JPS5921145B2 - Image tube - Google Patents
Image tubeInfo
- Publication number
- JPS5921145B2 JPS5921145B2 JP47102672A JP10267272A JPS5921145B2 JP S5921145 B2 JPS5921145 B2 JP S5921145B2 JP 47102672 A JP47102672 A JP 47102672A JP 10267272 A JP10267272 A JP 10267272A JP S5921145 B2 JPS5921145 B2 JP S5921145B2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- layer
- color separation
- separation line
- optical color
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Optical Filters (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
- Color Television Image Signal Generators (AREA)
Description
【発明の詳細な説明】
本発明はカラー用撮像管に係ち、特に透明ガラス窓など
の一側面上に光学色分解線条フィルタを設けた撮像管の
製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a color image pickup tube, and more particularly to a method of manufacturing an image pickup tube in which an optical color separation line filter is provided on one side of a transparent glass window or the like.
光学色分解線条フィルタを有する撮像管としては、たと
えば単管式あるいは二管式のカラーテレビジョンカメラ
用撮像管などが知られているが、本発明は前記光学色分
解線条フィルタを有する撮像管に関するものである。ま
ず、本発明の理解を容易にするため、単管式または二管
式カラーテレビジョンカメラ用撮像管（以下単一撮像管
という）の原理について述べる。As an image pickup tube having an optical color separation line filter, for example, a single tube type or a two tube type image pickup tube for a color television camera is known. It is related to pipes. First, in order to facilitate understanding of the present invention, the principle of a single-tube or dual-tube color television camera image pickup tube (hereinafter referred to as a single image pickup tube) will be described.
第１図はピジコン形の単一撮像管１を示すもので、２は
電子銃、３は集束コイル、４は偏向コイル、５は透明ガ
ラス窓、６は光学色分解線条フィルタ、１は透明導電膜
、８は光導電膜、９は前記透明導電膜Ｔに電気的に接続
されている信号取出端子、１０は光学系、１１は電子ビ
ームである。前記光学色分解線条フィルタ６は、第２図
に示すように二つのフィルタ成分６Ａ、６Ｂとからなつ
ている。一方のフィルタ成分６Ａは、被写体からの色光
を全て実質的に通過させる細線条のフィルタ素子６ＡＷ
と、被写体からの色光のうち赤色光の通過を実質的に阻
止する細線条のフィルタ素子６ＡＲとを交互に配列して
なつている。ここに、前記二つのフィルタ素子６ＡＷと
６ＡＲの幅は等しくＤＲとなつている。また、他方のフ
ィルタ成分６Ｂは、被写体からの色光の全てを実質的に
通過させる細線条のフィルタ素子６ＢＷと、被写体から
の色光のうち青色光の通過を実質的に阻止する細線条の
フィルタ素子６ＢＢとを交互に配列してなつている。こ
こに、前記二つのフィルタ素子６ＢＷと６ＢＢの幅は等
しくＤＢとなつている。そして、前者と後者のフィルタ
成分の各素子の幅ＤＲ、！Ｉ、ＤＢとは異なるものでな
ければならず、図示のもはＤＢの方がＤＲより細くなつ
ている。上述の構成に卦いて、透明ガラス窓５から光導
電膜８に入射する被写体像は、光学色分解線条フイルタ
６によ勺空間周波領域に訃いてサンプリングさね、この
像を電子ビーム１１を走査することにより前記二つのフ
イルタ成分６Ａと６Ｂの赤と青色光を阻止するフイルタ
素子６ＡＲと６ＢＢとの間隔の相異に基ずく二つの搬送
波を有する多重カラー信号が信号取出端子９から得られ
る。これを一つの低域Ｐ波器と二つの帯域ろ波器にて分
離することにより、光の三原色である緑色信号、赤色信
号｝よび青色信号が得られる。前述した第２図において
は、フイルタ成分６Ａと６Ｂの細条フイルタ素子６ＡＲ
，６ＡＷと６ＢＢ，６ＢＷの方向が平行なものとして説
明したが、実際には通常これらの細条フイルタを第３図
に示すようにある角度をもつて交叉させ、これら二つの
細条フイルタから発生するビードを軽減するようにして
いる。Figure 1 shows a pidicon-shaped single image pickup tube 1, in which 2 is an electron gun, 3 is a focusing coil, 4 is a deflection coil, 5 is a transparent glass window, 6 is an optical color separation line filter, and 1 is transparent. A conductive film, 8 a photoconductive film, 9 a signal output terminal electrically connected to the transparent conductive film T, 10 an optical system, and 11 an electron beam. The optical color separation line filter 6 is composed of two filter components 6A and 6B, as shown in FIG. One filter component 6A is a thin filament filter element 6AW that allows substantially all of the colored light from the subject to pass through.
