JPS59152436U - Leak test device - Google Patents
Leak test deviceInfo
- Publication number
- JPS59152436U JPS59152436U JP4661483U JP4661483U JPS59152436U JP S59152436 U JPS59152436 U JP S59152436U JP 4661483 U JP4661483 U JP 4661483U JP 4661483 U JP4661483 U JP 4661483U JP S59152436 U JPS59152436 U JP S59152436U
- Authority
- JP
- Japan
- Prior art keywords
- rough
- mass spectrometer
- evacuation
- evacuation system
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Examining Or Testing Airtightness (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来の構成を示す図、第2図は従来における操
作を示す図、第3図はこの考案による装置の構成を示す
図、第4図は第3図の操作を示す図である。
1・・・・・・質量分析計管、2,3・・・・・・ター
ボ分子ポンプ、3・・・・・・補助ポンプ、4・・・・
・・テストバルブ、5、 7. 15・・・・・・真空
計、6・・・・・・粗引バルブ、8゜14・・・・・・
油回転ポンプ、9・・・・・・真空チャンバ、11・・
・・・・ベンティングバルブ、12・・・・・・被試験
体、16・・・・・・第2粗引バルブ。Fig. 1 is a diagram showing the conventional configuration, Fig. 2 is a diagram showing the conventional operation, Fig. 3 is a diagram showing the configuration of the device according to this invention, and Fig. 4 is a diagram showing the operation of Fig. 3. . 1... Mass spectrometer tube, 2, 3... Turbo molecular pump, 3... Auxiliary pump, 4...
...Test valve, 5, 7. 15... Vacuum gauge, 6... Roughing valve, 8°14...
Oil rotary pump, 9... Vacuum chamber, 11...
... Venting valve, 12 ... Test object, 16 ... Second roughing valve.
Claims (1)
てリーク量を測定する装置において、ターボ分子ポンプ
等で高真空に排気された質量分析計管に被試験体を真空
的に接続するための粗引排気系を2個備えるとともに、
第1粗引排気系には油回転ポンプまたはメカニカルブー
スタポンプ等の中真空用排気機構を設け、第2粗引排気
系にはターボ分子ポンプ等の高真空用排気機構を設けて
機成し、第1粗引排気系にて中真空度の領域まで排気し
、ついで第2粗引排気系で真空度の高い領域まで排気し
た後質量分析計管に接続できることを特徴とするリーク
テスト装置。In a device that detects a probe gas such as helium gas with a mass spectrometer tube and measures the amount of leakage, it is used to vacuum connect the test object to the mass spectrometer tube that is evacuated to a high vacuum using a turbo molecular pump, etc. Equipped with two rough exhaust systems,
The first rough evacuation system is provided with a medium vacuum evacuation mechanism such as an oil rotary pump or a mechanical booster pump, and the second rough evacuation system is provided with a high vacuum evacuation mechanism such as a turbo molecular pump, A leak test device characterized in that it can be connected to a mass spectrometer tube after evacuation to a medium degree vacuum region in a first rough evacuation system and then to a high vacuum region in a second rough evacuation system.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4661483U JPS59152436U (en) | 1983-03-30 | 1983-03-30 | Leak test device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4661483U JPS59152436U (en) | 1983-03-30 | 1983-03-30 | Leak test device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59152436U true JPS59152436U (en) | 1984-10-12 |
Family
ID=30177166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4661483U Pending JPS59152436U (en) | 1983-03-30 | 1983-03-30 | Leak test device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59152436U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01301137A (en) * | 1988-05-30 | 1989-12-05 | Ulvac Corp | Rapid searching device for vacuum leakage |
JP2002527736A (en) * | 1998-10-10 | 2002-08-27 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | Method of operating a seat leak detector and a seat leak detector suitable for performing the method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56142437A (en) * | 1980-04-09 | 1981-11-06 | Toshiba Corp | Gas leak inspection device for cooling unit |
JPS5819244B2 (en) * | 1974-06-18 | 1983-04-16 | 株式会社クボタ | combine |
-
1983
- 1983-03-30 JP JP4661483U patent/JPS59152436U/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5819244B2 (en) * | 1974-06-18 | 1983-04-16 | 株式会社クボタ | combine |
JPS56142437A (en) * | 1980-04-09 | 1981-11-06 | Toshiba Corp | Gas leak inspection device for cooling unit |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01301137A (en) * | 1988-05-30 | 1989-12-05 | Ulvac Corp | Rapid searching device for vacuum leakage |
JP2002527736A (en) * | 1998-10-10 | 2002-08-27 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | Method of operating a seat leak detector and a seat leak detector suitable for performing the method |
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