JPS59190606A - Displacement measuring device - Google Patents
Displacement measuring deviceInfo
- Publication number
- JPS59190606A JPS59190606A JP6484983A JP6484983A JPS59190606A JP S59190606 A JPS59190606 A JP S59190606A JP 6484983 A JP6484983 A JP 6484983A JP 6484983 A JP6484983 A JP 6484983A JP S59190606 A JPS59190606 A JP S59190606A
- Authority
- JP
- Japan
- Prior art keywords
- optical axis
- detector
- astigmatism
- optical
- position detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、被測定物面の深さ方向の出入を検出すること
により、被測定面の変位量および面形状を測定する変位
測定装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a displacement measuring device that measures the amount of displacement and surface shape of a surface to be measured by detecting the movement in and out of the surface of the object to be measured in the depth direction. be.
従来例の構成とその問題点
レーザ光を用いた光学機器は温度変化、外部振動等の原
因により光軸が変動しやすい。特に’ｆ）１１６ｔｌ定
物の変位量２面形状等を高精度にて測定する６（す定装
置において、この光軸変動が剃定精ＩＷおよび分解能に
大きな影響を与える原因となる。このだめに今までの光
学測定機器は恒温室内にて防振台等に設置し、測定環境
を一定にするとともに防振台上に設置する必要があった
。このような手段では光学測定機器の使用できる場所が
限定され、設置には高価な費用を要する。寸だ防振台に
て数Ｈｚ以下の低周波成分の振動を除去することは困難
である。寸だ光学測定機器の温度か一定になるまでの時
間がかかり非常に効率が悪い。Conventional configurations and their problems Optical instruments that use laser light tend to have their optical axes fluctuated due to temperature changes, external vibrations, and other causes. In particular, in a device that measures the displacement amount, two-plane shape, etc. of a 116tl constant object with high precision, this optical axis fluctuation causes a large impact on the shaving precision IW and resolution. Until now, optical measuring instruments had to be installed on a vibration-isolating table in a temperature-controlled room to maintain a constant measurement environment and to be installed on a vibration-isolating table. Space is limited and installation is expensive.It is difficult to remove low frequency component vibrations of several Hz or less using a vibration isolation table.The temperature of the optical measurement equipment remains constant. It takes a long time and is very inefficient.
一方、光軸位置の変動が生じた場合、こ扛を補ｉＥする
のにその原因となるものを元の状態に戻す方法が考えら
れる。しかしレーサ自身の光軸に変動が生じた場合、そ
の原因を取り除くことは困難である。さらに光軸位置の
変動を生じさせる原因が多数ある場合、それぞれを元に
戻すことはさらに困難であり、装置も高価なものとなる
。On the other hand, when a change in the optical axis position occurs, a method can be considered to compensate for this change by restoring the cause of the change to its original state. However, when a fluctuation occurs in the optical axis of the laser itself, it is difficult to eliminate the cause. Furthermore, when there are many causes of variations in the optical axis position, it is even more difficult to restore each of them to the original state, and the apparatus becomes expensive.
発明の目的
本発明は変位検出用検出器位置における光軸変動を正確
に把握し、光軸位置補正を可能とすること、すなわち、
被測定物面の変位置・面形状を高精度に測定する変位１
測定装置を提供するものである。Purpose of the Invention The present invention is to accurately grasp optical axis fluctuations in the position of a displacement detection detector and to enable optical axis position correction.
Displacement 1 to measure displacement position and surface shape of object surface with high precision
The present invention provides a measuring device.
発明の構成
本発明は、反射光を分割し、反射光の光軸変化邦が同等
となる位置に非点収差検出器と光軸位置検器とを設け、
光軸位置検出器により検出した光＋１ＩＩｔ＋変動に応
した電気信号を差動出力アンプ、出力アンプ部を通して
光軸補正カラス板の駆動部に１０］制御・信号を印加す
ることによりカラス板を回動し、前記光軸検出器の定位
置に反射光の中心がくるように光軸を移動することによ
り上記目的を達成するものである。Structure of the Invention The present invention divides reflected light and provides an astigmatism detector and an optical axis position detector at positions where the optical axis changes of the reflected light are equal.
