JPS59155472A - Destaticizing paint - Google Patents

Abstract

PURPOSE:To provide the titled paint capable of forming a destaticizing film which is transparent and is difficultly peeled when applied to equipment members requiring antistatic properties, by dispersing fine transparent metal oxide particles having sharp protrusions in an org. high-molecular binder. CONSTITUTION:At least 65wt% fine transparent metal oxide particles (e.g. fine tin oxide particles) having sharp protrusions and low electrical resistance are incorporated in an org. high-molecular binder to obtain a destaticizing paint. When a transparent member 1 such as a cover for semiconductor manufacturing equipment is coated with said paint to form a film, part of the fine transparent metal oxide particle 2 is protruded from the surface of the org. high-molecular binder 3 and static charge is eliminated by discharge phenomenon at the tops of the protrusions. When the thickness of the film is 10mu or below, the light transmissibility of the transparent member 1 such as cover is not reduced.

Description

【発明の詳細な説明】 本発明は、静電気除去塗料に係９．特に半導体製造工場
等で使用され、帯電防止を必要とする設備部材等に塗布
される静電気除去塗料に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a static electricity removing paint. In particular, the present invention relates to static electricity removal paint used in semiconductor manufacturing factories and the like, and applied to equipment members that require antistatic properties.

従来、帯電防止を必要とするこの種の部材は。Conventionally, this type of member required anti-static properties.

電気抵抗値の低いカーボン粉末をプラスチック材に練込
んだものが開発されてきたが、透明性が損われるために
、薄いシート状のポリエチレンフィルム上に蒸着法、ま
たはスパッタリング法等によシ金属膜を付けたものや、
界面活性剤を含ませた溶液を噴霧させて使用するもの等
が製品化されている。しかしながら金属膜を付けた製品
は、シート状に作られており、これを静電気除去を必要
とする材料に貼シ付けて使用するため、複雑な形状をし
たものには施工時の気泡の巻き込み防止に熟練を要し施
工物の形状が限定される問題があった。Plastic materials have been developed in which carbon powder with low electrical resistance is kneaded into plastic materials. or those with
Products that are used by spraying a solution containing a surfactant have been commercialized. However, products with metal films are made in sheet form and are used by pasting them onto materials that require static electricity removal, so they can be used to prevent air bubbles from getting caught during construction on products with complex shapes. There was a problem that required skill and limited the shape of the construction object.

また界面活性剤を含ませた溶液状のものは、帯電防止剤
と称して製品化されている。これはカチオン界面活性剤
やノニオン界面活性剤を水や溶剤に混合したものであり
、疎水基が当該静電気除去材（プラスチック材）側に、
また親水基が外側に配置されて表面に露出された形にな
り、ここから放電させて除電するようにしたものである
。しかしながら、界面活性剤自体、当該静電気除去材に
対して１機械的保持力が弱いため、布１合成皮革等で拭
いただけで落ちたり、水、溶剤に溶けだすために、対象
物によってはメンテナンスが著しく困難な問題があった
。Moreover, a solution containing a surfactant is commercialized as an antistatic agent. This is a mixture of cationic surfactant or nonionic surfactant with water or solvent, and the hydrophobic group is on the side of the static electricity removal material (plastic material).
In addition, the hydrophilic groups are placed on the outside and exposed on the surface, from which electricity is discharged to remove static electricity. However, the surfactant itself has a weak mechanical holding power against the static electricity removal material, so it may come off just by wiping it with a cloth, synthetic leather, etc., or it may dissolve in water or solvent, so maintenance may be difficult depending on the object. There were some extremely difficult problems.

本発明は、このような事情に鑑みてなされたもので透明
で容易に離脱しにくい静電気除去膜を得ることができる
静電気除去塗料を提案することを目的としている。The present invention has been made in view of the above circumstances, and an object of the present invention is to propose a static electricity removal paint that can provide a static electricity removal film that is transparent and does not easily come off.

本発明は、有機高分子剤中に金属酸化物微粒子を含有さ
せたことを特徴としている。The present invention is characterized in that metal oxide fine particles are contained in the organic polymer agent.

以下添付図面に従って本発明に係る静電気除去塗料の好
ましい実施例を詳説する。Preferred embodiments of the static electricity removing paint according to the present invention will be described in detail below with reference to the accompanying drawings.

第１図は１本実施例に係る除去塗料を塗イロした膜を示
し、１は透明体（高分子材）、２は透明金属酸化物微粒
子、３は有機高分子結合剤を示す。FIG. 1 shows a film coated with the removing paint according to the present example, where 1 is a transparent body (polymer material), 2 is a transparent metal oxide fine particle, and 3 is an organic polymer binder.

