JPS59160109A - Detector for light image - Google Patents

Detector for light image

Info

Publication number
JPS59160109A
JPS59160109A JP3501783A JP3501783A JPS59160109A JP S59160109 A JPS59160109 A JP S59160109A JP 3501783 A JP3501783 A JP 3501783A JP 3501783 A JP3501783 A JP 3501783A JP S59160109 A JPS59160109 A JP S59160109A
Authority
JP
Japan
Prior art keywords
frequency
outputs
mtf
photoelectric
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3501783A
Other languages
Japanese (ja)
Other versions
JPH0554042B2 (en
Inventor
Takeshi Utagawa
健 歌川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP3501783A priority Critical patent/JPS59160109A/en
Priority to US06/575,154 priority patent/US4561749A/en
Publication of JPS59160109A publication Critical patent/JPS59160109A/en
Publication of JPH0554042B2 publication Critical patent/JPH0554042B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28Systems for automatic generation of focusing signals
    • G02B7/34Systems for automatic generation of focusing signals using different areas in a pupil plane
    • G02B7/346Systems for automatic generation of focusing signals using different areas in a pupil plane using horizontal and vertical areas in the pupil plane, i.e. wide area autofocusing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Focusing (AREA)
  • Automatic Focus Adjustment (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE:To remove thoroughly the space frequency component of a Nyquist frequency or above and to enable detection with high accuracy by providing the 1st means which forms the added outputs obtd. by adding respective prescribed weights to the photoelectic outputs from four photodetecting parts in proximity to each other at every specified pitch and a detecting means which detects the state of the light image on the arrays in the photodetecting parts from the added outputs. CONSTITUTION:Sample holding circuits 27A, 27B sample and hold the respective added outputs I1, I2, I3... from filter means 26A, 26B at every (n)-piece. The reason lies in that the sampling pitch (p) when spacially viewed is p=no0. The 1st means is constituted of the filter means 26A and the circuits 27A, 27B. Said means forms the added outputs obtd. by adding respective prescribed weights to the photoelectric outputs from plural pieces of photodetecting parts in proximity to each other at every prescribed pitch np0. An arithmetic means 28 acting as a means for detecting displacement calculates the respective outputs from the circuits 27A, 27B, detects the phase difference between the outputs patterns of the circuits 27A, 27B, and detects the deviation in the light image on the arrays 23A, 23B in the photodetecting parts of one- dimensional image sensors 22A, 22B, i.e., the displacement of the light image. The driving of a photographing lens to attain focusing and the displaying of the focusing condition are accomplished in accordance with the output from the means 28.

Description

【発明の詳細な説明】 (発明の技術分野) 本発明は、多数の受光部を配列して成る受光部アレイ上
に光像を投影し、その受光部アレイの一連の光電出力を
処理し光像の状態を検出する例えばカメラ用焦点検出装
置等の光像検出装置に係り、特に光像中の特定の空間周
波数成分を抑制するフイルタリング装置に関する。
Detailed Description of the Invention (Technical Field of the Invention) The present invention projects an optical image onto a light receiving array formed by arranging a large number of light receiving parts, processes a series of photoelectric outputs of the light receiving array, and generates light. The present invention relates to an optical image detection device such as a focus detection device for a camera that detects the state of an image, and particularly to a filtering device that suppresses a specific spatial frequency component in an optical image.

撮影レンズの射出瞳の嵌なる部分を通過した光束による
一対の被写体像の相対的すれ量を光電的に検出し、その
ずれ付から撮影レンズの焦点検出をする又は被写体まで
の距離を測定するカメラ用焦点検出装置へは多数提案さ
れている。
A camera that photoelectrically detects the relative amount of deviation between a pair of subject images due to the light flux that has passed through the fitting part of the exit pupil of the taking lens, and uses the deviation to detect the focus of the taking lens or to measure the distance to the subject. There have been many proposals for focus detection devices.

第1図と第2図とにそのうちの代表的な焦点検出装置の
光学系を示す。
FIGS. 1 and 2 show the optical system of a typical focus detection device.

第1図は特開昭54−104859号公報に記載された
光学系を示し、彬影レンズ1の射出瞳の第1及び第2部
分1a、1bを夫々通過した光束は、撮影レンズ1の予
定結像面2の近傍に第1及び第2被写体像を夫々形成す
る。この第1第2被写体像は夫々フィールドレンズ6を
介して第1及び第2再結像レンズ4、5により第1及び
第2光電紫子アレイ6.7上に再結像される。光電素子
アレイ6.7は共に第1図(b)に示す如く幅p0を有
する光電素子PTがピッチp0で即ち実効的に間隙なく
配列されている。第1光電素子アレイ6の一連の光電出
力a1、a2、a3・・・のパターンは、第1被写体像
の照度分布パターンに、第2光電素子アレイ7の一連の
光電出力b1、b2、b3・・・のパターンは第2被写
体像の照川分用ハターンに夫々対応する。上記両光電量
カバターンから上記第1と第2被写体像の相対的すれか
検出される。
FIG. 1 shows an optical system described in Japanese Patent Application Laid-open No. 54-104859, in which the light beams that have passed through the first and second portions 1a and 1b of the exit pupil of the Akiko lens 1 are First and second subject images are formed near the imaging plane 2, respectively. The first and second object images are re-imaged onto the first and second photoelectric violet arrays 6.7 by the first and second re-imaging lenses 4, 5 via the field lens 6, respectively. In both photoelectric element arrays 6.7, photoelectric elements PT having a width p0 are arranged at a pitch p0, ie, without any gaps, as shown in FIG. 1(b). The pattern of the series of photoelectric outputs a1, a2, a3, . The patterns . . . respectively correspond to the Terukawa pattern of the second subject image. A relative shift between the first and second subject images is detected from both the photovoltaic cover patterns.

第2図はu、s、p4.230.941に記載された光
学系を示し、同図(a)において払彰レンズ1の射出瞳
の第1及び第2部分1a、1bを夫々通過した光束は、
フィールドレンズ6を経て撮影レンズ1の予定結像面2
の近傍に夫々第1及び第2被写体像を形成する。この予
定結像面2の近傍には、小レンズアレイ8か配置されて
いる。この小レンズアレイ8は、第2図(b)に示す如
く互にわずかな間隙を匹でてピッチp0で一方向に配列
された多数の小レンズ801、802、・・・から構成
されている。
FIG. 2 shows the optical system described in U, S, p4.230.941, and in FIG. teeth,
Planned imaging plane 2 of the photographing lens 1 via the field lens 6
First and second subject images are respectively formed in the vicinity of . A small lens array 8 is arranged near the planned image forming plane 2. This small lens array 8 is composed of a large number of small lenses 801, 802, . . . arranged in one direction at a pitch p0 with a slight gap between them as shown in FIG. 2(b). .

各小レンズ801.802・・・の背後には、一対の光
電素子PT1、PT2が配置されている。第1、第2被
写体像は夫々小レンズアレイ8の小レンズにより小部分
に分割され、この分割された第1被写体像は、第1光電
素子拍PT1、PT1・・・により、第2被写体像は第
2光電素子群PT2、PT2により夫々光電変換される
。第1被写体像の照度分布パターンに対応する第1光電
素子群の光電出力a1、a2、a3・・・のパターンと
第2被互体像の照度分布パターンに対応する第2光電素
子群の光電出力b1、b2、b3・・・のパターンとか
ら像ずれが検出される。
A pair of photoelectric elements PT1 and PT2 are arranged behind each of the small lenses 801, 802, . . . . The first and second subject images are each divided into small parts by the small lenses of the small lens array 8, and the divided first subject images are converted into the second subject images by the first photoelectric element beats PT1, PT1, etc. are photoelectrically converted by the second photoelectric element groups PT2 and PT2, respectively. The pattern of photoelectric outputs a1, a2, a3, etc. of the first photoelectric element group corresponding to the illuminance distribution pattern of the first object image and the photoelectric output of the second photoelectric element group corresponding to the illuminance distribution pattern of the second object image. Image shift is detected from the patterns of outputs b1, b2, b3, . . .

上記被写体像は、第1図ではピッチp0で配列された光
電素子により量子化されて光電変換され、第2図ではピ
ッチp0で配列された小レンズにより量子化され、対応
の光電素子により光電変換される。この様に、光像を量
子化し光市劾換する部分を本明細書においては受光部と
言い、それらが配列されたものを受光部アレイと言う。
The above-mentioned subject image is quantized and photoelectrically converted by photoelectric elements arranged at a pitch of p0 in Fig. 1, and quantized by small lenses arranged at a pitch of p0 in Fig. 2, and photoelectrically converted by the corresponding photoelectric elements. be done. In this specification, the portion that quantizes the optical image and converts the light image is referred to as a light receiving section, and the arrangement thereof is referred to as a light receiving section array.

従って、第1図では光電素子それ自身が受光部であり、
第2図では小レンズとその背後の光電素子との組合せが
受光部に相当する。
Therefore, in FIG. 1, the photoelectric element itself is the light receiving part,
In FIG. 2, the combination of the small lens and the photoelectric element behind it corresponds to the light receiving section.

光市出力(a1、a2、a3、・・・)及び(b1、b
2、・・・)を夫々サンプリングピッチp(=np0、
nは1以上の整数)でサンプリングして、このサンプリ
ングされたデータに基づき像のずれを検出する場合、サ
ンプリングビノチpで決まるナイキスト周波数fN=1
/2p以上の光像の空間周波数成分は、像ずれ検出の誤
差要因となる。このことを第3図乃至第7図を用いて例
証する。尚、以下の訃明ではp=p0とし、光電素子ア
レイからの光電出力をすべてサンプリングするものとす
る。律ってこの時のサンプリングヒンチで決まるナイキ
スト周波数fNは1/2p0となる。
Hikari City output (a1, a2, a3,...) and (b1, b
2,...) respectively at the sampling pitch p(=np0,
n is an integer greater than or equal to 1), and when detecting an image shift based on this sampled data, the Nyquist frequency fN = 1 determined by the sampling pitch p.
A spatial frequency component of the optical image of /2p or more becomes an error factor in image shift detection. This will be illustrated using FIGS. 3 to 7. In the following description, it is assumed that p=p0 and all photoelectric outputs from the photoelectric element array are sampled. In general, the Nyquist frequency fN determined by the sampling hinch at this time is 1/2p0.

