JPS59211261A - Long close type image sensor - Google Patents

Long close type image sensor

Info

Publication number
JPS59211261A
JPS59211261A JP58085068A JP8506883A JPS59211261A JP S59211261 A JPS59211261 A JP S59211261A JP 58085068 A JP58085068 A JP 58085068A JP 8506883 A JP8506883 A JP 8506883A JP S59211261 A JPS59211261 A JP S59211261A
Authority
JP
Japan
Prior art keywords
light
film
emitting element
thin film
image sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58085068A
Other languages
Japanese (ja)
Inventor
Tetsuya Ogawa
哲也 小川
Nobuyoshi Takagi
高城 信義
Koichi Hiranaka
弘一 平中
Michiya Oura
大浦 道也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58085068A priority Critical patent/JPS59211261A/en
Publication of JPS59211261A publication Critical patent/JPS59211261A/en
Pending legal-status Critical Current

Links

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Facsimile Heads (AREA)

Abstract

PURPOSE:To improve the light utility efficiency by integrating a photoreceptor array with a thin film light emitting element as a light source, thereby enabling to reduce the size. CONSTITUTION:A printed board of glass is used as a substrate 10, a photoreceptor array 11 is formed by a known method on the substrate 10, a transparent insulating film 13 such as SiO2 is formed thereon, V-shaped or trapezoidal slot 14 is formed at the position corresponding to the photoreceptor section of the photoreceptor array of the film 13, and EL light emitting element 15 is formed as a thin film light emitting element on one or both side surfaces to the slot. The slot 14 is formed in the film 13, for example, by using a method of etching after forming the film under film forming condition to accelerate the etching speed from the lower part toward the upper part of the film in case of the film 13 with SiO2. And the element 15 is formed by using a thin film forming technique. Further, an optical thin film having different refractive index is formed in multilayer on the EL element, thereby enhancing the light collecting property.

Description

【発明の詳細な説明】 発明の技術分野 本発明はファクシミリや光学文字読取装置等に用いられ
る長尺密着型イメージセンサに関するものである。
DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to a long contact type image sensor used in facsimiles, optical character reading devices, and the like.

従来技術と問題点 従来よりファクシミリや光学文字読取装置などの画像入
力装置には原稿からの情報を光電変換する多数の受光素
子を1列に配置した長尺密着型イメージセンサが用いら
れている。
BACKGROUND OF THE INVENTION Conventionally, image input devices such as facsimile machines and optical character readers have used long contact type image sensors in which a large number of light-receiving elements for photoelectrically converting information from a document are arranged in a row.

第1図はこの長尺密着型イメージセンサの構造を示す図
であり、同図において、1は光源、2は導光系、3は受
光素子アレイをそれぞれ示1.ている。
FIG. 1 is a diagram showing the structure of this long contact type image sensor. In the figure, 1 is a light source, 2 is a light guiding system, and 3 is a light receiving element array. ing.

このイメージセンサは光源1から出た光で原稿4を照射
すると、原稿4からは白黒の模様を含んだ情報として反
射され、この光はライトフォーカシングロッドレンズア
レイと呼ばれる導光系2で受光素子アレイ3上に正立同
倍の像を結び、受光素子アレイ3は受光した光量の大小
を光電流の大小に光電変換して原稿の読み取りを行なう
ようになっている。
In this image sensor, when a document 4 is irradiated with light emitted from a light source 1, it is reflected from the document 4 as information containing a black and white pattern, and this light is passed through a light guide system 2 called a light focusing rod lens array to a light receiving element array. The light receiving element array 3 forms an erect image of the same magnification on the image sensor 3, and the light receiving element array 3 photoelectrically converts the magnitude of the received light amount into the magnitude of a photocurrent, thereby reading the document.

このような、ライトフォーカシングロッドレンズアレイ
を導光系として用いる長尺密着型イメージセンサは、ラ
イトフォーカシングロッドレンズアレイが光ファイバを
用いていることから原稿センサ間の光路長が長くなり、
そのため大型となり易く、且つ光の利用効率が高々3%
と少なくなるという欠点があった。
In such a long contact type image sensor that uses a light focusing rod lens array as a light guiding system, since the light focusing rod lens array uses an optical fiber, the optical path length between the document sensors becomes long.
Therefore, it tends to be large, and the light usage efficiency is at most 3%.
There was a drawback that the amount decreased.