静電気除去が要求・される透明体１の表面に点在する透
明金属酸化物微粒子２として、鋭角突起部を有し、電気
抵抗値が低く且つ微細なものを多く混ぜ入れ、前記粉末
の尖端放電現象により、除電作用が働く。透明金属酸化
物微粒子２は、酸化インジウム、酸化カドミウム、酸化
チタン、酸化錫管種々あるが、コスト、労働安全衛生、
粉末の量産技術面から考え、特別な制約のない限り、酸
化錫が好ましい。As the transparent metal oxide fine particles 2 dotted on the surface of the transparent body 1 which is required to remove static electricity, a large number of fine particles having acute angular protrusions and low electric resistance are mixed in to form a point discharge of the powder. Due to this phenomenon, the static elimination effect works. There are various types of transparent metal oxide fine particles 2, such as indium oxide, cadmium oxide, titanium oxide, and tin oxide tubes, but they are limited by cost, occupational safety and health,
Considering the technology for mass production of powder, tin oxide is preferred unless there are special restrictions.

実施例　ｌ 第２図は、塩化ビニールシートに酸化錫の含率を変えて
９作った塗料を約３μｍの膜厚に塗布した静電気除去膜
の表面電気抵抗値と全光線透過率の関係を示し１曲線Ａ
は表面電気抵抗を示し２曲線Ｂは全光線透過率を示して
いる。第２図によれば表面電気抵抗値を１０”〜１０９
Ωα以下に確保し、且つ７０％以上の全光線透過率を得
るためには、酸化錫の含率は６５重量％以上必要とする
。Example 1 Figure 2 shows the relationship between the surface electrical resistance value and the total light transmittance of a static electricity removal film made by coating a vinyl chloride sheet with paints prepared with varying tin oxide contents to a film thickness of approximately 3 μm. 1 curve A
indicates the surface electrical resistance, and curve 2 indicates the total light transmittance. According to Figure 2, the surface electrical resistance value is 10” to 109
In order to maintain Ωα or less and obtain a total light transmittance of 70% or more, the tin oxide content needs to be 65% by weight or more.

第３図は、塩化ビニールシートに、酸化錫６５重量％で
塗料を作り、塗布膜厚を変えた場合の静電気除去膜の表
面電気抵抗を示す曲線Ａと全光線透過率を示す曲線Ｂと
の関係を示している。第３図によればいずれの特性も膜
厚１０　／ｉｍ以下においてはさほど左右されない。こ
のことは、塗布における膜厚をコントロールする高度な
技術はさほど必要なく、スプレー塗布方式のごとき在来
技術で十分施工可能であることを示している。Figure 3 shows the curve A showing the surface electrical resistance of the static electricity removal film and the curve B showing the total light transmittance when a paint is made with 65% by weight of tin oxide on a vinyl chloride sheet and the coating film thickness is varied. It shows a relationship. According to FIG. 3, none of the characteristics is affected much at a film thickness of 10 2 /im or less. This shows that there is no need for advanced techniques to control the film thickness during coating, and that conventional techniques such as spray coating can be applied.

第４図は酸化錫６５重量琴、塗布膜厚２μｍの塗膜を塩
化ビニールシートの両面に形成し、１０ＫＶの電圧を印
加して、静電気の除電効果を示しだもので２曲線Ｃは静
電気除去塗料を塗布した塩化ビニールの場合を示し２曲
線りは無処理の塩化ビニールの場合を示す。室温２０℃
、湿度６５％の一般的条件下において、静電気除去塗料
を塗布じた塩化ビニールシートの曲線Ｃは、一般の無処
理の塩化ビニールシートの曲線りに比較して、著しい除
電効果を示している。これは、高電圧印加と同時に、放
電現象が起こり、即除電されたことを示している。Figure 4 shows the effect of removing static electricity by forming a coating film of 65 weight tin oxide, 2 μm thick, on both sides of a vinyl chloride sheet and applying a voltage of 10 KV.Curve 2 shows the effect of removing static electricity. The figure shows the case of vinyl chloride coated with paint, and the two curves show the case of untreated vinyl chloride. Room temperature 20℃
Under general conditions of 65% humidity, curve C of a vinyl chloride sheet coated with a static electricity removal paint shows a remarkable static elimination effect compared to the curve of a general untreated vinyl chloride sheet. This indicates that a discharge phenomenon occurred simultaneously with the application of high voltage, and the static electricity was removed immediately.

実施例　２ 実施例］で作った塗料を用いて、静電気の除電効果をク
リーンルームに使用した遮蔽板に適用し。Example 2 Using the paint made in Example 2, the static electricity removal effect was applied to a shielding plate used in a clean room.