第3図は、ピッチルp0で酉列された巾p0の光電素子
PT1〜PT5と、各光電素子の光重出力a1〜a5と
を示す。
FIG. 3 shows photoelectric elements PT1 to PT5 having a width p0 arranged in pitch pitch p0, and the light weight outputs a1 to a5 of each photoelectric element.

第4図(a)〜(f)は、空間周波数3/4p0を持つ
周期格子像(ハツチングが付されている。)か光電素子
アレイPT1〜PT5上を矢印方向に移動した時の状態
を夫々示し、第4図(a′)〜(f′)は第4図(a)
〜(f)の時の光電出力a1〜a5の変化を示す。第5
図(a)〜(f)、(a′)〜(f′)、第6図(a)
〜(f)、(a′)〜(f′)、及び第7図(a)〜(
f)、(a′)〜(f′)は、夫々空間周波数1/2p
0、3/8p0、1/4p0の周期格子像に関する第4
図(a)〜(f)、(a′)〜(f′)と同機の図であ
る。なお、第6図と第7図では、光市出力のパターンの
変化を明らかにする為に、光電素子数を10個として示
しである。
FIGS. 4(a) to 4(f) respectively show the state when the periodic grating image (hatched) with the spatial frequency 3/4p0 is moved in the direction of the arrow over the photoelectric element arrays PT1 to PT5. Figures 4(a') to (f') are shown in Figure 4(a).
-(f) shows changes in photoelectric outputs a1 to a5. Fifth
Figures (a) to (f), (a') to (f'), Figure 6 (a)
- (f), (a') - (f'), and Fig. 7 (a) - (
f), (a') to (f') are each spatial frequency 1/2p
4th periodic grating image of 0, 3/8p0, 1/4p0
Figures (a) to (f) and (a') to (f') are views of the same aircraft. In addition, in FIG. 6 and FIG. 7, the number of photoelectric elements is shown as 10 in order to clarify the change in the pattern of optical output.

第4図に示す様に周波数3/4p0即ちナイキスト周波
数1/2p0の1.5倍の空間格子像に関しては、光像
の動き方向とそれに伴う光電出方パターンの動き方向と
が逆になる。一般に、ナイキスト周波数fNからその2
倍の周波数2fNまでの間の周波数の空間格子像は、像
の移動と光電出方パターンの位相変化とは方向か逆とな
る。第5図において、空間周波数1/2p0計ちナイキ
スト周波数に等しい周波数の空間格子像に関しては、光
像の移動に伴う光電用カバターンが振幅を変化させるの
みで、光電用力バターンの位相変化は無い。第6図にお
いて、ナイキスト周波数の3/4倍の周波数3/8p0
を有する空間格子像に関しては光像の矢印方向の動きに
対して、光電出力バターン位相も同方向へ変化するが、
その位相変化は滑らかさを欠く。第7図においも、ナイ
キスト敏波数の1/2の周波売1/4p0を有する空間
格子像については、光像の矢印方向への動きに応じて光
電用力バターンの位相も同方向に滑らかに変化している
As shown in FIG. 4, for a spatial grating image with a frequency of 3/4p0, that is, 1.5 times the Nyquist frequency 1/2p0, the moving direction of the optical image and the accompanying moving direction of the photoelectric emission pattern are opposite. In general, from the Nyquist frequency fN to the second
In the spatial grating image at frequencies up to the double frequency 2fN, the movement of the image and the phase change of the photoelectric emission pattern are in opposite directions. In FIG. 5, regarding the spatial grating image having a frequency equal to the spatial frequency 1/2p0, which is equal to the Nyquist frequency, only the amplitude of the photoelectric power pattern changes as the optical image moves, and there is no phase change of the photoelectric power pattern. In Figure 6, the frequency 3/8p0 is 3/4 times the Nyquist frequency.
Regarding the spatial grating image with , the photoelectric output pattern phase changes in the same direction as the optical image moves in the direction of the arrow.
The phase change lacks smoothness. In Fig. 7, for a spatial grating image with a frequency distribution of 1/4p0, which is 1/2 of the Nyquist wave number, as the optical image moves in the direction of the arrow, the phase of the photoelectric power pattern changes smoothly in the same direction. are doing.

以上の事から明らかなように、サンプリングされた出力
バターンの位相の動きから光像の変位を検出する為には
、ナイキスト周波吸fN以上の高次の空間周波数成分を
充分に除去する必要がある。
As is clear from the above, in order to detect the displacement of the optical image from the phase movement of the sampled output pattern, it is necessary to sufficiently remove high-order spatial frequency components higher than the Nyquist frequency absorption fN. .

ところが、第1図に示す様に幅p0を有する矩形受光部
のMTF特性は第8図(a)の実線Aに示すごとく、空
間同波片1/p0でほは零となる特性を有する。このピ
ッチp0で発生ずる光電出力を上述のごとくすべてサン
プリングするとすれは、第8図(a)の実線Aに示した
受光部のMTF特性は、ナイキスト周波数fN=1/2
p0以上の高次の空間周波数特性全周波数成分ものとな
る。同作に第2図に示した受光部ピッチp0の0.8倍
の直径を有する受光部のMTF特性は第8図(a)の実
線Bに示す如くナイキスト周波数fN=1/2p0以上
の高次の空間周波数成分を第1図のものよりも史に多く
含む。従って、従来の焦点検出装置は被写体像が低突間
周波視成分に比べてナイキスト周波数以上の高空間周波
数成分を多く含むときには誤っだ焦点検出を行うと言う
欠点があった。
However, as shown in FIG. 1, the MTF characteristic of a rectangular light-receiving section having a width p0 has a characteristic that becomes zero at a spatial homolog of 1/p0, as shown by the solid line A in FIG. 8(a). If all the photoelectric outputs generated at this pitch p0 are sampled as described above, the MTF characteristic of the light receiving section shown by the solid line A in FIG. 8(a) will be the Nyquist frequency fN = 1/2
The high-order spatial frequency characteristic of p0 or higher has all frequency components. In the same work, the MTF characteristic of the light receiving part having a diameter 0.8 times the light receiving part pitch p0 shown in Fig. 2 is as shown by the solid line B in Fig. 8 (a). The following spatial frequency components are included in the history more than those in FIG. Therefore, the conventional focus detection device has the disadvantage that it performs erroneous focus detection when the subject image contains more high spatial frequency components above the Nyquist frequency than low salient frequency visual components.

そこで、本出嗟人は、特願昭56−185723号と特
願昭56−177827号の2件の特許出血において上
記欠点を低減した焦点検出装置を稈案している。前者の
出離は、受光部アレイの隣接する受光部同士の光電出力
をすべて加算し、サンプリングピッチは受光部ピッチp
0のままである新たな加算信号を作成するフィルタ手段
を設け、この加算信号を用いて像ずれ検出の演算を行う
焦点検出装置を開示している。このフィルタ手段と第1
図の受光部とから決まる合成MTF特性及びこのフィル
タ手段と第2図の受光部とがら決まる合成MTF特性は
夫々第8図(b)と(c)において冥線で示す如く、ナ
イキスト周波数fN=1/2p0において零をとるもの
であり、上記ナイキスト周波数近傍の空間周波数成分を
同図において点線で示した受光部のみのMTF特性より
も一層抑制しているが、しかし周波験零例近の仕空間周
波数に第1ピークを、ナイキスト周波数1/2p0とそ
の2倍の周波数1/p0との間にかなり大きな第2ピー
クpkが存在している。後者の出願は、受光部アレイの
受光剤1箇を置いて極り合う受光部の光重出力を減算す
るフィルタ手段を設け、その減所信号を上記と同様に用
いて像ずれ検出の演算を行う炉点検出装置を開示してい
る。このフィルタ手段と第1図の受光部とにより決まる
合成MTF特性は、第8図(d)において実線で示す如
く周波数零において零となる点を除いて、第8図(b)
とほぼ同一となる。
Therefore, the present inventor has proposed a focus detection device that reduces the above-mentioned drawbacks in two patent applications, Japanese Patent Application No. 56-185723 and Japanese Patent Application No. 56-177827. The former is calculated by adding all the photoelectric outputs of adjacent light receiving parts in the light receiving part array, and the sampling pitch is determined by the light receiving part pitch p.
A focus detection device is disclosed in which a filter means is provided to create a new addition signal that remains 0, and this addition signal is used to perform calculations for detecting image shift. This filter means and the first
The composite MTF characteristic determined by the light receiving section in the figure and the composite MTF characteristic determined by this filter means and the light receiving section in FIG. 2 are as shown by the dark lines in FIGS. /2p0, and the spatial frequency component near the Nyquist frequency is suppressed more than the MTF characteristic of only the light receiving section shown by the dotted line in the same figure. However, the spatial frequency component near the frequency experimental zero example There is a first peak in frequency, and a fairly large second peak pk between the Nyquist frequency 1/2p0 and twice the frequency 1/p0. In the latter application, one light-receiving agent of a light-receiving element array is placed, a filter means is provided for subtracting the light weight outputs of the light-receiving elements, and the subtraction signal is used in the same manner as above to perform calculations for detecting image shift. Discloses a furnace point detection device that performs the following steps. The composite MTF characteristic determined by this filter means and the light receiving section of FIG. 1 is as shown in FIG. 8(b), except that it becomes zero at zero frequency as shown by the solid line in FIG. 8(d).
is almost the same as

以上の如く、これらの先陣の発明に係る焦点検出装置も
、ナイキスト周波数より大きい周波数成分の除去は必ず
しも十分ではなく、光像によっては読検出を行う可能性
を有する。
As described above, even in the focus detection devices according to these pioneering inventions, removal of frequency components higher than the Nyquist frequency is not necessarily sufficient, and depending on the optical image, reading detection may be performed.

