JPS59161202A - Structure of bearing opposing surface and slide guide surface of machine tool - Google Patents

Structure of bearing opposing surface and slide guide surface of machine tool

Info

Publication number
JPS59161202A
JPS59161202A JP3348283A JP3348283A JPS59161202A JP S59161202 A JPS59161202 A JP S59161202A JP 3348283 A JP3348283 A JP 3348283A JP 3348283 A JP3348283 A JP 3348283A JP S59161202 A JPS59161202 A JP S59161202A
Authority
JP
Japan
Prior art keywords
bearing
layer
materials
heat
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3348283A
Other languages
Japanese (ja)
Other versions
JPH0229444B2 (en
Inventor
Toshiaki Watanabe
敏昭 渡辺
Yuichi Kawaguchi
川口 友一
Yasumichi Touno
東野 靖道
Yasunori Geshi
下司 安則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Okuma Corp
Original Assignee
Okuma Tekkosho KK
Okuma Machinery Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Okuma Tekkosho KK, Okuma Machinery Works Ltd filed Critical Okuma Tekkosho KK
Priority to JP3348283A priority Critical patent/JPS59161202A/en
Publication of JPS59161202A publication Critical patent/JPS59161202A/en
Publication of JPH0229444B2 publication Critical patent/JPH0229444B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0003Arrangements for preventing undesired thermal effects on tools or parts of the machine
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/70Stationary or movable members for carrying working-spindles for attachment of tools or work

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Turning (AREA)
  • Machine Tool Units (AREA)
  • Sliding-Contact Bearings (AREA)

Abstract

PURPOSE:To prevent the transmission of heat to a predetermined part of a main spindle or the like, and as well to enhance the machining accuracy of, for example, the surfaces, opposed to bearings, of the main spindle, by providing such an arrangement that heat insulating layers made of materials of a low heat conductivity are formed on, for example, the surfaces opposed to the bearings, of the main spindle, and moreover, other layers made of materials to which precise working may be made, are formed on the heat insulating layers. CONSTITUTION:A main spindle 1 is journalled by bearings 2, 14 at two positions in the front and rear sections thereof. Heat insulating layers 5, 10 made of materials of a low heat conductivity, such as, for example, ceramics, are formed on the bearing side surfaces of distance collars 4, 9, respectively, on the side of the bearing 2, and as well, second layers made of materials such as, for example, stainless steel to which precise working may be made, are formed on both heat insulating layers 5, 10, respectively. Further, similar insulating layers 16, 21 and second layers 17, 22, as above-mentioned, are formed on the bearing side surfaces of distance collars 15, 20, respectively, on the side of the bearing 14. Further heat insulating layers 17, 18 made of materials of low heat conductivity, and second layers 8, 19 made of materials to which precise working may be made, as mentioned the above, are formed on shaft parts 1b, is opposing the bearings 2, 14, respectively.

Description

【発明の詳細な説明】 技術分野 本発明は工作機械において熱による変形が起きると精度
を低下させる部分に熱が伝導されることを少くした工作
機械の軸受対向面及び摺動案内面の構造に関する。
Detailed Description of the Invention Technical Field The present invention relates to a structure of a bearing facing surface and a sliding guide surface of a machine tool, which reduces the conduction of heat to parts that degrade accuracy when deformation due to heat occurs in the machine tool. .

従来技術 工作機械の主軸等軸の軸受部は長時間の連続運転による
軸受温度の上昇につれて熱の伝導が多くなり、運転初期
に対してその軸心が変化し加工精度に悪い影響を及ぼし
ている。 また摺動案内面においては運動部材の高速化
にともなう高い摩擦熱の影響によって案内面が変化を起
し高精度化に要求される安定した案内面の精度が保たれ
ず重要な問題の一つになっている。 このため流体循環
による冷却が行なわれているが主軸の変位に対して満足
すべき効果が得られていない。 またヒートパイプによ
る冷却方法が考えられているがスペース、取付加工、コ
ストの面で実用上の多くの問題を有している。
Conventional technology In the equiaxed main shaft bearings of machine tools, heat conduction increases as the bearing temperature rises due to long-term continuous operation, and the axis changes compared to the initial stage of operation, which has a negative effect on machining accuracy. . In addition, in the case of sliding guide surfaces, the guide surfaces change due to the influence of high frictional heat due to the increase in the speed of moving members, and the stable precision of the guide surfaces required for high precision cannot be maintained, which is an important problem. It has become. For this reason, cooling by fluid circulation is performed, but a satisfactory effect on the displacement of the main shaft has not been obtained. A cooling method using a heat pipe has been considered, but it has many practical problems in terms of space, installation process, and cost.