発明の目的 本発明は上記従来の欠点に鑑み、小型化が可能であり、
且つ光の使用効率の高い長尺密着型イメージセンサを提
供することを目的とするものである。
Purpose of the Invention In view of the above-mentioned conventional drawbacks, the present invention enables miniaturization,
Another object of the present invention is to provide a long contact type image sensor with high light usage efficiency.

発明の構成 そしてこの目的は本発明によれば、基板と、該基板の上
に形成された受光素子アレイと、該受光素子アレイを覆
い且つその受光部に対応した位置にV形又は台形の溝を
有する透明絶縁膜と、該溝の側面に設けた薄膜型発光素
子とを具備し、て構成されたことを特徴とする長尺密着
型イメージセンサを提供することによって達成される。
According to the present invention, a substrate, a light-receiving element array formed on the substrate, and a V-shaped or trapezoidal groove covering the light-receiving element array and at a position corresponding to the light-receiving portion thereof are provided. This is achieved by providing an elongated contact type image sensor characterized by comprising a transparent insulating film having a structure of 100% and a thin film type light emitting element provided on the side surface of the groove.

発明の実施例 以下本発明実施例を図面によって詳述する。Examples of the invention Embodiments of the present invention will be described in detail below with reference to the drawings.

第2図は本発明による長尺密着型イメージセンサを説明
するための図である。同図において、10は基板、11
は受光素子アレイ、12はそのリード線、13は透明絶
縁膜、14は台形溝、15はEL発光素子、16はその
リード線、17は原稿面をそれぞれ示している。
FIG. 2 is a diagram for explaining a long contact type image sensor according to the present invention. In the figure, 10 is a substrate, 11
12 is a light receiving element array, 12 is a lead wire thereof, 13 is a transparent insulating film, 14 is a trapezoidal groove, 15 is an EL light emitting element, 16 is a lead wire thereof, and 17 is a document surface.

本実施例は、基板lOにガラス、エポキシ、セラミック
等のプリント板を用い、該基板10の上に公知の従来方
法で受光素子アレイ11を形成し7、その上にStO,
、エポキシ等の透明絶縁膜13を形成し、この絶縁膜1
3の受光素子アレイの受光部に対応した位置にV形又は
台形の溝14を形成し、この溝へ片側又は両側面に薄膜
型発光素子としてEL発光素子15を形成したものであ
る。
In this embodiment, a printed board made of glass, epoxy, ceramic, etc. is used as the substrate 10, and a photodetector array 11 is formed on the substrate 10 by a known conventional method.
, a transparent insulating film 13 made of epoxy or the like is formed, and this insulating film 1
A V-shaped or trapezoidal groove 14 is formed at a position corresponding to the light receiving portion of the light receiving element array No. 3, and an EL light emitting element 15 is formed as a thin film type light emitting element on one or both sides of this groove.

なお透明絶縁膜13へのV形又は台形の溝14の形成は
例えば透明絶房膜がS10.の場合には膜の下部から上
部へ向ってエツチング速度が早くなるような成膜条件で
成膜後エツチングする公知の方法を用いれば良く、また
EL発光素子15は薄膜形成技術を用いて形成すること
ができる。さらにこのEL発光素子の上に異なった屈折
率を持つ光学薄膜を多層形成し集光性を高めることもで
きる。
The V-shaped or trapezoidal grooves 14 are formed in the transparent insulating film 13, for example, in step S10. In this case, a known method of etching after film formation under film formation conditions such that the etching rate increases from the bottom to the top of the film may be used, and the EL light emitting element 15 may be formed using a thin film formation technique. be able to. Furthermore, it is also possible to form multiple layers of optical thin films having different refractive indexes on this EL light emitting element to improve light convergence.