また、以上では、受光部アレイに対する光像のずれ検出
におけるナイキスト周波数以上の周波数成分の除去の必
要性を述べたが、この様な除去は上記例に限らす、光像
をサンプリングして処理し光像の状態を検出する装置に
は必要である。
In addition, although the above described the necessity of removing frequency components higher than the Nyquist frequency in detecting the deviation of the optical image with respect to the light receiving array, such removal is limited to the above example; it is necessary to sample and process the optical image. This is necessary for a device that detects the state of an optical image.

(発明の目的) 本発明の目的は、ナイキスト周波数以上の空間周波数成
分を十分に除去できる光像検出装置を提供することであ
る。
(Object of the Invention) An object of the present invention is to provide an optical image detection device that can sufficiently remove spatial frequency components higher than the Nyquist frequency.

(発明の実施例) 以下に本発明の一実施例を図面を参照して説明する。(Example of the invention) An embodiment of the present invention will be described below with reference to the drawings.

第9図は、実施例に係る焦点検出装置の光学系を示し、
この光学系は基本的には第1図の光学系と同一であるが
、全体の構成の小型化を鞠ったものである。同図におい
て従形レンズの如き結像光学系1の予定炸点面(1次像
面)の近傍に、フィールドレンズ15が配貿され、この
フィールドレンズ15はその中央部に矩形の光透過領域
15aを有し、その領域15a以外は遮光領鯵となって
いる。
FIG. 9 shows an optical system of a focus detection device according to an embodiment,
This optical system is basically the same as the optical system shown in FIG. 1, but the overall configuration has been made smaller. In the same figure, a field lens 15 is placed near the planned burst plane (primary image plane) of the imaging optical system 1, such as a conformal lens, and this field lens 15 has a rectangular light transmission area in its center. 15a, and the area other than the area 15a is a light-shielding area.

はぼ直方体状の透明ブロック16はガラスやプラスチッ
ク等の高屈折率物質から成り、この一端面16aには上
記フィールドレンズ15が貼伺されている。この一端面
16aに対向した他端面16bには、互に逆方向にわず
かに傾いた一対の凹面鏡17、18が設けられている。
The rectangular parallelepiped-shaped transparent block 16 is made of a high refractive index material such as glass or plastic, and the field lens 15 is pasted on one end surface 16a. A pair of concave mirrors 17 and 18 that are slightly inclined in opposite directions are provided on the other end surface 16b opposite to the one end surface 16a.

これらの凹面鏡17、18は夫々第1図の再結像レンズ
4、5に対応する。
These concave mirrors 17, 18 correspond to the reimaging lenses 4, 5 of FIG. 1, respectively.

この両端面16a、16bの間のブロック16中には所
定の間隙を隔てて一対のミラー19.20がほぼ45°
の角度で斜設さねている。透明ブロック16の下方には
、夫々光電変換装憤21か前浴されている。この光重変
換装置21は、上記ミラー19.20の下方に夫々に対
応した一次元イメージセンサ22A、22Bが形成され
ている。
In the block 16 between the end surfaces 16a and 16b, a pair of mirrors 19 and 20 are provided with a predetermined gap at approximately 45 degrees.
It is installed diagonally at an angle of . Below each transparent block 16, a photoelectric conversion device 21 is pre-bathed. In this light weight conversion device 21, one-dimensional image sensors 22A and 22B are formed below the mirrors 19 and 20, respectively.

結像光学系1を通過した光束はフィールドレンズ15の
光透過領域15aを通過しブロック16内に入り、ミラ
ー19.20の間の間隙を通って一対の凹面鏡17.1
8に入射する。一方の凹面鏡17は入射光をミラー19
の方へ、他方の凹面鏡18は入射光をミラー20の方へ
夫々反射し、各反射光はミラー19.20を介して夫々
イメージセンサ22A、22Bに到達する。こうしてほ
ぼ同一被写体についての一対の被写体像がセンサ22A
、22B上に形成される。
The light flux that has passed through the imaging optical system 1 passes through the light transmitting region 15a of the field lens 15, enters the block 16, passes through the gap between the mirrors 19.20, and passes through the pair of concave mirrors 17.1.
8. One concave mirror 17 directs the incident light to the mirror 19.
, the other concave mirror 18 reflects the incident light towards the mirror 20, and each reflected light reaches the image sensor 22A, 22B, respectively, via a mirror 19,20. In this way, a pair of subject images of almost the same subject are captured by the sensor 22A.
, 22B.

この光電装置21からの光電出力を処理する回路糸を第
10図により評明する。
The circuit thread for processing the photoelectric output from the photoelectric device 21 will be explained with reference to FIG.

第10図において、一次元イメージセンサ22A、22
Bは、間隔p0で配列された受光部から成る受光部アレ
イ23A、23Bと、トランスファゲート24A、24
Bと、電荷転送シフトレジスタ25A、25Bとから構
成される。受光部アレイ23A、23Bの各受光部の電
荷信号即ち光電出力a1・・・・・・ap、b1・・・
・・・hpは、トランスファーゲート24A、24Bを
介して夫々電荷転送シフトレジスタ25A、25Bに並
列的に送られ、受光部の配列順に時系列化される。イメ
ージセンサ22A、22Bの一連の光電出力は、夫々対
応のフィルタ手段26A、26Bに送られる。尚、この
光電出力とは光電素子の出力に関連した信号を意味し、
従って光電素子出力を線形増幅や対数増幅したものを当
然含む。このフィルタ手段26A、26Bは共に第11
図(a)に示すトラジスバーサルフィルタにより構成さ
れている。このトランスバーサルフィルタは、互に直列
接続された一画素分の遅延回路D1〜Dqと、各遅延回
路D1〜Dqの出力端子にアンプAmを介して接読され
た乗算器W1〜Wqと、これらの乗算器の出力を加算す
る加算器T1とから成る。乗算器W1は遅延回路D1の
出力に市みW1を乗算し、残りの乗算器W2〜Wqも同
様に遅延回路D2〜Dqの出力に夫々重みW2〜Wqを
掛ける。ここでW1〜Wqは正、零、又は負の数である
。フィルタ手段26A、26Bは以上の如き構成である
ので、例えばイメージセンサ22Aからの一連の光電出
力a1、a2・・・・・・apがフィルタ手段26Aに
順次入力され、加算出力I2、I3、・・・・・・を順
次出力する。フィルタ手段26Bについても同様である
。サンプルホールド回路27A、27Bは夫々フィルタ
手段26A。
In FIG. 10, one-dimensional image sensors 22A, 22
B includes light receiving section arrays 23A, 23B consisting of light receiving sections arranged at intervals p0, and transfer gates 24A, 24.
B, and charge transfer shift registers 25A and 25B. Charge signals of each light receiving section of the light receiving section arrays 23A, 23B, that is, photoelectric output a1...ap, b1...
...hp are sent in parallel to charge transfer shift registers 25A and 25B via transfer gates 24A and 24B, respectively, and are time-seriesized in the order in which the light receiving sections are arranged. The series of photoelectric outputs of the image sensors 22A, 22B are sent to respective filter means 26A, 26B. Note that this photoelectric output means a signal related to the output of a photoelectric element,
Therefore, it naturally includes those obtained by linearly amplifying or logarithmically amplifying the photoelectric element output. These filter means 26A, 26B are both
It is composed of a tragiversal filter shown in Figure (a). This transversal filter includes delay circuits D1 to Dq for one pixel connected in series, multipliers W1 to Wq that are read directly to the output terminals of each delay circuit D1 to Dq via an amplifier Am, and these multipliers. and an adder T1 that adds the outputs of the multipliers. Multiplier W1 multiplies the output of delay circuit D1 by market weight W1, and the remaining multipliers W2 to Wq similarly multiply the outputs of delay circuits D2 to Dq by weights W2 to Wq, respectively. Here, W1 to Wq are positive, zero, or negative numbers. Since the filter means 26A, 26B have the above configuration, for example, a series of photoelectric outputs a1, a2, . Outputs ... sequentially. The same applies to the filter means 26B. Each of the sample and hold circuits 27A and 27B is a filter means 26A.

26Bの加算出力I1、I2、I3・・・をn個毎にサ
ンプルホールドする。例えばn=2とすると、加算出力
I1、I2、Iい、I7・・・がサンプリングされる。
26B addition outputs I1, I2, I3, . . . are sampled and held every n pieces. For example, if n=2, the addition outputs I1, I2, I, I7, . . . are sampled.

上記サンプリング間隔をnとすることは、空間的にみる
とサンプリングピッチpがp=npoとなることにあた
る。上記フィルタ手段とサンプルホールド回路とから、
第1手段を構成し、この第1手段は、近接した複数個の
受光部の光電出力に夫々所定の重みを付して加勢した加
算出力を、所定ピッチnpo毎に作成する。
Setting the sampling interval to n corresponds to the sampling pitch p being p=npo from a spatial perspective. From the filter means and sample hold circuit,
A first means is constituted, and this first means generates a summation output obtained by adding a predetermined weight to the photoelectric outputs of a plurality of adjacent light receiving sections, respectively, at a predetermined pitch npo.

変位検出手段として価く演算手段28は、上記サンプル
ボールド回路27A、27Bの各出力を演算し、両回路
27A、27Bの出力バターンの位相差を算出し、受光
部アレイ23A、23B上の光像のずれ即ち光像の変位
を検出する。この演算子段28の出力に非づき、枦影レ
ンズの合体紙動又は、焦点調節状態の表示が行われる。
The calculation means 28 used as a displacement detection means calculates each output of the sample bold circuits 27A and 27B, calculates the phase difference between the output patterns of both circuits 27A and 27B, and calculates the optical image on the light receiving arrays 23A and 23B. In other words, the displacement of the optical image is detected. Depending on the output of the operator stage 28, the combined movement of the shadow lens or the focus adjustment state is displayed.