目的 従って本発明は熱変形が起って問題となる部分への熱の
伝導を遮断して、高い機械精度が得られるための軸受対
向面若しくは摺動案内面を提供しようとするものである
Accordingly, the present invention seeks to provide a bearing facing surface or a sliding guide surface that can obtain high mechanical accuracy by blocking heat conduction to a portion where thermal deformation is a problem.

解決手段 本発明は熱の伝導を遮断したい部分に熱伝導率の低い材
料で断熱層を形成しこの断熱層の加工性の良くない性質
を補なうためにその上に精密加工の可能な層を形成した
多層構造となしたことてある。
Solution: The present invention forms a heat insulating layer made of a material with low thermal conductivity in the area where heat conduction is to be blocked, and in order to compensate for the poor workability of this heat insulating layer, a layer that can be precisely machined is added on top of the heat insulating layer. It has been made into a multi-layered structure.

実施例 以下本発明の実施例を図面にもとづき説明する。Example Embodiments of the present invention will be described below based on the drawings.

工作機械の主軸1の前部軸受部において、ころがり軸受
2のインナレースの内径と等しいか僅かに小さい径の7
ランジ3の首部1aにはディスタンスカラーが嵌装され
、このスラスト軸受側の面に熱伝導率kが鉄材5450
のk = 0.105 cal/ cm−sec・00
.50M21のに=0.11の値に比べて熱伝導率にの
低い材料例えばセラミック材のAl2O3のに−0,0
6cal/cm−8ec・0C9zrO2(ジルコニア
)のに= 0.0006 + Si3N4 のk = 
0.013zO,037、ssaのに== o、 07
〜0.148の内特に価の小さいジルコニアのドーナツ
型平板を熱伝導率にの低いエポキシ樹脂に= 0.00
34の接着剤若しくはこれに特殊充填物を添加した接着
剤によって接着するか、溶射によって約0.5mrr+
程度の第1層を形成する。 このジルコニアは硬度が高
く加工が困難で層形成後そのまま使用できず衝撃によっ
て欠は易いために、第1層の上に精密加工の可能な材料
例えばステンレス5US304.この材料はk = 0
.039でkの価が小さく而もじん性があり好適である
。 また加工性と耐摩耗性が要求されるときはセラミッ
クAl2O3等をエポキシ樹脂等の接着剤で接着するか
若しくは溶射によって約0.5′n1111程度の第2
層6を形成する。
At the front bearing part of the main shaft 1 of the machine tool, there is a diameter 7 that is equal to or slightly smaller than the inner diameter of the inner race of the rolling bearing 2.
A distance collar is fitted to the neck 1a of the lunge 3, and the surface on the thrust bearing side has a thermal conductivity k of 5450.
k = 0.105 cal/cm-sec・00
.. Materials with low thermal conductivity compared to the value of 50M21 = 0.11, such as ceramic materials Al2O3 -0,0
6cal/cm-8ec・0C9zrO2 (zirconia) = 0.0006 + k of Si3N4 =
0.013zO,037, ssa == o, 07
A doughnut-shaped flat plate of zirconia with a particularly low value of ~0.148 is used as an epoxy resin with a low thermal conductivity = 0.00
Approximately 0.5mrr+ by adhesion with No. 34 adhesive or an adhesive with special filler added, or by thermal spraying.
Form a first layer of about 100 ml. This zirconia has high hardness and is difficult to process, so it cannot be used as is after layer formation and is easily chipped by impact. This material has k = 0
.. 039, which has a small value of k and has good toughness, is suitable. In addition, when processability and wear resistance are required, ceramic Al2O3 etc. can be bonded with adhesive such as epoxy resin or thermal sprayed to form a second layer of about 0.5'n1111.
Form layer 6.