and thin filament filter elements 6AR that substantially block the passage of red light among the colored light from the subject are arranged alternately. Here, the widths of the two filter elements 6AW and 6AR are equal to DR. The other filter component 6B includes a thin filament filter element 6BW that allows substantially all of the colored light from the subject to pass through, and a thin filament filter element that substantially blocks the passage of blue light among the colored light from the subject. 6BB are arranged alternately. Here, the widths of the two filter elements 6BW and 6BB are equal to DB. And the width DR of each element of the former and latter filter components, ! They must be different from I and DB, and in the illustrated example, DB is thinner than DR. In addition to the above-mentioned configuration, the object image incident on the photoconductive film 8 from the transparent glass window 5 is sampled in the spatial frequency region by the optical color separation line filter 6, and this image is transmitted to the electron beam 11. By scanning, a multiple color signal having two carrier waves is obtained from the signal extraction terminal 9 based on the difference in the spacing between the filter elements 6AR and 6BB that block the red and blue light of the two filter components 6A and 6B. . By separating this signal using one low-pass P-wave filter and two bandpass filters, the three primary colors of light, green signal, red signal} and blue signal, are obtained. In the above-mentioned FIG. 2, the strip filter element 6AR of the filter components 6A and 6B is
, 6AW, 6BB, and 6BW have been explained as being parallel in direction, but in reality, these strip filters are usually crossed at a certain angle as shown in Fig. 3, and the output from these two strip filters is This is to reduce the amount of beads that occur.
また、光学色分解線条フイルタ６の構造も、実際には通
常第４図および第５図に示すように透明ガラス窓５の上
にまずフイルタ成分６Ａとしての赤色光を実質的に阻止
する細条フイルタ素子６ＡＲのみを形成し、この細条フ
イルタ素子６ＡＲの上に直接もう一つのフイルタ成分と
しての青色光を実質的に阻止する細条フイルタ素子６Ｂ
Ｂを形成レ両フイルタ成分６Ａ，６Ｂの全ての色光を通
過させる細条フイルタ素子６ＡＷと６ＢＷは形成してい
ない。In addition, the structure of the optical color separation line filter 6 is actually generally such that, as shown in FIG. 4 and FIG. A strip filter element 6B that forms only the strip filter element 6AR and substantially blocks blue light as another filter component directly above the strip filter element 6AR.
The striped filter elements 6AW and 6BW, which pass all the colored lights of both filter components 6A and 6B, are not formed.
そこで、第４図および第５図から明らかなように、光学
色分解線条フイルタ６の表面に沢山の凹凸が生じ、この
面上に透明導電膜７、光導電膜８を直接形成した場合、
これらも凹凸面となつて暗電流が細条フイルタ状に部分
的に変化してしまい、被写体の色光による信号に重畳し
て虚偽信号を発生レ虚偽の色信号を発生する等撮像管の
動作に種々の障害をきたしていた。Therefore, as is clear from FIGS. 4 and 5, when many irregularities occur on the surface of the optical color separation line filter 6 and the transparent conductive film 7 and photoconductive film 8 are directly formed on this surface,
These also become uneven surfaces, causing the dark current to change partially like a striped filter, which can cause false signals to be generated by being superimposed on the signal from the colored light of the subject.This can affect the operation of the image pickup tube. This caused various problems.
本発明は、前述したような欠点を除去するため光学色分
解線条フイルタをガラスもしくはＳｉＯ２などの無機透
明物質層で覆い、その表面をほぼ平面とすることにより
１この上に設けられる透明導電膜および光導電膜を平面
にし得るようにしたことを特徴とする単一カラ一用撮像
管を提供することにある。In order to eliminate the above-mentioned drawbacks, the present invention covers an optical color separation line filter with a layer of glass or an inorganic transparent material such as SiO2, and makes the surface almost flat, so that 1. the transparent conductive film provided thereon is Another object of the present invention is to provide a single color image pickup tube characterized in that the photoconductive film can be made flat.
