筐しい。しかしこれらの材料に限定さｎる
ものではない。Well, as a solid electrolyte material, l, i2U 5io2-
P2 O1l thread, l,, +20 ZrO2S I(J
2 series etc. are good. However, it is not limited to these materials.
本発明によシ、固体電池の特長である長寿命という点を
十分に満足し、かつ、大面積のため放電谷蓋も大きく大
電流で放電できる′ｒ！Ｌ池が製造できる。The present invention fully satisfies the long life that is a feature of solid-state batteries, and because of its large area, the discharge valley is large and can discharge at a large current. L pond can be produced.
【図面の簡単な説明】
第１図は薄膜′電池の原理図、第２図は短絡のある薄膜
電池の原理図、第３図は本発明の内拌葡実現するための
原理図でろゐ。[BRIEF DESCRIPTION OF THE DRAWINGS] FIG. 1 is a diagram of the principle of a thin film battery, FIG. 2 is a diagram of the principle of a thin film battery with a short circuit, and FIG. 3 is a diagram of the principle for realizing the internal stirring of the present invention.
Claims (1)
チウム電池を構成要素とすることを特徴とする大面積薄
膜リチウム電池。 ２、上記複数個の薄膜リチウム電池は、基板上に作製し
た正ｈｆ！材料薄膜上に固体電解質薄膜、さらにその上
に点状の負部材料薄膜を作製した薄膜リチウム電池でア
シ、そのうち自己放電のある電池上には絶縁体薄膜が形
成さｆＬ、全点状電池上に集電体薄膜ケ有する構造ｔも
つことに％徴とする特許請求の範囲第１項記載の大面積
薄膜リチウム電池。[Claims] i, q! A large-area thin-film lithium battery characterized by comprising a plurality of fine thin-film lithium batteries that operate independently. 2. The plurality of thin film lithium batteries mentioned above are fabricated on a substrate. A thin film lithium battery has a solid electrolyte thin film on a material thin film, and a dot-like negative material thin film on top of that, and an insulator thin film is formed on the self-discharging battery. A large area thin film lithium battery according to claim 1, characterized in that the structure has a current collector thin film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58095737A JPS59224076A (en) | 1983-06-01 | 1983-06-01 | Large area thin film lithium cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58095737A JPS59224076A (en) | 1983-06-01 | 1983-06-01 | Large area thin film lithium cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59224076A true JPS59224076A (en) | 1984-12-15 |
Family
ID=14145792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58095737A Pending JPS59224076A (en) | 1983-06-01 | 1983-06-01 | Large area thin film lithium cell |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59224076A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016025078A (en) * | 2014-07-18 | 2016-02-08 | 行政院原子能委員會核能研究所 | Thin film battery structure and method for manufacturing the same |
-
1983
- 1983-06-01 JP JP58095737A patent/JPS59224076A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016025078A (en) * | 2014-07-18 | 2016-02-08 | 行政院原子能委員會核能研究所 | Thin film battery structure and method for manufacturing the same |
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