効果を調べた。前記遮蔽物とは２局所的にりＩＪ−ンエ
リアを設け、高精度な塵埃清浄度を維持するために、清
浄エアの流れが分散しないよう遮蔽する目的で、取付け
るものでアシ、設備１作業状況を監視するために透明材
の使用が不可欠でちる。We investigated the effects. The above-mentioned shield is a device that is installed in order to prevent the flow of clean air from dispersing in order to maintain high-precision dust cleanliness by providing two local IJ-en areas. The use of transparent materials is essential to monitor the

第５図はクリーンルームに於ける遮蔽板に適用した実施
例である。４は遮蔽板、５は送風機５α及び高性能フィ
ルタ５ｈからなる送気ユニット。FIG. 5 shows an embodiment in which the present invention is applied to a shielding plate in a clean room. 4 is a shielding plate, and 5 is an air supply unit consisting of a blower 5α and a high-performance filter 5h.

６はニアコンディショニングされたエアを給気するダク
トであり、ａは送気ユニット５から流れ出る清浄エアを
示す。6 is a duct that supplies near-conditioned air, and a indicates clean air flowing out from the air supply unit 5.

第６図は清浄エアαと遮蔽板４との摩擦帯電によシ、帯
電する遮蔽板４の除電効果を示したもので、無処理の塩
化ビニール板の特性は曲線りで示され常時７００〜１０
０ＯＶ帯宛を呈している。これに対し、実施例１で作っ
た酸化錫６５重量％の塗料を２μ塗布した遮蔽板４の特
性は曲線Ｃで示すように終始ＯＶを示している。これに
より、遮蔽板４に浮遊塵埃が吸着し、積シ積って、急激
に落下する現象を防止でき、又従来、遮蔽板の清掃は毎
朝超純水を含んだ人工皮革により、拭き掃除をする必要
があったが１週に１回程度で済む。Figure 6 shows the static neutralization effect of the shielding plate 4 which is charged due to frictional charging between the clean air α and the shielding plate 4. The characteristics of the untreated vinyl chloride board are shown by a curved line, and the characteristic of the untreated vinyl chloride board is always 700~ 10
It is addressed to the 0OV band. On the other hand, the characteristics of the shielding plate 4 coated with 2μ of the paint containing 65% by weight of tin oxide prepared in Example 1 show OV from beginning to end as shown by curve C. This prevents floating dust from adhering to the shielding plate 4, accumulating, and suddenly falling down. Conventionally, the shielding plate was cleaned by wiping it with artificial leather containing ultrapure water every morning. It was necessary, but only once a week.

実施例　３ 第７図は、クリーンルーム内で磁気円板に磁性塗料を塗
布する設備を示している。７は塗布設備。Embodiment 3 FIG. 7 shows equipment for applying magnetic paint to magnetic disks in a clean room. 7 is coating equipment.

８はスピンドル、９は７ランジ、１０は箱体。8 is the spindle, 9 is the 7 lunge, and 10 is the box body.

１１は磁性塗料供給ノズル、１２はカバーである。11 is a magnetic paint supply nozzle, and 12 is a cover.

フランジ９の上に固定されたアルミニウム円板コ３に、
磁性塗料供給ノズル１１から磁性塗料１４が滴−ドし、
約１００　Ｏｒｐｍで高速回転し、いわゆるスピンコー
ティングと称する方法で、磁気円板の磁性媒体膜が形成
される。本塗布設備７は。On the aluminum disc 3 fixed on the flange 9,
The magnetic paint 14 is dripped from the magnetic paint supply nozzle 11,
The magnetic medium film of the magnetic disc is formed by rotating at a high speed of about 100 Orpm and using a method called spin coating. The main coating equipment 7 is.

磁性険相コ−４の滴化状態やアルミニウム円板１３への
ぬれ状態を時々監視する必要があり、カッ・−１２は透
明体で構成する必要がある。しかし、高速回転で磁性塗
材１４がスピンコーティングされる時に、カバー］２は
著しい帯電を示す。It is necessary to monitor from time to time the state of droplet formation of the magnetic phase shield 4 and the state of wetting of the aluminum disc 13, and therefore the cup 12 must be made of a transparent material. However, when the magnetic coating material 14 is spin-coated with high speed rotation, the cover 2 exhibits a significant charge.