第11図(b)は第11図(a)のトランスバーサルフ
ィルタの具体的構成例である分割電極形CCDトランス
バーサルフィルタを示ず。6相クロツクラインφ1、φ
2、φ3のうちのクロックラインφ3の転送電極は重み
Wに応じて分割されている。CMはカレントメータであ
る。尚、複数の重みに止の数と角の矛とか存在する場合
には、正の重みに関する部分和と負の取みに関する部分
和とを夫々求めた後、それらの部分和の差を求めるとよ
い。
FIG. 11(b) does not show a split electrode type CCD transversal filter which is a specific structural example of the transversal filter of FIG. 11(a). 6-phase clock line φ1, φ
The transfer electrodes of the clock line φ3 of the clock lines φ3 and φ3 are divided according to the weight W. CM is a current meter. In addition, if there are multiple weights such as the number of stops and the number of corners, after calculating the partial sum for the positive weight and the partial sum for the negative weight, calculate the difference between those partial sums. good.

このフィルタ手段26A、26Bとして、第12図(a
)に示す如く、Wq=W5とし、W1=0.28.W2
=0.76、W3=1.0、W4=0.76、W5=0
.23であるフィルタを用いた場合の、このフィルタ手
段と受光部形状とから決まる合成MTFを第12図(h
)の実線(A)に示ず。尚、同図の点線(B)は、受光
部形状のみから決まるMTFである。同図から分るよう
にこの合成MTFは、空間周波放客から周波数が大きく
なるにつれて徐々に減少し、周波数1/4p0の近傍で
零となり、該近傍より高い広い周波数帯域にわたって零
のままであり、周波数の1/p0の両側近傍に非常に小
さな第2ピーク、鍵3ビークか現われる特性を有する。
The filter means 26A, 26B are shown in FIG.
), Wq=W5, W1=0.28. W2
=0.76, W3=1.0, W4=0.76, W5=0
.. Figure 12 (h
) is not shown in the solid line (A). Note that the dotted line (B) in the figure is the MTF determined only from the shape of the light receiving section. As can be seen from the figure, this composite MTF gradually decreases as the frequency increases from the spatial frequency distribution, becomes zero near frequency 1/4p0, and remains zero over a wide frequency band higher than this vicinity. , it has the characteristic that very small second peaks and key 3 peaks appear near both sides of the frequency 1/p0.

このときのナイキスト周波数fNは、サンプルホールド
回路27A、27Bのサンプリングピッチp=np0に
よって決まるfn=1/2p=1/2np0となり、例
えばn=1のとき1/2p0、n=2のとき1/4p0
となる。第12図(b)と第9図(a)〜(d)との対
片からも明らかな様に、本実施例の焦点検出装計はナイ
キスト周波数が1/4p0、1/2p0のいずれてあっ
ても、上述した従来又は先頭に係る無点検出装置に比べ
てナイキスト周波数以上の品空間固波数成分を充分抑制
している。
The Nyquist frequency fN at this time is fn=1/2p=1/2np0, which is determined by the sampling pitch p=np0 of the sample-and-hold circuits 27A and 27B, and for example, 1/2p0 when n=1 and 1/2p0 when n=2. 4p0
becomes. As is clear from the pair of FIG. 12(b) and FIGS. 9(a) to (d), the focus detection instrument of this embodiment has a Nyquist frequency of 1/4p0 and 1/2p0. Even if there is, the component space solid wave number component above the Nyquist frequency is sufficiently suppressed compared to the conventional or leading pointless detection device described above.

尚、焦点検出装置か、本実於例の如き合成MTP特性を
有する場合には、サンプリングピンチをp0よりも2p
0とした方が以下の理由により望ましい。即ち、いずれ
の場合にも抽出される情報量は等しいがザンブリングビ
ツチを2p0とした時は、p0とした時よりもサンプリ
ングされるサンプル数か1/2となり、演算手段28の
演算短根を小さくできるからである。
In addition, if the focus detection device has a composite MTP characteristic as in this example, the sampling pinch should be set to 2p rather than p0.
It is preferable to set it to 0 for the following reasons. In other words, the amount of information extracted is the same in either case, but when the Zumbling bit is set to 2p0, the number of samples sampled is 1/2 compared to when it is set to p0, and the calculation short root of the calculation means 28 This is because it can be made smaller.

次に、上記実施例の如く互に近接した5個の受光部の光
電出力に重みを付して加算するフィルタ手段が、焦点検
出装置全体のMTF特性を改世できる理由を説明する。
Next, the reason why the filter means that weights and adds the photoelectric outputs of five light receiving sections close to each other as in the above embodiment can improve the MTF characteristics of the entire focus detection device will be explained.

第16図(a)は、第8図(b)、(d)において説明
した先願に係る焦点検出装置のフィルタ手段囃独のへM
TF特性を示すもので、実線(A)は、第15図(b)
に示す如く隣接する2受光部の光電出力に互に等しい重
みW1、W2を掛けて加算するフィルタ手段のMTFを
、破線(B)は第16図(C)こ示す如く一個置きに隣
接する2受光部の光電出力に互に符号の異なる重みW1
、W3を掛けて加算するフィルタ手段のMTFを夫々示
す。一つて同図の重みW2は零である。第14図(a)
は上記実施例のフィルタ手段、則も近接する5個の受己
部の光電出力を第14図(b)に示す重みW1〜W5を
掛けて加算するフィルタ手段単独のMTF特性を示す。
FIG. 16(a) shows the filter means of the focus detection device according to the prior application explained in FIGS. 8(b) and 8(d).
The solid line (A) shows the TF characteristics, and the solid line (A) is shown in Fig. 15 (b).
As shown in FIG. 16(C), the broken line (B) indicates the MTF of the filter means which multiplies the photoelectric outputs of two adjacent light receiving sections by mutually equal weights W1 and W2 and adds them. Weights W1 with different signs for the photoelectric outputs of the light receiving sections
, W3, and the MTF of the filter means to be multiplied and added. First, the weight W2 in the figure is zero. Figure 14(a)
14 shows the MTF characteristic of the filter means of the above embodiment, in which the photoelectric outputs of five adjacent receivers are multiplied by the weights W1 to W5 shown in FIG. 14(b) and added.

これらのフィルタ手段のMTFは、空間周波数1/2p
0に関して対称な形となり又1/p0の周期関数となる
。光用に係るフィルタ手段のMTF(A)、(B)は第
13図(a)に示す如くいずれも空間占波数1/2p0
で局所的に零になるか、そこから高周波側及び低周波側
で直ちに立ち上がる特刊であるのに対し、第14図(a
)の本実施例のフィルタ手段のMTFは、周波数1/2
p0を中心とした広い周波数帯域l0具体的には1/4
p0〜3/4p0にわたって充分小さく抑制されている
。周波数1/2p0より高い周波数域について、第16
図(a)と第14項(a)のMTF特性を比較すると、
第13図(a)のMTFは、周波数1/4p0よりわず
かに高い周波数についてかなり多くの抽出効率を有する
ので、受光部のMTFが第8図(a)に示す特性であっ
ても、受光部とフィルタ手段との合成MTFは第8図(
b)、(d)の如く大きな第2ピークが残存する。他方
、本実施例のみ高い抽出効率を有するが、この領域では
受光部MTFは第8図(a)に示す如く充分小さくなっ
ているので、合成MTFは第12図の如く、第2ピーク
は実質的に無視し得る程小さくなっている。
The MTF of these filter means is the spatial frequency 1/2p
It has a symmetrical shape with respect to 0 and is a periodic function of 1/p0. The MTFs (A) and (B) of the filter means for light are both spatial wave numbers 1/2p0 as shown in FIG. 13(a).
In contrast to the special issue where the voltage locally becomes zero at
) of the filter means of this embodiment is frequency 1/2
Wide frequency band l0 centered on p0 Specifically 1/4
It is suppressed to a sufficiently small value over p0 to 3/4p0. For the frequency range higher than frequency 1/2p0, the 16th
Comparing the MTF characteristics in Figure (a) and Section 14 (a),
Since the MTF of FIG. 13(a) has a considerably high extraction efficiency for frequencies slightly higher than the frequency 1/4p0, even if the MTF of the light receiving section has the characteristics shown in FIG. 8(a), the light receiving section The composite MTF of and filter means is shown in Figure 8 (
Large second peaks remain as shown in b) and (d). On the other hand, only this example has a high extraction efficiency, but in this region, the light receiving part MTF is sufficiently small as shown in FIG. 8(a), so the composite MTF is as shown in FIG. 12, and the second peak is substantially small. It is so small that it can be ignored.

以上の対比から明らかなように、本実施例のフイルタ手
段はそのMTFが周波数1/2p0を中心に広い周波数
帯域にわたって充分小さくなっているので、受光部のM
TF特性と相俟って、誤検出を惹起する高い空間周波数
成分を充分抑制できる。
As is clear from the above comparison, the MTF of the filter means of this embodiment is sufficiently small over a wide frequency band centered on the frequency 1/2p0, so the MTF of the light receiving section is
Together with the TF characteristics, high spatial frequency components that cause false detection can be sufficiently suppressed.

第15図(a)〜第19図(a)は、夫々本発明の別の
フィルタ手段のMTF特性を示し、第15図(b)〜第
19図(b)は、それらの重みを示す。
15(a) to 19(a) respectively show the MTF characteristics of other filter means of the present invention, and FIGS. 15(b) to 19(b) show their weights.