ノ
本目的で適用できる物質として上記ガラスもしくはＳｉ
Ｏ２に限定されることなく、透明固形物質でかつ、撮像
管を構成した後ガスの発生、気化等により真空度を低下
させるようなことがないことが必要であり１例えば、撮
像管使用温度例えば最高８０℃において、１０−５Ｔ０
ｒｒ台以下の蒸気圧を有すること、又撮像管の製造工程
を経た後空気中において吸蔵した気化成分を著しく放出
したｂしないことが要求されることは当然である。The above-mentioned glass or Si can be used for this purpose.
It is not limited to O2, but it must be a transparent solid substance that does not reduce the degree of vacuum due to gas generation, vaporization, etc. after forming the image pickup tube. 10-5T0 at maximum 80℃
It goes without saying that it is required to have a vapor pressure of less than RR, and to not release a significant amount of vaporized components occluded in the air after the imaging tube manufacturing process.
以下、本発明の一実施例を示す第６図について説明する
。なお同図のａ−ｆは製造過程順に示したものである。
まず、透明ガラス窓となる基板１７の表面に、赤色光の
通過を実質的に阻止する細条フイルタ素子６ＡＲを形成
し、次に被写体からの色光の全てを実質的に通過させる
ことのできるガラスもしくはＳｉＯ２を前記細条フイル
タ素子６ＡＲ上を含む基板１７に形成レ第６図ｂに示す
ように層１４を形成する。なお、ガラスもしくはＳｉＯ
２の形成方法については後述する。次に同層１４の表面
を研磨あるいはエツチングなどにより同図ｃに示すよう
に平滑化して表面が平滑な層１４ａとする。次に、前記
層１４ａの表面上に、青色光の通過を実質的に阻止する
細条フイルタ素子６ＢＢを形成する（同図ｄ）。Hereinafter, FIG. 6 showing one embodiment of the present invention will be explained. Note that a to f in the figure are shown in the order of the manufacturing process.
First, a striped filter element 6AR that substantially blocks the passage of red light is formed on the surface of the substrate 17, which becomes a transparent glass window, and then a glass strip that can substantially pass all of the colored light from the subject is formed. Alternatively, a layer 14 of SiO2 is formed on the substrate 17 including the striped filter element 6AR as shown in FIG. 6b. In addition, glass or SiO
The method for forming No. 2 will be described later. Next, the surface of the layer 14 is smoothed by polishing or etching to form a layer 14a with a smooth surface as shown in FIG. Next, a strip filter element 6BB is formed on the surface of the layer 14a to substantially block the passage of blue light (FIG. 1d).
次に、同細条フイルタ素子６ＢＢを覆うように前記層１
４と同様の層１５を形成し（同図ｅ）、必要に応じて同
層１５の表面に平滑化処理を施レ表面が平滑な層１５ａ
とする（同図ｆ）。これで光学色分解線条フイルタ６の
表面は平滑な面となＤ１この表面に直接透明導電膜７お
よび光導電膜を形成しても、これらの導電膜７，８を平
面状に形成でき、虚偽色信号の発生をなくすることがで
きるとともに、細条フイルタ素子６ＡＲ，６ＢＢの破損
を防止できる。この場合、層１４ａの表面に対する平滑
化が十分でない場合には、該層表面の凹凸部のエツジ部
分に電荷が集中−これに伴なつて該部分に対応した部分
の光導電膜の特性が劣化して暗電流が増加する。従つて
、この層の表面が平滑であることは重要な事である。ま
た、製造は第２図に示すように赤色光あるいは青色光を
阻止する細条フイルタ６ＡＲ，６ＢＢと、全ての色光を
通過する細条フイルタ素子６ＡＷ，６ＢＷとを交互に配
列したものより著しく簡素化できる。ここで、前述した
実施例においては、細条フイルタ素子６ＡＲの上に全色
光を通過する層１４ａを形成Ｌその上に別の細条フイル
タ素子６ＢＢを形成し、さらにその上に前記層１４ａと
同様の層１５ａを形成するようにしたが、第７図に示す
ように基板１７に細条フイルタ素子６ＡＲを形成した後
、同図ｂに示すようにこの上に直接別の細条フイルタ素
子６ＢＢを重ねて形成し、これらを共に同図ｃに示すよ
うに層１６で覆い、同図ｄに示すようにその表面に平滑
化処理を施し、表面が平滑な層１６ａとしてもよい。Next, the layer 1 is applied so as to cover the same striped filter element 6BB.