第８図は、このカバー１２に、処理、即ち実施例１で作
った塗料をカバー〕２に塗布したものと無処理のものと
を比較した結果を示す。第３図によれば、処理したもの
は線Ｅで示されるようにＯ〜５０Ｖの帯電であるか、無
処理のものは線Ｆで示されるように］、　０．　ＯＯＯ
〜２０，０ＯＯＶを示し、大きな相違がある。荷に磁性
塗料は低引火点の溶剤を含んでおり、火花放電による二
次災害防止のため１作業者等のカバー１２への接触は厳
しい制約を設けていたが、この制約を解除することがで
き。FIG. 8 shows the results of a comparison between the cover 12 treated, that is, the cover [2] coated with the paint prepared in Example 1, and the untreated cover. According to FIG. 3, the treated one has a charge of 0 to 50 V as shown by the line E, or the untreated one has a charge of 0 to 50 V as shown by the line F], 0. OOO
˜20,000 OOV, there is a large difference. The magnetic paint in the load contains a low flash point solvent, and in order to prevent secondary disasters caused by spark discharge, there were strict restrictions on workers touching the cover 12, but this restriction could be lifted. I can do it.

作業効率向上に結びついている。This is linked to improved work efficiency.

この実施例は、有機溶剤による洗浄プロセスへの適用も
でき、同様な効果を得ることができる。This embodiment can also be applied to a cleaning process using an organic solvent, and similar effects can be obtained.

以上説明した本発明に係る静電気除去塗料を。The static electricity removing paint according to the present invention explained above.

静電気の除去が不可欠な製品、生産設備、治工具類に塗
布すると、透明性を失わず塗膜の表面に点在している金
属酸化物の尖端放電現象により、帯電した静電気は直ち
に除去できる。従って本発明に係る静電気除去塗料は、
精密なりリーンルーム内での塵埃の吸着防止、危険物を
取扱うプロセスにおいては火花放電による二次災害防止
、電子部品製造プロセス及び取扱い作業におい・では絶
縁破壊防止等に有効である。When applied to products, production equipment, and tools that require the removal of static electricity, static electricity can be immediately removed by the sharp discharge phenomenon of the metal oxides scattered on the surface of the coating without losing its transparency. Therefore, the static electricity removing paint according to the present invention is
It is effective in preventing dust adsorption in precision or lean rooms, preventing secondary disasters due to spark discharge in processes that handle hazardous materials, and preventing dielectric breakdown in electronic component manufacturing processes and handling operations.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本実施例を用いた塗布膜を示す説明図。 第２図は本実施例で酸化錫の含有率を変えた場合の表面
電気抵抗値と全光線透過率の関係を示す特性線図、第３
図は本実施例で塗布膜厚を変えた場合の表面電気抵抗値
と全光線透過率の関係を示す特性線図、第４図は本実施
例の除電効果を示す特性線図、第５図はクリーンルーム
の送気ユニット付近の構造を示す説明図、第６図は本実
施例の除電効果を示す特性線図、第７図は磁気円板の磁
性塗料塗布設備を示す断面図、第８図は本実施例の除電
効果を示す特性線図である。 ｌ・・透明体 ２・・・透明金属酸化物微粒子 ３・・・有機高分子剤。 第１図 第２図 含−ｖ′（重量％） ｆｉｌ１μｍ） 第４図 第５図 第６図 刷定口赦FIG. 1 is an explanatory diagram showing a coating film using this example. Figure 2 is a characteristic diagram showing the relationship between surface electrical resistance and total light transmittance when the content of tin oxide is changed in this example.
The figure is a characteristic line diagram showing the relationship between the surface electrical resistance value and the total light transmittance when the coating film thickness is changed in this example, Figure 4 is a characteristic line diagram showing the static elimination effect of this example, and Figure 5 6 is an explanatory diagram showing the structure near the air supply unit of the clean room, FIG. 6 is a characteristic line diagram showing the static elimination effect of this example, FIG. 7 is a sectional view showing the magnetic paint coating equipment for magnetic discs, and FIG. 8 is a characteristic diagram showing the static elimination effect of this example. l...Transparent body 2...Transparent metal oxide fine particles 3...Organic polymer agent. Fig. 1 Fig. 2 Including -v' (wt%) fil1μm) Fig. 4 Fig. 5 Fig. 6 Printing opening

Claims (1)

【特許請求の範囲】 ｔｌ）　　有機高分子剤中に鋭角突起部を有する透明金
属酸化物微粒子を含有させ２分散せしめたことを特徴と
する静電気除去塗料。 （２）　　金属酸化物微粒子は有機高分子剤に対して６
５重量％以上含有させたことを特徴とする特許請求の範
囲第１項の静電気除去塗料。 （３）透明金属酸化物微粒子は酸化錫であることを特徴
とする特許請求の範囲第１項の静電気除去塗料。[Claims] tl) A static electricity eliminating paint characterized by containing and dispersing transparent metal oxide fine particles having acute angle protrusions in an organic polymer agent. (2) The metal oxide fine particles are 6% higher than the organic polymer agent.
The static electricity eliminating paint according to claim 1, characterized in that it contains 5% by weight or more. (3) The static electricity removing paint according to claim 1, wherein the transparent metal oxide fine particles are tin oxide.