そしてディスタンスカラー4と第2層乙の面を研削加工
またはラップ加工で千行且軸直角面に仕上げられている
。 軸受2の嵌合する部1bの径は前記第1層、第2層
を形成する厚み分小径につくられており、この部に同様
の手法によって断熱材を主とするセラミック材の第1層
7と加工性を主とする金属またはセラミック材等の第2
層8を形成して、主軸1の1a部とともに第2層8の外
径を精密研削加工して軸受との嵌合に適する寸法に仕上
げられている。 軸受2の後側のディスタンスカラー9
は主、軸の1b部の径に嵌合する内径を有しスラスト軸
受側の面にディスタンスカラー4と同様の手法で断熱性
を主とするセラミック材の第1層10とこの上に加工性
を主とする金属また′はセラミック等の第2層11を形
成し両側の面が平行で軸に直角となるよう研削加工若し
くはラップ加工されている。 そして両面が平行に仕上
げられたカラー12を介して主軸1の中央ねじ部1Cに
螺合するナツト13によって締着され、軸受2のプリロ
ードと軸方向の位置が決められている。
Then, the surfaces of the distance collar 4 and the second layer B are finished by grinding or lapping into a 1,000-line, axis-perpendicular surface. The diameter of the part 1b into which the bearing 2 is fitted is made smaller by the thickness of the first and second layers, and a first layer of ceramic material mainly made of heat insulating material is applied to this part by the same method. 7 and the second material, such as metal or ceramic material, which mainly has workability.
A layer 8 is formed, and the outer diameter of the second layer 8 along with the portion 1a of the main shaft 1 is precision ground to a size suitable for fitting with a bearing. Distance collar 9 on the rear side of bearing 2
The main body has an inner diameter that fits into the diameter of the 1b portion of the shaft, and a first layer 10 of a ceramic material mainly having heat insulation properties is formed on the surface on the thrust bearing side using a method similar to that of the distance collar 4. A second layer 11 of ceramic or the like is formed of metal or ' mainly composed of metal or ', and is ground or lapped so that both sides are parallel and perpendicular to the axis. It is then tightened by a nut 13 which is screwed into the central threaded portion 1C of the main shaft 1 via a collar 12 whose both surfaces are finished parallel, thereby determining the preload and axial position of the bearing 2.

更に主軸1の小径側の後部軸受部は軸受14の径に等し
いか僅かに小さな径の1d部に嵌装されるディスクレス
カラー15は軸受14側の面にディスタンスカラー3と
同様の手法で断熱を主とするセラミック材の第1層16
とこの上に加工性を主とする金属またはセラミックの第
2層17を形成し、ディスタンスカラー15の外側と第
2層17の面とが平行で且軸直角となるように研削加工
若しくはラップ加工で仕上げられている。 軸、受14
が位置する主軸1の1e部は第1層、第2層の厚み分小
径で軸受14の巾と等しいか僅かにせまい巾に同様の手
法で断熱性を主とするセラミック材の第1層18とその
上に加工性を主とする金属若しくはセラミックの第2層
19を形成し、研削加工によって軸受14の嵌合寸法に
仕上げられている。 軸受14の外側のディスタンスカ
ラー20は主軸1eに嵌合する穴を有し軸受14側の面
に同様の手法で断熱性を主とするセラミック材の第1層
21とその上に加工性を主とする金属若しくはセラミッ
クの第2層22とを形成して、両面が平行で且軸直角な
面に研削加工若しくはラップ加工によって仕上げられて
いる。 そして主軸1の軸端のねじ部1fに螺合するナ
ツト23によって締着されている。
Furthermore, in the rear bearing part on the small diameter side of the main shaft 1, a discless collar 15 fitted in a part 1d having a diameter equal to or slightly smaller than the diameter of the bearing 14 is heat-insulated on the surface on the bearing 14 side using the same method as the distance collar 3. First layer 16 of mainly ceramic material
A second layer 17 of metal or ceramic, which is mainly workable, is formed on this, and is ground or lapped so that the outside of the distance collar 15 and the surface of the second layer 17 are parallel and perpendicular to the axis. It is finished with. Shaft, receiver 14
The portion 1e of the main shaft 1 where is located has a smaller diameter due to the thickness of the first and second layers, and is equal to or slightly narrower than the width of the bearing 14.A first layer 18 of a ceramic material mainly having heat insulating properties is formed using the same method. A second layer 19 of metal or ceramic, which mainly has workability, is formed thereon, and is finished to the fitting dimensions of the bearing 14 by grinding. The distance collar 20 on the outside of the bearing 14 has a hole that fits into the main shaft 1e, and a first layer 21 of a ceramic material mainly for heat insulation properties is coated on the surface on the side of the bearing 14 using a similar method, and a first layer 21 of a ceramic material mainly for machinability is applied thereon. A second layer 22 of metal or ceramic is formed, and both surfaces are finished in parallel and perpendicular to the axis by grinding or lapping. It is fastened by a nut 23 that is screwed into a threaded portion 1f at the end of the main shaft 1.