A layer 15 similar to 4 is formed (e in the figure), and the surface of the layer 15 is smoothed if necessary to form a layer 15a with a smooth surface.
(Figure f). The surface of the optical color separation line filter 6 is now a smooth surface. Even if the transparent conductive film 7 and photoconductive film are directly formed on this surface, the conductive films 7 and 8 can be formed in a flat shape The generation of false color signals can be eliminated, and damage to the strip filter elements 6AR and 6BB can be prevented. In this case, if the surface of the layer 14a is not sufficiently smoothed, charges will concentrate on the edge portions of the uneven portions on the surface of the layer, and as a result, the characteristics of the photoconductive film in the portions corresponding to these portions will deteriorate. dark current increases. Therefore, it is important that the surface of this layer be smooth. In addition, the manufacturing process is significantly simpler than that shown in FIG. 2, in which strip filter elements 6AR and 6BB that block red or blue light and strip filter elements 6AW and 6BW that pass all color light are arranged alternately. can be converted into In the embodiment described above, a layer 14a that transmits all color light is formed on the strip filter element 6AR, and another strip filter element 6BB is formed on top of the layer 14a, and the layer 14a is formed on top of the layer 14a. A similar layer 15a was formed, but after a strip filter element 6AR was formed on the substrate 17 as shown in FIG. 7, another strip filter element 6BB was formed directly thereon as shown in FIG. 7b. They may be formed in layers and covered with a layer 16 as shown in FIG. 13C, and the surface thereof may be smoothed as shown in FIG.
前述の層はスパツタリング法によつて形成する。The aforementioned layers are formed by sputtering.
該層を形成する方法を以下に説明する。シリコンをター
ゲツト陰極とレアルゴンと酸素の混合ガスを用いた１〜
１０×１０−２Ｔ０ｒｒ程度の圧力の下に、放電電圧１
〜１．５ｋＶでスパツタさせてＳｉＯ２膜を形成する反
応スパツタ法や、石英板（ＳｉＯ２）または素材とする
硝子板をターゲツト陰極とレ ５×１０−３Ｔ０ｒｒ程
度の圧力のアルゴンガス中で放電させてＳｉＯ２膜また
は所望の硝子膜を形成することができる。なお、該スパ
ツタ層は第６図に示す方法においては、第１回目のスパ
ツタ層１４として、ストラィプフイルタ６ＡＲの厚さが
高々１μｍ前後であることから、研磨の均一性を考慮し
ても、研磨によ勺ストライプフイルタが露出しないため
には数μｍ程度形成すれば十分である。The method for forming this layer will be explained below. 1~ Using a silicon target cathode and a mixed gas of realgon and oxygen
Under a pressure of about 10×10-2T0rr, a discharge voltage of 1
A reactive sputtering method is used to form a SiO2 film by sputtering at ~1.5 kV, or a quartz plate (SiO2) or a glass plate is used as a target cathode and discharged in argon gas at a pressure of about 5 x 10-3T0rr. A SiO2 film or a desired glass film can be formed. In addition, in the method shown in FIG. 6, the sputter layer is formed as the first sputter layer 14, and since the thickness of the stripe filter 6AR is approximately 1 μm at most, even considering the uniformity of polishing, In order to prevent the stripe filter from being exposed during polishing, it is sufficient to form the stripe filter with a thickness of several μm.
第２回目のスパツタ層１５に関しても同様である。第７
図においては、ストライブフイルタ６ＡＲおよび６ＢＢ
の重畳により１表面凸凹の高さは高々２μｍ前後である
ことから、スパツタ層１６は前記と同様の関係から、高
々３〜１０μｍ程度形成すればよい。The same applies to the second sputter layer 15. 7th
In the figure, stripe filters 6AR and 6BB are shown.
Since the height of one surface unevenness is approximately 2 μm at most due to the superposition of the above, the sputter layer 16 may be formed to have a thickness of approximately 3 to 10 μm at most based on the same relationship as described above.