第15図(a)のフィルタ手段は、4個の重みW1〜W
4を用いるもので、周波数1/2p0を中心とするMT
F抑制帯域l0は3/8p0〜5/8p0となる。この
フィルタ手段は第14図のフィルタ手段よりもMTF抑
制帯域l0が狭くなっているが、第13図のフィルタ手
段よりは大幅に広く、受光部のMTF特性と共に周波数
1/2p0以上の高周波数成分をほぼ満足できる程度に
抑制できる。またサンプリングピッチnp0を2p0と
した時、ナイキスト周波数は1/4p0となり、これ以
上の周波数帯域1/4p0〜1/2p0の空間周波数成
分もわずかに抽出するが、この程度の量は光像の変位検
出に大きな悪影巻を及ぼさず許容できる。しかしサンプ
リングピッチを2p0とした時は、MTF抑制帯域l0
を第14図(a)又は第16図(a)〜第19図(a)
の如く、1/4p0〜3/4p0以上に広く定めること
が望ましい。第16図のフイルタ手段は、MTF抑制帯
域l0が1/8p0〜7/8p0と広いので、ナイキス
ト周波数を1/2p0と定めることは有効な空間周波数
成分1/8p0〜1/2p0を余りにも多く抑制し過ぎ
る為、好ましくなく、ナイキスト周波数が1/4p0又
は1/8p0となる様にサンプリング周期を選定するこ
とが望ましい。
The filter means in FIG. 15(a) uses four weights W1 to W.
4, and the MT centering on the frequency 1/2p0
The F suppression band l0 is 3/8p0 to 5/8p0. Although this filter means has a narrower MTF suppression band l0 than the filter means shown in FIG. 14, it is much wider than the filter means shown in FIG. can be suppressed to an almost satisfactory degree. Also, when the sampling pitch np0 is 2p0, the Nyquist frequency is 1/4p0, and a small amount of spatial frequency components in the frequency band 1/4p0 to 1/2p0 are also extracted, but this amount does not change the displacement of the optical image. It does not have a large adverse effect on detection and is acceptable. However, when the sampling pitch is 2p0, the MTF suppression band l0
Figure 14(a) or Figures 16(a) to 19(a)
It is desirable to set it broadly to 1/4p0 to 3/4p0 or more, as shown in FIG. In the filter means of FIG. 16, the MTF suppression band l0 is wide from 1/8p0 to 7/8p0, so setting the Nyquist frequency to 1/2p0 means that the effective spatial frequency components 1/8p0 to 1/2p0 are too large. This is not preferable because it suppresses too much, and it is desirable to select the sampling period so that the Nyquist frequency is 1/4p0 or 1/8p0.

本発明のフィルタ手段が具備すべき条件は以下の通りで
ある。即ち零でない重みの数は4個以上であり、そのM
TF特性が少なくとも、3/8p0から5/8p0まで
の周波数帯域l0において充分小さく、その周波数帯域
の下限からそれより小さい所定周波数まで徐々に増大す
ることである。重みが4個より少ないと、上記周波数帯
域l0を得ることが困難であり、周波数帯域l0が上記
範囲より狭いと受光部のMTF特性による1/2p0以
上の周波数成分の抑制が極めて困難となる。サンプリン
グピッチnp0のnが2以上である場合には、上記周波
数帯域l0が3/4np0〜(1/p0−3/4np0
)以上であることが必要であり、望ましくは1/2np
0〜(1/p0−1/2np0)以上であるとよい。上
記周波数帯域l0の下限3/4np0はこの時のナイキ
スト周波数1/2np0の3/2倍に相当し、この下限
を上記値3/4np0より大きくすると、ナイキスト周
波数からこの下限値までの空間周波数成分の悪影響を実
質的に無視し得なくなる。
The conditions that the filter means of the present invention should satisfy are as follows. In other words, the number of non-zero weights is 4 or more, and the M
The TF characteristic is sufficiently small at least in the frequency band l0 from 3/8p0 to 5/8p0, and gradually increases from the lower limit of the frequency band to a predetermined frequency smaller than that. When the number of weights is less than 4, it is difficult to obtain the above frequency band 10, and when the frequency band 10 is narrower than the above range, it becomes extremely difficult to suppress frequency components of 1/2p0 or more by the MTF characteristics of the light receiving section. When n of the sampling pitch np0 is 2 or more, the frequency band l0 is 3/4np0 to (1/p0 - 3/4np0
) or more, preferably 1/2np
It is good if it is 0 to (1/p0-1/2np0) or more. The lower limit 3/4np0 of the frequency band l0 above corresponds to 3/2 times the Nyquist frequency 1/2np0 at this time, and if this lower limit is made larger than the above value 3/4np0, the spatial frequency component from the Nyquist frequency to this lower limit value The negative effects of this can no longer be ignored.

第10図の一方のセンサ22Aの一連の光電出力a1、
a2、・・・と、他方のセンサ22Bの一連の光電出力
b1、b2、・・・とが同一の出力端子から、a1、b
1、a2、b2、・・・の如く交互に出力される場合に
適したフィルタ手段を第20図に示す。
A series of photoelectric outputs a1 of one sensor 22A in FIG.
a2, . . . and a series of photoelectric outputs b1, b2, . . . of the other sensor 22B are output from the same output terminal.
FIG. 20 shows a filter means suitable for outputting signals alternately such as 1, a2, b2, . . . .

S個の乗算器W1〜W5とm個の遅延回路D1〜Dmが
使用され、隣接する乗算器W1とW2、W2とW3・・
・との間に遅延回路D1〜Dmが2個介在している。そ
の他の構成は第11図(a)と同一である。
S multipliers W1 to W5 and m delay circuits D1 to Dm are used, and adjacent multipliers W1 and W2, W2 and W3...
Two delay circuits D1 to Dm are interposed between . The other configurations are the same as in FIG. 11(a).

この構成によりフィルタ手段30は、センサ22Aの一
連の光電出力a1、a2・・・・・・とセンサ22Bの
一連の光電出力b1、b2、・・・・・・とを交互にフ
ィルタリングする。
With this configuration, the filter means 30 alternately filters the series of photoelectric outputs a1, a2, . . . of the sensor 22A and the series of photoelectric outputs b1, b2, . . . of the sensor 22B.

以上の説明では、フィルタ手段のMTF特性が、サンプ
リングピッチにより決まるナイキスト周波数以上の周波
数領域において具備すべき条件を述べたので、次にナイ
キスト周波数以下の領域において具備することが望まし
い条件を説明する。
In the above description, the conditions that the MTF characteristic of the filter means should satisfy in the frequency range above the Nyquist frequency determined by the sampling pitch will be described. Next, the conditions that it is desirable to have in the frequency range below the Nyquist frequency will be explained.

第21図のグラフは、横軸が一対の受光部アレイ上の光
像の相対的ずれ風を表し、縦軸が焦点検出装置により検
出された像ずれ検出量を表し、実線(A)は像ずれ量と
検出量とが一致した理想的な状態を示す。一点鎖線(B
)及び破絞(C)は従来の焦点検出装部の検出状態を示
し、両線(B)、(C)は実線(A)とサンプリングピ
ッチpの整数倍の所で交わっており、光像のずれ量がサ
ンプリングピッチpの整数倍に等しい時はそれを正確に
検出するが、整数倍に等しくない時にはそれを正値に検
出できず誤差を含むことを表わしている。この様な誤差
は、像ずれ検出演算に使用する周波数成分中にナイキス
ト周波数以上の成分をも含まれている事により生ずるこ
とはもちろんのこと、たとえナイキスト周波数以下の周
波数成分のみを用いた場合にも生ずる。この理由は、ナ
イキスト周波数fN以下の周波数帯域fN/2〜fNの
うちナイキスト周波数fNの近傍においては、第6図に
おいて例示した如く、光像の変位に対する光東出力バタ
ーンの位相変化は滑らかさを著く欠くからである。この
様な理由により、周波数帯域fN/2〜fN内のナイキ
スト周波数fN近傍の周波数成分を焦点検出に使用する
と、第21図(a)に示す如くサンプリングピンチの整
数倍に等しくない光像のずれ量に対しては誤差が増大す
ることになる。上記同波数帯域fN/2〜fNにおける
光電出力パターンの位相変化の非円府外は、この帯域内
で周波原が大きい稈著しい。従って、フィルタ手段の、
ナイキスト周波数程度以下のMTF和性は第22図(a
)の如く、ナイキスト周波数fN近傍において充分小さ
く、そこから周波数の減小に伴い漸増し、ほぼ周波数f
N/2より小さい周波数において充分大きくなることが
望ましい。このMTFが充分大きな値をとるのは、上述
の如く周波数fN/2程度以下であるべきであるが、情
報の有効利用を考号すると、周波数帯波約fN/2〜約
fN/4内であることが好ましい。第22図(b)の更
新は、MTFが周波影fN/4で充分大きくなる例を示
している。上記二つのMTF特性曲線は、その漸増を開
始する魚卵も立上り点がナイキスト周波数近傍であった
が、この点は多少高周波側にずらしてもよく、逆に低周
波側にずらしてもよい。この低周波側へのすらし情を大
きくする程、上記光電出方パターンの位相変化の非円滑
性を呈する周波数帯域fN/2〜fN内の周波数成分を
より多く除去できる利点が生ずるが、同時に、有効な情
報をも一層多く除去してしまうという問題も招来する。
In the graph of FIG. 21, the horizontal axis represents the relative deviation of the optical images on the pair of light receiving arrays, the vertical axis represents the amount of image deviation detected by the focus detection device, and the solid line (A) represents the image deviation. This shows an ideal state in which the amount of deviation and the amount of detection match. Dot-dashed line (B
) and broken aperture (C) indicate the detection state of the conventional focus detection device, and both lines (B) and (C) intersect with the solid line (A) at an integral multiple of the sampling pitch p, and the optical image When the amount of deviation is equal to an integral multiple of the sampling pitch p, it is detected accurately, but when it is not equal to an integral multiple, it cannot be detected as a positive value, indicating that it contains an error. Such errors occur not only because the frequency components used for image shift detection calculations include components higher than the Nyquist frequency, but also when only frequency components lower than the Nyquist frequency are used. Also occurs. The reason for this is that in the frequency band fN/2 to fN below the Nyquist frequency fN, in the vicinity of the Nyquist frequency fN, the phase change of the Koto output pattern with respect to the displacement of the optical image is smooth. This is because it is severely lacking. For these reasons, if a frequency component near the Nyquist frequency fN within the frequency band fN/2 to fN is used for focus detection, a shift in the optical image that is not equal to an integral multiple of the sampling pinch will occur, as shown in Figure 21(a). The error will increase with respect to the amount. The non-circular phase change of the photoelectric output pattern in the above-mentioned same wave number band fN/2 to fN is significant because the frequency field is large within this band. Therefore, of the filter means,
The MTF compatibility below the Nyquist frequency is shown in Figure 22 (a
), it is sufficiently small near the Nyquist frequency fN, and increases gradually as the frequency decreases until it reaches approximately the frequency f
It is desirable that it be sufficiently large at frequencies smaller than N/2. As mentioned above, this MTF should take a sufficiently large value at a frequency of about fN/2 or less, but when considering the effective use of information, it should take a sufficiently large value for a frequency band of about fN/2 to about fN/4. It is preferable that there be. The update in FIG. 22(b) shows an example in which the MTF becomes sufficiently large with a frequency shadow of fN/4. In the above two MTF characteristic curves, the rising point of the fish eggs that start increasing gradually is near the Nyquist frequency, but this point may be shifted somewhat to the high frequency side or, conversely, to the low frequency side. The greater the smoothness toward the low frequency side, the more frequency components within the frequency band fN/2 to fN exhibiting the non-smooth phase change of the photoelectric output pattern can be removed. , this also brings about the problem that even more valid information is removed.

