JPS59152436U - Leak test device - Google Patents

Leak test device

Info

Publication number
JPS59152436U
JPS59152436U JP4661483U JP4661483U JPS59152436U JP S59152436 U JPS59152436 U JP S59152436U JP 4661483 U JP4661483 U JP 4661483U JP 4661483 U JP4661483 U JP 4661483U JP S59152436 U JPS59152436 U JP S59152436U
Authority
JP
Japan
Prior art keywords
rough
mass spectrometer
evacuation
evacuation system
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4661483U
Other languages
Japanese (ja)
Inventor
小寺　節夫
有田　公治
井上　新造
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP4661483U priority Critical patent/JPS59152436U/en
Publication of JPS59152436U publication Critical patent/JPS59152436U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の構成を示す図、第２図は従来における操
作を示す図、第３図はこの考案による装置の構成を示す
図、第４図は第３図の操作を示す図である。 １・・・・・・質量分析計管、２，３・・・・・・ター
ボ分子ポンプ、３・・・・・・補助ポンプ、４・・・・
・・テストバルブ、５、　７．　１５・・・・・・真空
計、６・・・・・・粗引バルブ、８゜１４・・・・・・
油回転ポンプ、９・・・・・・真空チャンバ、１１・・
・・・・ベンティングバルブ、１２・・・・・・被試験
体、１６・・・・・・第２粗引バルブ。Fig. 1 is a diagram showing the conventional configuration, Fig. 2 is a diagram showing the conventional operation, Fig. 3 is a diagram showing the configuration of the device according to this invention, and Fig. 4 is a diagram showing the operation of Fig. 3. . 1... Mass spectrometer tube, 2, 3... Turbo molecular pump, 3... Auxiliary pump, 4...
...Test valve, 5, 7. 15... Vacuum gauge, 6... Roughing valve, 8°14...
Oil rotary pump, 9... Vacuum chamber, 11...
... Venting valve, 12 ... Test object, 16 ... Second roughing valve.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ヘリウムガス等のプローブガスを質量分析計管で検知し
てリーク量を測定する装置において、ターボ分子ポンプ
等で高真空に排気された質量分析計管に被試験体を真空
的に接続するための粗引排気系を２個備えるとともに、
第１粗引排気系には油回転ポンプまたはメカニカルブー
スタポンプ等の中真空用排気機構を設け、第２粗引排気
系にはターボ分子ポンプ等の高真空用排気機構を設けて
機成し、第１粗引排気系にて中真空度の領域まで排気し
、ついで第２粗引排気系で真空度の高い領域まで排気し
た後質量分析計管に接続できることを特徴とするリーク
テスト装置。In a device that detects a probe gas such as helium gas with a mass spectrometer tube and measures the amount of leakage, it is used to vacuum connect the test object to the mass spectrometer tube that is evacuated to a high vacuum using a turbo molecular pump, etc. Equipped with two rough exhaust systems,
The first rough evacuation system is provided with a medium vacuum evacuation mechanism such as an oil rotary pump or a mechanical booster pump, and the second rough evacuation system is provided with a high vacuum evacuation mechanism such as a turbo molecular pump, A leak test device characterized in that it can be connected to a mass spectrometer tube after evacuation to a medium degree vacuum region in a first rough evacuation system and then to a high vacuum region in a second rough evacuation system.
JP4661483U 1983-03-30 1983-03-30 Leak test device Pending JPS59152436U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4661483U JPS59152436U (en) 1983-03-30 1983-03-30 Leak test device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4661483U JPS59152436U (en) 1983-03-30 1983-03-30 Leak test device

Publications (1)

Publication Number Publication Date
JPS59152436U true JPS59152436U (en) 1984-10-12

Family

ID=30177166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4661483U Pending JPS59152436U (en) 1983-03-30 1983-03-30 Leak test device

Country Status (1)

Country Link
JP (1) JPS59152436U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301137A (en) * 1988-05-30 1989-12-05 Ulvac Corp Rapid searching device for vacuum leakage
JP2002527736A (en) * 1998-10-10 2002-08-27 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Method of operating a seat leak detector and a seat leak detector suitable for performing the method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142437A (en) * 1980-04-09 1981-11-06 Toshiba Corp Gas leak inspection device for cooling unit
JPS5819244B2 (en) * 1974-06-18 1983-04-16 株式会社クボタ combine

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5819244B2 (en) * 1974-06-18 1983-04-16 株式会社クボタ combine
JPS56142437A (en) * 1980-04-09 1981-11-06 Toshiba Corp Gas leak inspection device for cooling unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301137A (en) * 1988-05-30 1989-12-05 Ulvac Corp Rapid searching device for vacuum leakage
JP2002527736A (en) * 1998-10-10 2002-08-27 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Method of operating a seat leak detector and a seat leak detector suitable for performing the method

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