The electrical signal corresponding to the fluctuation of the light+1IIt+ detected by the optical axis position detector is passed through the differential output amplifier and the output amplifier section to the driving section of the optical axis correction glass plate.The control/signal is applied to rotate the glass plate. However, the above object is achieved by moving the optical axis so that the center of the reflected light is located at the fixed position of the optical axis detector.
実施例の説明 以下本発明の実施例を図面を参照して説明する。Description of examples Embodiments of the present invention will be described below with reference to the drawings.
第１図において、１はレーザ光源、２はレーザ光源１に
より発光したレーザ光である。３は互いに平行な１ｆｌ
を有するガラス板で、レーザ光２に対しＮＪＺ面部分の
角度を変えることにより光軸位置を１／。In FIG. 1, 1 is a laser light source, and 2 is a laser beam emitted by the laser light source 1. In FIG. 3 is 1fl parallel to each other
By changing the angle of the NJZ plane part with respect to the laser beam 2, the optical axis position can be adjusted by 1/.
行移動することができる。４（−まレーザ光源１から発
しだレーザ光２の光径を変え任、鰍の平行光にゆえる光
学系である。５は第１のビームスプリッタで、 板６
と対物レンズ７の方向に１ｉｎ過し、被測定物８の測定
面って反射した光を、男点集冷ＩＩ光学系１０の方向に
反則する。対物レンズ７ （ｄ、レーザ光２を集束し被
測定物８のｉｌｉ、り定面に１（り団１する。Lines can be moved. 4 (-) is an optical system that changes the diameter of the laser beam 2 emitted from the laser light source 1 and is based on the parallel light of the eel. 5 is the first beam splitter, and the plate 6
The light that passes 1 inch in the direction of the objective lens 7 and is reflected by the measurement surface of the object to be measured 8 is reflected in the direction of the male point cooling II optical system 10. Objective lens 7 (d) focuses the laser beam 2 and directs it onto the fixed plane of the object 8.
非点収差用光学系１０を通過し／こレーザ光２（−１、
被測定物８の測定面９の位置に制、１［−１点から後焦
点の間において非点収差１象か安住する。The laser beam 2(-1,
Given the position of the measurement surface 9 of the object to be measured 8, one astigmatism remains at rest between the 1[-1 point and the back focal point.
１１は第２のビームスプリッタで・用定面って反射した
レーザ光２を変位）け、検出器１２と光１ＩＩｌｉ１位
１１″ざ昌・＋７出器１３の方向に分割する。Reference numeral 11 denotes a second beam splitter which displaces the reflected laser beam 2 and splits it in the direction of the detector 12 and the beam 1II1, 11'', and +7 output device 13.
変位量検出器１２と光軸位１市検出器１３ば４分割光検
出器を使用し非点収差光学系１０による前焦点と後焦点
の中央において、先例１変化）ｊｌ：が同等となる位置
に設置されている。１４は光］１１ｂ１１ｂ９′検出器
１３からの電気信号を増幅する差動アンプ・出力アンプ
部を示し、レーザ光２の光軸が変動し／こ場合、その変
動量を光軸位置検出器１３が検出し、その変動量に応じ
た制ｒ［Ｉ信号が差動アンプ・出力アンプ部１４を通し
て駆動部１５に印加されカラス板３が直角２方向に回動
し光軸のずれを補正する。Using the displacement detector 12, the optical axis position detector 13, and the 4-split photodetector, find the position where the precedent 1 change) jl: is the same at the center of the front focus and back focus of the astigmatism optical system 10. It is installed in Reference numeral 14 denotes a differential amplifier/output amplifier unit that amplifies the electrical signal from the optical detector 13. When the optical axis of the laser beam 2 fluctuates, the optical axis position detector 13 detects the amount of the fluctuation. A control r[I signal corresponding to the amount of variation is applied to the drive unit 15 through the differential amplifier/output amplifier unit 14, and the glass plate 3 rotates in two directions at right angles to correct the deviation of the optical axis.
