JPS59190335U - multiple ion source - Google Patents
multiple ion sourceInfo
- Publication number
- JPS59190335U JPS59190335U JP8325983U JP8325983U JPS59190335U JP S59190335 U JPS59190335 U JP S59190335U JP 8325983 U JP8325983 U JP 8325983U JP 8325983 U JP8325983 U JP 8325983U JP S59190335 U JPS59190335 U JP S59190335U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- vacuum container
- source vacuum
- rotary table
- reserve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の多重イオン源の構造を示す。第２図ａは
本考案の好適実施例を示す。また第２図すは、第２図ａ
中のリザーバ部の詳細図である。
１・・・イオン源真空容器、２・・・開口部、３・・・
リザーバ部、４・・・回転台、５・・・駆動軸、６・・
・回転導入器、７・・・回転駆動部、８・・・カソード
電極、９・・・引出電極、１０・・・電極接続器、１４
・・・絶縁板、１５・・・液体金属、１６・・・管状リ
ザーバ、１７・・・エミックニードル。FIG. 1 shows the structure of a conventional multiple ion source. FIG. 2a shows a preferred embodiment of the invention. In addition, Figure 2 is Figure 2 a.
It is a detailed view of the reservoir part inside. 1... Ion source vacuum vessel, 2... Opening, 3...
Reservoir part, 4... Turntable, 5... Drive shaft, 6...
- Rotation introducer, 7... Rotation drive unit, 8... Cathode electrode, 9... Extraction electrode, 10... Electrode connector, 14
...Insulating plate, 15...Liquid metal, 16...Tubular reservoir, 17...Emic needle.
Claims (1)
り回転自在に保持された回転台と、この回転台の周縁部
近傍に設けられた複数のリザーブ部と、前記イオン源真
空容器の一端に設けられ前記各リザーブの１個と電気的
に接続可能に設けられた電圧導入端子と、前記イオン源
真空容器内に設けられ前記各リザーブ部の１個と対応す
ることができる位置に配設されたカソード電極および引
出電極とを備え、前記回転台の回転により任意のリザー
ブ部を選択して複数種のイオン種を得ることができるよ
うに構成した多重イオン源。A rotary table rotatably held by a rotary drive unit in an ion source vacuum container having a box shape as a whole, a plurality of reserve portions provided near the periphery of the rotary table, and one end of the ion source vacuum container. A voltage introduction terminal provided in the ion source vacuum container and provided in the ion source vacuum container so as to be electrically connectable to one of the respective reserves, and provided in a position that can correspond to one of the respective reserve parts. A multiple ion source is provided with a cathode electrode and an extraction electrode, and is configured such that a plurality of ion species can be obtained by selecting an arbitrary reserve portion by rotating the rotary table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8325983U JPS59190335U (en) | 1983-06-01 | 1983-06-01 | multiple ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8325983U JPS59190335U (en) | 1983-06-01 | 1983-06-01 | multiple ion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59190335U true JPS59190335U (en) | 1984-12-17 |
Family
ID=30213217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8325983U Pending JPS59190335U (en) | 1983-06-01 | 1983-06-01 | multiple ion source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59190335U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63276858A (en) * | 1987-03-13 | 1988-11-15 | イアン・ジー・ブラウン | Ion beam generator |
-
1983
- 1983-06-01 JP JP8325983U patent/JPS59190335U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63276858A (en) * | 1987-03-13 | 1988-11-15 | イアン・ジー・ブラウン | Ion beam generator |
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