このように構成された主軸は長時間の連続運転で軸受部
の湿度上昇にもかかわらず熱伝導率の低い断熱材によっ
て熱の伝導が抑制、されるため、主軸の温度変化が少く
また温度変化がゆるネかになる。
With a spindle configured in this way, heat conduction is suppressed by the insulating material with low thermal conductivity, even though the humidity in the bearing part increases during long-term continuous operation, so there is little temperature change in the spindle. It becomes loose.

次にすべり軸受を用いる主軸においては、主軸61の7
ランジ32につづく軸受部31aの軸受面には同様の手
法で断熱性を主とするセラミック材のジルコニア(zr
o2)の第1層63とその上に耐焼付性、耐摩耗性のあ
るセラミック材Al2O3で直接滑り面となる第2層3
4を形成して、研削加工によってすべり軸受35が静圧
軸受とし作用する寸法に仕上げられている。 この構成
によって長時間連続運転でも主軸3′1の温度上昇はゆ
るやかである。
Next, in the main shaft using a sliding bearing, 7 of the main shaft 61
Zirconia (zr
o2) first layer 63 and a second layer 3 made of a ceramic material Al2O3 having seizure resistance and wear resistance on top of which becomes a direct sliding surface.
4, and is finished by grinding to a size that allows the sliding bearing 35 to act as a hydrostatic bearing. With this configuration, the temperature of the main shaft 3'1 increases slowly even during long-term continuous operation.

次にベッド等の摺動案内面においては、ベッド41の上
面の例えば2本の平行なT字形断面を有び両側の摩擦面
42 b y 42 c ’ 45 b * 43 C
を同様の手法によって断熱性を主とするセラミック材の
ジルコニア(ZrO2)の少くとも約0.5−厚の第1
層44.45と、その上に加工性と耐摩耗性、耐焼付性
のあるセラミックAl2O3の少くとも約o、51?1
m厚の第2層46.47を形成してベラ・−ド研削盤に
より摺動面42L、421)t 42Q :43a +
 43 b t 43 Cの第2層46.47が平行に
仕上げられている。
Next, in the sliding guide surface of a bed, etc., the upper surface of the bed 41 has, for example, two parallel T-shaped cross sections, and friction surfaces 42 b y 42 c ' 45 b * 43 C on both sides.
Using a similar method, the first layer of zirconia (ZrO2), which is a ceramic material mainly having thermal insulation properties, is at least about 0.5-thick.
layer 44.45 and on top of it a processable, wear-resistant, seizure-resistant ceramic Al2O3 of at least about 0.51?1
A second layer 46.47 with a thickness of m is formed and the sliding surface 42L, 421)t 42Q: 43a +
The second layer 46,47 of 43 b t 43 C is finished in parallel.

なお実施例はベッドを示したがこれに限られることなく
他の部の摺動案内面に応用できることは勿論である。
Although the embodiment shows a bed, the present invention is not limited to this and can of course be applied to sliding guide surfaces of other parts.