このような本実施例は、より細かいホトリソグラフィ工
程を必要とする受光素子アレイ11は基板10が平面の
状態のときに行なうことができ、またEL発光素子15
は側面でのパターニングが不要であるため多層蒸着で容
易に作成できる。さらに本実施例の使用に際しては、原
稿面17に密着して用いることができるので原稿面17
がら受光素子アレイ11間の光路長が著しく短がくなり
、そのため小型化及び光の使用効率の向上(10%以上
)が得られる。
In this embodiment, the light receiving element array 11 which requires a finer photolithography process can be formed when the substrate 10 is in a flat state, and the EL light emitting element 15 can be formed when the substrate 10 is in a flat state.
Since patterning on the sides is not required, it can be easily created by multilayer deposition. Furthermore, when using this embodiment, the document surface 17 can be used in close contact with the document surface 17.
However, the optical path length between the light receiving element arrays 11 is significantly shortened, resulting in miniaturization and improvement in light usage efficiency (10% or more).

発明の効果 以上、詳細に説明したように本発明の長尺密着型イメー
ジセンサは光源として薄膜型発光素子を用い受光素子ア
レイと一体化することにより光路長が短かくできるため
小型化が可能となり5且っ原稿面と密着させることがで
きるため光の利用効率が向上するといった効果大なるも
のである。
Effects of the Invention As explained in detail above, the long contact type image sensor of the present invention uses a thin film type light emitting element as a light source and is integrated with a light receiving element array, thereby making it possible to shorten the optical path length and thus to be miniaturized. 5. Since it can be brought into close contact with the surface of the document, it has a great effect of improving the efficiency of light use.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の長尺密着型イメージセンサを説明するた
めの図、第2図は本発明による長尺密着型イメージセン
サを説明するための図である。。 図面において、10は基板、IIVi受光素子アレイ、
13は透明絶縁膜、14は■形又は台形溝、15はEL
発光素子、17は原稿面をそれぞれ示すO 特許出願人 富士通株式会社 特許出願代理人 弁理士 青 木   朗 弁理士西舘和之 弁理士内田幸男 弁理士 山 口 昭 之
FIG. 1 is a diagram for explaining a conventional long contact type image sensor, and FIG. 2 is a diagram for explaining a long contact type image sensor according to the present invention. . In the drawings, 10 is a substrate, an IIVi light receiving element array,
13 is a transparent insulating film, 14 is a ■-shaped or trapezoidal groove, and 15 is an EL
Light-emitting element, 17 indicates the original surface, respectively Patent applicant Fujitsu Limited Patent agent Akira Aoki Patent attorney Kazuyuki Nishidate Patent attorney Yukio Uchida Patent attorney Akira Yamaguchi

Claims (1)

【特許請求の範囲】[Claims] 1、基板と、該基板の上に形成された受光素子アレイと
、該受光素子アレイを覆い且つその受光部に対応した位
置に■形又は台形の溝を有する透明絶縁膜と、該溝の側
面に設けた薄膜型発光素子とを具備して構成されたこと
を特徴とする長尺密着型イメージセンサ。
1. A substrate, a light-receiving element array formed on the substrate, a transparent insulating film covering the light-receiving element array and having a square or trapezoidal groove at a position corresponding to the light-receiving part, and a side surface of the groove. What is claimed is: 1. A long contact type image sensor comprising: a thin film type light emitting element;
JP58085068A 1983-05-17 1983-05-17 Long close type image sensor Pending JPS59211261A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58085068A JPS59211261A (en) 1983-05-17 1983-05-17 Long close type image sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58085068A JPS59211261A (en) 1983-05-17 1983-05-17 Long close type image sensor

Publications (1)

Publication Number Publication Date
JPS59211261A true JPS59211261A (en) 1984-11-30

Family

ID=13848307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58085068A Pending JPS59211261A (en) 1983-05-17 1983-05-17 Long close type image sensor

Country Status (1)

Country Link
JP (1) JPS59211261A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0268455U (en) * 1988-11-15 1990-05-24
JPH0268454U (en) * 1988-11-15 1990-05-24
JP2008227836A (en) * 2007-03-12 2008-09-25 Toyota Industries Corp Light source for scanner

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0268455U (en) * 1988-11-15 1990-05-24
JPH0268454U (en) * 1988-11-15 1990-05-24
JP2008227836A (en) * 2007-03-12 2008-09-25 Toyota Industries Corp Light source for scanner

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