そこで、上記非円滑性周波数成分の除去と有効情報の除
去とを考慮すると、MTFの上記立上り点の下限周波数
としては第22図(b)の一点鎖線で示す如く、約fN
/2とすることが望ましい。この一点鎖線で示したMT
Fは約fN/2以上の周波数領域において充分小さく、
その周波数fN/2付近から低周波側に漸増し、fN/
4伺近で充分に大きくなっているため、上記非円滑性周
波数帯域の周波数成分を実質的にすべて除去できる。
Therefore, considering the removal of the non-smooth frequency components and the removal of effective information, the lower limit frequency of the rise point of the MTF is approximately fN, as shown by the dashed line in FIG. 22(b).
/2 is desirable. MT indicated by this dashed line
F is sufficiently small in the frequency range of about fN/2 or higher,
The frequency gradually increases from around fN/2 to the low frequency side, and fN/
Since it is sufficiently large near 4, substantially all of the frequency components in the non-smooth frequency band can be removed.

尚、第22閉(a)の如きMTF特性を有するフィルタ
手段は、第17図(b)に示した重み数値を用いること
により得ることができる。即ちサンプリンクピッチを2
p0とすると、ナイキスト周波数fNは1/4p0とな
り、第17図(a)のMTFはこのナイキスト周波数f
N付近から立上り、周波数fN/2(=1/8p0)ま
で漸増し、その周波数fN/2で充分大きくなり、そこ
から周波数零までほぼ一定となっており、第22図(a
)のMTF特性とほぼ同一となる。
Incidentally, the filter means having the MTF characteristic as shown in FIG. 17(b) can be obtained by using the weighting values shown in FIG. 17(b). In other words, the sampling link pitch is 2.
If p0, the Nyquist frequency fN is 1/4p0, and the MTF in FIG. 17(a) is based on this Nyquist frequency f.
It rises from around N, gradually increases up to frequency fN/2 (=1/8p0), becomes sufficiently large at that frequency fN/2, and remains almost constant from there until frequency zero, as shown in Figure 22 (a).
) is almost the same as the MTF characteristic.

同様に、第22図(b)の実線のMTF特性は、近似的
に第14図のフィルタ手段により達成できる。
Similarly, the MTF characteristic indicated by the solid line in FIG. 22(b) can be approximately achieved by the filter means in FIG. 14.

この第14図(a)のMTF特性はサンプリングピッチ
を2p0としたときのナイキスト周波数fN=1/4p
0から、その1/4の周波数fN/4(=1/16p0
)付近まで漸増し、そこで充分大きくなっている。第2
2図(b)の一点鎖線のMTF特性は、ナイキスト周波
数を1/2p0とした場合の第17図(a)の特性に相
当する。
The MTF characteristic in Fig. 14(a) is the Nyquist frequency fN = 1/4p when the sampling pitch is 2p0.
0 to 1/4 frequency fN/4 (=1/16p0
), where it becomes sufficiently large. Second
The MTF characteristic indicated by the dashed line in FIG. 2(b) corresponds to the characteristic in FIG. 17(a) when the Nyquist frequency is set to 1/2p0.

焦点検出光学系の特性により光像の一部がケラレたり、
又は一対の光電素子アレイの増幅率か不均一である等の
原因により、像ずれ検出栽を表わす直線が、第21図(
b)に示す如く、平行移動し、座標の原点を通過せず、
焦点検出に誤差か生ずる。
Due to the characteristics of the focus detection optical system, part of the optical image may be vignetted,
Or, due to reasons such as non-uniform amplification factors of a pair of photoelectric element arrays, the straight line representing the image shift detection line may be
As shown in b), it moves in parallel and does not pass through the origin of the coordinates,
An error occurs in focus detection.

この誤差を除去する為には、周波数零付近の低次の空間
周波数成分を抑制すればよい。即ち、フィルタ手段のM
TFを上記低次空間周波数付近な低下させればよい。そ
こで、上誤差を低減させる為のフィルタ手段のMTF特
性は、第22図(c)及び(d)に示す如く、ナイキス
ト周波数fN近傍以上の周波数領域において充分小さく
、fN/4〜fN/2付近でピークとなり、低次空間周
波数側で漸減する。このような誤差低減の効果をもたら
すためには、この周波数零付近におけるMTFは、実線
又は一点鎖線で示す如くピークのけは1/2以下とする
ことが望ましい。これらの第22図(c).(d)に実
線で示したMTF特性は、近似的に第18図のフィルタ
手段により、また一点鎖線で示したMTF特性は、近似
的に第19図のフィルタ手段により夫々得られる。
In order to eliminate this error, it is sufficient to suppress low-order spatial frequency components near zero frequency. That is, M of the filter means
It is sufficient to reduce the TF to around the above-mentioned low-order spatial frequency. Therefore, as shown in FIGS. 22(c) and 22(d), the MTF characteristic of the filter means for reducing the above error is sufficiently small in the frequency region near the Nyquist frequency fN or higher, and near fN/4 to fN/2. It peaks at , and gradually decreases at lower spatial frequencies. In order to bring about such an effect of reducing errors, it is desirable that the peak offset of the MTF near zero frequency is set to 1/2 or less, as shown by a solid line or a dashed-dotted line. These Figure 22(c). The MTF characteristics shown by the solid line in (d) can be approximately obtained by the filter means of FIG. 18, and the MTF characteristics shown by the dashed-dotted line can be approximately obtained by the filter means of FIG. 19.

第14図〜第19図から分るように、本発明のきなピー
クを有するので、受光部のMTFは同周波数1/p0付
近で充分小さいことが望ましい。しがしながら、従来の
受光部MTFはその付近で充分小さいものとは言えなか
った。これを詳述すると、第26図(a)に示したピッ
チp0で配列された軸p0の矩形光電変換部PTのMT
Fは第24図(a)の実線(A)で示す特性を有し、第
26図(b)に示したピッチp0で配列された幅0.8
p0の蛙形光電変換部PTのMTFは第24図(b)の
一点鎖線(B)の特性を有し、ピッチp0で配列された
直径0.8p0の小レンズのMTFは第24図(b)の
破線(C)の特性を有する。尚、第24図(b)におい
てダブルハツチング31は隣接光電変換部PTの間の間
隙である。これらの従来の受光部のMTF特性(A)、
(B)、(C)のうち(A)は周波数1/p0で零であ
るか、その近傍例えば0.9/p0で0.109とかな
り大きくなり、特性(B)、(C)は周波数1/p0で
すら大きな値を示している。
As can be seen from FIGS. 14 to 19, since the present invention has a large peak, it is desirable that the MTF of the light receiving section is sufficiently small near the same frequency 1/p0. However, the conventional light receiving section MTF could not be said to be sufficiently small in this vicinity. To explain this in detail, the MT of the rectangular photoelectric conversion unit PT of the axis p0 arranged at the pitch p0 shown in FIG. 26(a)
F has the characteristics shown by the solid line (A) in FIG. 24(a), and has a width of 0.8 arranged at the pitch p0 shown in FIG. 26(b).
The MTF of the frog-shaped photoelectric conversion unit PT with p0 has the characteristics shown by the dashed-dotted line (B) in FIG. ) has the characteristics shown by the broken line (C). Note that in FIG. 24(b), double hatching 31 is a gap between adjacent photoelectric conversion parts PT. MTF characteristics (A) of these conventional light receiving sections,
Among (B) and (C), (A) is zero at the frequency 1/p0, or is quite large at a frequency of 1/p0, for example 0.109 at 0.9/p0, and the characteristics (B) and (C) are Even 1/p0 shows a large value.

そこでMTFを1/p0付近で充分小さくした受光部を
以下に説明する。
Therefore, a light receiving section in which the MTF is sufficiently small around 1/p0 will be described below.