第２図において光軸位置検出器１３ば４分割の太陽型１
’（！２１３ａ％３ｂ、１３ｃ、１３ｄにより構成され
、非点収差像１６は、太陽電池１３ａ、１３ｂ。In Fig. 2, the optical axis position detector 13 is a solar type 1 divided into four parts.
'(!213a%3b, 13c, 13d, and the astigmatism image 16 is the solar cells 13a, 13b.
１３ｃ、１３ｄの分割線１７の中央に位置するよう位置
決めされる。また光４１１１位置ずれしけは各太陽型２
ｔｍの出力を（１３ａ−１−１３ｂ） −（１３ｃｍ１
−１３ｄ）と（１３ａ＋１３ｄ）−（１３ｂ−４−１３
ｃ）の如く２方向の差」の出力の検出により求められ、
光軸変動がない場合２方向の差動出力はＯとなる。It is positioned at the center of the dividing line 17 between 13c and 13d. In addition, the light 4111 position shift barge is for each solar type 2
The output of tm is (13a-1-13b) - (13cm1
-13d) and (13a+13d) -(13b-4-13
It is determined by detecting the output of the difference in two directions as shown in c),
If there is no optical axis variation, the differential output in the two directions will be O.
第３図において、変位ＪＴｌ−検出器１２は、４分割の
太陽電池１２ａ 、１２ｂ、１２Ｃ，１２ｄにより構成
され、非点収差像１８は、太陽型／＋１２１２ａ、１２
ｂ。In FIG. 3, the displacement JTl-detector 12 is composed of solar cells 12a, 12b, 12C, and 12d divided into four parts, and the astigmatism image 18 is solar type/+1212a, 12
b.
１２Ｃ，１２ｄの分割線１９に対し約４５°傾き位置決
めされる。被測定物の変位量および面形状の測定は、各
太陽電池の出力を、（１２ａ＋１２ｃ）−（１２ｂ＋１
２ｄ）の如くで方向の非点収差像１８の差動出力により
求められる。It is positioned at an angle of about 45° with respect to the dividing line 19 of 12C and 12d. To measure the displacement and surface shape of the object to be measured, the output of each solar cell is calculated as (12a+12c)-(12b+1
2d) is determined by the differential output of the astigmatism image 18 in the direction.
２０１ｒ！、前記の非点収差像１８の光軸かδたけずれ
た場合の非点収差像を示す。201r! , shows an astigmatism image when the optical axis of the astigmatism image 18 is shifted by δ.
非点収差像の光軸かずれだ状態で前記のように各々の太
陽電池の差動出力を求めると、被測定１０１の変動が○
であっても、変位し／こと判断さ、Ｉ］るか、この実施
例の構成においては、レーザの光軸かずれた場合、光軸
位置検１１１１器１３の差動出力ハラ／スがくずれ、カ
ラス板３の傾きを塵えることにより光１１１１位高゛補
１１・、が行なわれる。従−１で）し軸位ｉｉ”＋°検
出器１３と光路長を等しく設けた変位；「１゛倹ｔ１を
：；１２においても光軸は安定し、光軸鼓動による測定
誤差を防き、信頼性の、ｉ−ｊ；い測定仙を札すること
が出来る。When the differential output of each solar cell is determined as described above in a state where the optical axis of the astigmatism image is shifted, the fluctuation of the measured object 101 is
However, in the configuration of this embodiment, if the optical axis of the laser is shifted, the differential output error of the optical axis position detector 111113 will collapse. By correcting the inclination of the glass plate 3, the height of the light 1111 is compensated 11. The optical axis is stable even at the optical axis position ii" + 12 with the same optical path length as the detector 13; , reliability, i-j;
発明の効果
以」−のように本発明によれは、ｉ％’＋ ’ＪＣ’Ａ
−化等により生じる光軸のずれを容易に補正できるもの
であり、光学機器の安定な動作を得ることかできる。According to the present invention, i%'+'JC'A
It is possible to easily correct the deviation of the optical axis caused by -, etc., and it is possible to obtain stable operation of the optical equipment.