第１図はカラー用撮像管の原理図、第２図はカラー用撮
像管の光学色分解線条フイルタの従来例を示す部分拡大
斜視図、第３図ないし第５図は光学色分解線条フイルタ
を示すもので第３図は部分拡大平面図、第４図は同斜視
図、第５図は同断面図、第６図および第７図は本発明に
よるカラー用撮像管の光学色分解線条フイルタのそれぞ
れ異なる実施例を製造工程順に示した部分拡大断面図で
ある。
５・・・・・・透明ガラス窓、６・・・・・・光学色分
解線条フイルタ、６ＡＲ・・・・・・（赤色光）細条フ
イルタ素子、６ＢＢ・・・・・・（青色光）細条フイル
タ素子、７・・・・・・透明導電膜、８・・・・・・光
導電膜、１４，１４ａ，１５，１５ａ，１６ならびに１
６ａ・・・・・・ガラスもしくは石英の無機透明物質層
、１７・・・・・・基板。Figure 1 is a principle diagram of a color image pickup tube, Figure 2 is a partially enlarged perspective view showing a conventional example of an optical color separation line filter for a color image pickup tube, and Figures 3 to 5 are optical color separation line filters. Fig. 3 is a partially enlarged plan view of the filter, Fig. 4 is a perspective view thereof, Fig. 5 is a sectional view thereof, and Figs. 6 and 7 are optical color separation lines of the color image pickup tube according to the present invention. FIG. 4 is a partially enlarged cross-sectional view showing different embodiments of the strip filter in the order of manufacturing steps. 5...Transparent glass window, 6...Optical color separation striped filter, 6AR...(red light) striped filter element, 6BB...(blue light) Optical) Striped filter element, 7...Transparent conductive film, 8...Photoconductive film, 14, 14a, 15, 15a, 16 and 1
6a... Inorganic transparent material layer of glass or quartz, 17... Substrate.
Claims (1)
膜および光導電膜を積層する撮像管の製造方法に於いて
、前記光学色分解線条フィルタ上に光学色分解線条フィ
ルタの凹凸をなくすためにガラス層をスパッタリング法
により被覆形成し、ついで研磨により該表面を平面とな
し、前記光学色分解線条フィルタのもつとも厚い部位に
於いても被覆物質に覆われていることを特徴とする撮像
管の製造方法。1. In a method for manufacturing an image pickup tube in which an optical color separation line filter, a transparent conductive film, and a photoconductive film are laminated on a glass substrate, the unevenness of the optical color separation line filter is eliminated on the optical color separation line filter. For this purpose, a glass layer is coated by a sputtering method, and then the surface is made flat by polishing, so that even the thickest portion of the optical color separation line filter is covered with the coating material. Method of manufacturing tubes.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47102672A JPS5921145B2 (en) | 1972-10-16 | 1972-10-16 | Image tube |
| US05/399,745 US4004176A (en) | 1972-10-16 | 1973-09-21 | Stripe-shaped color separation filter for image pickup tube and method for manufacturing the same |
| FR7335869A FR2203088B1 (en) | 1972-10-16 | 1973-10-08 | |
| DE19732350894 DE2350894A1 (en) | 1972-10-16 | 1973-10-10 | STRIP-SHAPED COLOR SEPARATION FILTER FOR AN IMAGE SCANNING TUBE AND METHOD FOR MANUFACTURING IT |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47102672A JPS5921145B2 (en) | 1972-10-16 | 1972-10-16 | Image tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4960830A JPS4960830A (en) | 1974-06-13 |
| JPS5921145B2 true JPS5921145B2 (en) | 1984-05-17 |
Family
ID=14333710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47102672A Expired JPS5921145B2 (en) | 1972-10-16 | 1972-10-16 | Image tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5921145B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5110722A (en) * | 1974-07-16 | 1976-01-28 | Matsushita Electric Ind Co Ltd | Denkyokuyokibanno seizohoho |
| JPS51142912A (en) * | 1975-06-04 | 1976-12-08 | Hitachi Ltd | Production method of image pickup tube |
| JPS5485635A (en) * | 1977-12-20 | 1979-07-07 | Matsushita Electric Ind Co Ltd | Manufacture of pickup tube target incorporating stripe filter |
| JPS59116909U (en) * | 1983-01-28 | 1984-08-07 | 大日本印刷株式会社 | colored image element |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5112973A (en) * | 1974-07-20 | 1976-01-31 | Hiroyuki Yamato |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5112973B1 (en) * | 1973-09-11 | 1976-04-23 |
-
1972
- 1972-10-16 JP JP47102672A patent/JPS5921145B2/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5112973A (en) * | 1974-07-20 | 1976-01-31 | Hiroyuki Yamato |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4960830A (en) | 1974-06-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
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