第25図(a)はCCD受光部アレイの断面図を示し、
32はポリシリコン電極、33は二酸化シリコン膜、3
4は受光部を区画するチャンネルストッパ、35はシリ
コン基板であり、点線はポテンシャルの井戸を示す。チ
ャンネルストッパ34に入射した光により発生した電荷
は、隣接するポテンシャルの井戸の両方に流れ込むので
、個々の光電変換部の感度分布は、第25図(b)に示
す如く台形となる。uはこの台形の半値幅であり、vは
台形の斜辺の幅でチャンネルストッパのx方向の長さに
相当する。この様な台形状の感度分布は、上記受光部構
造に限ることなく、第26図(a)、(b)の如き光電
変換部PTをその配列方向xに対して傾斜させても得る
ことができる。この光電変換部PTの、配列方向の幅を
u、隘接光宙変換部の境界の、x方向への投影長をvと
すると、この感度分布は、第26図(c)に示す如く台
形となり、この台形の半値幅と斜辺の幅は夫々上記値u
とvの大きい方及び小さい方である。第25図(b)又
は第26図(c)の如き台形の感度分布な有する受光部
のMTFは、u=p0、v=0.5p0とした時、u=
p0、v=0.7p0の時、夫々第24図(C)の一点
鎖線(D)、二点鎖線(E)となり、u=v=p0の時
、第24図(d)の三点鎖線(F)となる。また第26
図(a)、(b)の如く光電変換部を#斜させた場合に
は、vを光電変換部ピッチp0よりも大きく設定するこ
とができ、例えばu=p0、v=1,33p0とするこ
とができる。この値における受光部MTFを節24図(
d)の破線(G)に示す。これらの本発明に係る受光部
のMTF特性(D)、(E)、(F)、(G)はいずれ
も周波数1/p0で零となり、それらのうち特性(D)
、(E)は周波数0.91/p0においてピークの0.
1以下であり、特性(F)、(G)は、周波数0.8/
p0においてすら0.1以下となっており、第24図(
a)(b)の従来の受光部MTF(A)、(B)、(C
)に比べて周波数1/p0付近において著しく抑制され
ていることが分る。
FIG. 25(a) shows a cross-sectional view of the CCD light receiving part array,
32 is a polysilicon electrode, 33 is a silicon dioxide film, 3
4 is a channel stopper that partitions the light receiving section, 35 is a silicon substrate, and dotted lines indicate potential wells. Since charges generated by light incident on the channel stopper 34 flow into both adjacent potential wells, the sensitivity distribution of each photoelectric conversion section becomes trapezoidal as shown in FIG. 25(b). u is the half width of this trapezoid, and v is the width of the hypotenuse of the trapezoid, which corresponds to the length of the channel stopper in the x direction. Such a trapezoidal sensitivity distribution can be obtained not only by the above-mentioned light receiving part structure but also by tilting the photoelectric conversion parts PT with respect to the arrangement direction x as shown in FIGS. 26(a) and 26(b). can. If the width of this photoelectric conversion part PT in the arrangement direction is u, and the projected length in the x direction of the boundary of the light-contact space conversion part is v, then this sensitivity distribution will be trapezoidal as shown in FIG. 26(c). The half width and the width of the hypotenuse of this trapezoid are respectively the above values u
and v are the larger and smaller ones. The MTF of a light receiving section having a trapezoidal sensitivity distribution as shown in FIG. 25(b) or FIG. 26(c) is, when u=p0 and v=0.5p0, u=
When p0, v=0.7p0, the dashed-dotted line (D) and dashed-dot line (E) in FIG. 24(C), respectively, and when u=v=p0, the dashed-three-dot line in FIG. 24(d). (F). Also the 26th
When the photoelectric conversion section is tilted # as shown in Figures (a) and (b), v can be set larger than the photoelectric conversion section pitch p0, for example, u=p0, v=1,33p0. be able to. The MTF of the light receiving section at this value is shown in Section 24 (
Indicated by the dashed line (G) in d). These MTF characteristics (D), (E), (F), and (G) of the light receiving section according to the present invention all become zero at frequency 1/p0, and among them, the characteristic (D)
, (E) has a peak of 0.91/p0 at a frequency of 0.91/p0.
1 or less, and the characteristics (F) and (G) are frequency 0.8/
Even at p0, it is less than 0.1, as shown in Figure 24 (
Conventional light receiving section MTF of a) (b) (A), (B), (C
), it can be seen that it is significantly suppressed near the frequency 1/p0.

尚、この様なMTF特性は、第27図(a)に示す如き
受光部形状によっても達成することができる。この受光
部は複数列、具体的には第1〜第4の小レンズアレイ3
6、37.38、39がら成り第2と第4小レンズアレ
イ37.39の小レンズ配列は第1と第3小レンズアレ
イ36.38に対して所定量、具体的にはp0/2だけ
ずれている。これらの各小レンズアレイは第2図の小レ
ンズアレイと同一構成で、各小レンズは図では左端に位
置する小レンズにのみ示した如く一対の光電素子PT1
、PT2を有する。各小レンズアレイにおいて、位置的
に対応する小レンズの一対の光電素子の対応する光電素
子同士PT1とPT1、PT2とPT3が導体40によ
り接続されている。この導体40は、接続した光電素子
の出力を合成する働きをするものであるから、この導体
の代りに、各小レンズアレイ毎に光電素子の出力を読み
出した後に、対応する出力同士を加算するようにしても
よい。この様な構成においては、各受光部は各小レンズ
アレイの位置的に対応する四つの小レンズから成り、こ
の受光部の感度分布は第27図(b)に示す特性となる
Incidentally, such MTF characteristics can also be achieved by the shape of the light receiving section as shown in FIG. 27(a). This light receiving section has multiple rows, specifically, the first to fourth small lens arrays 3.
6, 37, 38, and 39, the small lens arrays of the second and fourth small lens arrays 37, 39 have a predetermined amount, specifically, p0/2, with respect to the first and third small lens arrays 36, 38. It's off. Each of these small lens arrays has the same configuration as the small lens array shown in FIG.
, has PT2. In each small lens array, corresponding photoelectric elements PT1 and PT1 and PT2 and PT3 of a pair of positionally corresponding small lenses are connected by a conductor 40. This conductor 40 serves to combine the outputs of the connected photoelectric elements, so instead of using this conductor, after reading out the outputs of the photoelectric elements for each small lens array, the corresponding outputs are added together. You can do it like this. In such a configuration, each light receiving section is composed of four small lenses corresponding in position to each small lens array, and the sensitivity distribution of this light receiving section has the characteristics shown in FIG. 27(b).

この感度分布特性を適宜設定することにより、第24図
(c)、(d)のMTF特性を得ることができる。
By appropriately setting this sensitivity distribution characteristic, the MTF characteristics shown in FIGS. 24(c) and 24(d) can be obtained.

以上に詳述した本発明に係る受光部は、周波数0.9/
p0以上の周波数においてMTFが0.1以下であるこ
とが必要であり、周波数0.8/p0以上の周波数にお
いて0.1以下であれば申し分ない。受光部MTFが0
.9/p0以上の周波数において0.1以下であれば、
重みを4個しか用いないMTF抑制帯域loの多少狭い
第15図のフィルタ手段を用いたとしても、それらの合
成MTFは1/p0付近の高周波成分を充分抑制した満
足できるものとなる。また、受光部MTFが0.8/p
0以上の周波数において0.1以下であれば、本願に係
るフィルタ手段との合成MTFはもちろんのこと、先願
に係る第13図のフィルタ手段との合成MTFも充分満
足のいくものとなる。
The light receiving section according to the present invention detailed above has a frequency of 0.9/
It is necessary that the MTF is 0.1 or less at frequencies above p0, and it is satisfactory if it is 0.1 or below at frequencies above 0.8/p0. Light receiving part MTF is 0
.. If it is 0.1 or less at a frequency of 9/p0 or more,
Even if the filter means of FIG. 15, which uses only four weights and has a somewhat narrow MTF suppression band lo, is used, the combined MTF will be satisfactory, sufficiently suppressing high frequency components around 1/p0. In addition, the light receiving part MTF is 0.8/p
If it is 0.1 or less at a frequency of 0 or more, not only the composite MTF with the filter means according to the present application but also the composite MTF with the filter means of FIG. 13 according to the prior application will be sufficiently satisfactory.

又、先願のフィルタ手段以外にも6項以下の重み数値で
決まる例えばW1=1、W2=0、W3=−0.5とか
、W1=0,3、W2=0、W3=1、W4=0、W5
=−0.3といったフィルタに対してもほぼ満足のいく
ものとなる。更に、第24図(d)の破線(G)の如く
周波数0.7/p0以上の周波数においてMTFが0.
1以下である受光部は、これ単独で高周波成分抑制用フ
ィルタ手段を設けなくてもよい程に、周波数1/2p0
以上の空間周波数成分を抑制している。
In addition, in addition to the filter means of the earlier application, weight values determined by six terms or less, such as W1 = 1, W2 = 0, W3 = -0.5, W1 = 0, 3, W2 = 0, W3 = 1, W4 =0, W5
It is almost satisfactory even for a filter such as =-0.3. Furthermore, as shown by the broken line (G) in FIG. 24(d), the MTF is 0.7/p0 or higher at frequencies above 0.7/p0.
1 or less, the light receiving section has a frequency of 1/2p0, which is so high that it is not necessary to provide a filter means for suppressing high frequency components by itself.
The above spatial frequency components are suppressed.

また、上記実施例は焦点検出装置に関するものであるが
本発明はそれに限ることなく、伸の光像検出装置にも連
用できるものである。
Further, although the above embodiment relates to a focus detection device, the present invention is not limited thereto, and can also be applied to a light image detection device of Shin.