効果 以上詳述したように本発明は金属よりはるかに低い熱伝
導率を有するセラミック材の第1層の上に精密加工の容
易又は可能な金属またはセラミックの第2層を形成した
ので、熱伝導を抑制する構造を複雑にすることなく、ま
たそのためのスペースを必要としないで、主軸あるいは
ベッド等への熱伝導が11]制されて熱変位が少く長時
間運転でも機械の精度をda持することができ、tた変
位そのものもゆるやかになるため熱補償の制御が容易と
なるうえ、ヒートパイプなどを用いるものに比べてコス
トを安くすることができる。 また接触面の第2層に加
工しやすい材料を使用したので高精度の仕上が得られ高
い精度の機械のL4 迄に支1沁2をきたさないもので
ある。 更に第2層には接触する相手側の性質に適応し
た加工性ある材料のうちから選択することによって耐摩
耗性、耐焼付性が層 向上し、機械寿命を長くでき、また金ノ・罵となしたΔ ときは第1層の欠は易いセラミックを保腹し取扱い上の
配慮を特徴とする特徴を有するものである
Effects As detailed above, the present invention forms a second layer of metal or ceramic that can be easily or precisely processed on the first layer of ceramic material, which has a much lower thermal conductivity than metal, so that thermal conductivity is improved. Heat conduction to the spindle, bed, etc. is suppressed without complicating the structure and without requiring space for it, resulting in little thermal displacement and maintaining machine accuracy even during long-term operation. Since the displacement itself becomes gentler, thermal compensation can be easily controlled, and the cost can be lower than that using a heat pipe or the like. In addition, since a material that is easy to process is used for the second layer of the contact surface, a high-precision finish can be obtained, and it does not take a long time to reach L4 of a high-precision machine. Furthermore, by selecting materials for the second layer that are workable and adaptable to the properties of the other side that comes into contact, wear resistance and seizure resistance can be further improved, machine life can be extended, and metal corrosion resistance can be improved. When the Δ value is 100%, the first layer is made of ceramic that is easily chipped, and has the characteristics of being careful in handling.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明をころがり軸受に実施した主軸ユニット
の図、第2図はすべり軸受に実施した主軸ユニットの部
分図、第6図はベッドの摺動面Gこ実施した図である。 1.31・・・主軸、  2,14・・・軸受4.9,
15.20・・・ディスタンスカラー5 、7 、10
.16.18.21.33.44.45・・・第1層、
  6 、8 、11 、17.19.22.34.4
6゜47・・・第2層、35・・・すべり軸受41・・
・ベッド、42.43・・・摺動案内面第3図
FIG. 1 is a diagram of a main shaft unit in which the present invention is applied to a rolling bearing, FIG. 2 is a partial view of a main shaft unit implemented in a sliding bearing, and FIG. 6 is a diagram in which the present invention is applied to a sliding surface of a bed. 1.31...Main shaft, 2,14...Bearing 4.9,
15.20...Distance color 5, 7, 10
.. 16.18.21.33.44.45...1st layer,
6, 8, 11, 17.19.22.34.4
6゜47...Second layer, 35...Sliding bearing 41...
・Bed, 42.43...Sliding guideway Figure 3

Claims (1)

【特許請求の範囲】[Claims] (1)軸受の発熱によって熱が伝導される主軸等の軸受
対向面或いは摩擦熱によって熱が伝導されるベッド等の
摺動案内面にセラミックのような熱伝導率の低い材料で
断熱層を形成し、その上に精密加工可能な材料による層
を形成したことを特徴とする工作機械の軸受対向面及び
摺動案内面の構ム
(1) Form a heat insulating layer using a material with low thermal conductivity, such as ceramic, on the bearing facing surface of the main shaft, etc., where heat is conducted by the heat generated by the bearing, or on the sliding guide surface, such as the bed, where heat is conducted, due to frictional heat. A structure of a bearing facing surface and a sliding guide surface of a machine tool, characterized in that a layer made of a material capable of precision machining is formed on the bearing facing surface and a sliding guide surface.
JP3348283A 1983-02-28 1983-02-28 Structure of bearing opposing surface and slide guide surface of machine tool Granted JPS59161202A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3348283A JPS59161202A (en) 1983-02-28 1983-02-28 Structure of bearing opposing surface and slide guide surface of machine tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3348283A JPS59161202A (en) 1983-02-28 1983-02-28 Structure of bearing opposing surface and slide guide surface of machine tool