第１図は本発明の一実施例における変位測定装置の原理
図、第２図は同装置の光軸位置検出器の配置を示す図、
第３図は同装置の変位検出器の配置を示す図である。
１・・・・レーザ光源、２ ・・ レーザ光、３ カ
ラス板、５．１１・・・・ビームスプリッタ、１２・・
変位量検出器、１３ ・・位置検出器。FIG. 1 is a principle diagram of a displacement measuring device according to an embodiment of the present invention, and FIG. 2 is a diagram showing the arrangement of an optical axis position detector of the same device.
FIG. 3 is a diagram showing the arrangement of the displacement detector of the same device. 1... Laser light source, 2... Laser light, 3 Glass plate, 5.11... Beam splitter, 12...
Displacement detector, 13...Position detector.
Claims (1)
点収差を検出することにより被１１１］定面の変位量お
よび面形状を測定するよう構成し、前記反則光を分割し
、反射光の光軸変化量が同等となるような位置に、前記
非点収差−」検出器と光軸位置検出器を設け、前記光軸
位置検出器の定位置に反則光の中心がくる」＝うに前記
光ビームの光軸を移動する手段を設けたことを特徴とす
る変位測定装置。A light beam is focused and irradiated onto the surface to be measured, and the displacement amount and surface shape of the surface to be measured are measured by detecting astigmatism of the reflected light, and the reflected light is divided. , the astigmatism detector and the optical axis position detector are provided at positions where the amount of change in the optical axis of the reflected light is the same, and the center of the reflected light is located at the fixed position of the optical axis position detector. A displacement measuring device characterized in that a means for moving the optical axis of the light beam is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6484983A JPS59190606A (en) | 1983-04-13 | 1983-04-13 | Displacement measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6484983A JPS59190606A (en) | 1983-04-13 | 1983-04-13 | Displacement measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59190606A true JPS59190606A (en) | 1984-10-29 |
Family
ID=13270055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6484983A Pending JPS59190606A (en) | 1983-04-13 | 1983-04-13 | Displacement measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59190606A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61235709A (en) * | 1985-04-12 | 1986-10-21 | Citizen Watch Co Ltd | Shape measuring method |
| JPH04174315A (en) * | 1989-12-26 | 1992-06-22 | Fujitsu Ltd | Adjusting apparatus for optical axis |
| JPH06217317A (en) * | 1992-12-09 | 1994-08-05 | Egawa:Kk | Spot tracking equipment |
| US10361846B2 (en) * | 2014-05-12 | 2019-07-23 | University Of Kwazulu-Natal | System and method for identifying and/or measuring orientation mismatches between stations |
-
1983
- 1983-04-13 JP JP6484983A patent/JPS59190606A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61235709A (en) * | 1985-04-12 | 1986-10-21 | Citizen Watch Co Ltd | Shape measuring method |
| JPH04174315A (en) * | 1989-12-26 | 1992-06-22 | Fujitsu Ltd | Adjusting apparatus for optical axis |
| JPH06217317A (en) * | 1992-12-09 | 1994-08-05 | Egawa:Kk | Spot tracking equipment |
| US10361846B2 (en) * | 2014-05-12 | 2019-07-23 | University Of Kwazulu-Natal | System and method for identifying and/or measuring orientation mismatches between stations |
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