(発明の効果) 本発明によると、受光部アレイの互に近接した4以上の
受光部の光電出力に夫々所定の重みを付して加算した加
勢出力を、ピッチnp0毎に作成する第1手段と、上記
加算出力から、受光部アレイ上の光像の状態を検出する
検出手段とを具備し、第1手段はそのフィルタ特性を表
わすMTFが少なくとも空間周波数3/8p0から5/
8p0までの周波数帯域において充分小さく、この周破
数帯域の下限からそれより小さい所定空間周波数まで徐
々に増大し所定空間周波数で充分大きくなる様に定めら
れているので、ナイキスト周波数以上の空間周波数成分
を十分に除去でき、高精度の検出が可能である。
(Effects of the Invention) According to the present invention, the first means generates, for each pitch np0, an auxiliary output obtained by adding a predetermined weight to the photoelectric outputs of four or more adjacent light receiving sections of the light receiving section array. and a detection means for detecting the state of the optical image on the light receiving array from the addition output, and the first means has an MTF representing a filter characteristic of at least a spatial frequency of 3/8p0 to 5/8p0.
It is set to be sufficiently small in the frequency band up to 8p0, gradually increase from the lower limit of this frequency band to a predetermined spatial frequency smaller than that, and become sufficiently large at the predetermined spatial frequency, so that the spatial frequency component above the Nyquist frequency can be sufficiently removed, allowing highly accurate detection.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a)、(b)は従来の焦点検出装置の光学系を
示す光学図とその受光部の正面図、第2図は別の従来の
焦点検出装置の第1図(a)、(b)と同様の図、第3
図は受光部アレイを示す正面図、第4図乃至第7図は、
受洸部アレイ上の光像の変位とそのときの光電用力バタ
ーンとを夫々示す説明図、第8図(a)は、受光部のM
TF特性を第8図(b)乃至(d)は、先願に係る焦点
検出装置のMTF特性を夫々示すグラフ、第9図は本発
明の一実施例の焦点検出装置の光学系を示す斜視図、第
10図は、上記実施例の電気処理系を示すブロック図、
第11図(a)及び(b)は夫々トランスバーサルフィ
ルタを示すブロック図と回路図、第12図(a)及び(
b)は夫々本発明のフィルタ手段の一例のMTF特性と
重み数値を示すグラフ、第16図(a)、(b)、(c
)は先願に係るフィルタ手段のMTF特性とその重み数
値とを夫々示すグラフ、第14図(a)、(b)乃至第
19図(a)、(b)は夫々本発明に係るフィルタ手段
のMTF特性と重み数値とを示すグラフ、第20図はト
ランスパーサルフィルタの別の構成例を示すブロック図
、第21図(a)及び(b)は光像の変位量とその検出
量との関係を示すグラフ、第22図(a)乃至(d)は
、本発明に係るフィルタ手段のMTF特性を示すグラフ
、第23図(a)乃至(c)は従来の受光部アレイを示
す正面図、第24図(a)及び(b)は夫々第25図の
受光部のMTFを、第24図(c)及び(d)は本発明
に係る受光部のMTFを夫々示すグラフ、第25図乃至
第27図は、第24図(c)と(d)のMTFを与える
受光部とその感度分布とを示す説明図である。 1・・・結像光学系、26・・・フィルタ子役28・・
・演算手段、PT・・・克重茶手出願人 日本光学工業
株式会社 代理人 渡辺隆男 2″3図 j (C)11Fml、q汁で (d)7td>ト七「 才 (F)耐口白1址穎 2−5図 fc)―掬j(C)4杢し cd)閤抽腸tdi叫斗会 6図 ナ 門フ lrOFO 7図 2昂   PO 〒q図 f110図 22B    21B     778771図 δ8 才1?図 L−1−”−a− Σl−■            Σト匡L4−.  
                   −  ’−オ
?3図 ヤ240 墾り 才25図 (6) 六26厘 オ27囚 (A、)
FIGS. 1(a) and (b) are optical diagrams showing the optical system of a conventional focus detection device and a front view of its light receiving section. FIG. 2 is FIG. 1(a) of another conventional focus detection device. Figure similar to (b), 3rd
The figure is a front view showing the light receiving array, and FIGS. 4 to 7 are
FIG. 8(a) is an explanatory diagram showing the displacement of the optical image on the light receiving part array and the photoelectric power pattern at that time.
8(b) to (d) are graphs showing the MTF characteristics of the focus detection device according to the prior application, respectively, and FIG. 9 is a perspective view showing the optical system of the focus detection device according to an embodiment of the present invention. 10 are block diagrams showing the electrical processing system of the above embodiment,
11(a) and (b) are a block diagram and a circuit diagram showing a transversal filter, respectively, and FIG. 12(a) and (
b) are graphs showing the MTF characteristics and weighting values of an example of the filter means of the present invention, respectively, and FIGS. 16(a), (b), and (c)
) are graphs respectively showing the MTF characteristics and their weight values of the filter means according to the prior application, and FIGS. 20 is a block diagram showing another configuration example of the transpersal filter, and FIGS. 21(a) and (b) are graphs showing the displacement amount of the optical image and its detected amount. 22(a) to (d) are graphs showing the MTF characteristics of the filter means according to the present invention, and FIG. 23(a) to (c) are front views showing the conventional light receiving array. 24(a) and (b) are graphs showing the MTF of the light receiving section in FIG. 25, respectively, and FIGS. 24(c) and (d) are graphs showing the MTF of the light receiving section according to the present invention, respectively. 27A to 27C are explanatory diagrams showing the light receiving section providing the MTF of FIGS. 24(c) and 24(d) and its sensitivity distribution. 1... Imaging optical system, 26... Filter child actor 28...
・Calculating means, PT... Katsushige Chate Applicant Nippon Kogaku Kogyo Co., Ltd. Agent Takao Watanabe 2" 3 figure j (C) 11Fml, q juice (d) 7td >7" Sai (F) mouthful White 1 place 2-5 figure fc) - scoop j (C) 4 heather cd) 閤 intestine tdi shout meeting 6 figure namon full lrOFO 7 figure 2 昂 PO 〒q figure f110 figure 22B 21B 778771 figure δ8 year old 1?Figure L-1-"-a- Σl-■ ΣTo匡L4-.
− '−O? 3 figure Ya 240 Kenzai 25 figure (6) 626 Rin O 27 prisoner (A,)

Claims (4)

【特許請求の範囲】[Claims] (1)入射光強度に応じた光電出力を発生ずる受光部が
ヒソチpoの間隔て多数並袢された受光部アレイと、 該受光部アレイ上に光像な形成する結像光学系と、 互に近接した4以上の上記受光部の光電出力に夫々所定
の重みを付して加算した力字出力を、ヒリチnp0(n
は1以上の整数)毎に作成する第1手段と、 上記加算出力から上記光像の状態を検出する検出手段と
を具備し、 上記第1手段は、そのフィルタ特性を表わすMTFが少
なくとも、空間周波数3/8p0から5/8p0までの
周波数帯域において充分小さく、この周波数帯域の下限
からそれより小さい所定空間周波数まで神々に増大し該
所定空間周波数で充分大きくなる様に定められているこ
とを特徴とする光像検出装置。
(1) A light-receiving section array in which a large number of light-receiving sections that generate photoelectric output according to the intensity of incident light are lined up at intervals of a certain distance, and an imaging optical system that forms a light image on the light-receiving section array; The power output obtained by adding a predetermined weight to the photoelectric outputs of four or more light-receiving sections that are close to
is an integer greater than or equal to 1); and a detection means for detecting the state of the optical image from the addition output; It is characterized by being sufficiently small in the frequency band from 3/8p0 to 5/8p0, increasing divinely from the lower limit of this frequency band to a predetermined spatial frequency smaller than that, and becoming sufficiently large at the predetermined spatial frequency. Optical image detection device.
(2)上記周波数帯域は約1/4p0乃至3/4p0で
あることを特徴とする特許請求の範囲第1項に記載の光
像検出装置。
(2) The optical image detection device according to claim 1, wherein the frequency band is approximately 1/4p0 to 3/4p0.
(3)上記ピッチnp0のnは2以上であり上記周波数
帯域は3/4np0乃至(1/p0−3/4np0)で
あり、上記所定空間周波数は約1/4np0以下である
ことを特徴とする特許請求の範囲第1項に記載の光像検
出装置。
(3) n of the pitch np0 is 2 or more, the frequency band is 3/4np0 to (1/p0-3/4np0), and the predetermined spatial frequency is about 1/4np0 or less. An optical image detection device according to claim 1.
(4)上記周波数帯域は約1/2np0乃至(1/p0
−1/2np0)であることを特徴とする特許訂求の範
囲第6項に記載の光像検出装置。
(4) The above frequency band is approximately 1/2np0 to (1/p0
-1/2np0).
JP3501783A 1983-02-02 1983-03-03 Detector for light image Granted JPS59160109A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3501783A JPS59160109A (en) 1983-03-03 1983-03-03 Detector for light image
US06/575,154 US4561749A (en) 1983-02-02 1984-01-30 Focus detection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3501783A JPS59160109A (en) 1983-03-03 1983-03-03 Detector for light image

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2048785A Division JPH02263103A (en) 1990-02-28 1990-02-28 Optical image detecting device

Publications (2)

Publication Number Publication Date
JPS59160109A true JPS59160109A (en) 1984-09-10
JPH0554042B2 JPH0554042B2 (en) 1993-08-11

Family

ID=12430297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3501783A Granted JPS59160109A (en) 1983-02-02 1983-03-03 Detector for light image

Country Status (1)

Country Link
JP (1) JPS59160109A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4908644A (en) * 1987-03-23 1990-03-13 Asahi Kogaku Kogyo K.K. Optical filtering device and method for using the same
US5710667A (en) * 1994-03-29 1998-01-20 Olympus Optical Co., Ltd. Focus detecting optical system
WO2006129677A1 (en) * 2005-05-30 2006-12-07 Nikon Corporation Image formation state detection device
US7805067B2 (en) 2007-02-27 2010-09-28 Nikon Corporation Focus detection device for image forming optical system, imaging apparatus, and focus detection method for image forming optical system
CN105592978A (en) * 2013-08-27 2016-05-18 三菱重工工作机械株式会社 Machine tool
JP2018500598A (en) * 2014-12-22 2018-01-11 エーエスエムエル ネザーランズ ビー.ブイ. Level sensor, lithographic apparatus, and device manufacturing method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6214183B2 (en) * 2012-05-11 2017-10-18 キヤノン株式会社 Distance measuring device, imaging device, distance measuring method, and program

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5652728A (en) * 1979-09-13 1981-05-12 Honeywell Inc Device for use in automatic focusing unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5652728A (en) * 1979-09-13 1981-05-12 Honeywell Inc Device for use in automatic focusing unit

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4908644A (en) * 1987-03-23 1990-03-13 Asahi Kogaku Kogyo K.K. Optical filtering device and method for using the same
US5128706A (en) * 1987-03-23 1992-07-07 Asahi Kogaku Kogyo Kabushiki Kaisha Optical filtering device and method for using the same
US5710667A (en) * 1994-03-29 1998-01-20 Olympus Optical Co., Ltd. Focus detecting optical system
WO2006129677A1 (en) * 2005-05-30 2006-12-07 Nikon Corporation Image formation state detection device
US7745772B2 (en) 2005-05-30 2010-06-29 Nikon Corporation Image forming state detection device
US7805067B2 (en) 2007-02-27 2010-09-28 Nikon Corporation Focus detection device for image forming optical system, imaging apparatus, and focus detection method for image forming optical system
CN105592978A (en) * 2013-08-27 2016-05-18 三菱重工工作机械株式会社 Machine tool
JP2018500598A (en) * 2014-12-22 2018-01-11 エーエスエムエル ネザーランズ ビー.ブイ. Level sensor, lithographic apparatus, and device manufacturing method
US10241425B2 (en) 2014-12-22 2019-03-26 Asml Netherlands B.V. Level sensor, lithographic apparatus and device manufacturing method

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