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1809788A Division JPS63212426A (en) 1988-01-28 1988-01-28 Structure of slide guide surface of machine tool

Publications (2)

Publication Number Publication Date
JPS59161202A true JPS59161202A (en) 1984-09-12
JPH0229444B2 JPH0229444B2 (en) 1990-06-29

Family

ID=12387765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3348283A Granted JPS59161202A (en) 1983-02-28 1983-02-28 Structure of bearing opposing surface and slide guide surface of machine tool

Country Status (1)

Country Link
JP (1) JPS59161202A (en)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6168848U (en) * 1984-10-08 1986-05-12
JPS61121802A (en) * 1984-11-15 1986-06-09 Koyo Seiko Co Ltd Antifriction bearing for machine tool spindle
JPS61270043A (en) * 1985-05-22 1986-11-29 Toyoda Mach Works Ltd Spindle mechanism
JPS61270042A (en) * 1985-05-22 1986-11-29 Toyoda Mach Works Ltd Spindle mechanism of machine tool
WO1988007910A1 (en) * 1987-04-07 1988-10-20 Salje Ernst Spindle system for machine-tools, in particular grinding machines
JPH023340U (en) * 1988-06-09 1990-01-10
JPH023339U (en) * 1988-06-09 1990-01-10
JP2012187702A (en) * 2011-02-24 2012-10-04 Nsk Ltd Motor built-in type spindle device
WO2013011815A1 (en) * 2011-07-20 2013-01-24 日本精工株式会社 Main shaft apparatus
JP2013022699A (en) * 2011-07-22 2013-02-04 Nsk Ltd Motor built-in type main spindle device
JP2013022698A (en) * 2011-07-22 2013-02-04 Nsk Ltd Main spindle device
JP2013022674A (en) * 2011-07-20 2013-02-04 Nsk Ltd Main spindle device
JP2013082018A (en) * 2011-10-06 2013-05-09 Nsk Ltd Spindle device of built-in motor system
JP2017020559A (en) * 2015-07-09 2017-01-26 株式会社荏原製作所 Slide bearing device
JP2017061999A (en) * 2015-09-25 2017-03-30 株式会社荏原製作所 Sliding bearing device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5593998A (en) * 1979-01-08 1980-07-16 Shibaura Eng Works Co Ltd Canned pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5593998A (en) * 1979-01-08 1980-07-16 Shibaura Eng Works Co Ltd Canned pump

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6168848U (en) * 1984-10-08 1986-05-12
JPH0314280Y2 (en) * 1984-10-08 1991-03-29
JPS61121802A (en) * 1984-11-15 1986-06-09 Koyo Seiko Co Ltd Antifriction bearing for machine tool spindle
JPS61270043A (en) * 1985-05-22 1986-11-29 Toyoda Mach Works Ltd Spindle mechanism
JPS61270042A (en) * 1985-05-22 1986-11-29 Toyoda Mach Works Ltd Spindle mechanism of machine tool
WO1988007910A1 (en) * 1987-04-07 1988-10-20 Salje Ernst Spindle system for machine-tools, in particular grinding machines
JPH023340U (en) * 1988-06-09 1990-01-10
JPH023339U (en) * 1988-06-09 1990-01-10
JP2012187702A (en) * 2011-02-24 2012-10-04 Nsk Ltd Motor built-in type spindle device
WO2013011815A1 (en) * 2011-07-20 2013-01-24 日本精工株式会社 Main shaft apparatus
JP2013022674A (en) * 2011-07-20 2013-02-04 Nsk Ltd Main spindle device
TWI503201B (en) * 2011-07-20 2015-10-11 Nsk Ltd Spindle device
JP2013022699A (en) * 2011-07-22 2013-02-04 Nsk Ltd Motor built-in type main spindle device
JP2013022698A (en) * 2011-07-22 2013-02-04 Nsk Ltd Main spindle device
JP2013082018A (en) * 2011-10-06 2013-05-09 Nsk Ltd Spindle device of built-in motor system
JP2017020559A (en) * 2015-07-09 2017-01-26 株式会社荏原製作所 Slide bearing device
JP2017061999A (en) * 2015-09-25 2017-03-30 株式会社荏原製作所 Sliding bearing device

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